JP2018537544A5 - - Google Patents
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- Publication number
- JP2018537544A5 JP2018537544A5 JP2018515559A JP2018515559A JP2018537544A5 JP 2018537544 A5 JP2018537544 A5 JP 2018537544A5 JP 2018515559 A JP2018515559 A JP 2018515559A JP 2018515559 A JP2018515559 A JP 2018515559A JP 2018537544 A5 JP2018537544 A5 JP 2018537544A5
- Authority
- JP
- Japan
- Prior art keywords
- hept
- bicyclo
- alkyl
- hydroxyphenyl
- hydroxy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 perfluoro Chemical group 0.000 claims description 59
- 229920001897 terpolymer Polymers 0.000 claims description 42
- 239000000203 mixture Substances 0.000 claims description 31
- 229920000642 polymer Polymers 0.000 claims description 31
- WBMIKZQTDDXLSD-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enyl)-1-(4-hydroxyphenyl)ethanone Chemical compound C1=CC(O)=CC=C1C(=O)CC1C(C=C2)CC2C1 WBMIKZQTDDXLSD-UHFFFAOYSA-N 0.000 claims description 28
- 150000002367 halogens Chemical class 0.000 claims description 23
- 229910052739 hydrogen Inorganic materials 0.000 claims description 20
- 239000001257 hydrogen Substances 0.000 claims description 20
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 18
- STAXVPTUONLACL-UHFFFAOYSA-N 3-(5-bicyclo[2.2.1]hept-2-enyl)propanoic acid Chemical compound C1C2C(CCC(=O)O)CC1C=C2 STAXVPTUONLACL-UHFFFAOYSA-N 0.000 claims description 17
- FHZCAIGTTALOKZ-UHFFFAOYSA-N C12C(CC(C=C1)C2)CCC(=O)C1=CC=C(C=C1)O Chemical compound C12C(CC(C=C1)C2)CCC(=O)C1=CC=C(C=C1)O FHZCAIGTTALOKZ-UHFFFAOYSA-N 0.000 claims description 16
- 125000000041 C6-C10 aryl group Chemical group 0.000 claims description 15
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 14
- 150000002431 hydrogen Chemical class 0.000 claims description 14
- 239000000178 monomer Substances 0.000 claims description 14
- 125000004423 acyloxy group Chemical group 0.000 claims description 13
- 125000005553 heteroaryloxy group Chemical group 0.000 claims description 12
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 claims description 11
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 claims description 10
- HRVGJQMCNYJEHM-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enyl)acetic acid Chemical compound C1C2C(CC(=O)O)CC1C=C2 HRVGJQMCNYJEHM-UHFFFAOYSA-N 0.000 claims description 10
- NIQLOLNJWXWZHX-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enylmethyl)-1,1,1,3,3,3-hexafluoropropan-2-ol Chemical compound C1C2C(CC(O)(C(F)(F)F)C(F)(F)F)CC1C=C2 NIQLOLNJWXWZHX-UHFFFAOYSA-N 0.000 claims description 10
- 125000001072 heteroaryl group Chemical group 0.000 claims description 10
- 125000003161 (C1-C6) alkylene group Chemical group 0.000 claims description 8
- 125000006652 (C3-C12) cycloalkyl group Chemical group 0.000 claims description 8
- 125000004104 aryloxy group Chemical group 0.000 claims description 8
- 150000001602 bicycloalkyls Chemical group 0.000 claims description 8
- 125000000000 cycloalkoxy group Chemical group 0.000 claims description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 8
- DUWWHGPELOTTOE-UHFFFAOYSA-N n-(5-chloro-2,4-dimethoxyphenyl)-3-oxobutanamide Chemical compound COC1=CC(OC)=C(NC(=O)CC(C)=O)C=C1Cl DUWWHGPELOTTOE-UHFFFAOYSA-N 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 235000019260 propionic acid Nutrition 0.000 claims description 8
