JP2020523780A - ハンドリング装置及びハンドリング装置のためのハンドリング方法 - Google Patents
ハンドリング装置及びハンドリング装置のためのハンドリング方法 Download PDFInfo
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Abstract
Description
ステップ1:制御ボックス310の制御下で搬送機構10が第1の棚の位置401に移動すること、
ステップ2:制御ボックス310が、検出された情報に基づいて、ウェハカセットが第1のローディングステーション405に存在しているか、且つ把持機構40が通常の状態であるかを判断すること、ウェハカセットが第1のローディングステーション405に存在しており且つ把持機構40が通常の状態である場合、把持機構40を起動すること、及び
ステップ3:起動された把持機構30がウェハカセットを第1のローディングステーション405から取り出しそれを第1の棚の位置401に置くこと、
を含む。
ステップ11:制御ボックス310の制御下で搬送機構10が第1の棚の位置401に移動すること、
ステップ21:制御ボックス310が、検出された情報に基づいて、第1のローディングステーション405が空いているかどうか、且つ把持機構40が通常の状態であるかどうかを判断すること、第1のローディングステーション405が空いており且つ把持機構40が通常の状態である場合、把持機構40を起動すること、及び
ステップ31:把持機構40がウェハカセットを第1の棚の位置401から取り出しそれを第1のローディングステーション405に置くこと、
を含んでもよい。
102、202 グリッパ
103、203 ロボットアーム
10 搬送機構
20 支持プラットフォーム
30 駆動機構
40 把持機構
301 キャスタ
302 無人搬送車(AGV)
304 ウェハカセット
305 ホルダ
306 グリッパ
307 ロボットアーム
308 伝達機構
309 駆動モータ
310 制御ボックス
311 位置決めスタッド
401 第1の棚の位置
402 第2の棚の位置
403 第3の棚の位置
404 第4の棚の位置
405 第1のローディングステーション
406 第2のローディングステーション
407 第3のローディングステーション
408 第4のローディングステーション
501 チェーン
Claims (14)
- 可動搬送機構と、
水平面に平行な支持面を有する支持プラットフォームであって、該支持面は処理対象の物体を支持するように構成され、複数のローディングステーションが前記処理対象の物体を受け取るように前記支持面上に円周方向に配置され、前記支持プラットフォームはその中央にある貫通孔を画定する、支持プラットフォームと、
前記処理対象の物体を掴み且つ置くように構成された把持機構であって、該把持機構は前記貫通孔を通り抜ける一端を有し且つ前記搬送機構に接続される、把持機構と、
前記支持プラットフォームを駆動し前記搬送機構の上方で前記水平面において回転させるように構成される駆動機構と、
を備える、
ハンドリング装置。 - 前記搬送機構は無人搬送車を備える、
請求項1に記載のハンドリング装置。 - 前記搬送機構は、前記無人搬送車の上方に設けられ前記支持プラットフォーム、前記駆動機構、及び前記把持機構を支持するキャスタ付き支持フレームをさらに備える、
請求項2に記載のハンドリング装置。 - 前記支持プラットフォームは円形のディスク形状である、
請求項1に記載のハンドリング装置。 - 前記ローディングステーションは前記処理対象の物体に適合し該処理対象の物体と接続可能な位置決め機構を備える、
請求項1に記載のハンドリング装置。 - 前記駆動機構は伝達機構と該伝達機構に接続された駆動モータとを備え、前記伝達機構は前記支持プラットフォームに接続され、前記駆動モータの動作下で前記支持プラットフォームを回転させるように構成される、
請求項1に記載のハンドリング装置。 - 前記伝達機構は駆動ギア及び従動ギアを備え、前記駆動ギアは前記駆動モータの駆動軸に結合され、前記支持プラットフォームは前記従動ギアに固定される、
請求項6に記載のハンドリング装置。 - 前記駆動ギアは前記従動ギアに、互いに接触することにより又はチェーンを用いて係合する、
請求項6に記載のハンドリング装置。 - 前記搬送機構、前記把持機構、及び前記駆動機構のそれぞれに接続された且つ前記支持プラットフォームの回転、前記搬送機構の動き、及び前記把持機構の動作を制御するように構成されている、制御機構
をさらに備える、
請求項1に記載のハンドリング装置。 - 前記制御機構は、前記把持機構の末端に取り付けられたセンサであって、ローディングステーションの1つに前記処理対象の物体のうちの対応する1つが積載されているかどうかを確認し、該確認の結果に基づいて前記支持プラットフォームの回転を制御するように構成されたセンサを備える、
請求項9に記載のハンドリング装置。 - 前記処理対象の物体はウェハカセットである、
請求項1〜10のいずれか1項に記載のハンドリング装置。 - 請求項1〜10のいずれか1項に記載のハンドリング装置を用いたハンドリング方法であって、
搬送機構を物体保管場所に移動させること、
