JP2019121775A - Tip push-up needle device and tip push-up needle equipment - Google Patents

Tip push-up needle device and tip push-up needle equipment Download PDF

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JP2019121775A
JP2019121775A JP2018034919A JP2018034919A JP2019121775A JP 2019121775 A JP2019121775 A JP 2019121775A JP 2018034919 A JP2018034919 A JP 2018034919A JP 2018034919 A JP2018034919 A JP 2018034919A JP 2019121775 A JP2019121775 A JP 2019121775A
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groove
inclined groove
tip
needle device
push
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JP6503487B1 (en
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駿宏 ▲呉▼
駿宏 ▲呉▼
jun hong Wu
佳正 彭
Jia Zheng Peng
佳正 彭
金城 劉
jin cheng Liu
金城 劉
炳谷 陳
Bing Gu Chen
炳谷 陳
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Powertech Technology Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52—Mounting semiconductor bodies in containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

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Abstract

To provide a tip push-up needle device capable of suppressing the tip from being pushed up and broken by a needle.SOLUTION: A tip push-up needle device according to the present invention includes multiple outer frames arranged one by one from the outside to the inside and one central base, and a plurality of first inclined groove channels and second inclined groove channels are formed on the upper surface of each side wall of the outer frame, and each of the first inclined groove channels and the second inclined groove channels has a flat inner wall surface and communicates with a first groove and a second groove in the central base. When the tip push-up needle device according to the present invention is installed and used in a vacuum environment, since the first and second inclined groove channels and the first and second grooves generate a uniform vacuum suction force to the upper tape to which a chip is adhered, the outer frame and the central base can suppress breakage of the chip during the process of pushing up the tape.SELECTED DRAWING: Figure 1

Description

本発明はチップ突き上げニードル装置に関し、特に多段式チップ突き上げニードル装置に関する。   The present invention relates to a tip push-up needle device, and more particularly to a multistage tip push-up needle device.

半導体パッケージングプロセスにおいて、複数あるチップは一旦テープ上に貼り付けられ、所定の工程を終えた後、テープからそれぞれピックアップされて次の工程へ搬送される。最も一般的なチップピックアップ方法は、テープの下方に針状ニードルを設けると共にチップの上方に真空吸着ヘッドを設け、チップに位置合わせされた針状ニードルによってチップを突き上げてチップを真空吸着ヘッドに接近させた後、真空吸着ヘッドによってチップを吸着してテープから離脱させることを、テープ上のチップが全てピックアップされるまで繰り返すという方法である。   In the semiconductor packaging process, a plurality of chips are once stuck on a tape, and after completing a predetermined process, they are picked up from the tape and transported to the next process. The most common chip pickup method is to provide a needle needle below the tape and a vacuum suction head above the chip, and push the chip up with the needle needle aligned with the chip to bring the chip closer to the vacuum suction head After that, suctioning the chip by the vacuum suction head and removing it from the tape is repeated until all the chips on the tape are picked up.

上記従来の針状ニードルによってチップを突き上げる際に、ニードルによる圧力はチップの一箇所に集中する。そのため、近年、厚さがますます薄くなる傾向にあるチップは、従来の針状ニードルによって突き上げられる際に、ニードルから受ける圧力によって破損しやすい。この問題を解決する手段として、引用文献１には、圧力の集中を防止できるチップ剥離装置が提案された。また、図９、図１０に示すような、複数の外枠６１と１つの中央台部６２が外側から内側へ順に配置される他の多段式チップ突き上げニードル装置６０も提案されている。多段式チップ突き上げニードル装置６０において、図１０に示すように、各外枠６１の各長側壁の上面及び各短側壁の上面には、凹入した１つ又は複数の溝部６１１、６１２がそれぞれ形成され、これら外枠６１における、同じ位置にある溝部６１１、６１２は互いに連通している。また、中央台部６２における、これら外枠６１の長側壁上面の溝部６１１に対応する位置には、長手の溝部６２１が形成され、これら外枠６１の対向する２つの長側壁上面の溝部６１１は、長手の溝部６２１を介して互いに連通している。また、各外枠６１の内壁面には通気間隙６１３が形成されている。   When the tip is pushed up by the conventional needle needle, the pressure by the needle is concentrated at one point of the tip. Therefore, in recent years, a chip whose thickness tends to be thinner tends to be broken by pressure received from the needle when it is pushed up by a conventional needle needle. As a means to solve this problem, Patent Document 1 proposes a chip peeling device capable of preventing concentration of pressure. Also, another multistage tip-pushing needle device 60 has been proposed, as shown in FIGS. 9 and 10, in which a plurality of outer frames 61 and one central base 62 are arranged in order from the outside to the inside. In the multistage tip push-up needle device 60, as shown in FIG. 10, one or a plurality of recessed groove portions 611, 612 are respectively formed on the upper surface of each long side wall of each outer frame 61 and the upper side of each short side wall The grooves 611 and 612 at the same position in the outer frame 61 communicate with each other. Further, in the central base portion 62, longitudinal groove portions 621 are formed at positions corresponding to the groove portions 611 on the upper surface of the long side wall of the outer frame 61, and the groove portions 611 on the upper surface of two opposite long side walls of the outer frame 61 are The longitudinal grooves 621 communicate with each other. A ventilation gap 613 is formed on the inner wall surface of each outer frame 61.

上記多段式チップ突き上げニードル装置６０は、真空環境に設置されて使用される。チップのピックアップ過程中、多段式チップ突き上げニードル装置６０は上方におけるテープ上のチップに位置合わせされ、真空環境下では、複数の連通した溝部及び通気間隙を介して下方への真空吸着力が発生し、吸着力によって固定テープが多段式チップ突き上げニードル装置６０に固定される。その後、多段式チップ突き上げニードル装置６０の複数の外枠６１と中央台部６２とが、外側から内側への順で上昇してテープを突き上げ、中央台部６２によってテープが最も高い位置へ突き上げられる。中央台部６２の長さ及び幅が各外枠の長さ及び幅よりも小さいため、多段式チップ突き上げニードル装置６０による突き上げ中に、チップの底面とテープの間の粘着強度は次第に弱まり、最終的にピックアップヘッドによってチップがピックアップされ、テープから離脱する。   The multistage tip push-up needle device 60 is installed and used in a vacuum environment. During the tip pick-up process, the multi-stage tip-pushing needle device 60 is aligned with the tip on the tape at the upper side, and under vacuum environment, a downward vacuum suction force is generated through a plurality of communicating grooves and vent gaps. The fixing tape is fixed to the multistage tip push-up needle device 60 by the suction force. Thereafter, the outer frames 61 and the central base 62 of the multistage tip push-up needle device 60 ascend in order from the outer side to the inner side to push up the tape, and the central base 62 pushes up the tape to the highest position. . Since the length and width of the central base portion 62 are smaller than the length and width of each outer frame, the adhesion strength between the bottom of the chip and the tape gradually weakens during pushing up by the multistage tip pushing-up needle device 60 The pick-up head picks up the chip and leaves the tape.

