JP2019035954A5 - - Google Patents
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- Publication number
- JP2019035954A5 JP2019035954A5 JP2018146142A JP2018146142A JP2019035954A5 JP 2019035954 A5 JP2019035954 A5 JP 2019035954A5 JP 2018146142 A JP2018146142 A JP 2018146142A JP 2018146142 A JP2018146142 A JP 2018146142A JP 2019035954 A5 JP2019035954 A5 JP 2019035954A5
- Authority
- JP
- Japan
- Prior art keywords
- antireflection structure
- antireflection
- layer
- optical element
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022089078A JP7348991B2 (ja) | 2017-08-16 | 2022-05-31 | 多レベル回折光学素子の薄膜コーティング |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762546172P | 2017-08-16 | 2017-08-16 | |
| US62/546,172 | 2017-08-16 | ||
| US16/044,081 | 2018-07-24 | ||
| US16/044,081 US10802185B2 (en) | 2017-08-16 | 2018-07-24 | Multi-level diffractive optical element thin film coating |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022089078A Division JP7348991B2 (ja) | 2017-08-16 | 2022-05-31 | 多レベル回折光学素子の薄膜コーティング |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019035954A JP2019035954A (ja) | 2019-03-07 |
| JP2019035954A5 true JP2019035954A5 (ko) | 2020-10-01 |
| JP7330675B2 JP7330675B2 (ja) | 2023-08-22 |
Family
ID=63209272
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018146142A Active JP7330675B2 (ja) | 2017-08-16 | 2018-08-02 | 多レベル回折光学素子の薄膜コーティング |
| JP2022089078A Active JP7348991B2 (ja) | 2017-08-16 | 2022-05-31 | 多レベル回折光学素子の薄膜コーティング |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022089078A Active JP7348991B2 (ja) | 2017-08-16 | 2022-05-31 | 多レベル回折光学素子の薄膜コーティング |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10802185B2 (ko) |
| EP (1) | EP3444643A1 (ko) |
| JP (2) | JP7330675B2 (ko) |
| KR (1) | KR102421825B1 (ko) |
| CN (1) | CN109407191A (ko) |
| IL (1) | IL261086B2 (ko) |
| TW (2) | TWI756459B (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10802185B2 (en) | 2017-08-16 | 2020-10-13 | Lumentum Operations Llc | Multi-level diffractive optical element thin film coating |
| US10712475B2 (en) | 2017-08-16 | 2020-07-14 | Lumentum Operations Llc | Multi-layer thin film stack for diffractive optical elements |
| WO2019173383A1 (en) * | 2018-03-06 | 2019-09-12 | Applied Materials, Inc. | Method of building a 3d functional optical material stacking structure |
| US11347087B2 (en) | 2019-04-16 | 2022-05-31 | Korea Advanced Institute Of Science And Technology | Acousto-optic interactive structure |
| KR102357157B1 (ko) * | 2019-04-16 | 2022-01-28 | 한국과학기술원 | 음향 광학 상호 작용 구조체 |
| US11782195B2 (en) | 2019-09-30 | 2023-10-10 | Himax Technologies Limited | Diffractive optical element and method for fabricating the diffractive optical element |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4895790A (en) | 1987-09-21 | 1990-01-23 | Massachusetts Institute Of Technology | High-efficiency, multilevel, diffractive optical elements |
| US5161059A (en) | 1987-09-21 | 1992-11-03 | Massachusetts Institute Of Technology | High-efficiency, multilevel, diffractive optical elements |
| US5245468A (en) * | 1990-12-14 | 1993-09-14 | Ford Motor Company | Anti-reflective transparent coating |
| JPH0643311A (ja) * | 1992-07-22 | 1994-02-18 | Nippon Telegr & Teleph Corp <Ntt> | 回折光学素子及びその製造方法 |
| KR970003593B1 (en) * | 1992-09-03 | 1997-03-20 | Samsung Electronics Co Ltd | Projection exposure method and device using mask |
| US5606434A (en) | 1994-06-30 | 1997-02-25 | University Of North Carolina | Achromatic optical system including diffractive optical element |
| US6829091B2 (en) | 1997-02-07 | 2004-12-07 | Canon Kabushiki Kaisha | Optical system and optical instrument with diffractive optical element |
| US6055262A (en) | 1997-06-11 | 2000-04-25 | Honeywell Inc. | Resonant reflector for improved optoelectronic device performance and enhanced applicability |
| JPH11174217A (ja) * | 1997-12-16 | 1999-07-02 | Canon Inc | 回折光学素子及びその製造方法 |
| JP2000098116A (ja) * | 1998-09-18 | 2000-04-07 | Canon Inc | 素子又は素子作製用モールド型の作製方法 |