- ZSGZCVBOKLXAEF-UHFFFAOYSA-N 5-(5-bicyclo[2.2.1]hept-2-enyl)-1,1,1-trifluoro-2-(trifluoromethyl)pentan-2-ol Chemical compound C1C2C(CCCC(O)(C(F)(F)F)C(F)(F)F)CC1C=C2 ZSGZCVBOKLXAEF-UHFFFAOYSA-N 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 7
- 125000004400 (C1-C12) alkyl group Chemical group 0.000 claims description 6
- YMQUTLSKDCOLJO-UHFFFAOYSA-N 4-(5-bicyclo[2.2.1]hept-2-enyl)-1,1,1-trifluoro-2-(trifluoromethyl)butan-2-ol Chemical compound C1C2C(CCC(O)(C(F)(F)F)C(F)(F)F)CC1C=C2 YMQUTLSKDCOLJO-UHFFFAOYSA-N 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 5
- 125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims description 4
- HTUIHOPKTIKZQR-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enyl)-1-(4-hydroxy-3-methoxyphenyl)ethanone Chemical compound C1=C(O)C(OC)=CC(C(=O)CC2C3CC(C=C3)C2)=C1 HTUIHOPKTIKZQR-UHFFFAOYSA-N 0.000 claims description 4
- NXVKWTQVEFQQTF-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enylmethoxy)ethanol Chemical compound C1C2C(COCCO)CC1C=C2 NXVKWTQVEFQQTF-UHFFFAOYSA-N 0.000 claims description 4
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 claims description 4
- ORMSKUPWIJWKPT-UHFFFAOYSA-N 4-(5-bicyclo[2.2.1]hept-2-enyl)butanoic acid Chemical compound C1C2C(CCCC(=O)O)CC1C=C2 ORMSKUPWIJWKPT-UHFFFAOYSA-N 0.000 claims description 4
- QIOOARGNDHTVAI-UHFFFAOYSA-N C(C)(=O)OC1=C(C=C(C=C1)C(CC1C2C=CC(C1)C2)=O)OC Chemical compound C(C)(=O)OC1=C(C=C(C=C1)C(CC1C2C=CC(C1)C2)=O)OC QIOOARGNDHTVAI-UHFFFAOYSA-N 0.000 claims description 4
- UMPQZGASEBSBDJ-UHFFFAOYSA-N C12C(CC(C=C1)C2)CC(=O)C1=CC2=CC(=C(C=C2C=C1)O)OC Chemical compound C12C(CC(C=C1)C2)CC(=O)C1=CC2=CC(=C(C=C2C=C1)O)OC UMPQZGASEBSBDJ-UHFFFAOYSA-N 0.000 claims description 4
- MDPOXLOWSCSKNY-UHFFFAOYSA-N C12C(CC(C=C1)C2)CC(=O)C1=CC2=CC=C(C=C2C=C1)O Chemical compound C12C(CC(C=C1)C2)CC(=O)C1=CC2=CC=C(C=C2C=C1)O MDPOXLOWSCSKNY-UHFFFAOYSA-N 0.000 claims description 4
- AVNSKNIIFQKFIJ-UHFFFAOYSA-N C12C(CC(C=C1)C2)CC(=O)C1=CC=C(C=C1)C1=CC(=C(C=C1)O)OC Chemical compound C12C(CC(C=C1)C2)CC(=O)C1=CC=C(C=C1)C1=CC(=C(C=C1)O)OC AVNSKNIIFQKFIJ-UHFFFAOYSA-N 0.000 claims description 4
- YQQPHPKQZIPMRM-UHFFFAOYSA-N C12C(CC(C=C1)C2)CC(=O)C1=CC=C(C=C1)C1=CC=C(C=C1)O Chemical compound C12C(CC(C=C1)C2)CC(=O)C1=CC=C(C=C1)C1=CC=C(C=C1)O YQQPHPKQZIPMRM-UHFFFAOYSA-N 0.000 claims description 4
- UFYBVJALFOUGJJ-UHFFFAOYSA-N C12C(CC(C=C1)C2)CCC(=O)C1=CC(=C(C=C1)O)OC Chemical compound C12C(CC(C=C1)C2)CCC(=O)C1=CC(=C(C=C1)O)OC UFYBVJALFOUGJJ-UHFFFAOYSA-N 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 125000005293 bicycloalkoxy group Chemical group 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 150000001616 biphenylenes Chemical group 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 125000002993 cycloalkylene group Chemical group 0.000 claims description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 claims description 4
- 150000002790 naphthalenes Chemical class 0.000 claims description 4
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims description 4
- 229920001451 polypropylene glycol Polymers 0.000 claims description 4