台湾特許第Ｉ３１７９６６号明細書Taiwan Patent No. I317966 Specification

針状ニードルと比べると、上述した多段式チップ突き上げニードル装置では、チップを突き上げる力が分散されているため、ピックアップ過程中にチップが破損するおそれが低減される。ところで、図１０に示すように、上記多段式チップ突き上げニードル装置６０では、互いに連通する複数の溝部６１１及び互いに連通する複数の溝部６１２のうち、中央台部６２における長手の溝部６２１と連通して比較的長い溝チャンネルを構成しているのは長側壁上面の溝部６１１のみである。そして、互いに連通する溝部６１１の内壁面が連続しておらず段階状となっている。その結果、テープを固定するための吸着力は限定的であり、且つ分布が均等でないため、厚さがより薄いチップのピックアップに使用される場合、テープを突き上げる過程中に薄化チップを破損させてしまいやすい問題があった。したがって、薄化チップのピックアップ作業に使用するためには、このような多段式チップ突き上げニードル装置６０を改良する必要があった。   As compared with the needle needle, in the above-described multi-stage tip push-up needle device, since the force for pushing up the tip is dispersed, the possibility of the tip being broken during the pickup process is reduced. By the way, as shown in FIG. 10, in the multistage tip push-up needle device 60, the plurality of groove portions 611 communicating with each other and the plurality of groove portions 612 communicating with each other communicate with the longitudinal groove portions 621 of the central base portion 62. It is only the groove 611 on the upper surface of the long side wall that constitutes a relatively long grooved channel. And the inner wall surface of the groove part 611 connected mutually is not continuous, but has become step shape. As a result, the adsorptive power to fix the tape is limited and the distribution is not uniform, so if it is used for picking up thinner chips, the thinned chips will be broken during the process of pushing up the tape. There was a problem that Therefore, it has been necessary to improve such a multistage tip push-up needle device 60 in order to use it for pick-up operation of thinned chips.

本発明は上記多段式チップ突き上げニードル装置の課題に鑑みてなされたものであり、その主な目的は、チップのピックアップ作業中に、チップがニードルによって突き上げられて破損することを抑えることができるチップ突き上げニードル装置を提供することにある。   The present invention has been made in view of the problem of the above-described multistage tip push-up needle device, and its main object is to suppress the tip being pushed up and broken by the needle during pick-up operation of the tip. To provide a push-up needle device.

上記目的を達成するために、本発明のチップ突き上げニードル装置は、
外側から内側へ順に設置される複数の外枠と、
前記複数の外枠のうち最も内側にある外枠内に設置され、少なくとも１つの第１溝部及び少なくとも１つの第２溝部が形成されている中央台部と、
前記複数の外枠の各側壁の上面に形成され、それぞれの内壁面が平面である複数の第１傾斜溝チャンネルと、
前記複数の外枠の各側壁の上面に形成され、それぞれの内壁面が平面であって且つ傾斜方向が各前記第１傾斜溝チャンネルの傾斜方向とは反対方向である複数の第２傾斜溝チャンネルとを備え、
各前記外枠の少なくとも１つの内側面に通気間隙が形成され、
各前記第１溝部は、各前記第２溝部と互いに連通し、
前記複数の第１傾斜溝チャンネルのうち少なくとも１つの第１傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通し、
前記複数の第２傾斜溝チャンネルのうち少なくとも１つの第２傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通していることを特徴としている。 In order to achieve the above object, the tip push-up needle device of the present invention is
Several outer frames installed in order from the outside to the inside,
A central base portion disposed in the innermost outer frame of the plurality of outer frames and having at least one first groove and at least one second groove formed therein;
A plurality of first inclined groove channels formed on the upper surface of each side wall of the plurality of outer frames, each inner wall surface being a plane;
A plurality of second inclined groove channels formed on the upper surface of each side wall of the plurality of outer frames, each inner wall surface being a flat surface, and the inclination direction is the direction opposite to the inclination direction of each first inclined groove channel Equipped with
A ventilation gap is formed on at least one inner surface of each of the outer frames,
The first grooves communicate with the second grooves, and
At least one first inclined groove channel of the plurality of first inclined groove channels communicates with the at least one first groove and the at least one second groove,
At least one second inclined groove channel among the plurality of second inclined groove channels is in communication with the at least one first groove and at least one second groove.

以上のように、本発明では、主に複数の外枠の各側壁の上面に複数の第１傾斜溝チャンネル、第２傾斜溝チャンネルが形成され、各第１傾斜溝チャンネル、第２傾斜溝チャンネルは、段階状とならないように内壁面が平面であり、且つ中央台部における第１溝部、第２溝部と連通している。この構成によれば、本発明のチップ突き上げニードル装置が真空環境に設置されて使用する際に、これら第１傾斜溝チャンネル及び第２傾斜溝チャンネルと、第１溝部及び第２溝部とによって、チップが粘着されている上方のテープに対する均等な真空吸着力が発生するため、外枠及び中央台部によってテープを突き上げる過程中にチップが破損することを抑制することができる。   As described above, in the present invention, a plurality of first inclined groove channels and second inclined groove channels are mainly formed on the upper surface of each side wall of a plurality of outer frames, and each first inclined groove channel and second inclined groove channel The inner wall surface is flat so as not to be stepped, and is in communication with the first groove and the second groove in the central pedestal. According to this configuration, when the tip push-up needle device of the present invention is installed and used in a vacuum environment, the tip is formed by the first inclined groove channel and the second inclined groove channel and the first groove portion and the second groove portion. The outer frame and the central base can suppress breakage of the chip during the process of pushing up the tape by generating an even vacuum suction force to the upper tape adhered.

