JP2019156905A - 封止用シート - Google Patents
封止用シート Download PDFInfo
- Publication number
- JP2019156905A JP2019156905A JP2018041968A JP2018041968A JP2019156905A JP 2019156905 A JP2019156905 A JP 2019156905A JP 2018041968 A JP2018041968 A JP 2018041968A JP 2018041968 A JP2018041968 A JP 2018041968A JP 2019156905 A JP2019156905 A JP 2019156905A
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- sheet
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- sealing
- filler
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/06—Non-macromolecular additives organic
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/10—Adhesives in the form of films or foils without carriers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
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- C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/412—Additional features of adhesives in the form of films or foils characterized by the presence of essential components presence of microspheres
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- C09J2433/00—Presence of (meth)acrylic polymer
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- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
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Abstract
Description
以下の各変形例において、上記した一実施形態と同様の部材および工程については、同一の参照符号を付し、その詳細な説明を省略する。また、各変形例は、特記する以外、一実施形態と同様の作用効果を奏することができる。さらに、一実施形態および変形例は、適宜組み合わせることができる。
硬化剤:群栄化学社製のLVR−8210DL(ノボラック型フェノール樹脂、エポキシ樹脂硬化剤、水酸基当量:104g/eq.、軟化点:60℃)
硬化促進剤:四国化成工業社製の2PHZ−PW(2−フェニル−4,5−ジヒドロキシメチルイミダゾール)、エポキシ樹脂硬化促進剤
第1フィラー:デンカ社製のFB−8SM(球状溶融シリカ粉末(無機フィラー)、平均粒子径15μm)
第2フィラー:アドマテックス社製のSC220G−SMJ(平均粒径0.5μm)を3−メタクリロキシプロピルトリメトキシシラン(信越化学社製の製品名:KBM−503)で表面処理した無機フィラー。SC220G−SMJ 100質量部に対して1質量部のシランカップリング剤で表面処理した無機フィラー。
顔料:三菱化学社製の#20(カーボンブラック)
シランカップリング剤:信越化学社製のKBM−403(3−グリシドキシプロピルトリメトキシシラン)
RF2:品番(RF2・PET75csAM8U)(第2剥離シート、最大高さRz8.8μm、平均長さRSm4.5μm、アイム工業株式会社製)
EXP:品番(EXP−LCM−01)(第2剥離シート、最大高さRz4.7μm、平均長さRSm4.5μm、開成工業株式会社製)
SHP:品番(PET−75−SHP−A0)(第2剥離シート、最大高さRz2.2μm、平均長さRSm2.7μm、株式会社フジコー製)
U70:品番(U70−50−280−150)(第2剥離シート、最大高さRz4μm、平均長さRSm4.5μm、帝人フィルムソリューション社製)
MRA:品番(MRA38)(第2剥離シート、最大高さRz2.4μm、平均長さRSm1.5μm、三菱樹脂株式会社製)
NT:品番(NT−01)(第2剥離シート、最大高さRz18.5μm、平均長さRSm127.6μ、株式会社きもと社製)
表1に記載の配合処方に従い、各成分をメチルエチルケトンに溶解および分散させ、ワニスを得た。ワニスの固形分濃度は、80質量%であった。
硬化体シート5について、下記の物性を評価した。その結果を表1に記載する。
硬化体シート5の第2面7について、最大高さsz、および、粗さ曲線要素の平均長さRSmを測定した。また、硬化体シート5の第2面7の平均長さRSmの、最大高さRzに対する比(RSm/Rz)を算出した。
硬化体シート5を、縦0.1cm、横5cmに外形加工して、25℃における引張貯蔵弾性率E’を求めた。
モード:引張
走査温度:0〜260℃
周波数:1Hz
歪み:0.05%
昇温速度:10℃/分
[硬化体シートの評価]
硬化体シート5について、下記の項目を評価した。その結果を表1に記載する。
硬化体シート5を、ダイシングテープ30(NBD−5172K、日東電工株式会社製)に貼り合わせて、続いて、ダイシングソー25(ダイシングブレード、ブレード幅200μm幅、直径54mm、DFD6361、Disco株式会社製)を用いて、ダイシングソー25の移動速度30mm/sec、回転数40000rpm、PKGサイズ2mm×2mm、水量1.5L/minで、ダイシング(切断加工)した。
○:硬化体シート5をダイシングしているときに、硬化体シート5がダイシングテープ30から全く剥離しなかった(シート飛びが生じなかった)。
△:シート飛びが、10%以下の割合で、発生した。
×:シート飛びが、10%超過、100%以下の割合で、発生した。
◎:10個全部の半導体素子パッケージ4を、ピックアップ装置36によって、ダイシングテープ30から剥離できた。
○:7個以上、9個以下の半導体素子パッケージ4を、ピックアップ装置36によって、ダイシングテープ30から剥離できた。
△:5個以上、6個以下の半導体素子パッケージ4を、ピックアップ装置36によって、ダイシングテープ30から剥離できた。
×:1個以上4個以下の半導体素子パッケージ4を、ピックアップ装置36によって、ダイシングテープ30から剥離できた、あるいは、10個全部の半導体素子パッケージ4を、ピックアップ装置36によって、ダイシングテープ30から剥離できなかった。
3 半導体素子(電子素子の一例)
5 硬化体シート
6 第1面(一方面の一例)
7 第2面(他方面の一例)
30 ダイシングテープ(基材の一例)
Rz 最大高さ
RSm 粗さ曲線要素の平均長さ
Claims (4)
- 電子素子に接触する一方面と、前記一方面と前記厚み方向に間隔を隔てて対向し、基材に接触する他方面とを有する封止用シートであり、
前記封止用シートの硬化物である硬化体シートの前記他方面の最大高さRzが、4μm以上、15μm以下であることを特徴とする、封止用シート。 - 電子素子に接触する一方面と、前記一方面と前記厚み方向に間隔を隔てて対向し、基材に接触する他方.面とを有する封止用シートであり、
前記封止用シートの硬化物である硬化体シートの前記他方面の粗さ曲線要素の平均長さRSmが、4μm以上、25μm以下であることを特徴とする、封止用シート。 - 前記硬化体シートの前記他方面の粗さ曲線要素の平均長さRSmの、前記硬化体シートの前記他方面の最大高さRzに対する比(RSm/Rz)が、0.5以上、1以下であることを特徴とする、請求項1または2に記載の封止用シート。
- 熱硬化性成分と、無機フィラーとを含有し、
前記無機フィラーは、
第1フィラーと、
前記第1フィラーの平均フィラー径より小さい平均フィラー径を有する第2フィラーとを含有し、
前記第2フィラーの前記第1フィラー100質量部に対する配合部数が、50質量部以上、100質量部未満であることを特徴とする、請求項1〜3のいずれか一項に記載の封止用シート。
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SG10201901848P SG10201901848PA (en) | 2018-03-08 | 2019-03-01 | Sealable sheet |
CN201910168533.3A CN110240871A (zh) | 2018-03-08 | 2019-03-06 | 密封用片 |
TW108107371A TW201939677A (zh) | 2018-03-08 | 2019-03-06 | 密封用薄片 |
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- 2019-03-06 CN CN201910168533.3A patent/CN110240871A/zh active Pending
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