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 3
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 229920001223 polyethylene glycol Polymers 0.000 claims description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical group COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 3
- QHPQWRBYOIRBIT-UHFFFAOYSA-N 4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C=C1 QHPQWRBYOIRBIT-UHFFFAOYSA-N 0.000 claims description 2
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- KVMGTLWDHXMQCT-UHFFFAOYSA-N [N-]=[N+]=[N-].[N-]=[N+]=[N-].S(=O)(=O)=C1C(C=CC(C1)=O)=O Chemical group [N-]=[N+]=[N-].[N-]=[N+]=[N-].S(=O)(=O)=C1C(C=CC(C1)=O)=O KVMGTLWDHXMQCT-UHFFFAOYSA-N 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims description 2
- 239000002318 adhesion promoter Substances 0.000 claims description 2
- 239000003963 antioxidant agent Substances 0.000 claims description 2
- 230000003078 antioxidant effect Effects 0.000 claims description 2
- XUCHXOAWJMEFLF-UHFFFAOYSA-N bisphenol F diglycidyl ether Chemical compound C1OC1COC(C=C1)=CC=C1CC(C=C1)=CC=C1OCC1CO1 XUCHXOAWJMEFLF-UHFFFAOYSA-N 0.000 claims description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 238000004377 microelectronic Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims 6
- VCOXSVQMANZZDY-UHFFFAOYSA-N 5-[2-(2-methoxyethoxy)ethoxymethyl]bicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(COCCOCCOC)CC1C=C2 VCOXSVQMANZZDY-UHFFFAOYSA-N 0.000 claims 3
- IFPMZBBHBZQTOV-UHFFFAOYSA-N 1,3,5-trinitro-2-(2,4,6-trinitrophenyl)-4-[2,4,6-trinitro-3-(2,4,6-trinitrophenyl)phenyl]benzene Chemical compound [O-][N+](=O)C1=CC([N+](=O)[O-])=CC([N+]([O-])=O)=C1C1=C([N+]([O-])=O)C=C([N+]([O-])=O)C(C=2C(=C(C=3C(=CC(=CC=3[N+]([O-])=O)[N+]([O-])=O)[N+]([O-])=O)C(=CC=2[N+]([O-])=O)[N+]([O-])=O)[N+]([O-])=O)=C1[N+]([O-])=O IFPMZBBHBZQTOV-UHFFFAOYSA-N 0.000 claims 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 1
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- AKHDGSRSWWFVIZ-UHFFFAOYSA-N 5-propylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCC)CC1C=C2 AKHDGSRSWWFVIZ-UHFFFAOYSA-N 0.000 claims 1
- GXSGWRJTJUDAEW-UHFFFAOYSA-N C12C(CC(C=C1)C2)CC1=CC=C(C=C1)C(=O)C1=CC=C(C=C1)O Chemical compound C12C(CC(C=C1)C2)CC1=CC=C(C=C1)C(=O)C1=CC=C(C=C1)O GXSGWRJTJUDAEW-UHFFFAOYSA-N 0.000 claims 1
- 235000018936 Vitellaria paradoxa Nutrition 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 14
- 229920001577 copolymer Polymers 0.000 description 12
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Natural products CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 4
- OTTZHAVKAVGASB-UHFFFAOYSA-N hept-2-ene Chemical compound CCCCC=CC OTTZHAVKAVGASB-UHFFFAOYSA-N 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- AAVXIUYWYBDQHZ-UHFFFAOYSA-N 5-[2-[2-(2-methoxyethoxy)ethoxy]ethoxymethyl]bicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(COCCOCCOCCOC)CC1C=C2 AAVXIUYWYBDQHZ-UHFFFAOYSA-N 0.000 description 2
- 0 C*C(C1=CCC(C2C=CC=CC2)C=C1)=N Chemical compound C*C(C1=CCC(C2C=CC=CC2)C=C1)=N 0.000 description 2
- IPBVNPXQWQGGJP-UHFFFAOYSA-N phenyl acetate Chemical compound CC(=O)OC1=CC=CC=C1 IPBVNPXQWQGGJP-UHFFFAOYSA-N 0.000 description 2
- YRFSGDURTMDVSJ-UHFFFAOYSA-N 1,1,1-trifluoro-2-methylbutan-2-ol Chemical compound CCC(C)(O)C(F)(F)F YRFSGDURTMDVSJ-UHFFFAOYSA-N 0.000 description 1
