JP6866309B2 - 層状構造を有する音響光学偏向器およびその偏向器を用いて光ビームを偏向させる方法 - Google Patents
層状構造を有する音響光学偏向器およびその偏向器を用いて光ビームを偏向させる方法 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/113—Circuit or control arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
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Description
Claims (14)
- 層状構造を有する音響光学偏向器(10)であって、少なくとも2つの電気音響変換器(14,14’,14”)および少なくとも2つの音響光学結晶(12,12’,12”)を含み、前記音響光学結晶の各々に少なくとも1つの電気音響変換器(14,14’,14”)が接続されるとともに、隣接する前記結晶(12,12’,12”)は、音響アイソレータ(16)によって分離されている、音響光学偏向器において、
アパーチャ(11)を備え、アパーチャ(11)は前記音響光学結晶(12,12’,12”)によって帯状域に分割され、
第1の電気音響変換器(14’)は、第1の音響光学結晶(12’)に接続されており、第2の電気音響変換器(14”)は、第2の音響光学結晶(12”)に接続されており、このとき、前記第2の電気音響変換器(14”)は、前記第1の音響光学結晶(12’)と前記第2の音響光学結晶(12”)との間に配置されており、前記少なくとも2つの変換器(14,14’,14”)は、互いに独立に制御可能である、ことを特徴とする音響光学偏向器。 - 前記第1と第2の音響光学結晶(12’,12”)の間の前記音響アイソレータ(16)は、前記第2の変換器(14”)と前記第1の音響光学結晶(12’)との間に配置されている、ことを特徴とする、請求項1に記載の音響光学偏向器。
- 前記音響光学結晶(12’,12”)に接続された前記少なくとも2つの電気音響変換器(14’,14”)は、2つの電極(20)と、前記2つの電極の間に配置された圧電板(22)とを有し、前記2つの電極のうちの一方の電極(20a)は、前記音響光学結晶(12)に接続されている、ことを特徴とする、請求項1または2に記載の音響光学偏向器。
- 前記音響光学結晶(12’,12”)の間に配置された前記変換器(14”)の厚さは、100μm未満であることを特徴とする、請求項1〜3のいずれか1項に記載の音響光学偏向器。
- 前記2つの電極(20)のうちの少なくとも一方の電極(20a、20b)は、前記変換器(14)を制御する電気信号発生器(18)に接続されていることを特徴とする、請求項3または4に記載の音響光学偏向器。
- 前記第2の電気音響変換器(14”)は、第2の音波(15”)を生成することを特徴とする、請求項1〜5のいずれか1項に記載の音響光学偏向器。
- 前記音響アイソレータ(16)は、空隙および/または真空空間を有することを特徴とする、請求項1〜5のいずれか1項に記載の音響光学偏向器。
- 層状構造を有する音響光学偏向器(10)を用いて光ビーム(50)を偏向させる方法であって、前記音響光学偏向器は、少なくとも第1および第2の音響光学結晶(12,12’,12”)と、少なくとも、前記第1の音響光学結晶(12’)に接続された第1の電気音響変換器(14’)および前記第2の音響光学結晶(12”)に接続された第2の電気音響変換器(14”)と、を含む、方法において、
前記音響光学結晶(12,12’,12”)が、音響光学偏向器(10)に備えるアパーチャ(11)を帯状域に分割し、
同時に、前記第1の音響光学結晶(12’)において、前記第1の電気音響変換器(14’)を用いて第1の音波(15’)を生成し、前記第2の音響光学結晶(12”)において、前記第1の音響光学結晶(12’)と前記第2の結晶(12”)との間に配置された前記第2の電気音響変換器(14”)を用いて第2の音波(15”)を生成すると共に、
前記光ビーム(50)を前記アパーチャ(11)の前記帯状域に通過させる、
ことを特徴とする方法。 - 個々の前記音響光学結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶(12’,12”)において同期的に音波(15’、15”)を生成することを特徴とする、請求項8に記載の方法。
- 個々の前記結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶を用いて前記光ビーム(50)を1点に合焦させることを特徴とする、請求項8または9に記載の方法。
- 個々の前記結晶(12’,12”)に接続された前記電気音響変換器(14’,14”)の同期制御によって、個々の前記音響光学結晶(12’,12”)を用いて前記光ビーム(50)を少なくとも2点に合焦させることを特徴とする、請求項8または9に記載の方法。
- 前記音響光学偏向器(10)において、前記音響光学偏向器(10)のアパーチャ(11)全体を満たす所望の周波数プロファイルを有する音波(15)を生成し、このとき、個々の前記音響光学結晶(12)では、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当する前記音波(15)の空間部分を生成する、ことを特徴とする、請求項8〜11のいずれか1項に記載の方法。
- 個々の前記音響光学結晶(12)において、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当するチャープ信号の空間部分を生成することによって、前記チャープ信号に対応した周波数プロファイルを有する音波(15)を生成することを特徴とする、請求項8〜10または12のいずれか1項に記載の方法。
- 個々の前記音響光学結晶(12)において、所与の音響光学結晶(12)に属する前記電気音響変換器(14)を用いて、所与の音響光学結晶(12)に相当する前記チャープ信号の所与の空間部分を生成することによって、複数のチャープ信号で構成される周波数プロファイルを有する音波(15)を生成して、前記音響光学偏向器(10)の前記アパーチャ(11)を通過する前記光ビーム(50)を複数点に合焦させる、ことを特徴とする、請求項9または11または12のいずれか1項に記載の方法。
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HU1500264A HUP1500264A2 (en) | 2015-06-01 | 2015-06-01 | Layered structured acousto-optical deflector and method for optical beam deflection with deflectior |
HUP1500264 | 2015-06-01 | ||
PCT/HU2016/050020 WO2016193770A1 (en) | 2015-06-01 | 2016-05-31 | Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector |
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JP2018517937A JP2018517937A (ja) | 2018-07-05 |
JP6866309B2 true JP6866309B2 (ja) | 2021-04-28 |
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US (1) | US10613414B2 (ja) |
EP (1) | EP3304184B1 (ja) |
JP (1) | JP6866309B2 (ja) |
CN (1) | CN107850796B (ja) |
CA (1) | CA2994903C (ja) |
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WO (1) | WO2016193770A1 (ja) |
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WO2020035710A1 (en) * | 2018-08-14 | 2020-02-20 | Femtonics Kft. | Method of scanning an optical beam using an acousto-optic deflector driven by chirped acoustic signals |
KR102236192B1 (ko) * | 2019-11-25 | 2021-04-06 | 한국표준과학연구원 | 굴절률분포형 음향양자결정 평면 렌즈 및 이의 설계방법 |
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CA2994903C (en) | 2023-07-11 |
US10613414B2 (en) | 2020-04-07 |
US20180157147A1 (en) | 2018-06-07 |
EP3304184B1 (en) | 2020-05-27 |
CA2994903A1 (en) | 2016-12-08 |
HUE051482T2 (hu) | 2021-03-01 |
WO2016193770A1 (en) | 2016-12-08 |
CN107850796B (zh) | 2022-03-01 |
JP2018517937A (ja) | 2018-07-05 |
EP3304184A1 (en) | 2018-04-11 |
CN107850796A (zh) | 2018-03-27 |
HUP1500264A2 (en) | 2018-05-02 |
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