本発明のチップ突き上げニードル装置の第１実施形態を示す斜視図である。It is a perspective view which shows 1st Embodiment of the tip push-up needle apparatus of this invention. 図１のチップ突き上げニードル装置を示す分解斜視図である。It is a disassembled perspective view which shows the tip push-up needle apparatus of FIG. 図１のチップ突き上げニードル装置を示す平面図である。It is a top view which shows the tip push-up needle apparatus of FIG. 真空環境に設置された図１のチップ突き上げニードル装置を示す縦方向断面図である。FIG. 2 is a longitudinal cross-sectional view of the tip push-up needle device of FIG. 1 installed in a vacuum environment. 図４のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 図４のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 図４のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 本発明のチップ突き上げニードル装置の第２実施形態を示す平面図である。It is a top view which shows 2nd Embodiment of the tip push-up needle apparatus of this invention. 真空環境に設置された図６のチップ突き上げニードル装置を示す縦方向断面図である。FIG. 7 is a longitudinal cross-sectional view of the tip push-up needle device of FIG. 6 installed in a vacuum environment. 図７のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 図７のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 図７のチップ突き上げニードル装置の動作を示す模式図である。It is a schematic diagram which shows operation | movement of the tip push-up needle apparatus of FIG. 従来の多段式チップ突き上げニードル装置の外観斜視図である。It is an external appearance perspective view of the conventional multistage type tip push-up needle apparatus. 図９の多段式チップ突き上げニードル装置を示す平面図である。It is a top view which shows the multistage type tip push-up needle apparatus of FIG.

本発明は、チップ突き上げニードル装置について構造の改良を行って得られたものであり、以下、図面を参考しながら複数の実施形態を用いて本発明のチップ突き上げニードル装置の構造的特徴を説明する。   The present invention is obtained by improving the structure of a tip-pushing needle device, and the structural features of the tip-pushing needle device of the present invention will be described using a plurality of embodiments with reference to the drawings. .

まず、図１に示すように、第１実施形態の本発明のチップ突き上げニードル装置１０は、複数の外枠１１、１２、１３と、１つの中央台部１４とを備え、これら複数の外枠１１、１２、１３と、中央台部１４とは、外側から内側へ順に同軸的に設置され、中央台部１４は最も内側にある外枠１３内に設置される。組み立てられた状態では、これら外枠１１、１２、１３と、中央台部１４とは、上面が共面をなしている。また、本実施形態において、これら外枠１１、１２、１３の上面には、複数の第１傾斜溝チャンネル１０１及複数の第２傾斜溝チャンネル１０２が形成されている。   First, as shown in FIG. 1, the tip-pushing-up needle device 10 of the present invention according to the first embodiment includes a plurality of outer frames 11, 12, 13 and one central base portion 14, and the plurality of outer frames 11, 12, 13 and the central base 14 are coaxially installed in order from the outside to the inside, and the central base 14 is installed in the innermost outer frame 13. In the assembled state, the outer frames 11, 12, 13 and the central base portion 14 have coplanar upper surfaces. Further, in the present embodiment, a plurality of first inclined groove channels 101 and a plurality of second inclined groove channels 102 are formed on the upper surfaces of the outer frames 11, 12, 13.

説明の便宜上、ここでは外側から内側へ順に設置された第１外枠１１、第２外枠１２及び第３外枠１３を有する例を示したが、外枠の数はこの限りではない。図２に示すように、第１外枠１１は、２つの長側壁及び２つの短側壁を有する矩形の枠体であり、各長側壁及び各短側壁には、複数の第１傾斜溝部１１１、複数の第２傾斜溝部１１２がそれぞれ形成されている。各第１傾斜溝部１１１の傾斜方向と各第２傾斜溝部１１２の傾斜方向とは反対方向であり、これにより、各長側壁及び短側壁の中央部位において隣接する２つの第１傾斜溝部１１１及び第２傾斜溝部１１２が互いに交差して連通し、Ｖ形溝を構成する。第１外枠１１の内側面１１０ａの中央部位には第１通気間隙１１３が形成されている。本実施形態では、第１外枠１１は矩形のものであるため、４つの外側面１１０ｂ及び４つの内側面１１０ａが備えられ、各内側面１１０ａには、第１通気間隙１１３がそれぞれ形成されている。   Although the example which has the 1st outer frame 11, the 2nd outer frame 12, and the 3rd outer frame 13 installed in order from the outer side to the inner side here was shown for convenience of explanation, the number of outer frames is not this limitation. As shown in FIG. 2, the first outer frame 11 is a rectangular frame having two long side walls and two short side walls, and each long side wall and each short side wall have a plurality of first inclined groove portions 111, A plurality of second inclined groove portions 112 are formed respectively. The inclination direction of each of the first inclined groove portions 111 and the inclination direction of each of the second inclined groove portions 112 are opposite to each other, whereby the two first inclined groove portions 111 and the first adjacent ones in the central portion of each long side wall and short side wall The two inclined groove portions 112 cross each other and communicate to form a V-shaped groove. A first ventilation gap 113 is formed at a central portion of the inner side surface 110 a of the first outer frame 11. In the present embodiment, since the first outer frame 11 is rectangular, four outer side surfaces 110 b and four inner side surfaces 110 a are provided, and a first air gap 113 is formed in each of the inner side surfaces 110 a. There is.

