JP2019065324A - 切削工具用硬質皮膜 - Google Patents
切削工具用硬質皮膜 Download PDFInfo
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- JP2019065324A JP2019065324A JP2017189804A JP2017189804A JP2019065324A JP 2019065324 A JP2019065324 A JP 2019065324A JP 2017189804 A JP2017189804 A JP 2017189804A JP 2017189804 A JP2017189804 A JP 2017189804A JP 2019065324 A JP2019065324 A JP 2019065324A
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- Prior art keywords
- film
- hard film
- cutting tool
- hard
- coating layer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims abstract description 56
- 238000000576 coating method Methods 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 239000011247 coating layer Substances 0.000 claims description 28
- 239000010410 layer Substances 0.000 claims description 24
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 14
- 238000002441 X-ray diffraction Methods 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 8
- 239000011780 sodium chloride Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 150000004767 nitrides Chemical group 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 13
- 229910000963 austenitic stainless steel Inorganic materials 0.000 abstract description 7
- 230000001747 exhibiting effect Effects 0.000 abstract description 2
- 229910052755 nonmetal Inorganic materials 0.000 abstract 2
- 238000003466 welding Methods 0.000 description 24
- 238000012545 processing Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 13
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 238000005299 abrasion Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 3
- 238000010835 comparative analysis Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Drilling Tools (AREA)
Abstract
Description
Al(100-x)Cr(x)
ただし、25≦X≦35
と表され、非金属元素として少なくともNを含み不可避不純物を含む第1皮膜層と、
金属成分が原子%で、
Cr(100-α)V(α)
ただし、15≦α≦50
と表され、非金属元素として少なくともNを含み不可避不純物を含む第2皮膜層とを含み、前記第2皮膜層が最表面に配置されていることを特徴とする切削工具用硬質皮膜に係るものである。
I(111)/I(200)≧1.5 (1)
Al(100-x)Cr(x)
ただし、25≦X≦35
と表され、非金属元素として少なくともNを含み不可避不純物を含む第1皮膜層と、
金属成分が原子%で、
Cr(100-α)V(α)
ただし、15≦α≦50
と表され、非金属元素として少なくともNを含み不可避不純物を含む第2皮膜層とを含み、前記第2皮膜層が最表面に配置されているものである。
I(111)/I(200)≧1.5 (1)
Claims (6)
- 基材上に形成された切削工具用硬質皮膜であって、金属成分が原子%で、
Al(100-x)Cr(x)
ただし、25≦X≦35
と表され、非金属元素として少なくともNを含み不可避不純物を含む第1皮膜層と、
金属成分が原子%で、
Cr(100-α)V(α)
ただし、15≦α≦50
と表され、非金属元素として少なくともNを含み不可避不純物を含む第2皮膜層とを含み、前記第2皮膜層が最表面に配置されていることを特徴とする切削工具用硬質皮膜。 - 請求項1記載の切削工具用硬質皮膜において、前記αが15以上25以下であることを特徴とする切削工具用硬質皮膜。
- 請求項1,2いずれか1項に記載の切削工具用硬質皮膜において、前記第1皮膜層の膜厚T1と前記第2皮膜層の膜厚T2の比率が、0.1≦T2/T1≦0.5であり、前記膜厚T1と前記膜厚T2の合計が2.0μm以上5.0μm以下であることを特徴とする切削工具用硬質皮膜。
- 請求項1〜3いずれか1項に記載の切削工具用硬質皮膜において、前記基材と前記第1皮膜層との間に下地層が設けられ、この下地層は、Tiの窒化物または炭窒化物から成り、この下地層の膜厚は0.20μm以上1.0μm以下であることを特徴とする切削工具用硬質皮膜。
- 請求項1〜4いずれか1項に記載の切削工具用硬質皮膜において、この硬質皮膜は、NaCl型結晶構造を含み、X線回折法で測定される(111)面の回折強度が(200)面の回折強度より強いものであることを特徴とする切削工具用硬質皮膜。
- 請求項1〜4いずれか1項に記載の切削工具用硬質皮膜において、この硬質皮膜は、NaCl型結晶構造を含み、X線回折法で測定される(111)面の回折強度が(200)面の回折強度より強く、前記(111)面の回折強度をI(111)、(200)面の回折強度をI(200)としたとき、次式(1)を充足するものであることを特徴とする切削工具用硬質皮膜。
I(111)/I(200)≧1.5 (1)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017189804A JP6861137B2 (ja) | 2017-09-29 | 2017-09-29 | 切削工具用硬質皮膜 |
