TW325777U - Wafer delivery device with standard machine interface - Google Patents

Wafer delivery device with standard machine interface

Info

Publication number
TW325777U
TW325777U TW086209295U TW86209295U TW325777U TW 325777 U TW325777 U TW 325777U TW 086209295 U TW086209295 U TW 086209295U TW 86209295 U TW86209295 U TW 86209295U TW 325777 U TW325777 U TW 325777U
Authority
TW
Taiwan
Prior art keywords
delivery device
machine interface
standard machine
wafer delivery
wafer
Prior art date
Application number
TW086209295U
Other languages
Chinese (zh)
Inventor
Jr-Jung Li
Guo-Jou Huang
Hung-Guang Fan
Ping-Yu Hu
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW086209295U priority Critical patent/TW325777U/en
Publication of TW325777U publication Critical patent/TW325777U/en

Links

TW086209295U 1997-06-06 1997-06-06 Wafer delivery device with standard machine interface TW325777U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086209295U TW325777U (en) 1997-06-06 1997-06-06 Wafer delivery device with standard machine interface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086209295U TW325777U (en) 1997-06-06 1997-06-06 Wafer delivery device with standard machine interface

Publications (1)

Publication Number Publication Date
TW325777U true TW325777U (en) 1998-01-21

Family

ID=54627873

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086209295U TW325777U (en) 1997-06-06 1997-06-06 Wafer delivery device with standard machine interface

Country Status (1)

Country Link
TW (1) TW325777U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI698951B (en) * 2018-09-14 2020-07-11 樂華科技股份有限公司 Wafer carrier handling device
TWI708312B (en) * 2017-05-31 2020-10-21 大陸商上海微電子裝備（集團）股份有限公司 Transport device and transport method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI708312B (en) * 2017-05-31 2020-10-21 大陸商上海微電子裝備（集團）股份有限公司 Transport device and transport method
TWI698951B (en) * 2018-09-14 2020-07-11 樂華科技股份有限公司 Wafer carrier handling device

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