JP2019503961A - 石英ガラスの調製における二酸化ケイ素粉末のアンモニア処理 - Google Patents

石英ガラスの調製における二酸化ケイ素粉末のアンモニア処理 Download PDF

Info

Publication number
JP2019503961A
JP2019503961A JP2018530538A JP2018530538A JP2019503961A JP 2019503961 A JP2019503961 A JP 2019503961A JP 2018530538 A JP2018530538 A JP 2018530538A JP 2018530538 A JP2018530538 A JP 2018530538A JP 2019503961 A JP2019503961 A JP 2019503961A
Authority
JP
Japan
Prior art keywords
silicon dioxide
range
less
quartz glass
content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018530538A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019503961A5 (enExample
Inventor
マティアス オッター
マティアス オッター
ヴァルター レーマン
ヴァルター レーマン
ミハエル ヒュネルマン
ミハエル ヒュネルマン
ニルス クリスティアン ニールセン
ニルス クリスティアン ニールセン
ニゲル ロバート ヴィッペイ
ニゲル ロバート ヴィッペイ
ボリス グローマン
ボリス グローマン
アブドウル−ガファール クペバネ
アブドウル−ガファール クペバネ
トーマス カイザー
トーマス カイザー
Original Assignee
ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー
ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー, ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー filed Critical ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー
Publication of JP2019503961A publication Critical patent/JP2019503961A/ja
Publication of JP2019503961A5 publication Critical patent/JP2019503961A5/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/06Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/066Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/10Forming beads
    • C03B19/1005Forming solid beads
    • C03B19/106Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/10Forming beads
    • C03B19/1005Forming solid beads
    • C03B19/106Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/10Forming beads
    • C03B19/108Forming porous, sintered or foamed beads
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/10Forming beads
    • C03B19/1095Thermal after-treatment of beads, e.g. tempering, crystallisation, annealing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C13/00Fibre or filament compositions
    • C03C13/04Fibre optics, e.g. core and clad fibre compositions
    • C03C13/045Silica-containing oxide glass compositions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/06Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/51Particles with a specific particle size distribution
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/10Solid density
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/12Surface area
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/14Pore volume
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/04Forming tubes or rods by drawing from stationary or rotating tools or from forming nozzles
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/07Impurity concentration specified
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/20Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00Glass compositions
    • C03C2201/06Doped silica-based glasses
    • C03C2201/08Doped silica-based glasses containing boron or halide
    • C03C2201/11Doped silica-based glasses containing boron or halide containing chlorine
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00Glass compositions
    • C03C2201/06Doped silica-based glasses
    • C03C2201/20Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/23Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00Glass compositions
    • C03C2201/06Doped silica-based glasses
    • C03C2201/20Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/26Doped silica-based glasses containing non-metals other than boron or halide containing carbon
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00Glass compositions
    • C03C2201/06Doped silica-based glasses
    • C03C2201/30Doped silica-based glasses containing metals
    • C03C2201/32Doped silica-based glasses containing metals containing aluminium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00Production processes
    • C03C2203/40Gas-phase processes
    • C03C2203/42Gas-phase processes using silicon halides as starting materials
    • C03C2203/44Gas-phase processes using silicon halides as starting materials chlorine containing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00Production processes
    • C03C2203/50After-treatment
    • C03C2203/52Heat-treatment
    • C03C2203/54Heat-treatment in a dopant containing atmosphere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/412Index profiling of optical fibres
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
JP2018530538A 2015-12-18 2016-12-16 石英ガラスの調製における二酸化ケイ素粉末のアンモニア処理 Pending JP2019503961A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15201116.9 2015-12-18
EP15201116 2015-12-18
PCT/EP2016/081525 WO2017103171A1 (de) 2015-12-18 2016-12-16 Ammoniakbehandlung von siliziumdioxidpulver bei der herstellung von quarzglas

Publications (2)

Publication Number Publication Date
JP2019503961A true JP2019503961A (ja) 2019-02-14
JP2019503961A5 JP2019503961A5 (enExample) 2020-01-23

Family

ID=54850387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018530538A Pending JP2019503961A (ja) 2015-12-18 2016-12-16 石英ガラスの調製における二酸化ケイ素粉末のアンモニア処理

Country Status (6)