CN201810994484.4A CN109576670B (zh) | 2017-09-29 | 2018-08-29 | 切削工具用硬质覆膜 |
EP18197148.2A EP3467150B9 (en) | 2017-09-29 | 2018-09-27 | Hard coating for cutting tools |
Applications Claiming Priority (1)
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JP2017189804A JP6861137B2 (ja) | 2017-09-29 | 2017-09-29 | 切削工具用硬質皮膜 |
Publications (2)
Publication Number | Publication Date |
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JP2019065324A true JP2019065324A (ja) | 2019-04-25 |
JP6861137B2 JP6861137B2 (ja) | 2021-04-21 |
Family
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JP2017189804A Active JP6861137B2 (ja) | 2017-09-29 | 2017-09-29 | 切削工具用硬質皮膜 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3467150B9 (ja) |
JP (1) | JP6861137B2 (ja) |
CN (1) | CN109576670B (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000271699A (ja) * | 1999-03-23 | 2000-10-03 | Sumitomo Electric Ind Ltd | 表面被覆成形型およびその製造方法 |
JP2004238736A (ja) * | 2003-01-17 | 2004-08-26 | Hitachi Tool Engineering Ltd | 硬質皮膜及び硬質皮膜被覆工具 |
JP2008055558A (ja) * | 2006-08-31 | 2008-03-13 | Union Tool Co | 切削工具用硬質皮膜 |
JP2008188735A (ja) * | 2007-02-06 | 2008-08-21 | Mitsubishi Materials Corp | 難削材の重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
JP2011189499A (ja) * | 2010-02-22 | 2011-09-29 | Hitachi Tool Engineering Ltd | 硬質皮膜被覆工具 |
JP2011218513A (ja) * | 2010-04-13 | 2011-11-04 | Union Tool Co | 切削工具用硬質皮膜 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3039381B2 (ja) | 1996-07-12 | 2000-05-08 | 山口県 | 耐高温酸化特性に優れた複合硬質皮膜の形成法 |
JP3879113B2 (ja) * | 2001-11-02 | 2007-02-07 | 三菱マテリアル株式会社 | 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具 |
JP2003136307A (ja) * | 2001-11-06 | 2003-05-14 | Mitsubishi Materials Corp | 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具 |
JP3879114B2 (ja) * | 2001-11-06 | 2007-02-07 | 三菱マテリアル株式会社 | 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具 |
-
2017
- 2017-09-29 JP JP2017189804A patent/JP6861137B2/ja active Active
-
2018
- 2018-08-29 CN CN201810994484.4A patent/CN109576670B/zh active Active
- 2018-09-27 EP EP18197148.2A patent/EP3467150B9/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000271699A (ja) * | 1999-03-23 | 2000-10-03 | Sumitomo Electric Ind Ltd | 表面被覆成形型およびその製造方法 |
JP2004238736A (ja) * | 2003-01-17 | 2004-08-26 | Hitachi Tool Engineering Ltd | 硬質皮膜及び硬質皮膜被覆工具 |
JP2008055558A (ja) * | 2006-08-31 | 2008-03-13 | Union Tool Co | 切削工具用硬質皮膜 |
JP2008188735A (ja) * | 2007-02-06 | 2008-08-21 | Mitsubishi Materials Corp | 難削材の重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
JP2011189499A (ja) * | 2010-02-22 | 2011-09-29 | Hitachi Tool Engineering Ltd | 硬質皮膜被覆工具 |
JP2011218513A (ja) * | 2010-04-13 | 2011-11-04 | Union Tool Co | 切削工具用硬質皮膜 |
Also Published As
Publication number | Publication date |
---|---|
JP6861137B2 (ja) | 2021-04-21 |
CN109576670B (zh) | 2021-09-17 |
EP3467150B9 (en) | 2024-02-21 |
EP3467150A1 (en) | 2019-04-10 |
CN109576670A (zh) | 2019-04-05 |
EP3467150B1 (en) | 2023-10-25 |
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