JP2019003145A5 - - Google Patents

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Publication number
JP2019003145A5
JP2019003145A5 JP2017119884A JP2017119884A JP2019003145A5 JP 2019003145 A5 JP2019003145 A5 JP 2019003145A5 JP 2017119884 A JP2017119884 A JP 2017119884A JP 2017119884 A JP2017119884 A JP 2017119884A JP 2019003145 A5 JP2019003145 A5 JP 2019003145A5
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JP
Japan
Prior art keywords
shutter member
exposure apparatus
light
driving
control unit
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Application number
JP2017119884A
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English (en)
Japanese (ja)
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JP2019003145A (ja
JP6929142B2 (ja
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Priority to JP2017119884A priority Critical patent/JP6929142B2/ja
Priority claimed from JP2017119884A external-priority patent/JP6929142B2/ja
Priority to TW107119099A priority patent/TWI694313B/zh
Priority to KR1020180069506A priority patent/KR102359802B1/ko
Publication of JP2019003145A publication Critical patent/JP2019003145A/ja
Publication of JP2019003145A5 publication Critical patent/JP2019003145A5/ja
Application granted granted Critical
Publication of JP6929142B2 publication Critical patent/JP6929142B2/ja
Active legal-status Critical Current
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JP2017119884A 2017-06-19 2017-06-19 露光装置、および物品の製造方法 Active JP6929142B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017119884A JP6929142B2 (ja) 2017-06-19 2017-06-19 露光装置、および物品の製造方法
TW107119099A TWI694313B (zh) 2017-06-19 2018-06-04 曝光裝置及物品之製造方法
KR1020180069506A KR102359802B1 (ko) 2017-06-19 2018-06-18 노광 장치 및 물품의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017119884A JP6929142B2 (ja) 2017-06-19 2017-06-19 露光装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2019003145A JP2019003145A (ja) 2019-01-10
JP2019003145A5 true JP2019003145A5 (enrdf_load_stackoverflow) 2020-07-16
JP6929142B2 JP6929142B2 (ja) 2021-09-01

Family

ID=65006119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017119884A Active JP6929142B2 (ja) 2017-06-19 2017-06-19 露光装置、および物品の製造方法

Country Status (3)

Country Link
JP (1) JP6929142B2 (enrdf_load_stackoverflow)
KR (1) KR102359802B1 (enrdf_load_stackoverflow)
TW (1) TWI694313B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7241564B2 (ja) * 2019-02-22 2023-03-17 キヤノン株式会社 露光装置、および物品の製造方法
JP7286365B2 (ja) * 2019-03-25 2023-06-05 キヤノン株式会社 シャッタ装置、露光装置および物品製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952246A (ja) * 1982-09-20 1984-03-26 Nippon Kogaku Kk <Nikon> 露光制御装置
JPS60144745A (ja) * 1984-01-05 1985-07-31 Nippon Kogaku Kk <Nikon> 露光装置
JPH04229843A (ja) * 1990-12-27 1992-08-19 Canon Inc 露光装置用シャッタ
JPH04361522A (ja) * 1991-06-10 1992-12-15 Hitachi Ltd シャッタ制御装置
JPH0555106A (ja) * 1991-08-28 1993-03-05 Canon Inc 露光量制御装置
JPH06120103A (ja) * 1992-10-07 1994-04-28 Canon Inc 露光装置
JP4346320B2 (ja) * 2003-02-05 2009-10-21 大日本印刷株式会社 露光方法及び露光装置
JP5025250B2 (ja) * 2006-12-15 2012-09-12 キヤノン株式会社 露光装置及びデバイス製造方法
JP6415057B2 (ja) * 2014-02-07 2018-10-31 キヤノン株式会社 露光装置、および物品の製造方法
JP6861463B2 (ja) * 2015-06-16 2021-04-21 キヤノン株式会社 露光装置及び物品の製造方法

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