JP2019153731A - ウェーハの加工方法 - Google Patents
ウェーハの加工方法 Download PDFInfo
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- JP2019153731A JP2019153731A JP2018039413A JP2018039413A JP2019153731A JP 2019153731 A JP2019153731 A JP 2019153731A JP 2018039413 A JP2018039413 A JP 2018039413A JP 2018039413 A JP2018039413 A JP 2018039413A JP 2019153731 A JP2019153731 A JP 2019153731A
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- 238000003672 processing method Methods 0.000 title claims description 17
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 79
- 238000000034 method Methods 0.000 description 11
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 230000011218 segmentation Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000003754 machining Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 240000001973 Ficus microcarpa Species 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
Abstract
Description
続いて、図2乃至図9を参照して、第1の実施の形態のウェーハの加工方法について説明する。図2乃至図5はグループ化ステップ、図6は貼り替えステップ、図7は改質層形成ステップ、図8及び図9は分割ステップの説明図をそれぞれ示している。
次に、第2の実施の形態のウェーハの加工方法について説明する。第2の実施の形態では、エキスパンドテープ貼着ステップ、グループ化ステップ、改質層形成ステップ、分割ステップの順に実施する。なお、第2の実施の形態において、第1の実施の形態のウェーハの加工方法と同様な構成については簡略化して説明する。
D デバイス
G グループ片
L 分割予定ライン
R 改質層
T1 エキスパンドテープ
T2 エキスパンドテープ
W ウェーハ
Claims (2)
- 表面に複数の分割予定ラインが格子状に形成され区画された複数の領域に個々のデバイスが形成されたウェーハを、分割予定ラインに沿って個々のデバイスに分割するウェーハの加工方法であって、
複数個のデバイスをひとかたまりとして区画する分割予定ラインを分割しグループ片を形成するグループ化ステップと、
1つのグループ片又は相互に離間させた複数個のグループ片をエキスパンドテープに貼り替える貼り替えステップと、
該貼り替えステップを実施した後、それぞれのグループ片毎にウェーハに対して透過性を有する波長のレーザー光線を該分割予定ラインに沿って照射して改質層を形成する改質層形成ステップと、
改質層形成ステップを実施した後に、改質層が形成されたグループ片をエキスパンドテープをエキスパンドして個々のデバイスに分割する分割ステップと、
から構成されるウェーハの加工方法。 - 表面に複数の分割予定ラインが格子状に形成され区画された複数の領域に個々のデバイスが形成されたウェーハを、分割予定ラインに沿って個々のデバイスに分割するウェーハの加工方法であって、
ウェーハをエキスパンドテープに貼着するエキスパンドテープ貼着ステップと、
複数個のデバイスをひとかたまりとして区画する分割予定ラインにウェーハに対して透過性を有する波長のレーザー光線を分割予定ラインに沿って照射して改質層を形成しエキスパンドテープをエキスパンドして分割しグループ片に分割するグループ化ステップと、
それぞれのグループ片毎にウェーハに対して透過性を有する波長のレーザー光線を該分割予定ラインに沿って照射して改質層を形成する改質層形成ステップと、
改質層形成ステップを実施した後に、該グループ化ステップよりも更にエキスパンドして複数の該グループ片を個々のデバイスに分割する分割ステップと、
から構成されるウェーハの加工方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018039413A JP7082502B2 (ja) | 2018-03-06 | 2018-03-06 | ウェーハの加工方法 |
US16/289,969 US10804154B2 (en) | 2018-03-06 | 2019-03-01 | Wafer processing method |
DE102019202914.0A DE102019202914A1 (de) | 2018-03-06 | 2019-03-05 | Waferbearbeitungsverfahren |
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JP2018039413A JP7082502B2 (ja) | 2018-03-06 | 2018-03-06 | ウェーハの加工方法 |
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JP2019153731A true JP2019153731A (ja) | 2019-09-12 |
JP7082502B2 JP7082502B2 (ja) | 2022-06-08 |
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JP2018039413A Active JP7082502B2 (ja) | 2018-03-06 | 2018-03-06 | ウェーハの加工方法 |
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US (1) | US10804154B2 (ja) |
JP (1) | JP7082502B2 (ja) |
DE (1) | DE102019202914A1 (ja) |
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JP7402601B2 (ja) * | 2018-05-09 | 2023-12-21 | リンテック株式会社 | 個片体形成装置および個片体形成方法 |
KR102536844B1 (ko) * | 2018-10-15 | 2023-05-30 | 삼성디스플레이 주식회사 | 표시 장치 및 그의 제조 방법 |
JP7313219B2 (ja) * | 2019-07-22 | 2023-07-24 | 株式会社ディスコ | エキスパンド方法及びエキスパンド装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013021114A (ja) * | 2011-07-11 | 2013-01-31 | Disco Abrasive Syst Ltd | 光デバイス基板の分割方法 |
JP2014138113A (ja) * | 2013-01-17 | 2014-07-28 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2015103674A (ja) * | 2013-11-25 | 2015-06-04 | 豊田合成株式会社 | Iii族窒化物半導体発光素子の製造方法 |
JP2015191993A (ja) * | 2014-03-28 | 2015-11-02 | 株式会社東京精密 | 半導体製造装置及び半導体の製造方法 |
JP2016004960A (ja) * | 2014-06-19 | 2016-01-12 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
JP2017092129A (ja) * | 2015-11-05 | 2017-05-25 | 株式会社ディスコ | ウエーハの加工方法 |
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JP3408805B2 (ja) | 2000-09-13 | 2003-05-19 | 浜松ホトニクス株式会社 | 切断起点領域形成方法及び加工対象物切断方法 |
CN108807253B (zh) * | 2012-12-26 | 2023-05-02 | 株式会社力森诺科 | 扩展方法、半导体装置的制造方法、及半导体装置 |
US10679912B2 (en) * | 2017-10-02 | 2020-06-09 | International Business Machines Corporation | Wafer scale testing and initialization of small die chips |
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2018
- 2018-03-06 JP JP2018039413A patent/JP7082502B2/ja active Active
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- 2019-03-01 US US16/289,969 patent/US10804154B2/en active Active
- 2019-03-05 DE DE102019202914.0A patent/DE102019202914A1/de active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013021114A (ja) * | 2011-07-11 | 2013-01-31 | Disco Abrasive Syst Ltd | 光デバイス基板の分割方法 |
JP2014138113A (ja) * | 2013-01-17 | 2014-07-28 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2015103674A (ja) * | 2013-11-25 | 2015-06-04 | 豊田合成株式会社 | Iii族窒化物半導体発光素子の製造方法 |
JP2015191993A (ja) * | 2014-03-28 | 2015-11-02 | 株式会社東京精密 | 半導体製造装置及び半導体の製造方法 |
JP2016004960A (ja) * | 2014-06-19 | 2016-01-12 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
JP2017092129A (ja) * | 2015-11-05 | 2017-05-25 | 株式会社ディスコ | ウエーハの加工方法 |
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DE102019202914A1 (de) | 2019-09-12 |
US10804154B2 (en) | 2020-10-13 |
JP7082502B2 (ja) | 2022-06-08 |
US20190279903A1 (en) | 2019-09-12 |
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