JP2019116336A - 回転式ストッカ及びそれを備える移送システム - Google Patents
回転式ストッカ及びそれを備える移送システム Download PDFInfo
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- JP2019116336A JP2019116336A JP2017250215A JP2017250215A JP2019116336A JP 2019116336 A JP2019116336 A JP 2019116336A JP 2017250215 A JP2017250215 A JP 2017250215A JP 2017250215 A JP2017250215 A JP 2017250215A JP 2019116336 A JP2019116336 A JP 2019116336A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0096—Programme-controlled manipulators co-operating with a working support, e.g. work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0028—Gripping heads and other end effectors with movable, e.g. pivoting gripping jaw surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/045—Storage devices mechanical in a circular arrangement, e.g. towers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/905—Control arrangements
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F11/00—Coin-freed apparatus for dispensing, or the like, discrete articles
- G07F11/46—Coin-freed apparatus for dispensing, or the like, discrete articles from movable storage containers or supports
- G07F11/50—Coin-freed apparatus for dispensing, or the like, discrete articles from movable storage containers or supports the storage containers or supports being rotatably mounted
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07F—COIN-FREED OR LIKE APPARATUS
- G07F11/00—Coin-freed apparatus for dispensing, or the like, discrete articles
- G07F11/46—Coin-freed apparatus for dispensing, or the like, discrete articles from movable storage containers or supports
- G07F11/50—Coin-freed apparatus for dispensing, or the like, discrete articles from movable storage containers or supports the storage containers or supports being rotatably mounted
- G07F11/54—Coin-freed apparatus for dispensing, or the like, discrete articles from movable storage containers or supports the storage containers or supports being rotatably mounted about vertical axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Abstract
Description
以下、本発明の第1実施形態に係る回転式ストッカとそれを備える移送システムについて、添付図面を参照して説明する。図1は、第1実施形態に係る回転式ストッカ20Aを備える移送システム1の概略側面図である。
次に、本発明の第2実施形態に係る回転式ストッカ20Bを、図8を参照して説明する。なお、本実施形態において、第1実施形態と同一構成要素には同一符号を付し、重複した説明は省略する。
本発明は、上述した実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲で種々の変形が可能である。
2 :容器(載置対象物)
10 :ロボットアーム
12 :エンドエフェクタ
20A,20B :回転式ストッカ
21 :棚
22 :基台
23 :回転部
29 :回転駆動装置
32 :延設部
33 :連結部
35 :センサ
36 :支持面
37 :傾斜面
51 :昇降部
52 :昇降駆動装置
C :回転軸
Claims (6)
- 基台と、
前記基台上に設けられ、鉛直方向に延びる回転軸を中心に前記基台に対して回転可能に接続された回転部と、
前記回転部を回転させる前記回転駆動装置と、
前記回転部に固定され、前記回転軸を中心に周方向に並んだ、載置対象物が載置される複数の棚と、
前記複数の棚より前記回転軸の径方向外方に位置するセンサであって、前記回転軸と前記センサとの間に位置する前記棚に、前記載置対象物が載置されているか否かを検知するセンサと、を備える、回転式ストッカ。 - 前記基台に固定され、前記複数の棚より前記回転軸の径方向外方の位置で上下方向に延びる延設部と、
前記延設部から前記回転軸に向かって延び、前記回転部の上端部に回転可能に連結する連結部と、を備え、
前記センサは、前記延設部に設けられる、請求項1に記載の回転式ストッカ。 - 前記複数の棚は、複数の第1棚であり、前記センサは、前記延設部に固定された第1センサであり、
前記複数の第1棚より上方で前記回転部に固定され、前記回転軸を中心に周方向に並んだ、前記複数の第1棚とは別の複数の第2棚と、
前記第1センサより上方で前記延設部に固定された第2センサであって、前記回転軸と前記第2センサとの間に位置する前記第2棚に、前記載置対象物が載置されているか否かを検知する第2センサと、を備える、請求項2に記載の回転式ストッカ。 - 前記複数の棚は、複数の第1棚であり、
前記複数の第1棚より上方で前記回転部に固定され、前記回転軸を中心に周方向に並んだ、前記複数の第1棚とは別の複数の第2棚と、
前記延設部に沿って昇降可能に、前記延設部に支持される昇降部と、
前記昇降部を昇降させる昇降駆動装置と、を備え、
前記センサは、前記昇降部に固定されており、当該センサが前記第1棚に対して前記径方向に対向する位置にあるときは、当該第1棚に前記載置対象物が載置されているか否かを検知し、当該センサが前記第2棚に対して前記径方向に対向する位置にあるときは、当該第2棚に前記載置対象物が載置されているか否かを検知する、請求項2に記載の回転式ストッカ。 - 前記棚は、前記載置対象物を下方から支持する水平な支持面と、前記支持面における前記回転軸に対して遠位側の端部に接続され、当該端部から前記径方向外方に向かって上方に傾斜する傾斜面を有する、請求項1〜4のいずれか1項に記載の回転式ストッカ。
- 前記載置対象物を前記棚に移送する移送システムであって、
請求項5に記載の回転式ストッカと、
ロボットアームと、
前記ロボットアームの先端に設けられた、前記載置対象物を保持可能なエンドエフェクタと、
前記ロボットアーム及び前記エンドエフェクタを制御する制御装置と、を備え、
前記制御装置は、前記エンドエフェクタにより保持された前記載置対象物が、前記傾斜面に接触するよう前記ロボットアームを制御し、前記載置対象物が前記傾斜面に接触したときに、前記載置対象物の保持を解除するよう前記エンドエフェクタを制御する、移送システム。
Priority Applications (2)
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JP2017250215A JP7037352B2 (ja) | 2017-12-26 | 2017-12-26 | 移送システム |
US16/232,508 US10923376B2 (en) | 2017-12-26 | 2018-12-26 | Rotary stocker and transfer system provided with rotary stocker |
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JP2017250215A JP7037352B2 (ja) | 2017-12-26 | 2017-12-26 | 移送システム |
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JP2019116336A true JP2019116336A (ja) | 2019-07-18 |
JP7037352B2 JP7037352B2 (ja) | 2022-03-16 |
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Cited By (1)
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EP3904013B1 (en) * | 2020-04-27 | 2022-07-20 | C.R.F. Società Consortile per Azioni | System for assisting an operator in a work station |
CN112158559A (zh) * | 2020-08-30 | 2021-01-01 | 东风耐世特转向系统(武汉)有限公司 | 一种便于工件上料的料架 |
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JP7037352B2 (ja) | 2022-03-16 |
US20190193951A1 (en) | 2019-06-27 |
US10923376B2 (en) | 2021-02-16 |
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