Country Link
US (1) US20180370838A1 (enExample)
EP (1) EP3390301A1 (enExample)
JP (1) JP2019503961A (enExample)
CN (1) CN108698882A (enExample)
TW (1) TW201733930A (enExample)
WO (1) WO2017103171A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022052497A (ja) * 2020-09-23 2022-04-04 三菱ケミカル株式会社 造粒シリカ粉体及び造粒シリカ粉体の製造方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180095880A (ko) 2015-12-18 2018-08-28 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 합성 석영 유리 결정립의 제조
TWI812586B (zh) 2015-12-18 2023-08-21 德商何瑞斯廓格拉斯公司 石英玻璃體、其製備方法與應用、及用於控制烘箱出口處之露點
US11952303B2 (en) 2015-12-18 2024-04-09 Heraeus Quarzglas Gmbh & Co. Kg Increase in silicon content in the preparation of quartz glass
US11339076B2 (en) 2015-12-18 2022-05-24 Heraeus Quarzglas Gmbh & Co. Kg Preparation of carbon-doped silicon dioxide granulate as an intermediate in the preparation of quartz glass
EP3390304B1 (de) 2015-12-18 2023-09-13 Heraeus Quarzglas GmbH & Co. KG Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas
TW201731782A (zh) 2015-12-18 2017-09-16 何瑞斯廓格拉斯公司 在多腔式爐中製備石英玻璃體
KR20180095616A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 용융 가열로에서 이슬점 조절을 이용한 실리카 유리체의 제조
WO2017103160A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Herstellung von quarzglaskörpern aus siliziumdioxidgranulat
JP6881776B2 (ja) 2015-12-18 2021-06-02 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 不透明石英ガラス体の調製
EP3390308B1 (de) 2015-12-18 2024-08-28 Heraeus Quarzglas GmbH & Co. KG Glasfasern aus quarzglas mit geringem oh-, cl- und al-gehalt
US11111172B2 (en) 2016-11-30 2021-09-07 Corning Incorporated Basic additives for silica soot compacts and methods for forming optical quality glass

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3043660A (en) * 1958-03-10 1962-07-10 British Titan Products Production of silicon dioxide
JPS605016A (ja) * 1983-06-10 1985-01-11 デグ−サ・アクチエンゲゼルシヤフト 高温処理により製造された二酸化ケイ素、その製造方法およびその用途
JPH05229839A (ja) * 1991-09-06 1993-09-07 Furukawa Electric Co Ltd:The 石英系ガラス成形体の製造方法
JPH07277751A (ja) * 1994-04-14 1995-10-24 Shin Etsu Chem Co Ltd 合成石英ガラス部材の製造方法
JPH08119664A (ja) * 1994-10-14 1996-05-14 Nitto Chem Ind Co Ltd 高純度透明石英ガラス及びその製造方法
JP2001089125A (ja) * 1999-09-28 2001-04-03 Shinetsu Quartz Prod Co Ltd 多孔質シリカ顆粒、その製造方法及び該多孔質シリカ顆粒を用いた合成石英ガラス粉の製造方法
DE10329806A1 (de) * 2003-04-09 2004-10-21 Silicaglas Ilmenau Gmbh Verfahren und Vorrichtungen zur Herstellung von Kieselglasgranulaten mit definierten Formen der Granalien
JP2005170706A (ja) * 2003-12-09 2005-06-30 Tosoh Corp 紫外線吸収合成石英ガラス及びその製造方法
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
JP2008512845A (ja) * 2004-09-10 2008-04-24 アクセリス テクノロジーズ インコーポレーテッド 紫外放射光および/または真空紫外放射光を放射するための無電極ランプ
JP2008532903A (ja) * 2005-03-09 2008-08-21 エボニック デグサ ゲーエムベーハー 超高純度の光学品質ガラス製品の製造方法
JP2010519751A (ja) * 2007-02-27 2010-06-03 ヘレウス クヴァルツグラス ゲーエムベーハー ウント コー カーゲー 照射耐性を強化した合成石英ガラスから作られた光学部品、および光学部品の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260434A (ja) * 1984-06-04 1985-12-23 Shin Etsu Chem Co Ltd 光伝送用無水ガラス素材の製造方法
US5141786A (en) * 1989-02-28 1992-08-25 Shin-Etsu Chemical Co., Ltd. Synthetic silica glass articles and a method for manufacturing them
US6136736A (en) * 1993-06-01 2000-10-24 General Electric Company Doped silica glass
DE10123950A1 (de) * 2001-05-17 2002-11-28 Degussa Granulate auf Basis von mittels Aerosol mit Aluminiumoxid dotiertem, pyrogen hergestelltem Siliziumdioxid, Verfahren zu ihrer Herstellung und ihre Verwendung
US20040118155A1 (en) * 2002-12-20 2004-06-24 Brown John T Method of making ultra-dry, Cl-free and F-doped high purity fused silica
JP4470479B2 (ja) * 2003-12-17 2010-06-02 旭硝子株式会社 光学部材用合成石英ガラスおよびその製造方法
EP1717202A1 (en) * 2005-04-29 2006-11-02 Degussa AG Sintered silicon dioxide materials
TWI430966B (zh) * 2006-09-11 2014-03-21 Tosoh Corp 熔融石英玻璃及其製造方法
WO2009096557A1 (ja) * 2008-01-30 2009-08-06 Asahi Glass Co., Ltd. エネルギー伝送用または紫外光伝送用光ファイバプリフォームおよびその製造方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3043660A (en) * 1958-03-10 1962-07-10 British Titan Products Production of silicon dioxide
JPS605016A (ja) * 1983-06-10 1985-01-11 デグ−サ・アクチエンゲゼルシヤフト 高温処理により製造された二酸化ケイ素、その製造方法およびその用途
JPH05229839A (ja) * 1991-09-06 1993-09-07 Furukawa Electric Co Ltd:The 石英系ガラス成形体の製造方法
JPH07277751A (ja) * 1994-04-14 1995-10-24 Shin Etsu Chem Co Ltd 合成石英ガラス部材の製造方法
JPH08119664A (ja) * 1994-10-14 1996-05-14 Nitto Chem Ind Co Ltd 高純度透明石英ガラス及びその製造方法
JP2001089125A (ja) * 1999-09-28 2001-04-03 Shinetsu Quartz Prod Co Ltd 多孔質シリカ顆粒、その製造方法及び該多孔質シリカ顆粒を用いた合成石英ガラス粉の製造方法
DE10329806A1 (de) * 2003-04-09 2004-10-21 Silicaglas Ilmenau Gmbh Verfahren und Vorrichtungen zur Herstellung von Kieselglasgranulaten mit definierten Formen der Granalien
JP2005170706A (ja) * 2003-12-09 2005-06-30 Tosoh Corp 紫外線吸収合成石英ガラス及びその製造方法
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
JP2008512845A (ja) * 2004-09-10 2008-04-24 アクセリス テクノロジーズ インコーポレーテッド 紫外放射光および/または真空紫外放射光を放射するための無電極ランプ
JP2008532903A (ja) * 2005-03-09 2008-08-21 エボニック デグサ ゲーエムベーハー 超高純度の光学品質ガラス製品の製造方法
JP2010519751A (ja) * 2007-02-27 2010-06-03 ヘレウス クヴァルツグラス ゲーエムベーハー ウント コー カーゲー 照射耐性を強化した合成石英ガラスから作られた光学部品、および光学部品の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022052497A (ja) * 2020-09-23 2022-04-04 三菱ケミカル株式会社 造粒シリカ粉体及び造粒シリカ粉体の製造方法
JP7567316B2 (ja) 2020-09-23 2024-10-16 三菱ケミカル株式会社 造粒シリカ粉体及び造粒シリカ粉体の製造方法