上記第２外枠１２は、第１外枠１１よりも長さと幅が小さい矩形の枠体であり、外側面１２０ｂが第１外枠１１の内側面１１０ａに当接するように第１外枠１１内に嵌設されている。第２外枠１２は、２つの長側壁及び２つの短側壁を有する。各長側壁及び各短側壁における、第１外枠１１の各第１傾斜溝部１１１と対応する箇所に第１傾斜溝部１２１が形成され、第２外枠１２における各第１傾斜溝部１２１の内壁面１２１１と、第１外枠１１における対応する第１傾斜溝部１１１の内壁面１１１１とが共面をなしている。また、第２外枠１２の各長側壁及び各短側壁における、第１外枠１１の各第２傾斜溝部１１２と対応する箇所に第２傾斜溝部１２２が形成され、第２外枠１２における各第２傾斜溝部１２２の内壁面１２２１と、第１外枠１１における対応する第２傾斜溝部１１２の内壁面１１２１とが共面をなしている。第２外枠１２の内側面１２０ａの中央部位には第２通気間隙１２３が形成されている。本実施形態において、第２外枠１２も同じく矩形の枠体であるため、４つの外側面１２０ｂ及び４つの内側面１２０ａが備えられ、各内側面１２０ａには、第１外枠１１における対応する内側面１１０ａの第１通気間隙１１３と位置合わせされている第２通気間隙１２３が形成されている。   The second outer frame 12 is a rectangular frame whose length and width are smaller than that of the first outer frame 11, and the first outer frame 11 is in such a manner that the outer side surface 120 b abuts on the inner side surface 110 a of the first outer frame 11. It is fitted inside. The second outer frame 12 has two long side walls and two short side walls. First inclined groove portions 121 are formed in portions corresponding to the first inclined groove portions 111 of the first outer frame 11 in each long side wall and each short side wall, and the inner wall surface of each first inclined groove portion 121 in the second outer frame 12 1211 and the inner wall surface 1111 of the corresponding first inclined groove portion 111 in the first outer frame 11 are coplanar. Further, second inclined groove portions 122 are formed in portions corresponding to the second inclined groove portions 112 of the first outer frame 11 in the long side walls and the short side walls of the second outer frame 12, and An inner wall surface 1221 of the second inclined groove portion 122 and an inner wall surface 1121 of the corresponding second inclined groove portion 112 in the first outer frame 11 are coplanar. A second ventilation gap 123 is formed at a central portion of the inner side surface 120 a of the second outer frame 12. In the present embodiment, since the second outer frame 12 is also a rectangular frame, four outer side surfaces 120 b and four inner side surfaces 120 a are provided, and each inner side surface 120 a corresponds to the first outer frame 11. A second venting gap 123 is formed which is aligned with the first venting gap 113 of the inner surface 110a.

上記第３外枠１３は、第２外枠１２よりも長さと幅が小さい矩形の枠体であり、外側面１３０ｂが第２外枠１２の内側面１２０ａに当接するように第２外枠１２内に嵌設されている。第３外枠１３は、２つの長側壁及び２つの短側壁を有する。各長側壁及び各短側壁における、第２外枠１２の各第１傾斜溝部１２１と対応する箇所に第１傾斜溝部１３１が形成され、第３外枠１３における各第１傾斜溝部１３１の内壁面１３１１と、第２外枠１２における対応する第１傾斜溝部１２１の内壁面１２１１とが共面をなしている。これにより、図１及び図３に示すような第１傾斜溝チャンネル１０１が構成される。また、第３外枠１３の各長側壁及び各短側壁における、第２外枠１２の各第２傾斜溝部１２２と対応する箇所に第２傾斜溝部１３２が形成され、第３外枠１３における各第２傾斜溝部１３２の内壁面１３２１と、第２外枠１２における対応する第２傾斜溝部１２２の内壁面１２２１とが共面をなしている。これにより、図１及び図３に示すような第２傾斜溝チャンネル１０２が構成される。第３外枠１３の各長側壁及び短側壁の中央部位において隣接する２つの第１傾斜溝部１３１及び第２傾斜溝部１３２と、これらと連通する第１外枠１１における第１傾斜溝部１１１、第２傾斜溝部１１２及び第２外枠１２における第１傾斜溝部１２１、第２傾斜溝部１２２とによってＶ形溝が構成されている。第３外枠１３の内側面１３０ａの中央部位には第３通気間隙１３３が形成されている。本実施形態において、第３外枠１３も同じく矩形の枠体であるため、４つの外側面１３０ｂ及び４つの内側面１３０ａが備えられ、各内側面１３０ａには、第２外枠１２における対応する内側面１２０ａの第２通気間隙１２３と位置合わせされている第３通気間隙１３３が形成されている。   The third outer frame 13 is a rectangular frame whose length and width are smaller than that of the second outer frame 12, and the second outer frame 12 is configured such that the outer side surface 130 b abuts on the inner side surface 120 a of the second outer frame 12. It is fitted inside. The third outer frame 13 has two long side walls and two short side walls. First inclined groove portions 131 are formed in portions corresponding to the first inclined groove portions 121 of the second outer frame 12 in each long side wall and each short side wall, and the inner wall surface of each first inclined groove portion 131 in the third outer frame 13 1311 and the inner wall surface 1211 of the corresponding first inclined groove portion 121 in the second outer frame 12 are coplanar. Thereby, the first inclined groove channel 101 as shown in FIGS. 1 and 3 is configured. Further, second inclined groove portions 132 are formed in portions corresponding to the respective second inclined groove portions 122 of the second outer frame 12 in each long side wall and each short side wall of the third outer frame 13. The inner wall surface 1321 of the second inclined groove 132 and the inner wall surface 1221 of the corresponding second inclined groove 122 in the second outer frame 12 are coplanar. Thereby, the second inclined groove channel 102 as shown in FIGS. 1 and 3 is configured. Two first inclined groove portions 131 and second inclined groove portions 132 adjacent to each other at the central portion of each long side wall and short side wall of the third outer frame 13, and first inclined groove portions 111 in the first outer frame 11 communicating with these A V-shaped groove is configured by the first inclined groove portion 121 and the second inclined groove portion 122 in the second inclined groove portion 112 and the second outer frame 12. A third ventilation gap 133 is formed at a central portion of the inner side surface 130 a of the third outer frame 13. In the present embodiment, since the third outer frame 13 is also a rectangular frame, four outer side surfaces 130 b and four inner side surfaces 130 a are provided, and each inner side surface 130 a corresponds to the second outer frame 12. A third venting gap 133 is formed which is aligned with the second venting gap 123 of the inner surface 120a.

