JP2018517937A - 層状構造を有する音響光学偏向器およびその偏向器を用いて光ビームを偏向させる方法 - Google Patents
層状構造を有する音響光学偏向器およびその偏向器を用いて光ビームを偏向させる方法 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/113—Circuit or control arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
Abstract
【選択図】図2a
Description
Claims (14)
- 層状構造を有する音響光学偏向器(10)であって、少なくとも2つの音響光学結晶(12)を含み、前記音響光学結晶の各々に少なくとも1つの電気音響変換器(14)が接続されるとともに、隣接する前記結晶(12)は、音響アイソレータ(16)によって分離されている、ことを特徴とする音響光学偏向器。
- 第1と第2の隣接する音響光学結晶(12’,12”)を含み、前記音響光学結晶のうちの前記第2の音響光学結晶(12”)に接続された前記電気音響変換器(14”)は、前記第1と第2の音響光学結晶(12’,12”)の間に配置されており、前記第1と第2の音響光学結晶の間の前記音響アイソレータ(16)は、前記変換器(14”)と前記第1の音響光学結晶(12’)との間に配置されている、ことを特徴とする、請求項1に記載の音響光学偏向器。
- 前記少なくとも2つの変換器(14’,14”)は、互いに独立に制御可能であることを特徴とする、請求項1または2に記載の音響光学偏向器。
- 前記音響光学結晶(12’,12”)に接続された前記少なくとも2つの電気音響変換器(14’,14”)は、2つの電極(20)と、前記2つの電極の間に配置された圧電板(22)とを有し、前記2つの電極のうちの一方の電極(20a)は、前記音響光学結晶(12)に接続されている、ことを特徴とする、請求項1〜3のいずれか1項に記載の音響光学偏向器。
- 前記音響光学結晶(12’,12”)の間に配置された前記変換器(14”)の厚さは、100μm未満であることを特徴とする、請求項1〜4のいずれか1項に記載の音響光学偏向器。
- 前記2つの電極(20)のうちの少なくとも一方の電極(20a、20b)は、前記変換器(14)を制御する電気信号発生器(18)に接続されていることを特徴とする、請求項4または5に記載の音響光学偏向器。
- 前記音響アイソレータ(16)は、ブランキング信号を生成する第2の電気音響変換器(14a)を有することを特徴とする、請求項1〜6のいずれか1項に記載の音響光学偏向器。
- 前記音響アイソレータ(16)は、空隙および/または真空空間を有することを特徴とする、請求項1〜6のいずれか1項に記載の音響光学偏向器。
(請求項8)
音響光学偏向器(10)を用いて光ビームを偏向させる方法であって、前記音響光学偏向器(10)は、少なくとも2つの音響光学結晶(12’,12”)を含み、前記音響光学結晶のうち、第1の音響光学結晶(12’)において、前記第1の音響光学結晶(12’)に接続された第1の電気音響変換器(14’)を用いて第1の音波(15’)を生成し、第2の音響光学結晶(12”)において、前記第2の音響光学結晶(12”)に接続されるとともに前記第1の音響光学結晶(12’)と前記第2の結晶(12”)との間に配置された第2の電気音響変換器(14”)を用いて第2の音波(15”)を生成する、ことを特徴とする方法。 - 個々の前記音響光学結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶(12’,12”)において同期的に音波(15’、15”)を生成することを特徴とする、請求項7に記載の方法。
- 個々の前記結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶を用いて前記光ビーム(50)を1点に合焦させることを特徴とする、請求項7または8に記載の方法。
- 個々の前記結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶(12’,12”)を用いて前記光ビーム(50)を少なくとも2点に合焦させることを特徴とする、請求項7または8に記載の方法。
- 前記音響光学偏向器(10)において、前記音響光学偏向器(10)のアパーチャ(11)全体を満たす所望の周波数プロファイルを有する音波(15)を生成し、このとき、個々の前記音響光学結晶(12)では、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当する前記音波(15)の空間部分を生成する、ことを特徴とする、請求項7〜10のいずれか1項に記載の方法。
- 個々の前記音響光学結晶(12)において、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当するチャープ信号の空間部分を生成することによって、前記チャープ信号に対応した周波数プロファイルを有する音波(15)を生成することを特徴とする、請求項7〜9または11のいずれか1項に記載の方法。
- 個々の前記音響光学結晶(12)において、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当する前記チャープ信号の所与の空間部分を生成することによって、複数のチャープ信号で構成される周波数プロファイルを有する音波(15)を生成して、前記音響光学偏向器(10)の前記アパーチャ(11)を通過する前記光ビーム(50)を複数点に合焦させる、ことを特徴とする、請求項8または9または10または11のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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HUP1500264 | 2015-06-01 | ||
HU1500264A HUP1500264A2 (en) | 2015-06-01 | 2015-06-01 | Layered structured acousto-optical deflector and method for optical beam deflection with deflectior |
PCT/HU2016/050020 WO2016193770A1 (en) | 2015-06-01 | 2016-05-31 | Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector |
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JP2018517937A true JP2018517937A (ja) | 2018-07-05 |
JP6866309B2 JP6866309B2 (ja) | 2021-04-28 |
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US (1) | US10613414B2 (ja) |
EP (1) | EP3304184B1 (ja) |
JP (1) | JP6866309B2 (ja) |
CN (1) | CN107850796B (ja) |
CA (1) | CA2994903C (ja) |
HU (2) | HUP1500264A2 (ja) |