Also Published As

Publication number Publication date
WO2017103171A1 (de) 2017-06-22
CN108698882A (zh) 2018-10-23
US20180370838A1 (en) 2018-12-27
WO2017103171A9 (de) 2017-11-23
EP3390301A1 (de) 2018-10-24
TW201733930A (zh) 2017-10-01

Similar Documents

Publication Publication Date Title
JP2019502641A (ja) 石英ガラス調製時のケイ素含有量の増大
JP2019502635A (ja) 二酸化ケイ素粉末からの石英ガラス体の調製
JP2019506352A (ja) 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製
JP2019502636A (ja) マルチチャンバ炉内での石英ガラス体の調製
JP2019503961A (ja) 石英ガラスの調製における二酸化ケイ素粉末のアンモニア処理
JP2019502630A (ja) 二酸化ケイ素造粒体からの石英ガラス体の調製
JP2019503962A (ja) 吊り下げ式焼結坩堝内での石英ガラス体の調製
JP2019502631A (ja) 二酸化ケイ素造粒体の炭素含有量の低減および石英ガラス体の調製
JP2019504810A (ja) 石英ガラス体の調製および後処理
JP2019502644A (ja) 溶融炉内での露点監視による石英ガラス体の調製
JP2019502634A (ja) 石英ガラス調製時の二酸化ケイ素粉末の蒸気処理
JP2019502632A (ja) 立設式焼結坩堝内での石英ガラス体の調製
JP2019502638A (ja) 高融点金属の溶融坩堝内での石英ガラス体の調製
JP2019506349A (ja) 吊り下げ式金属シート坩堝内での石英ガラス体の調製
JP2019502642A (ja) 合成石英ガラス粒の調製
JP2019503966A (ja) 不透明石英ガラス体の調製
JP2019502637A (ja) 高熱法二酸化ケイ素造粒体からの均質な石英ガラス

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191209

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191209

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20201126

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201201

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20210219

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210428

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20210921