HUP1500264A2 - Layered structured acousto-optical deflector and method for optical beam deflection with deflectior - Google Patents

Layered structured acousto-optical deflector and method for optical beam deflection with deflectior

Info

Publication number
HUP1500264A2
HUP1500264A2 HU1500264A HUP1500264A HUP1500264A2 HU P1500264 A2 HUP1500264 A2 HU P1500264A2 HU 1500264 A HU1500264 A HU 1500264A HU P1500264 A HUP1500264 A HU P1500264A HU P1500264 A2 HUP1500264 A2 HU P1500264A2
Authority
HU
Hungary
Prior art keywords
deflectior
acousto
optical
beam deflection
layered structured
Prior art date
Application number
HU1500264A
Other languages
English (en)
Hungarian (hu)
Inventor
Rozsa Balazs Dr
Gergely Katona
Mate Veress
Pal Maak
Gergely Szalay
Original Assignee
Femtonics Kft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Femtonics Kft filed Critical Femtonics Kft
Priority to HU1500264A priority Critical patent/HUP1500264A2/hu
Priority to US15/578,590 priority patent/US10613414B2/en
Priority to HUE16738857A priority patent/HUE051482T2/hu
Priority to CA2994903A priority patent/CA2994903C/en
Priority to EP16738857.8A priority patent/EP3304184B1/en
Priority to CN201680040531.0A priority patent/CN107850796B/zh
Priority to PCT/HU2016/050020 priority patent/WO2016193770A1/en
Priority to JP2017562704A priority patent/JP6866309B2/ja
Publication of HUP1500264A2 publication Critical patent/HUP1500264A2/hu

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
HU1500264A 2015-06-01 2015-06-01 Layered structured acousto-optical deflector and method for optical beam deflection with deflectior HUP1500264A2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
HU1500264A HUP1500264A2 (en) 2015-06-01 2015-06-01 Layered structured acousto-optical deflector and method for optical beam deflection with deflectior
US15/578,590 US10613414B2 (en) 2015-06-01 2016-05-31 Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector
HUE16738857A HUE051482T2 (hu) 2015-06-01 2016-05-31 Réteges szerkezetû akuszto-optikai deflektor és eljárás optikai nyaláb eltérítésére ilyen deflektor segítségével
CA2994903A CA2994903C (en) 2015-06-01 2016-05-31 Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector
EP16738857.8A EP3304184B1 (en) 2015-06-01 2016-05-31 Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector
CN201680040531.0A CN107850796B (zh) 2015-06-01 2016-05-31 具有分层结构的声光偏转器及使用这种偏转器偏转光束的方法
PCT/HU2016/050020 WO2016193770A1 (en) 2015-06-01 2016-05-31 Acousto-optic deflector with layered structure and method for deflecting an optical beam with such deflector
JP2017562704A JP6866309B2 (ja) 2015-06-01 2016-05-31 層状構造を有する音響光学偏向器およびその偏向器を用いて光ビームを偏向させる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU1500264A HUP1500264A2 (en) 2015-06-01 2015-06-01 Layered structured acousto-optical deflector and method for optical beam deflection with deflectior

Publications (1)

Publication Number Publication Date
HUP1500264A2 true HUP1500264A2 (en) 2018-05-02

Family

ID=89991844

Family Applications (2)

Application Number Title Priority Date Filing Date
HU1500264A HUP1500264A2 (en) 2015-06-01 2015-06-01 Layered structured acousto-optical deflector and method for optical beam deflection with deflectior
HUE16738857A HUE051482T2 (hu) 2015-06-01 2016-05-31 Réteges szerkezetû akuszto-optikai deflektor és eljárás optikai nyaláb eltérítésére ilyen deflektor segítségével

Family Applications After (1)

Application Number Title Priority Date Filing Date
HUE16738857A HUE051482T2 (hu) 2015-06-01 2016-05-31 Réteges szerkezetû akuszto-optikai deflektor és eljárás optikai nyaláb eltérítésére ilyen deflektor segítségével

Country Status (7)

Country Link
US (1) US10613414B2 (ja)
EP (1) EP3304184B1 (ja)
JP (1) JP6866309B2 (ja)
CN (1) CN107850796B (ja)
CA (1) CA2994903C (ja)
HU (2) HUP1500264A2 (ja)
WO (1) WO2016193770A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10401704B2 (en) * 2016-11-11 2019-09-03 Asml Netherlands B.V. Compensating for a physical effect in an optical system
EP3837580A1 (en) * 2018-08-14 2021-06-23 Femtonics Kft. Method of scanning an optical beam using an acousto-optic deflector driven by chirped acoustic signals
KR102236192B1 (ko) * 2019-11-25 2021-04-06 한국표준과학연구원 굴절률분포형 음향양자결정 평면 렌즈 및 이의 설계방법

