JP2019041021A5 - - Google Patents

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Publication number
JP2019041021A5
JP2019041021A5 JP2017162602A JP2017162602A JP2019041021A5 JP 2019041021 A5 JP2019041021 A5 JP 2019041021A5 JP 2017162602 A JP2017162602 A JP 2017162602A JP 2017162602 A JP2017162602 A JP 2017162602A JP 2019041021 A5 JP2019041021 A5 JP 2019041021A5
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JP
Japan
Prior art keywords
gas
processed
trench
film
plasma
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JP2017162602A
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English (en)
Japanese (ja)
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JP6817168B2 (ja
JP2019041021A (ja
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Priority claimed from JP2017162602A external-priority patent/JP6817168B2/ja
Priority to JP2017162602A priority Critical patent/JP6817168B2/ja
Priority to TW107128531A priority patent/TW201921432A/zh
Priority to TW111103533A priority patent/TWI801113B/zh
Priority to KR1020180098685A priority patent/KR102632154B1/ko
Priority to CN201810971368.0A priority patent/CN109427607B/zh
Priority to US16/111,789 priority patent/US10748766B2/en
Priority to CN202211541768.0A priority patent/CN115732351B/zh
Publication of JP2019041021A publication Critical patent/JP2019041021A/ja
Publication of JP2019041021A5 publication Critical patent/JP2019041021A5/ja
Priority to US16/925,934 priority patent/US11322354B2/en
Publication of JP6817168B2 publication Critical patent/JP6817168B2/ja
Application granted granted Critical
Priority to US17/728,618 priority patent/US11735423B2/en
Active legal-status Critical Current
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JP2017162602A 2017-08-25 2017-08-25 被処理体を処理する方法 Active JP6817168B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2017162602A JP6817168B2 (ja) 2017-08-25 2017-08-25 被処理体を処理する方法
TW107128531A TW201921432A (zh) 2017-08-25 2018-08-16 被處理體之處理方法
TW111103533A TWI801113B (zh) 2017-08-25 2018-08-16 被處理體之處理方法及電漿處理裝置
KR1020180098685A KR102632154B1 (ko) 2017-08-25 2018-08-23 피처리체를 처리하는 방법
CN202211541768.0A CN115732351B (zh) 2017-08-25 2018-08-24 处理被处理体的方法
US16/111,789 US10748766B2 (en) 2017-08-25 2018-08-24 Workpiece processing method
CN201810971368.0A CN109427607B (zh) 2017-08-25 2018-08-24 处理被处理体的方法
US16/925,934 US11322354B2 (en) 2017-08-25 2020-07-10 Workpiece processing method
US17/728,618 US11735423B2 (en) 2017-08-25 2022-04-25 Workpiece processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017162602A JP6817168B2 (ja) 2017-08-25 2017-08-25 被処理体を処理する方法

Publications (3)

Publication Number Publication Date
JP2019041021A JP2019041021A (ja) 2019-03-14
JP2019041021A5 true JP2019041021A5 (https=) 2020-06-18
JP6817168B2 JP6817168B2 (ja) 2021-01-20

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ID=65437918

Family Applications (1)

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JP2017162602A Active JP6817168B2 (ja) 2017-08-25 2017-08-25 被処理体を処理する方法

Country Status (5)

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US (3) US10748766B2 (https=)
JP (1) JP6817168B2 (https=)
KR (1) KR102632154B1 (https=)
CN (2) CN115732351B (https=)
TW (2) TWI801113B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US10950428B1 (en) * 2019-08-30 2021-03-16 Mattson Technology, Inc. Method for processing a workpiece

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