JP2019046873A - マルチブレード、加工方法 - Google Patents
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Abstract
【解決手段】パッケージ基板を分割しつつ半導体パッケージを所望の形状に加工するマルチブレード(40)が、パッケージ基板を個々の半導体パッケージに分割する複数の切削ブレード(44)と、隣り合う2つの切削ブレードの間に設けられたスペーサ(43)とを備え、切削ブレードとスペーサが同一回転軸心を有するように構成されている。スペーサの外面は半導体パッケージの転写形状に形成されると共に砥粒層で覆われており、複数の切削ブレードでパッケージ基板が切り込まれると同時に、スペーサの外面でパッケージ基板の上面が研削される。
【選択図】図3
Description
(1)
step coverage=(t2/t1)×100
11 配線基板(配線基材)
12 半導体チップ(半導体部品)
15 パッケージ基板(被加工物)
16 シールド層
25 傾斜面
35 保持テープ
40 マルチブレード
43 スペーサ
44 切削ブレード
45 砥粒層
66 段部
108、109 ウェーハ(被加工物)
Claims (3)
- 被加工物を分割しつつ所望の形状に加工するためのマルチブレードであって、
被加工物を個々のチップに分割する複数の切削ブレードと、
隣り合う2つの切削ブレードの間に設けられたスペーサとが同一回転軸心を有するように構成され、
該切削ブレードの間から露出した該スペーサ外面は該チップの外周に所望の形状を形成する転写形状で形成され且つ砥粒層で覆われていることを特徴とするマルチブレード。 - 請求項1記載のマルチブレードを使用して、表面に交差する分割予定ラインが形成された被加工物を該分割予定ラインに沿って分割しつつ分割後のチップを所望の形状に加工を行う加工方法であって、
該被加工物の裏面を保持治具又は保持テープで保持する保持ステップと、
該保持ステップを実施した後に、該マルチブレードの該切削ブレードで該分割予定ラインに沿って該保持テープ途中まで又は該保持治具内まで切り込み、被加工物を個々のチップに分割する分割ステップと、を備え、
該分割ステップにおいて、個々のチップに分割する際に、該スペーサ外面の該砥粒層により各チップ上面及び/又は側面に所望の形状が形成されること、を特徴とする加工方法。 - 該被加工物は、配線基材上の半導体部品を樹脂層で封止したパッケージ基板であり、
該チップは、パッケージ基板を分割した半導体パッケージであり、
該マルチブレードの該スペーサは、該切削ブレードに接する端部に傾斜面又は段部が形成されており、
該分割ステップにおいて、該スペーサ外面の該傾斜面又は該段部により各半導体パッケージが上面側よりも下面側が大きくなるようにパッケージ側面に傾斜又は段差が形成され、
複数の該半導体パッケージの該上面及び傾斜面にシールド層を形成するシールド層形成ステップを実施する、請求項2記載の加工方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017165963A JP6971093B2 (ja) | 2017-08-30 | 2017-08-30 | マルチブレード、加工方法 |
KR1020180095040A KR20190024698A (ko) | 2017-08-30 | 2018-08-14 | 멀티블레이드 및 피가공물의 가공 방법 |
CN201810970697.3A CN109427631A (zh) | 2017-08-30 | 2018-08-24 | 多刀刀具和被加工物的加工方法 |
TW107129776A TWI755563B (zh) | 2017-08-30 | 2018-08-27 | 多刀切割刀片及工件的加工方法 |
US16/113,496 US10403520B2 (en) | 2017-08-30 | 2018-08-27 | Multi-blade and processing method of workpiece |
DE102018214408.7A DE102018214408A1 (de) | 2017-08-30 | 2018-08-27 | Multiklinge und bearbeitungsverfahren für ein werkstück |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017165963A JP6971093B2 (ja) | 2017-08-30 | 2017-08-30 | マルチブレード、加工方法 |
Publications (2)
Publication Number | Publication Date |
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JP2019046873A true JP2019046873A (ja) | 2019-03-22 |
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JP6955918B2 (ja) * | 2017-07-03 | 2021-10-27 | 株式会社ディスコ | 基板の加工方法 |
JP6890893B2 (ja) * | 2017-08-08 | 2021-06-18 | 株式会社ディスコ | 金属が露出した基板の加工方法 |
KR20210148743A (ko) * | 2020-06-01 | 2021-12-08 | 삼성전자주식회사 | 반도체 패키지 |
US11664327B2 (en) * | 2020-11-17 | 2023-05-30 | STATS ChipPAC Pte. Ltd. | Selective EMI shielding using preformed mask |
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JP2000357672A (ja) * | 1999-05-27 | 2000-12-26 | Texas Instr Inc <Ti> | ダイシングのこ刃集成体 |
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JP2015018965A (ja) * | 2013-07-11 | 2015-01-29 | 株式会社ディスコ | ウェーハの加工方法 |
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US6517427B1 (en) * | 1998-02-23 | 2003-02-11 | Shin-Etsu Chemical Co., Ltd. | Abrasive-bladed multiple cutting wheel assembly |
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JP2005111617A (ja) * | 2003-10-08 | 2005-04-28 | Tdk Corp | 切削具、切削加工装置及び電子部品の製造方法 |
JP4733929B2 (ja) * | 2004-04-20 | 2011-07-27 | 株式会社ディスコ | 半導体ウエーハの切断方法 |
JP2007253277A (ja) * | 2006-03-23 | 2007-10-04 | Tdk Corp | 研切削体及び研削体セット、これらを用いた研削装置及び研削方法 |
JP2011159788A (ja) * | 2010-02-01 | 2011-08-18 | Panasonic Corp | モジュールとその製造方法 |
US8419508B2 (en) * | 2010-05-28 | 2013-04-16 | Corning Incorporated | Methods of fabricating a honeycomb extrusion die from a die body |
KR102245134B1 (ko) * | 2014-04-18 | 2021-04-28 | 삼성전자 주식회사 | 반도체 칩을 구비하는 반도체 패키지 |
JP6557081B2 (ja) * | 2015-07-13 | 2019-08-07 | 株式会社ディスコ | ウエーハの加工方法 |
CN108029226B (zh) * | 2015-09-11 | 2020-04-17 | 株式会社村田制作所 | 高频模块 |
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US6306018B1 (en) * | 1996-07-24 | 2001-10-23 | Unova U.K. Limited | Grinding methods and apparatus |
JP2000311872A (ja) * | 1999-04-27 | 2000-11-07 | Sharp Corp | ダイシング装置およびそれを用いた電子顕微鏡観察用試料片の作成方法 |
JP2000357672A (ja) * | 1999-05-27 | 2000-12-26 | Texas Instr Inc <Ti> | ダイシングのこ刃集成体 |
JP2015018965A (ja) * | 2013-07-11 | 2015-01-29 | 株式会社ディスコ | ウェーハの加工方法 |
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DE102018214408A1 (de) | 2019-02-28 |
TW201913773A (zh) | 2019-04-01 |
JP6971093B2 (ja) | 2021-11-24 |
US10403520B2 (en) | 2019-09-03 |
TWI755563B (zh) | 2022-02-21 |
US20190067050A1 (en) | 2019-02-28 |
CN109427631A (zh) | 2019-03-05 |
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