JP2019210185A5 - - Google Patents

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Publication number
JP2019210185A5
JP2019210185A5 JP2018107532A JP2018107532A JP2019210185A5 JP 2019210185 A5 JP2019210185 A5 JP 2019210185A5 JP 2018107532 A JP2018107532 A JP 2018107532A JP 2018107532 A JP2018107532 A JP 2018107532A JP 2019210185 A5 JP2019210185 A5 JP 2019210185A5
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JP
Japan
Prior art keywords
electrode
separation membrane
hydrogen separation
high voltage
functions
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JP2018107532A
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English (en)
Japanese (ja)
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JP2019210185A (ja
JP7072168B2 (ja
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Priority claimed from JP2018107532A external-priority patent/JP7072168B2/ja
Priority to JP2018107532A priority Critical patent/JP7072168B2/ja
Priority to KR1020207033549A priority patent/KR102469291B1/ko
Priority to US17/056,265 priority patent/US12024427B2/en
Priority to PCT/JP2019/019628 priority patent/WO2019235169A1/ja
Priority to CN201980029047.1A priority patent/CN112135790A/zh
Priority to DE112019002865.0T priority patent/DE112019002865B4/de
Publication of JP2019210185A publication Critical patent/JP2019210185A/ja
Publication of JP2019210185A5 publication Critical patent/JP2019210185A5/ja
Publication of JP7072168B2 publication Critical patent/JP7072168B2/ja
Application granted granted Critical
Priority to US18/598,591 priority patent/US12246963B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018107532A 2018-06-05 2018-06-05 水素リサイクルシステム及び水素リサイクル方法 Active JP7072168B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2018107532A JP7072168B2 (ja) 2018-06-05 2018-06-05 水素リサイクルシステム及び水素リサイクル方法
CN201980029047.1A CN112135790A (zh) 2018-06-05 2019-05-17 氢回收系统和氢回收方法
US17/056,265 US12024427B2 (en) 2018-06-05 2019-05-17 Hydrogen recycle system and hydrogen recycle method
PCT/JP2019/019628 WO2019235169A1 (ja) 2018-06-05 2019-05-17 水素リサイクルシステム及び水素リサイクル方法
KR1020207033549A KR102469291B1 (ko) 2018-06-05 2019-05-17 수소 리사이클 시스템 및 수소 리사이클 방법
DE112019002865.0T DE112019002865B4 (de) 2018-06-05 2019-05-17 Wasserstoffwiederverwertungssystem und Wasserstoffwiederverwertungsverfahren
US18/598,591 US12246963B2 (en) 2018-06-05 2024-03-07 Hydrogen recycle system and hydrogen recycle method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018107532A JP7072168B2 (ja) 2018-06-05 2018-06-05 水素リサイクルシステム及び水素リサイクル方法

Publications (3)

Publication Number Publication Date
JP2019210185A JP2019210185A (ja) 2019-12-12
JP2019210185A5 true JP2019210185A5 (https=) 2021-05-27
JP7072168B2 JP7072168B2 (ja) 2022-05-20

Family

ID=68770121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018107532A Active JP7072168B2 (ja) 2018-06-05 2018-06-05 水素リサイクルシステム及び水素リサイクル方法

Country Status (6)

