JP2018531301A5 - - Google Patents
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- JP2018531301A5 JP2018531301A5 JP2018514983A JP2018514983A JP2018531301A5 JP 2018531301 A5 JP2018531301 A5 JP 2018531301A5 JP 2018514983 A JP2018514983 A JP 2018514983A JP 2018514983 A JP2018514983 A JP 2018514983A JP 2018531301 A5 JP2018531301 A5 JP 2018531301A5
- Authority
- JP
- Japan
- Prior art keywords
- hydroxyl
- sultone
- alkyl
- compounds
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2015/091435 WO2017059565A1 (en) | 2015-10-08 | 2015-10-08 | Copper electroplating baths containing compounds of reaction products of amines, polyacrylamides and sultones |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2018531301A JP2018531301A (ja) | 2018-10-25 |
| JP2018531301A6 JP2018531301A6 (ja) | 2018-12-13 |
| JP2018531301A5 true JP2018531301A5 (enExample) | 2019-10-31 |
| JP6622908B2 JP6622908B2 (ja) | 2019-12-18 |
Family
ID=58487163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018514983A Expired - Fee Related JP6622908B2 (ja) | 2015-10-08 | 2015-10-08 | アミン、ポリアクリルアミド、及びスルトンの反応生成物の化合物を含有する銅電気めっき浴 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10604858B2 (enExample) |
| EP (1) | EP3359552B1 (enExample) |
| JP (1) | JP6622908B2 (enExample) |
| KR (1) | KR102125240B1 (enExample) |
| CN (1) | CN108026129A (enExample) |
| TW (1) | TWI609101B (enExample) |
| WO (1) | WO2017059565A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3359709B1 (en) * | 2015-10-08 | 2020-07-29 | Rohm and Haas Electronic Materials LLC | Copper electroplating baths containing compounds of reaction products of amines and polyacrylamides |
| WO2017059565A1 (en) * | 2015-10-08 | 2017-04-13 | Rohm And Haas Electronic Materials Llc | Copper electroplating baths containing compounds of reaction products of amines, polyacrylamides and sultones |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2453847B1 (fr) * | 1979-04-13 | 1985-08-16 | Anvar | Procede pour l'obtention d'ampholytes porteurs utilisables dans les diverses techniques d'electrofocalisation |
| IT1254898B (it) * | 1992-04-21 | 1995-10-11 | Gianfranco Palumbo | Idrogeli di tipo polietereammidoamminico come materiali eparinizzabili |
| US5534611A (en) * | 1993-10-29 | 1996-07-09 | Nalco Chemical Company | Sulfonated and carboxylated aminoethylenephosphonic acid and aminobis (methylene) phosphinic acid |
| US5866660A (en) * | 1997-03-13 | 1999-02-02 | Isp Investments Inc. | Polyvinyl prolidone and crosslinker with divinyl and chelation group |
| EP2199315B1 (en) * | 2008-12-19 | 2013-12-11 | Basf Se | Composition for metal electroplating comprising leveling agent |
| MY168658A (en) * | 2011-06-01 | 2018-11-28 | Basf Se | Composition for metal electroplating comprising an additive for bottom-up filling of though silicon vias and interconnect features |
| KR101385280B1 (ko) * | 2012-05-23 | 2014-04-16 | 한국과학기술원 | 역상 현탁중합과 전구체를 이용한 가교된 하이퍼브랜치 폴리아미도아민 입자의 제조 방법 |
| CN104797633B (zh) * | 2012-11-09 | 2018-04-24 | 巴斯夫欧洲公司 | 用于金属电镀的包含调平剂的组合物 |
| US20160104918A1 (en) * | 2013-05-24 | 2016-04-14 | Joyce Wang | Gel polymer electrolyte and lithium ion batteries employing the gel polymer electrolyte |
| US9922844B2 (en) * | 2014-03-12 | 2018-03-20 | Mediatek Inc. | Semiconductor package and method for fabricating base for semiconductor package |
| CN104762643A (zh) * | 2014-12-17 | 2015-07-08 | 安捷利电子科技（苏州）有限公司 | 一种通孔、盲孔和线路共镀的镀铜药水 |
| WO2017059565A1 (en) * | 2015-10-08 | 2017-04-13 | Rohm And Haas Electronic Materials Llc | Copper electroplating baths containing compounds of reaction products of amines, polyacrylamides and sultones |
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2015
- 2015-10-08 WO PCT/CN2015/091435 patent/WO2017059565A1/en not_active Ceased
- 2015-10-08 CN CN201580083217.6A patent/CN108026129A/zh active Pending
- 2015-10-08 EP EP15905663.9A patent/EP3359552B1/en active Active
- 2015-10-08 KR KR1020187010819A patent/KR102125240B1/ko active Active
- 2015-10-08 US US15/752,636 patent/US10604858B2/en active Active
- 2015-10-08 JP JP2018514983A patent/JP6622908B2/ja not_active Expired - Fee Related
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2016
- 2016-09-30 TW TW105131756A patent/TWI609101B/zh active
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2020
- 2020-01-17 US US16/745,400 patent/US11761107B2/en active Active