- WZVNNQRNOIMLJS-UHFFFAOYSA-N 1,1,1-trifluoro-2-methylpentan-2-ol Chemical compound CCCC(C)(O)C(F)(F)F WZVNNQRNOIMLJS-UHFFFAOYSA-N 0.000 description 1
- GEWWCWZGHNIUBW-UHFFFAOYSA-N 1-(4-nitrophenyl)propan-2-one Chemical compound CC(=O)CC1=CC=C([N+]([O-])=O)C=C1 GEWWCWZGHNIUBW-UHFFFAOYSA-N 0.000 description 1
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562235919P | 2015-10-01 | 2015-10-01 | |
| US62/235,919 | 2015-10-01 | ||
| PCT/US2016/053880 WO2017058746A1 (en) | 2015-10-01 | 2016-09-27 | Fluorine free photopatternable phenol functional group containing polymer compositions |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018537544A JP2018537544A (ja) | 2018-12-20 |
| JP2018537544A5 true JP2018537544A5 (enExample) | 2019-06-20 |
| JP6605720B2 JP6605720B2 (ja) | 2019-11-13 |
Family
ID=57113777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018515559A Active JP6605720B2 (ja) | 2015-10-01 | 2016-09-27 | 光パターニング可能なフッ素フリーフェノール官能基含有ポリマー組成物 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US10054854B2 (enExample) |
| JP (1) | JP6605720B2 (enExample) |
| KR (1) | KR20180059805A (enExample) |
| TW (1) | TWI672323B (enExample) |
| WO (1) | WO2017058746A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6605720B2 (ja) * | 2015-10-01 | 2019-11-13 | プロメラス， エルエルシー | 光パターニング可能なフッ素フリーフェノール官能基含有ポリマー組成物 |
| TWI794520B (zh) * | 2018-06-29 | 2023-03-01 | 日商住友電木股份有限公司 | 作為 3d 列印材料之聚環烯烴單體及由能夠產生光酸之化合物活化之催化劑 |
| US12476107B2 (en) * | 2021-08-30 | 2025-11-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing a semiconductor device |
| JP7856019B2 (ja) * | 2023-02-06 | 2026-05-11 | 信越化学工業株式会社 | 樹脂組成物、樹脂皮膜、ドライフィルム及び樹脂硬化物 |
| TW202528838A (zh) * | 2023-09-29 | 2025-07-16 | 美商普羅梅勒斯有限公司 | 含有不含pfas的多環烯烴三元共聚物之感光性組成物及由其製成的半導體裝置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE414118T1 (de) * | 2004-07-07 | 2008-11-15 | Promerus Llc | Lichtempfindliche dielektrische harzzusammensetzungen und ihre verwendungen |
| US8053515B2 (en) * | 2006-12-06 | 2011-11-08 | Promerus Llc | Directly photodefinable polymer compositions and methods thereof |
| US7727705B2 (en) * | 2007-02-23 | 2010-06-01 | Fujifilm Electronic Materials, U.S.A., Inc. | High etch resistant underlayer compositions for multilayer lithographic processes |
| JP4948647B2 (ja) * | 2008-04-07 | 2012-06-06 | 株式会社日立ハイテクノロジーズ | 尿中粒子画像の領域分割方法及び装置 |
| US8753790B2 (en) | 2009-07-01 | 2014-06-17 | Promerus, Llc | Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom |
| CN103370347B (zh) * | 2010-11-24 | 2016-08-10 | 普罗米鲁斯有限责任公司 | 可自成像成膜聚合物、其组合物以及由其制得的器件和结构 |
| JP6605720B2 (ja) * | 2015-10-01 | 2019-11-13 | プロメラス， エルエルシー | 光パターニング可能なフッ素フリーフェノール官能基含有ポリマー組成物 |
-
2016
- 2016-09-27 JP JP2018515559A patent/JP6605720B2/ja active Active
- 2016-09-27 US US15/276,997 patent/US10054854B2/en active Active
- 2016-09-27 WO PCT/US2016/053880 patent/WO2017058746A1/en not_active Ceased
- 2016-09-27 KR KR1020187009204A patent/KR20180059805A/ko not_active Withdrawn
- 2016-09-30 TW TW105131643A patent/TWI672323B/zh not_active IP Right Cessation
-
2018
- 2018-07-19 US US16/040,459 patent/US10303057B2/en active Active
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