JP2018526201A5 - - Google Patents
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- Publication number
- JP2018526201A5 JP2018526201A5 JP2018506896A JP2018506896A JP2018526201A5 JP 2018526201 A5 JP2018526201 A5 JP 2018526201A5 JP 2018506896 A JP2018506896 A JP 2018506896A JP 2018506896 A JP2018506896 A JP 2018506896A JP 2018526201 A5 JP2018526201 A5 JP 2018526201A5
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- heater
- gas
- vaporizer
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 32
- 238000000034 method Methods 0.000 claims 24
- 239000006200 vaporizer Substances 0.000 claims 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 13
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 12
- 239000012159 carrier gas Substances 0.000 claims 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 6
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims 6
- 239000012528 membrane Substances 0.000 claims 6
- 239000007788 liquid Substances 0.000 claims 5
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 4
- 239000001569 carbon dioxide Substances 0.000 claims 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 3
- 150000001412 amines Chemical class 0.000 claims 3
- 229910052786 argon Inorganic materials 0.000 claims 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 230000001276 controlling effect Effects 0.000 claims 3
- 239000001307 helium Substances 0.000 claims 3
- 229910052734 helium Inorganic materials 0.000 claims 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 3
- 239000001257 hydrogen Substances 0.000 claims 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 3
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 229910017840 NH 3 Inorganic materials 0.000 claims 2
- 230000002596 correlated effect Effects 0.000 claims 2
- 239000003014 ion exchange membrane Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562203197P | 2015-08-10 | 2015-08-10 | |
| US62/203,197 | 2015-08-10 | ||
| PCT/US2016/046334 WO2017027581A1 (en) | 2015-08-10 | 2016-08-10 | Methods and systems for generating process gases |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018526201A JP2018526201A (ja) | 2018-09-13 |
| JP2018526201A5 true JP2018526201A5 (enExample) | 2019-09-26 |
| JP6951321B2 JP6951321B2 (ja) | 2021-10-20 |
Family
ID=57983644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018506896A Active JP6951321B2 (ja) | 2015-08-10 | 2016-08-10 | プロセスガスを生成するための方法およびシステム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11154792B2 (enExample) |
| JP (1) | JP6951321B2 (enExample) |
| WO (1) | WO2017027581A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3162914A1 (en) * | 2015-11-02 | 2017-05-03 | IMEC vzw | Apparatus and method for delivering a gaseous precursor to a reaction chamber |
| EP3409300B1 (de) * | 2017-06-01 | 2019-11-27 | Metall + Plastic GmbH | Dekontaminationsanordnung, system sowie dekontaminationsverfahren |
| JP7129310B2 (ja) * | 2018-10-17 | 2022-09-01 | 株式会社カネカ | 蒸着装置 |
| KR20220062288A (ko) * | 2019-08-14 | 2022-05-16 | 엘리멘탈 사이언티픽, 인코포레이티드 | 샘플 전달 라인 가열 시스템 및 샘플 전달의 방법 |
| JP7671779B2 (ja) | 2020-04-14 | 2025-05-02 | ラシルク，インコーポレイテッド | 水素劣化の抑制 |
| DE102020116271A1 (de) | 2020-06-19 | 2021-12-23 | Apeva Se | Vorrichtung und Verfahren zum Verdampfen eines organischen Pulvers |
| CN113813619B (zh) * | 2021-10-14 | 2023-11-17 | 聚光科技(杭州)股份有限公司 | 水蒸气产生装置和方法 |
| WO2024074929A1 (en) | 2022-10-03 | 2024-04-11 | Rasirc, Inc. | Hydrogen peroxide plasma etch of ashable hard mask |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2958391A (en) | 1958-02-24 | 1960-11-01 | Universal Oil Prod Co | Purification of hydrogen utilizing hydrogen-permeable membranes |
| EP1252495A2 (en) * | 2000-02-02 | 2002-10-30 | PAWLISZYN, Janusz B. | Analytical devices based on diffusion boundary layer calibration and quantitative sorption |
| US6841124B2 (en) * | 2000-10-02 | 2005-01-11 | Ethicon, Inc. | Sterilization system with a plasma generator controlled by a digital signal processor |
| US8926731B2 (en) * | 2005-09-13 | 2015-01-06 | Rasirc | Methods and devices for producing high purity steam |
| US9039900B2 (en) | 2008-05-09 | 2015-05-26 | New Jersey Institute Of Technology | Membrane distillation apparatus and methods |
| US8776821B2 (en) * | 2011-05-24 | 2014-07-15 | Rohm And Haas Electronic Materials Llc | Vapor delivery device, methods of manufacture and methods of use thereof |
| US9610550B2 (en) * | 2012-03-28 | 2017-04-04 | Rasirc, Inc. | Method of delivering a process gas from a multi-component solution |
-
2016
- 2016-08-10 JP JP2018506896A patent/JP6951321B2/ja active Active
- 2016-08-10 US US15/751,044 patent/US11154792B2/en active Active
- 2016-08-10 WO PCT/US2016/046334 patent/WO2017027581A1/en not_active Ceased
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