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DE2353950A1 (de) * 1973-10-27 1975-04-30 Philips Patentverwaltung Vorrichtung zur unterdrueckung von stoerlicht in digitalen elektro-optischen lichtablenkern
JPS57190926A (en) * 1981-05-20 1982-11-24 Hagiwara Denki Kk Multispot acoustooptic modulator
JPS5919921A (ja) * 1982-07-27 1984-02-01 Hoya Corp 多ビ−ム音響光学変調装置
JPS5919920A (ja) * 1982-07-27 1984-02-01 Hoya Corp 多ビ−ム音響光学変調装置
US4592621A (en) * 1982-07-27 1986-06-03 Hoya Corporation Acoustooptic modulation element and system for acoustooptically carrying out modulation of a plurality of parallel beams by the use of a single acoustooptic medium
US4566760A (en) * 1984-04-12 1986-01-28 The United States Of America As Represented By The Secretary Of The Army Multi-product acousto-optic time integrating correlator
JPS61278824A (ja) * 1985-06-05 1986-12-09 Fuji Photo Film Co Ltd 光合波装置
JPH03100628A (ja) * 1989-09-14 1991-04-25 Sony Corp レーザ描画装置
JPH04155310A (ja) * 1990-10-18 1992-05-28 Matsushita Electric Ind Co Ltd 音響光学素子
US5633747A (en) * 1994-12-21 1997-05-27 Tencor Instruments Variable spot-size scanning apparatus
FR2751095B1 (fr) * 1996-07-09 1998-10-30 Thomson Csf Dispositif de controle d'impulsions lumineuses par un dispositif programmable acousto-optique
JP3132419B2 (ja) * 1997-05-20 2001-02-05 日本電気株式会社 ビーム偏向装置
US6295157B1 (en) * 1999-08-23 2001-09-25 Etec Systems, Inc. Thermally balanced acousto-optic modulator
US6853474B2 (en) * 2002-04-04 2005-02-08 Cabot Microelectronics Corporation Process for fabricating optical switches
DE102004022654A1 (de) * 2003-05-15 2004-12-23 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Heterodynstrahl-Bereitstellung mit Aktivsteuerung zweier orthogonaler Polarisierungen
GB2427282A (en) * 2005-06-17 2006-12-20 Thales Holdings Uk Plc Acousto-optic deflection
GB0617945D0 (en) * 2006-09-12 2006-10-18 Ucl Business Plc Imaging apparatus and methods
JP2011085916A (ja) * 2009-09-15 2011-04-28 Ricoh Co Ltd 複数ビーム偏向器、二次元スキャナ及び複数ビーム偏向モジュール
FR2952263B1 (fr) * 2009-10-29 2012-01-06 Univ Paris Descartes Procede et dispositif d'annulation d'echo acoustique par tatouage audio
CN102656513B (zh) * 2009-11-13 2016-01-27 辛诺普蒂克斯照明电气设备有限公司 用于调制和显示光学效应的系统和方法
GB201106787D0 (en) * 2011-04-20 2011-06-01 Ucl Business Plc Methods and apparatus to control acousto-optic deflectors
US8797123B2 (en) * 2011-09-14 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Double film bulk acoustic resonator having electrode edge alignments providing improved quality factor or electromechanical coupling coefficient
PL2800995T3 (pl) 2012-01-05 2019-10-31 Femtonics Kft Sposób skanowania wzdłuż ciągłej trajektorii skanowania za pomocą systemu skanującego
CN202693930U (zh) * 2012-08-21 2013-01-23 中国电子科技集团公司第二十六研究所 宽带声光器件
US10018889B2 (en) * 2013-11-28 2018-07-10 Femtonics Kft. Acousto-optic deflector comprising multiple electro-acoustic transducers
JP6652559B2 (ja) * 2014-11-12 2020-02-26 オーボテック リミテッド 光学装置及び光学方法
US10996540B2 (en) * 2018-04-26 2021-05-04 Mycronic AB Compact alpha-BBO acousto-optic deflector with high resolving power for UV and visible radiation

Also Published As

Publication number Publication date
US20180157147A1 (en) 2018-06-07
HUE051482T2 (hu) 2021-03-01
CN107850796B (zh) 2022-03-01
JP6866309B2 (ja) 2021-04-28
CN107850796A (zh) 2018-03-27
CA2994903A1 (en) 2016-12-08
JP2018517937A (ja) 2018-07-05
EP3304184A1 (en) 2018-04-11
EP3304184B1 (en) 2020-05-27
CA2994903C (en) 2023-07-11
WO2016193770A1 (en) 2016-12-08
US10613414B2 (en) 2020-04-07

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Legal Events

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FA9A Lapse of provisional patent protection due to relinquishment or protection considered relinquished