上記中央台部１４の上面には、１つの第１溝部１４１及び複数の第２溝部１４２が形成され、中央台部１４の外側面１４０は第３外枠１３の内側面１３０ａに当接している。本実施形態において、中央台部１４は矩形のブロックであり、第１溝部１４１は中央台部１４における２つの短側面にわたって穿設された長手溝であり、第３外枠１３の短側壁の上面における対応する位置にある、Ｖ形溝を構成する第１傾斜溝部１３１及び第２傾斜溝部１３２と連通している。各第２溝部１４２は中央台部１４における２つの長側面にわたって穿設された長手溝であり、第３外枠１３の長側壁における対応する位置にある第１傾斜溝部１３１及び第２傾斜溝部１３２（すなわちＶ形溝）と連通している。各第２溝部１４２は、第１溝部１４１と互いに交差して連通し、複数の十字形溝を構成している。第１溝部１４１の幅と第２溝部１４２の幅はいずれも、各第１傾斜溝チャンネル１０１の幅及び各第２傾斜溝チャンネル１０２の幅より大きい。   One first groove portion 141 and a plurality of second groove portions 142 are formed on the upper surface of the central base portion 14, and the outer side surface 140 of the central base portion 14 is in contact with the inner side surface 130 a of the third outer frame 13. . In the present embodiment, the central base portion 14 is a rectangular block, and the first groove portion 141 is a longitudinal groove drilled over two short side surfaces of the central base portion 14, and the upper surface of the short side wall of the third outer frame 13. It communicates with the first inclined groove portion 131 and the second inclined groove portion 132 which constitute the V-shaped groove at the corresponding position in Each second groove portion 142 is a longitudinal groove drilled over two long side surfaces in the central base portion 14, and the first inclined groove portion 131 and the second inclined groove portion 132 at corresponding positions in the long side wall of the third outer frame 13. It is in communication with (that is, V-shaped groove). The respective second grooves 142 intersect with and communicate with the first grooves 141 to constitute a plurality of cruciform grooves. The width of the first groove portion 141 and the width of the second groove portion 142 are both larger than the width of each first inclined groove channel 101 and the width of each second inclined groove channel 102.

図３に示すように、第１外枠〜第３外枠１１、１２、１３には、複数の連続した第１傾斜溝部１１１、１２１、１３１によって構成された複数の第１傾斜溝チャンネル１０１が形成されている。すなわち、各第１傾斜溝チャンネル１０１は、第１外枠〜第３外枠１１、１２、１３の同じ側の側壁の上面における互いに連通する第１傾斜溝部１１１、１２１、１３１によって構成されている。また、第１外枠〜第３外枠１１、１２、１３には、複数の連続した第２傾斜溝部１１２、１２２、１３２によって構成された複数の第２傾斜溝チャンネル１０２が形成されている。すなわち、各第２傾斜溝チャンネル１０２は、第１外枠〜第３外枠１１、１２、１３の同じ側の側壁の上面における互いに連通する第２傾斜溝部１１２、１２２、１３２によって構成されている。各第１傾斜溝チャンネル１０１、第２傾斜溝チャンネル１０２の内壁面は平面である。中央台部１４における第１溝部１４１、第２溝部１４２は、一部の第１傾斜溝チャンネル１０１、第２傾斜溝チャンネル１０２と連通している。   As shown in FIG. 3, the first outer frame to the third outer frame 11, 12, 13 have a plurality of first inclined groove channels 101 formed of a plurality of continuous first inclined groove portions 111, 121, 131. It is formed. That is, each first inclined groove channel 101 is constituted by the first inclined groove portions 111, 121, 131 communicating with each other in the upper surface of the side wall on the same side of the first outer frame to the third outer frame 11, 12, 13. . Further, in the first to third outer frames 11, 12 and 13, a plurality of second inclined groove channels 102 formed of a plurality of continuous second inclined groove portions 112, 122 and 132 are formed. That is, each second inclined groove channel 102 is constituted by the second inclined groove portions 112, 122, 132 communicating with each other in the upper surface of the side wall on the same side of the first outer frame to the third outer frame 11, 12, 13. . The inner wall surfaces of the first inclined groove channel 101 and the second inclined groove channel 102 are flat. The first groove portion 141 and the second groove portion 142 in the central base portion 14 communicate with a part of the first inclined groove channel 101 and the second inclined groove channel 102.

図４に示すように、使用時に、上記チップ突き上げニードル装置１０は真空環境２０中に設置されている。本実施形態において、チップ突き上げニードル設備を構成するように、チップ突き上げニードル装置１０は、内部が真空状態である真空筒２１内の一端に設置されている。ピックアップ作業時に、チップ突き上げニードル装置１０は、上方にあるテープ４０の上面におけるチップ３０に位置合わせされた状態でテープ４０の底面に貼り付けられる。真空筒２１の内部が真空状態となっていることにより、外枠１１、１２、１３の通気間隙１１３、１２３、１３３を介して各第１傾斜溝チャンネル１０１と第２傾斜溝チャンネル１０２、及び第１溝部１４１と第２溝部１４２において真空吸着力を発生させることができ、上方にあるテープ４０を均等な吸着力でチップ突き上げニードル装置１０の上面に吸着して固定させることができる。   As shown in FIG. 4, in use, the tip push-up needle assembly 10 is placed in a vacuum environment 20. In the present embodiment, the tip push-up needle device 10 is installed at one end inside the vacuum cylinder 21 whose inside is in a vacuum state so as to constitute a tip push-up needle facility. During the pick-up operation, the tip-pushing needle device 10 is attached to the bottom surface of the tape 40 in a state of being aligned with the tip 30 on the top surface of the tape 40 located above. Since the inside of the vacuum cylinder 21 is in a vacuum state, the first inclined groove channel 101, the second inclined groove channel 102, and the first inclined groove channel 101 and the second are formed via the air gaps 113, 123, 133 of the outer frames 11, 12, and 13. A vacuum suction force can be generated in the first groove portion 141 and the second groove portion 142, and the tape 40 located above can be suctioned and fixed to the upper surface of the tip push-up needle device 10 with a uniform suction force.