| JP3442004B2 (ja) * | 1999-07-30 | 2003-09-02 | キヤノン株式会社 | 光学素子の製造方法 |
| JP3381150B2 (ja) | 1999-08-30 | 2003-02-24 | スタンレー電気株式会社 | 赤外線透過フィルタ及びその製造方法 |
| JP2004028862A (ja) | 2002-06-27 | 2004-01-29 | Harmonic Drive Syst Ind Co Ltd | 投影型エンコーダ |
| US6905618B2 (en) * | 2002-07-30 | 2005-06-14 | Agilent Technologies, Inc. | Diffractive optical elements and methods of making the same |
| WO2004081620A1 (ja) * | 2003-03-13 | 2004-09-23 | Asahi Glass Company Limited | 回折素子および光学装置 |
| US20040263981A1 (en) | 2003-06-27 | 2004-12-30 | Coleman Christopher L. | Diffractive optical element with anti-reflection coating |
| FR2861183B1 (fr) | 2003-10-15 | 2006-01-21 | Thales Sa | Elements d'optique diffractive de type binaire pour une utilisation sur une large bande spectrale |
| DE102005020944A1 (de) | 2004-05-04 | 2005-12-01 | Friedrich-Schiller-Universität Jena | Diffraktive Elemente mit Antireflex-Eigenschaften |
| US7879209B2 (en) | 2004-08-20 | 2011-02-01 | Jds Uniphase Corporation | Cathode for sputter coating |
| KR100641006B1 (ko) * | 2004-11-04 | 2006-11-02 | 엘지.필립스 엘시디 주식회사 | 인쇄판 |
| JP2007234094A (ja) | 2006-02-28 | 2007-09-13 | Epson Toyocom Corp | 回折格子体、これを用いた光ヘッド装置及び回折格子体の製造方法 |
| EP1855127A1 (en) * | 2006-05-12 | 2007-11-14 | Rolic AG | Optically effective surface relief microstructures and method of making them |
| CA2600900A1 (en) * | 2006-09-21 | 2008-03-21 | Nippon Sheet Glass Company, Limited | Transmissive diffraction grating, and spectral separation element and spectroscope using the same |
| JP5280654B2 (ja) | 2006-09-21 | 2013-09-04 | 日本板硝子株式会社 | 透過型回折格子、並びに、それを用いた分光素子及び分光器 |
| CN101140400A (zh) | 2007-10-19 | 2008-03-12 | 中国科学院上海光学精密机械研究所 | 脉冲压缩光栅用多层介质膜的优化设计方法 |
| US8384997B2 (en) | 2008-01-21 | 2013-02-26 | Primesense Ltd | Optical pattern projection |
| TWI409852B (zh) | 2009-12-31 | 2013-09-21 | Inotera Memories Inc | 利用自對準雙重圖案製作半導體元件微細結構的方法 |
| JP2011187139A (ja) * | 2010-03-10 | 2011-09-22 | Hitachi Maxell Ltd | グレーティング素子及びその製造方法、並びに、そのグレーティング素子を用いた光ピックアップ装置 |
| JP2012039042A (ja) * | 2010-08-11 | 2012-02-23 | Sony Corp | メモリ素子 |
| FR2981460B1 (fr) * | 2011-10-18 | 2016-06-24 | Commissariat Energie Atomique | Procede de realisation d'un dispositif optique refractif ou diffractif |
| TWI756606B (zh) | 2012-07-16 | 2022-03-01 | 美商唯亞威方案公司 | 光學濾波器及感測器系統 |
| CN103424995B (zh) | 2013-06-05 | 2015-02-11 | 上海理工大学 | 导模共振滤光片光刻胶层的优化方法 |
| DE102015218702A1 (de) | 2015-09-29 | 2017-03-30 | Dr. Johannes Heidenhain Gmbh | Optisches Schichtsystem |
| US9960199B2 (en) | 2015-12-29 | 2018-05-01 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
| FR3047810B1 (fr) | 2016-02-12 | 2018-05-25 | Thales | Composant diffractif sub longueur d'onde large bande spectracle |
| CN106654858B (zh) | 2017-03-08 | 2021-03-19 | 长春理工大学 | 具有双层亚波长光栅反射镜的垂直腔面发射半导体激光器 |
| JP6981074B2 (ja) * | 2017-07-25 | 2021-12-15 | Ａｇｃ株式会社 | 光学素子 |
| DE102017213330A1 (de) | 2017-08-02 | 2019-02-07 | Dr. Johannes Heidenhain Gmbh | Abtastplatte für eine optische Positionsmesseinrichtung |
| US10712475B2 (en) | 2017-08-16 | 2020-07-14 | Lumentum Operations Llc | Multi-layer thin film stack for diffractive optical elements |
| US10802185B2 (en) | 2017-08-16 | 2020-10-13 | Lumentum Operations Llc | Multi-level diffractive optical element thin film coating |
-
2018
- 2018-07-24 US US16/044,081 patent/US10802185B2/en active Active
- 2018-08-02 JP JP2018146142A patent/JP7330675B2/ja active Active
- 2018-08-03 TW TW107127006A patent/TWI756459B/zh active
- 2018-08-03 TW TW111102948A patent/TWI809675B/zh active
- 2018-08-09 IL IL261086A patent/IL261086B2/en unknown
- 2018-08-10 EP EP18188469.3A patent/EP3444643A1/en active Pending
- 2018-08-16 KR KR1020180095665A patent/KR102421825B1/ko active IP Right Grant
- 2018-08-16 CN CN201810934058.1A patent/CN109407191A/zh active Pending
-
2020
- 2020-09-30 US US16/948,732 patent/US11686890B2/en active Active
-
2022
- 2022-05-31 JP JP2022089078A patent/JP7348991B2/ja active Active
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