JP2019132278A5 - - Google Patents
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- Publication number
- JP2019132278A5 JP2019132278A5 JP2019076645A JP2019076645A JP2019132278A5 JP 2019132278 A5 JP2019132278 A5 JP 2019132278A5 JP 2019076645 A JP2019076645 A JP 2019076645A JP 2019076645 A JP2019076645 A JP 2019076645A JP 2019132278 A5 JP2019132278 A5 JP 2019132278A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- piezoelectric
- piezoelectric element
- diaphragm
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims 16
- 239000000919 ceramic Substances 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016201718.7A DE102016201718B4 (de) | 2016-02-04 | 2016-02-04 | Pumpe mit polygonförmigem Piezo-Membranwandler |
| DE102016201718.7 | 2016-02-04 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017014407A Division JP6797703B2 (ja) | 2016-02-04 | 2017-01-30 | 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019132278A JP2019132278A (ja) | 2019-08-08 |
| JP2019132278A5 true JP2019132278A5 (https=) | 2020-08-20 |
Family
ID=59382470
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017014407A Active JP6797703B2 (ja) | 2016-02-04 | 2017-01-30 | 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ |
| JP2019076645A Withdrawn JP2019132278A (ja) | 2016-02-04 | 2019-04-12 | 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017014407A Active JP6797703B2 (ja) | 2016-02-04 | 2017-01-30 | 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11131299B2 (https=) |
| JP (2) | JP6797703B2 (https=) |
| CN (1) | CN107035667B (https=) |
| DE (1) | DE102016201718B4 (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10231364B2 (en) * | 2016-10-24 | 2019-03-12 | Toyota Motor Engineering & Manufacturing North America, Inc. | Fluidly cooled power electronics assemblies having a thermo-electric generator |
| DE102018207858B4 (de) | 2018-05-18 | 2021-06-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor |
| JP7200535B2 (ja) * | 2018-08-17 | 2023-01-10 | セイコーエプソン株式会社 | 構造体、ダイヤフラム式圧縮機、冷却機、プロジェクター及び構造体の製造方法 |
| JP7072492B2 (ja) * | 2018-11-22 | 2022-05-20 | 京セラ株式会社 | アクチュエータ及び触感呈示装置 |
| CN109985796A (zh) * | 2019-03-25 | 2019-07-09 | 中国船舶重工集团公司第七一五研究所 | 一种多边形阵元压电复合材料换能器制备方法 |
| DE102019211941B3 (de) * | 2019-08-08 | 2020-10-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikrostrukturierte fluidflussregelvorrichtung |
| WO2021108421A1 (en) | 2019-11-25 | 2021-06-03 | Aita Bio Inc. | Micropump and method of fabricating the same |
| DE102020209594B3 (de) | 2020-07-30 | 2021-12-30 | Festo Se & Co. Kg | Fluidgerät |
| DE102020209593B4 (de) * | 2020-07-30 | 2022-02-17 | Festo Se & Co. Kg | Fluidgerät |
| TWI806068B (zh) * | 2021-06-11 | 2023-06-21 | 研能科技股份有限公司 | 微機電泵浦 |
| EP4466460A4 (en) * | 2022-01-19 | 2025-09-03 | Aita Bio Inc | MULTI-CHAMBER MEMS MICROPUMP FOR AN INSULIN DELIVERY DEVICE |
| CN114640269B (zh) * | 2022-04-12 | 2024-04-30 | 合肥工业大学 | 一种基于菱形环和对称同相放大杆的二级驱动压电堆栈泵 |
| US20250109742A1 (en) * | 2023-09-28 | 2025-04-03 | Boston Scientific Scimed, Inc. | Surface enhancement of a bonding surface in a piezo electric pump/valve |
| US20250177182A1 (en) * | 2023-12-04 | 2025-06-05 | Boston Scientific Scimed, Inc. | Formation of a chamber for a fluidic device |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2557732B1 (fr) * | 1983-12-28 | 1986-04-11 | Lefevre Rene | Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede |
| JPH05272457A (ja) * | 1992-01-30 | 1993-10-19 | Terumo Corp | マイクロポンプおよびその製造方法 |
| IL106803A (en) * | 1993-08-25 | 1998-02-08 | Scitex Corp Ltd | Printable inkjet head |
| JP3320596B2 (ja) | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| DE19834461C2 (de) * | 1998-07-30 | 2000-09-28 | Siemens Ag | Vielschicht-Piezoaktor |
| US6334761B1 (en) * | 2000-03-02 | 2002-01-01 | California Institute Of Technology | Check-valved silicon diaphragm pump and method of fabricating the same |
| JP3629405B2 (ja) * | 2000-05-16 | 2005-03-16 | コニカミノルタホールディングス株式会社 | マイクロポンプ |
| EP1435664A1 (en) * | 2002-01-21 | 2004-07-07 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device |
| DE10238600A1 (de) | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltische Mikropumpe |
| CA2654688C (en) * | 2006-12-09 | 2011-07-26 | Murata Manufacturing Co., Ltd. | Piezoelectric pump |
| US8821134B2 (en) * | 2009-06-03 | 2014-09-02 | The Technology Partnership Plc | Fluid disc pump |
| EP2542809A1 (en) * | 2010-03-05 | 2013-01-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve |
| CN102884352B (zh) * | 2010-03-05 | 2014-06-18 | 弗兰霍菲尔运输应用研究公司 | 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀 |
| JP2013527751A (ja) * | 2010-03-15 | 2013-07-04 | ザ ジョンズ ホプキンズ ユニヴァーシティー | 物質の非毒性を決定する方法 |
| CN101846653B (zh) * | 2010-04-30 | 2011-09-14 | 湖北大学 | 一种多边形电极的压电薄膜体声波传感器 |
-
2016
- 2016-02-04 DE DE102016201718.7A patent/DE102016201718B4/de active Active
-
2017
- 2017-01-30 JP JP2017014407A patent/JP6797703B2/ja active Active
- 2017-01-30 US US15/419,015 patent/US11131299B2/en active Active
- 2017-02-04 CN CN201710064243.5A patent/CN107035667B/zh active Active
-
2019
- 2019-04-12 JP JP2019076645A patent/JP2019132278A/ja not_active Withdrawn
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