そして、図４及び図５Ａに示すように、第２外枠１２、第３外枠１３及び中央台部１４が上昇し、チップ３０をテープ４０と共に第１の高さまで突き上げる。この時、チップ３０の底面の外周部分はテープ４０から離脱する。次に、図５Ｂに示すように、第３外枠１３及び中央台部１４が上昇してチップ３０をテープ４０と共に第２高さまでさらに突き上げることにより、チップ３０の底面とテープ４０との粘着面積がさらに縮小する。さらに、図５Ｃに示すように、中央台部１４が上昇してチップ３０をテープ４０と共に第３高さまでさらに突き上げることにより、チップ３０の底面とテープ４０との粘着面積がさらに縮小する。その後、ピックアップヘッド５０がチップ３０の上面に接触し、チップ３０をテープ４０から離脱させる。   Then, as shown in FIGS. 4 and 5A, the second outer frame 12, the third outer frame 13, and the central base portion 14 ascend, and push up the chip 30 together with the tape 40 to a first height. At this time, the outer peripheral portion of the bottom surface of the chip 30 is separated from the tape 40. Next, as shown in FIG. 5B, the third outer frame 13 and the central base portion 14 ascend to further push up the chip 30 together with the tape 40 to the second height, whereby the adhesion area between the bottom surface of the chip 30 and the tape 40 Will shrink further. Furthermore, as shown in FIG. 5C, the central pedestal portion ascends to further push up the chip 30 with the tape 40 to the third height, thereby further reducing the adhesion area between the bottom surface of the chip 30 and the tape 40. Thereafter, the pickup head 50 comes in contact with the upper surface of the chip 30 to separate the chip 30 from the tape 40.

本発明のチップ突き上げニードル装置１０において、その上面には均等に分布された複数の第１傾斜溝チャンネル１０１及び複数の第２傾斜溝チャンネル１０２が形成されており、さらに中央台部１４に第１溝部１４１及び第２溝部１４２が形成されている。そのため、ピックアップ作業時に、テープ４０には均等な真空吸着力が作用するので、チップ突き上げニードル装置１０によって突き上げられる過程中にチップ３０が破損することを抑制することができる。   In the tip push-up needle device 10 of the present invention, a plurality of first sloped groove channels 101 and a plurality of second sloped groove channels 102 uniformly distributed are formed on the upper surface thereof. The groove portion 141 and the second groove portion 142 are formed. Therefore, since an equal vacuum suction force acts on the tape 40 at the time of pickup operation, it is possible to suppress breakage of the chip 30 during the process of being pushed up by the chip push-up needle device 10.

図６には、本発明のチップ突き上げニードル装置１０’の第２の好適な実施形態が示されている。本実施形態のチップ突き上げニードル装置１０’の構成の多くは、図１に示す第１の好適な実施形態と同様であるが、本実施形態において、中央台部１４には、２つの短側面にわたって穿設された第１溝部１４１が形成されていると共に、第１傾斜溝チャンネル１０１、第２傾斜溝チャンネル１０２とそれぞれ連通する複数の第３傾斜溝部１４３、第４傾斜溝部１４４が形成されている。そのうち、互いに連通する第１傾斜溝チャンネル及び第３傾斜溝部と、互いに連通する第２傾斜溝チャンネル及び第４傾斜溝部とによってＶ形溝が構成されており、これにより、チップ突き上げニードル装置１０’の上面における４つの側部に全Ｖ形溝が構成されている。すなわち、第３傾斜溝部１４３の内壁面１４３１と、連通する第１傾斜溝チャンネル１０１の内壁面とが共面をなしておおり、第４傾斜溝部１４４の内壁面１４４１と、連通する第２傾斜溝チャンネル１０２の内壁面とが共面をなしている。   Referring to FIG. 6, a second preferred embodiment of the tip push-up needle device 10 'of the present invention is shown. Many of the configurations of the tip-lifting needle device 10 'of the present embodiment are similar to the first preferred embodiment shown in FIG. 1, but in the present embodiment, the central pedestal 14 spans two short sides. A drilled first groove portion 141 is formed, and a plurality of third inclined groove portions 143 and fourth inclined groove portions 144 respectively communicating with the first inclined groove channel 101 and the second inclined groove channel 102 are formed. . Among them, a V-shaped groove is constituted by the first inclined groove channel and the third inclined groove portion communicating with each other and the second inclined groove channel and the fourth inclined groove portion communicating with each other, whereby the tip push-up needle device 10 ' The entire V-shaped groove is formed on the four sides of the upper surface of the. That is, an inner wall surface 1431 of the third inclined groove portion 143 and an inner wall surface of the first inclined groove channel 101 in communication are flush with each other, and a second inclination in communication with the inner wall surface 1441 of the fourth inclined groove portion 144. The inner wall surface of the grooved channel 102 is coplanar.

図７に示すように、使用時に、チップ突き上げニードル装置１０’は同様に真空筒２１内の一端に設置されている。本実施形態のチップ突き上げニードル装置１０’の上面における４つの側部に全Ｖ形溝が構成されているため、真空筒２１内が真空状態となった時、チップ突き上げニードル装置１０’における全Ｖ形真空溝により、テープ４０に対するより均等な真空吸着力が発生する。図８Ａ〜図８Ｃに示すように、テープ４０の底面に対応する真空溝チャンネルがより多く存在するため、チップ突き上げニードル装置１０’によってチップ３０を突き上げる過程中に、テープ４０を安定的に吸着することができ、チップ３０の破損をより一層抑制することができる。   As shown in FIG. 7, in use, the tip push-up needle device 10 'is similarly installed at one end within the vacuum cylinder 21. Since all V-shaped grooves are formed on the four sides of the upper surface of the tip push-up needle device 10 'of the present embodiment, when the vacuum cylinder 21 is in a vacuum state, all Vs in the tip push-up needle device 10' The shaped vacuum groove generates a more even vacuum suction to the tape 40. As shown in FIGS. 8A-8C, since there are more vacuum groove channels corresponding to the bottom surface of the tape 40, the tape 40 is stably attracted during the process of pushing up the chip 30 by the chip push-up needle device 10 '. Thus, the breakage of the chip 30 can be further suppressed.