WO (1) | WO2016193770A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102236192B1 (ko) * | 2019-11-25 | 2021-04-06 | 한국표준과학연구원 | 굴절률분포형 음향양자결정 평면 렌즈 및 이의 설계방법 |
JP2021535420A (ja) * | 2018-08-14 | 2021-12-16 | フェムトニクス・カーエフテー | チャープ付き音響信号駆動の音響光学偏向器を用いた光ビーム走査方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10401704B2 (en) * | 2016-11-11 | 2019-09-03 | Asml Netherlands B.V. | Compensating for a physical effect in an optical system |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5079344A (ja) * | 1973-10-27 | 1975-06-27 | ||
EP0100238A2 (en) * | 1982-07-27 | 1984-02-08 | Hoya Corporation | Acoustooptic modulation element and system |
US4566760A (en) * | 1984-04-12 | 1986-01-28 | The United States Of America As Represented By The Secretary Of The Army | Multi-product acousto-optic time integrating correlator |
JPS61278824A (ja) * | 1985-06-05 | 1986-12-09 | Fuji Photo Film Co Ltd | 光合波装置 |
EP0418084A2 (en) * | 1989-09-14 | 1991-03-20 | Sony Corporation | Laser beam deflection apparatus |
JPH04155310A (ja) * | 1990-10-18 | 1992-05-28 | Matsushita Electric Ind Co Ltd | 音響光学素子 |
JPH10319446A (ja) * | 1997-05-20 | 1998-12-04 | Nec Corp | ビーム偏向装置 |
WO2001014925A1 (en) * | 1999-08-23 | 2001-03-01 | Etec Systems, Inc. | Thermally balanced acousto-optic modulator |
JP2001525919A (ja) * | 1994-12-21 | 2001-12-11 | テンカー、インスツルメンツ | 可変スポットサイズ走査装置 |
US20030189025A1 (en) * | 2002-04-04 | 2003-10-09 | Yu Chris C. | Process for fabricating optical switches |
JP2004341534A (ja) * | 2003-05-15 | 2004-12-02 | Agilent Technol Inc | 2つの直交偏光の能動的制御を用いたヘテロダインビームの伝達 |
GB2427282A (en) * | 2005-06-17 | 2006-12-20 | Thales Holdings Uk Plc | Acousto-optic deflection |
EP2494772A1 (fr) * | 2009-10-29 | 2012-09-05 | Université Paris Descartes | Procede et dispositif d'annulation d'echo acoustique par tatouage audio |
JP2013511055A (ja) * | 2009-11-13 | 2013-03-28 | コマンディートゲゼルシャフト ズュノプトリクス リッヒテッヒニク ゲーエムベーハー ウント コー | 光学効果を変調して表示するためのシステム及び方法 |
EP2634622A1 (en) * | 2006-09-12 | 2013-09-04 | UCL Business PLC | Imaging apparatus and methods |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57190926A (en) * | 1981-05-20 | 1982-11-24 | Hagiwara Denki Kk | Multispot acoustooptic modulator |
JPS5919920A (ja) * | 1982-07-27 | 1984-02-01 | Hoya Corp | 多ビ−ム音響光学変調装置 |
JPS5919921A (ja) * | 1982-07-27 | 1984-02-01 | Hoya Corp | 多ビ−ム音響光学変調装置 |
FR2751095B1 (fr) * | 1996-07-09 | 1998-10-30 | Thomson Csf | Dispositif de controle d'impulsions lumineuses par un dispositif programmable acousto-optique |
US8654424B2 (en) * | 2009-09-15 | 2014-02-18 | Ricoh Company, Ltd. | Multibeam deflector for separating beams output from optical deflection devices |
GB201106787D0 (en) * | 2011-04-20 | 2011-06-01 | Ucl Business Plc | Methods and apparatus to control acousto-optic deflectors |
US8797123B2 (en) * | 2011-09-14 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Double film bulk acoustic resonator having electrode edge alignments providing improved quality factor or electromechanical coupling coefficient |
PT2800995T (pt) | 2012-01-05 | 2019-07-05 | Femtonics Kft | Método para varrimento ao longo de uma trajetória de varrimento contínua com um sistema digitalizador |
CN202693930U (zh) * | 2012-08-21 | 2013-01-23 | 中国电子科技集团公司第二十六研究所 | 宽带声光器件 |
US10018889B2 (en) * | 2013-11-28 | 2018-07-10 | Femtonics Kft. | Acousto-optic deflector comprising multiple electro-acoustic transducers |
