JP2019079927A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP2019079927A JP2019079927A JP2017205550A JP2017205550A JP2019079927A JP 2019079927 A JP2019079927 A JP 2019079927A JP 2017205550 A JP2017205550 A JP 2017205550A JP 2017205550 A JP2017205550 A JP 2017205550A JP 2019079927 A JP2019079927 A JP 2019079927A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Abstract
Description
図1に示すように、第1実施形態に係る基板処理装置1は、キャリア搬入出部2と、ロット形成部3と、ロット載置部4と、ロット搬送部5と、ロット処理部6と、制御部100とを有する。図1は、第1実施形態に係る基板処理装置1の概略平面図である。ここでは、水平方向に直交する方向を上下方向として説明する。
次に、第2実施形態に係る基板処理装置1について図9を参照し説明する。図9は、第2実施形態に係る調圧プレート47の概略平面図である。ここでは、第1実施形態と異なる箇所を中心に説明し、第1実施形態と同じ構成については、同じ符号を付して詳しい説明は省略する。
次に、第3実施形態に係る基板処理装置1について図10を参照し説明する。図10は、第3実施形態に係る調圧プレート47の概略平面図である。ここでは、第1実施形態と異なる箇所を中心に説明し、第1実施形態と同じ構成については、同じ符号を付して詳しい説明は省略する。
次に、第4実施形態に係る基板処理装置1について図11を参照し説明する。図11は、第4実施形態に係るエッチング用の処理槽27の構成を示す概略ブロック図である。ここでは、第1実施形態と異なる箇所を中心に説明し、第1実施形態と同じ構成については、同じ符号を付して詳しい説明は省略する。
次に、第5実施形態に係る基板処理装置1について図13および図14を参照し説明する。図13は、第5実施形態に係る気泡発生部70をエッチング液の流れ方向から見た概略正面図である。図14は、図13のXIV−XIV概略断面図である。ここでは、第4実施形態と異なる箇所を中心に説明し、第4実施形態と同じ構成については、同じ符号を付して詳しい説明は省略する。
6 ロット処理部
8 基板
23 エッチング処理装置
27 エッチング用の処理槽
44 窒素供給部
45 内槽(基板処理槽)
47 調圧プレート
47A 孔
47B リブ
47C 第1リブ
47D 第2リブ
47E 面取部
47F 第3リブ
48 整流プレート
48A スリット
49 処理液供給ノズル
50 循環ライン(処理液供給路)
54 気泡発生部
60 気泡発生部
70 気泡発生部
72 混入部
72B 絞り部(調整部)
75 混入部(調整部)
Claims (8)
- 基板処理槽と、
前記基板処理槽内の下方に設けられ、処理液を複数の吐出口から吐出する処理液供給ノズルと、
前記処理液供給ノズルと前記基板処理槽内の基板との間に設けられ、前記処理液を通流させる複数の孔を有し、前記処理液供給ノズルから吐出された前記処理液の流入圧力を調整する調圧プレートと
を備え、
前記調圧プレートは、
前記処理液供給ノズル側の面から突出し、前記処理液供給ノズル側の面を複数の区画領域に区画するリブを備えることを特徴とする基板処理装置。 - 前記調圧プレートは、
格子状の前記リブ
を備えることを特徴とする請求項1に記載の基板処理装置。 - 前記複数の区画領域のうち、前記基板処理槽の側壁側の区画領域は、他の区画領域よりも面積が小さい
ことを特徴とする請求項1または2に記載の基板処理装置。 - 前記調圧プレートは、
前記処理液供給ノズル側の孔の端部に面取部
を備えることを特徴とする請求項1〜3のいずれか一つに記載の基板処理装置。 - 前記調圧プレートと前記基板との間に設けられ、スリットを有し、前記基板への前記処理液の流れを整流する整流プレート
を備えることを特徴とする請求項1〜4のいずれか一つに記載の基板処理装置。 - 前記処理液を前記処理液供給ノズルに供給する処理液供給路において気泡を発生させる気泡発生部
を備えることを特徴とする請求項1〜5のいずれか一つに記載の基板処理装置。 - 前記気泡発生部は、
前記気泡の径を調整する調整部
を備えることを特徴とする請求項6に記載の基板処理装置。 - 前記調整部は、
流路面積を変更する
ことを特徴とする請求項7に記載の基板処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017205550A JP6971124B2 (ja) | 2017-10-24 | 2017-10-24 | 基板処理装置 |
KR1020180126013A KR102565576B1 (ko) | 2017-10-24 | 2018-10-22 | 기판 처리 장치 |
US16/167,863 US20190148176A1 (en) | 2017-10-24 | 2018-10-23 | Substrate processing apparatus |
CN201811240941.7A CN109698146A (zh) | 2017-10-24 | 2018-10-24 | 基片处理装置 |
CN201821724128.2U CN209000877U (zh) | 2017-10-24 | 2018-10-24 | 基片处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017205550A JP6971124B2 (ja) | 2017-10-24 | 2017-10-24 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
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JP2019079927A true JP2019079927A (ja) | 2019-05-23 |
JP6971124B2 JP6971124B2 (ja) | 2021-11-24 |
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JP2017205550A Active JP6971124B2 (ja) | 2017-10-24 | 2017-10-24 | 基板処理装置 |
Country Status (4)
Country | Link |
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US (1) | US20190148176A1 (ja) |
JP (1) | JP6971124B2 (ja) |
KR (1) | KR102565576B1 (ja) |
CN (2) | CN209000877U (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7190912B2 (ja) * | 2019-01-10 | 2022-12-16 | 東京エレクトロン株式会社 | 基板処理装置 |
CN111081609A (zh) * | 2019-12-26 | 2020-04-28 | 西安奕斯伟硅片技术有限公司 | 一种清洗刻蚀系统 |
JP2022073307A (ja) * | 2020-10-30 | 2022-05-17 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5730162A (en) * | 1995-01-12 | 1998-03-24 | Tokyo Electron Limited | Apparatus and method for washing substrates |
US6199568B1 (en) * | 1997-10-20 | 2001-03-13 | Dainippon Screen Mfg. Co., Ltd. | Treating tank, and substrate treating apparatus having the treating tank |
US20020063169A1 (en) * | 2000-06-26 | 2002-05-30 | Applied Materials, Inc. | Wafer spray configurations for a single wafer processing apparatus |
JP6509104B2 (ja) | 2015-09-30 | 2019-05-08 | 東京エレクトロン株式会社 | 基板液処理装置 |
-
2017
- 2017-10-24 JP JP2017205550A patent/JP6971124B2/ja active Active
-
2018
- 2018-10-22 KR KR1020180126013A patent/KR102565576B1/ko active IP Right Grant
- 2018-10-23 US US16/167,863 patent/US20190148176A1/en not_active Abandoned
- 2018-10-24 CN CN201821724128.2U patent/CN209000877U/zh active Active
- 2018-10-24 CN CN201811240941.7A patent/CN109698146A/zh active Pending
Also Published As
Publication number | Publication date |
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CN109698146A (zh) | 2019-04-30 |
US20190148176A1 (en) | 2019-05-16 |
CN209000877U (zh) | 2019-06-18 |
JP6971124B2 (ja) | 2021-11-24 |
KR20190045858A (ko) | 2019-05-03 |
KR102565576B1 (ko) | 2023-08-09 |
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