以上のように、本発明のチップ突き上げニードル装置では、主に複数の外枠の各側壁の上面に複数の第１傾斜溝チャンネル、第２傾斜溝チャンネルが形成され、各第１傾斜溝チャンネル、第２傾斜溝チャンネルは、段階状とならないように内壁面が平面であり、且つ中央台部における第１溝部、第２溝部と連通している。この構成によれば、本発明のチップ突き上げニードル装置が真空環境に設置されて使用する際に、これら第１傾斜溝チャンネル及び第２傾斜溝チャンネルと、第１溝部及び第２溝部とによって、チップが粘着されている上方のテープに対する均等な真空吸着力が発生するため、外枠及び中央台部によってテープを突き上げる過程中にチップが破損することを抑制することができる。   As described above, in the tip push-up needle device of the present invention, the plurality of first inclined groove channels and the second inclined groove channels are mainly formed on the upper surfaces of the side walls of the plurality of outer frames. The second inclined groove channel has a flat inner wall surface so as not to be stepped, and communicates with the first groove and the second groove in the central pedestal. According to this configuration, when the tip push-up needle device of the present invention is installed and used in a vacuum environment, the tip is formed by the first inclined groove channel and the second inclined groove channel and the first groove portion and the second groove portion. The outer frame and the central base can suppress breakage of the chip during the process of pushing up the tape by generating an even vacuum suction force to the upper tape adhered.

１０、１０’ チップ突き上げニードル装置
１１、１２、１３ 外枠
１１０ａ、１２０ａ、１３０ａ 内側面
１１０ｂ、１２０ｂ、１３０ｂ 外側面
１１１、１２１、１３１ 第１傾斜溝部
１１１１、１２１１、１３１１ 内壁面
１１２、１２２、１３２ 第２傾斜溝部
１１２１、１２２１、１３２１ 内壁面
１１３、１２３、１３３ 通気間隙
１４、１４’ 中央台部
１４０ 外側面
１４１ 第１溝部
１４２ 第２溝部
１４３ 第３傾斜溝部
１４３１ 内壁面
１４４ 第４傾斜溝部
１４４１ 内壁面
２０ 真空環境
２１ 真空筒
３０ チップ
４０ テープ
５０ ピックアップヘッド
６０ チップ突き上げニードル装置
６１ 外枠
６１１、６１２ 溝部
６２ 中央台部
６２１ 長手の溝部
６１３ 通気間隙 10, 10 'tip push-up needle device
11, 12, 13 Outer frame 110a, 120a, 130a inner side surface
110b, 120b, 130b outer side surfaces 111, 121, 131 first inclined groove portions
111 11, 211, 1311 inner wall surface 112, 122, 132 second inclined groove portion
1121, 1221, 1321 inner wall surface 113, 123, 133 air gap 14, 14 'central pedestal portion 140 outer side surface 141 first groove portion 142 second groove portion 143 third inclined groove portion 1431 inner wall surface 144 fourth inclined groove portion 1441 inner wall surface 20 vacuum Environment 21 vacuum cylinder 30 tip 40 tape
Reference Signs List 50 pickup head 60 tip push-up needle device 61 outer frame 611, 612 groove 62 central base 621 longitudinal groove 613 air gap

上記目的を達成するために、本発明のチップ突き上げニードル装置は、
外側から内側へ順に設置される複数の外枠と、
前記複数の外枠のうち最も内側にある外枠内に設置され、少なくとも１つの第１溝部及び少なくとも１つの第２溝部が形成されている中央台部と、
前記複数の外枠の各側壁の上面に形成され、階段状とならないようにそれぞれの内壁面が平面である複数の第１傾斜溝チャンネルと、
前記複数の外枠の各側壁の上面に形成され、階段状とならないようにそれぞれの内壁面が平面であって且つ傾斜方向が各前記第１傾斜溝チャンネルの傾斜方向とは非平行である複数の第２傾斜溝チャンネルとを備え、
各前記外枠の少なくとも１つの内側面に通気間隙が形成され、
各前記第１溝部は、各前記第２溝部と互いに連通し、
前記複数の第１傾斜溝チャンネルのうち少なくとも１つの第１傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通し、
前記複数の第２傾斜溝チャンネルのうち少なくとも１つの第２傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通していることを特徴としている。 In order to achieve the above object, the tip push-up needle device of the present invention is
Several outer frames installed in order from the outside to the inside,
A central base portion disposed in the innermost outer frame of the plurality of outer frames and having at least one first groove and at least one second groove formed therein;
A plurality of first inclined groove channels formed on the upper surface of each side wall of the plurality of outer frames and in which each inner wall surface is flat so as not to be stepped ;
A plurality of the inner walls formed on the upper surfaces of the side walls of the plurality of outer frames and having a flat inner surface so that the inner wall is not inclined and the inclination direction is not parallel to the inclination direction of each first inclined groove channel And the second inclined groove channel of the
A ventilation gap is formed on at least one inner surface of each of the outer frames,
The first grooves communicate with the second grooves, and
At least one first inclined groove channel of the plurality of first inclined groove channels communicates with the at least one first groove and the at least one second groove,
At least one second inclined groove channel among the plurality of second inclined groove channels is in communication with the at least one first groove and at least one second groove.

Claims (10)