CN107111205B (zh) * | 2014-11-12 | 2020-12-15 | 奥宝科技有限公司 | 具有多个输出光束的声光偏光器 |
US10996540B2 (en) * | 2018-04-26 | 2021-05-04 | Mycronic AB | Compact alpha-BBO acousto-optic deflector with high resolving power for UV and visible radiation |
-
2015
- 2015-06-01 HU HU1500264A patent/HUP1500264A2/hu unknown
-
2016
- 2016-05-31 US US15/578,590 patent/US10613414B2/en active Active
- 2016-05-31 HU HUE16738857A patent/HUE051482T2/hu unknown
- 2016-05-31 EP EP16738857.8A patent/EP3304184B1/en active Active
- 2016-05-31 WO PCT/HU2016/050020 patent/WO2016193770A1/en active Application Filing
- 2016-05-31 JP JP2017562704A patent/JP6866309B2/ja active Active
- 2016-05-31 CA CA2994903A patent/CA2994903C/en active Active
- 2016-05-31 CN CN201680040531.0A patent/CN107850796B/zh active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5079344A (ja) * | 1973-10-27 | 1975-06-27 | ||
EP0100238A2 (en) * | 1982-07-27 | 1984-02-08 | Hoya Corporation | Acoustooptic modulation element and system |
US4566760A (en) * | 1984-04-12 | 1986-01-28 | The United States Of America As Represented By The Secretary Of The Army | Multi-product acousto-optic time integrating correlator |
JPS61278824A (ja) * | 1985-06-05 | 1986-12-09 | Fuji Photo Film Co Ltd | 光合波装置 |
EP0418084A2 (en) * | 1989-09-14 | 1991-03-20 | Sony Corporation | Laser beam deflection apparatus |
JPH04155310A (ja) * | 1990-10-18 | 1992-05-28 | Matsushita Electric Ind Co Ltd | 音響光学素子 |
JP2001525919A (ja) * | 1994-12-21 | 2001-12-11 | テンカー、インスツルメンツ | 可変スポットサイズ走査装置 |
JPH10319446A (ja) * | 1997-05-20 | 1998-12-04 | Nec Corp | ビーム偏向装置 |
WO2001014925A1 (en) * | 1999-08-23 | 2001-03-01 | Etec Systems, Inc. | Thermally balanced acousto-optic modulator |
US20030189025A1 (en) * | 2002-04-04 | 2003-10-09 | Yu Chris C. | Process for fabricating optical switches |
JP2004341534A (ja) * | 2003-05-15 | 2004-12-02 | Agilent Technol Inc | 2つの直交偏光の能動的制御を用いたヘテロダインビームの伝達 |
GB2427282A (en) * | 2005-06-17 | 2006-12-20 | Thales Holdings Uk Plc | Acousto-optic deflection |
EP2634622A1 (en) * | 2006-09-12 | 2013-09-04 | UCL Business PLC | Imaging apparatus and methods |
EP2494772A1 (fr) * | 2009-10-29 | 2012-09-05 | Université Paris Descartes | Procede et dispositif d'annulation d'echo acoustique par tatouage audio |
JP2013511055A (ja) * | 2009-11-13 | 2013-03-28 | コマンディートゲゼルシャフト ズュノプトリクス リッヒテッヒニク ゲーエムベーハー ウント コー | 光学効果を変調して表示するためのシステム及び方法 |
Cited By (3)
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JP2021535420A (ja) * | 2018-08-14 | 2021-12-16 | フェムトニクス・カーエフテー | チャープ付き音響信号駆動の音響光学偏向器を用いた光ビーム走査方法 |
JP7444161B2 (ja) | 2018-08-14 | 2024-03-06 | フェムトニクス・カーエフテー | チャープ付き音響信号駆動の音響光学偏向器を用いた光ビーム走査方法 |
KR102236192B1 (ko) * | 2019-11-25 | 2021-04-06 | 한국표준과학연구원 | 굴절률분포형 음향양자결정 평면 렌즈 및 이의 설계방법 |
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HUE051482T2 (hu) | 2021-03-01 |
CN107850796B (zh) | 2022-03-01 |
CA2994903C (en) | 2023-07-11 |
HUP1500264A2 (en) | 2018-05-02 |
US20180157147A1 (en) | 2018-06-07 |
WO2016193770A1 (en) | 2016-12-08 |
EP3304184A1 (en) | 2018-04-11 |
JP6866309B2 (ja) | 2021-04-28 |
US10613414B2 (en) | 2020-04-07 |
CA2994903A1 (en) | 2016-12-08 |
EP3304184B1 (en) | 2020-05-27 |
CN107850796A (zh) | 2018-03-27 |
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