駆動機構によって、支持プラットフォームを駆動し水平面において回転させて、複数のローディングステーションのうちの、処理対象の物体を積載した1つのローディングステーションが前記物体保管場所と対向する位置に移動することを可能にすること、
把持機構によって、前記ローディングステーションから前記物体を取り出し、該物体を前記物体保管場所に置くこと、及び
上記のステップを繰り返して、処理対象の物体を前記複数のローディングステーションから前記物体保管場所に連続して搬送すること、
を含む、
ハンドリング方法。 - 請求項1〜10のいずれか1項に記載のハンドリング装置を用いたハンドリング方法であって、
搬送機構を物体保管場所に移動させること、
駆動機構によって、支持プラットフォームを駆動し水平面において回転させて、複数のローディングステーションのうちの、処理対象の物体を積載した1つのローディングステーションが前記物体保管場所と対向する位置に移動することを可能にすること、
把持機構によって、前記物体保管場所から前記物体を取り出し、該物体を前記ローディングステーションに置くこと、及び
上記のステップを繰り返して、処理対象の物体を前記複数のローディングステーションに連続して搬送すること、
を含む、
ハンドリング方法。 - 前記処理対象の物体はウェハカセットであり、
前記ローディングステーションはそれぞれウェハカセット上の識別マークを識別するための識別デバイスを備え、
前記ハンドリング装置が前記ウェハカセットのうちの対象の1つを運搬しながら前記物体保管場所に移動する場合、
前記ローディングステーションのうち、前記ウェハカセットのうちの対象の1つを積載した1つのローディングステーションが前記識別デバイスからフィードバックされた情報に基づいて識別され、
前記駆動機構が前記支持プラットフォームを駆動し前記水平面において回転させ、それにより前記ウェハカセットのうちの対象の1つを積載した前記ローディングステーションは前記物体保管場所に対向する場所に移動する、
請求項12に記載のハンドリング方法。
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CN201710400604.9A CN108987318B (zh) | 2017-05-31 | 2017-05-31 | 搬运装置及其搬运方法 |
CN201710400604.9 | 2017-05-31 | ||
PCT/CN2018/089071 WO2018219302A1 (zh) | 2017-05-31 | 2018-05-30 | 搬运装置及其搬运方法 |
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CN113495166B (zh) * | 2021-06-22 | 2024-05-03 | 迪瑞医疗科技股份有限公司 | 一种试剂盒自动加载系统及其控制方法 |
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TWM521513U (zh) * | 2015-11-06 | 2016-05-11 | You-Long Weng | 用於電路板之表面金屬層切削處理設備 |
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- 2017-05-31 CN CN201710400604.9A patent/CN108987318B/zh active Active
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2018
- 2018-05-30 KR KR1020197036771A patent/KR20200007897A/ko not_active Application Discontinuation
- 2018-05-30 WO PCT/CN2018/089071 patent/WO2018219302A1/zh active Application Filing
- 2018-05-30 US US16/618,314 patent/US20200118864A1/en not_active Abandoned
- 2018-05-30 JP JP2019566157A patent/JP2020523780A/ja active Pending
- 2018-05-31 TW TW107118749A patent/TWI708312B/zh active
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Also Published As
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KR20200007897A (ko) | 2020-01-22 |
CN108987318B (zh) | 2020-10-16 |
TWI708312B (zh) | 2020-10-21 |
WO2018219302A1 (zh) | 2018-12-06 |
US20200118864A1 (en) | 2020-04-16 |
CN108987318A (zh) | 2018-12-11 |
TW201906057A (zh) | 2019-02-01 |
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