外側から内側へ順に設置される複数の外枠と、
前記複数の外枠のうち最も内側にある外枠内に設置され、少なくとも１つの第１溝部及び少なくとも１つの第２溝部が形成されている中央台部と、
前記複数の外枠の各側壁の上面に形成され、それぞれの内壁面が平面である複数の第１傾斜溝チャンネルと、
前記複数の外枠の各側壁の上面に形成され、それぞれの内壁面が平面であって且つ傾斜方向が各前記第１傾斜溝チャンネルの傾斜方向とは反対方向である複数の第２傾斜溝チャンネルとを備えるチップ突き上げニードル装置であって、
各前記外枠の少なくとも１つの内側面に通気間隙が形成され、
各前記第１溝部は、各前記第２溝部と互いに連通し、
前記複数の第１傾斜溝チャンネルのうち少なくとも１つの第１傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通し、
前記複数の第２傾斜溝チャンネルのうち少なくとも１つの第２傾斜溝チャンネルが前記少なくとも１つの第１溝部及び少なくとも１つの第２溝部と連通している、チップ突き上げニードル装置。 Several outer frames installed in order from the outside to the inside,
A central base portion disposed in the innermost outer frame of the plurality of outer frames and having at least one first groove and at least one second groove formed therein;
A plurality of first inclined groove channels formed on the upper surface of each side wall of the plurality of outer frames, each inner wall surface being a plane;
A plurality of second inclined groove channels formed on the upper surface of each side wall of the plurality of outer frames, each inner wall surface being a flat surface, and the inclination direction is the direction opposite to the inclination direction of each first inclined groove channel And a tip push-up needle device comprising
A ventilation gap is formed on at least one inner surface of each of the outer frames,
The first grooves communicate with the second grooves, and
At least one first inclined groove channel of the plurality of first inclined groove channels communicates with the at least one first groove and the at least one second groove,
A tip push-up needle device, wherein at least one second angled groove channel of the plurality of second angled groove channels is in communication with the at least one first groove and the at least one second groove. 各前記第１傾斜溝チャンネルは、前記複数の外枠の同じ側の側壁の上面における互いに連通する第１傾斜溝部によって構成され、
各前記第２傾斜溝チャンネルは、前記複数の外枠の同じ側の側壁の上面における互いに連通する第２傾斜溝部によって構成されている、請求項１に記載のチップ突き上げニードル装置。 Each of the first inclined groove channels is constituted by first inclined groove portions communicating with each other on the upper surface of the side wall of the same side of the plurality of outer frames,
The tip push-up needle device according to claim 1, wherein each of the second inclined groove channels is constituted by a second inclined groove portion communicating with each other on the upper surface of the same side wall of the plurality of outer frames. 前記複数の外枠の各側壁の上面中央部位における互いに連通する第１傾斜溝部及び第２傾斜溝部によってＶ形溝が構成され、
前記第１溝部は、対向する２つの側壁の上面におけるＶ形溝と連通する長手溝であり、
前記第２溝部は、対向する他の２つの側壁の上面におけるＶ形溝と連通する長手溝である、請求項２に記載のチップ突き上げニードル装置。 A V-shaped groove is constituted by the first inclined groove portion and the second inclined groove portion communicating with each other at the upper central portion of each side wall of the plurality of outer frames,
The first groove portion is a longitudinal groove in communication with the V-shaped groove in the upper surface of the two opposing side walls,
The tip-pushing-up needle device according to claim 2, wherein the second groove portion is a longitudinal groove communicating with the V-shaped groove in the upper surface of the other two side walls opposite to each other. 各前記第１溝部と各前記第２溝部とが互いに連通して十字形溝を構成している、請求項３に記載のチップ突き上げニードル装置。   The tip push-up needle device according to claim 3, wherein each first groove and each second groove communicate with each other to form a cruciform groove. 前記第１溝部の幅と前記第２溝部の幅はいずれも、各前記第１傾斜溝チャンネルの幅及び各前記第２傾斜溝チャンネルの幅より大きい、請求項１に記載のチップ突き上げニードル装置。   The tip push-up needle device according to claim 1, wherein the width of the first groove and the width of the second groove are both larger than the width of each of the first inclined groove channels and the width of each of the second inclined groove channels. 前記複数の外枠の各側壁の上面中央部位における互いに連通する第１傾斜溝部及び第２傾斜溝部によってＶ形溝が構成され、
前記第１溝部は、前記複数の外枠の対向する２つの側壁の上面におけるＶ形溝と連通する長手溝であり、
各前記第２溝部は、１つの第３傾斜溝部及び１つの第４傾斜溝部を有し、
前記第３傾斜溝部は、前記第１傾斜溝チャンネル及び前記第１溝部と連通し、前記第４傾斜溝部は、前記第２傾斜溝チャンネル及び前記第１溝部と連通し、
互いに連通する第１傾斜溝チャンネル及び第３傾斜溝部と、互いに連通する第２傾斜溝チャンネル及び第４傾斜溝部とによってＶ形溝が構成されている、請求項１に記載のチップ突き上げニードル装置。 A V-shaped groove is constituted by the first inclined groove portion and the second inclined groove portion communicating with each other at the upper central portion of each side wall of the plurality of outer frames,
The first groove portion is a longitudinal groove communicating with the V-shaped groove in the upper surface of the two opposing side walls of the plurality of outer frames,
Each second groove has one third inclined groove and one fourth inclined groove.
The third sloped groove portion communicates with the first sloped groove channel and the first groove portion, and the fourth sloped groove portion communicates with the second sloped groove channel and the first groove portion.
The tip push-up needle device according to claim 1, wherein a V-shaped groove is constituted by the first inclined groove channel and the third inclined groove portion communicating with each other, and the second inclined groove channel and the fourth inclined groove portion communicating with each other. 前記第３傾斜溝部の内壁面と、連通する前記第１傾斜溝チャンネルの内壁面とが共面をなし、
前記第４傾斜溝部の内壁面と、連通する前記第２傾斜溝チャンネルの内壁面とが共面をなしている、請求項６に記載のチップ突き上げニードル装置。 The inner wall surface of the third inclined groove portion and the inner wall surface of the first inclined groove channel in communication form a coplanar surface;
The tip push-up needle device according to claim 6, wherein an inner wall surface of the fourth inclined groove portion and an inner wall surface of the second inclined groove channel communicating with each other are coplanar. 各前記通気間隙は、各前記外枠の内側面の中央部位に形成されている、請求項１から７のいずれか一項に記載のチップ突き上げニードル装置。   The tip push-up needle device according to any one of claims 1 to 7, wherein each of the ventilation gaps is formed at a central portion of an inner surface of each of the outer frames. 各前記外枠は矩形の枠体であり、
前記中央台部は矩形のブロックである、請求項８に記載のチップ突き上げニードル装置。 Each outer frame is a rectangular frame,
9. The tip push-up needle device of claim 8, wherein the central pedestal is a rectangular block. 請求項１から９のいずれか一項に記載のチップ突き上げニードル装置を備え、前記チップ突き上げニードル装置は真空筒内の一端に設置されている、チップ突き上げニードル設備。   A tip-push-up needle installation comprising the tip-push-up needle device according to any one of claims 1 to 9, wherein the tip-push-up needle device is installed at one end in a vacuum cylinder.
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