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US (2) US12024427B2 (https=)
JP (1) JP7072168B2 (https=)
KR (1) KR102469291B1 (https=)
CN (1) CN112135790A (https=)
DE (1) DE112019002865B4 (https=)
WO (1) WO2019235169A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021004154A (ja) * 2019-06-27 2021-01-14 国立大学法人岐阜大学 水素製造装置及び水素製造方法
JP2022045188A (ja) * 2020-09-08 2022-03-18 キオクシア株式会社 ガス回収装置、半導体製造システムおよびガス回収方法
CN116412406A (zh) * 2021-12-31 2023-07-11 隆基绿能科技股份有限公司 尾气处理系统和尾气处理方法
JP2025528866A (ja) * 2022-08-24 2025-09-02 ラム リサーチ コーポレーション ガスリサイクルシステムをもつプラズマ処理システム
US20240175126A1 (en) * 2022-11-28 2024-05-30 Applied Materials, Inc. Gas recycling systems, substrate processing systems, and related apparatus and methods for semiconductor manufacturing
CN116146453A (zh) * 2023-01-05 2023-05-23 西安交通大学 一种具有超高增压比的自驱动氢气增压系统及操作方法
CN116854034B (zh) * 2023-07-19 2025-04-25 西安理工大学 板-孔dbd等离子体协同质子交换膜氨气制氢的装置
JP7602682B1 (ja) 2024-04-09 2024-12-18 株式会社三井E&S 水素ガス製造装置、水素ガス供給装置、燃料電池システム、移動体、及び水素ガス製造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11285613A (ja) * 1998-04-03 1999-10-19 Mitsubishi Research Institute Inc 水素透過膜ポンプシステム
US7037484B1 (en) * 2002-06-21 2006-05-02 University Of Central Florida Research Foundation, Inc. Plasma reactor for cracking ammonia and hydrogen-rich gases to hydrogen
US20050214181A1 (en) 2004-03-26 2005-09-29 Canon Kabushiki Kaisha Dielectric, gas treatment apparatus using the same, and plasma generator
JP4235580B2 (ja) 2004-04-30 2009-03-11 キヤノン株式会社 誘電体
JP2007307514A (ja) * 2006-05-22 2007-11-29 Sharp Corp 気体浄化装置
GB0618016D0 (en) * 2006-09-13 2006-10-18 Boc Group Plc Method of recycling hydrogen
US20080131744A1 (en) 2006-10-20 2008-06-05 Charles Terrel Adams Methods and systems of producing molecular hydrogen using a low-temperature plasma system
US8220440B2 (en) 2006-10-20 2012-07-17 Tetros Innovations, Llc Methods and systems for producing fuel for an internal combustion engine using a low-temperature plasma system
AU2007351434A1 (en) 2006-10-20 2008-10-23 Semgreen, L.P. Methods and systems of producing molecular hydrogen using a plasma system
US7946258B2 (en) 2006-10-20 2011-05-24 Tetros Innovations, Llc Method and apparatus to produce enriched hydrogen with a plasma system for an internal combustion engine
US20080131360A1 (en) 2006-10-20 2008-06-05 Charles Terrel Adams Methods and systems of producing molecular hydrogen using a plasma system at various pressures
US20080138676A1 (en) 2006-10-20 2008-06-12 Charles Terrel Adams Methods and systems of producing molecular hydrogen using a plasma system in combination with a membrane separation system
US8211276B2 (en) 2006-10-20 2012-07-03 Tetros Innovations, Llc Methods and systems of producing fuel for an internal combustion engine using a plasma system at various pressures
JP2011084422A (ja) * 2009-10-14 2011-04-28 Shin-Etsu Chemical Co Ltd 水素ガス回収システムおよび水素ガスの分離回収方法
CN102179169B (zh) 2011-03-15 2012-12-26 浙江大学 吸附与等离子体选择催化还原脱除氮氧化物的方法
JP6095203B2 (ja) * 2012-10-02 2017-03-15 国立大学法人岐阜大学 水素生成装置及び水素生成装置を備えた燃料電池システム
TWI522164B (zh) 2013-04-26 2016-02-21 Japan Pionics And a method of treating the exhaust gas discharged from the manufacturing step of the gallium nitride-based compound semiconductor
JP2014214060A (ja) * 2013-04-26 2014-11-17 日本パイオニクス株式会社 水素の回収方法及びそれを用いた水素の再利用方法
US20150211378A1 (en) 2014-01-30 2015-07-30 Boxer Industries, Inc. Integration of plasma and hydrogen process with combined cycle power plant, simple cycle power plant and steam reformers
JP6241803B1 (ja) 2017-01-30 2017-12-06 国立大学法人岐阜大学 水素生成装置

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