JP2018505561A5 - - Google Patents
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- Publication number
- JP2018505561A5 JP2018505561A5 JP2017541608A JP2017541608A JP2018505561A5 JP 2018505561 A5 JP2018505561 A5 JP 2018505561A5 JP 2017541608 A JP2017541608 A JP 2017541608A JP 2017541608 A JP2017541608 A JP 2017541608A JP 2018505561 A5 JP2018505561 A5 JP 2018505561A5
- Authority
- JP
- Japan
- Prior art keywords
- elongated features
- radially aligned
- outer edge
- processing chamber
- electrostatic chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/616,647 | 2015-02-06 | ||
| US14/616,647 US20160230269A1 (en) | 2015-02-06 | 2015-02-06 | Radially outward pad design for electrostatic chuck surface |
| PCT/US2016/012362 WO2016126360A1 (en) | 2015-02-06 | 2016-01-06 | Radially outward pad design for electrostatic chuck surface |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018505561A JP2018505561A (ja) | 2018-02-22 |
| JP2018505561A5 true JP2018505561A5 (https=) | 2019-02-14 |
| JP6711838B2 JP6711838B2 (ja) | 2020-06-17 |
Family
ID=56564492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017541608A Active JP6711838B2 (ja) | 2015-02-06 | 2016-01-06 | 静電チャック表面の半径方向外側パッド設計 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20160230269A1 (https=) |
| EP (1) | EP3254307B1 (https=) |
| JP (1) | JP6711838B2 (https=) |
| KR (1) | KR102619126B1 (https=) |
| CN (2) | CN114686834A (https=) |
| TW (1) | TWI685916B (https=) |
| WO (1) | WO2016126360A1 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9646843B2 (en) * | 2014-12-08 | 2017-05-09 | Applied Materials, Inc. | Tunable magnetic field to improve uniformity |
| KR102669903B1 (ko) * | 2016-08-30 | 2024-05-28 | 주성엔지니어링(주) | 기판 처리 장치 |
| US20180148835A1 (en) | 2016-11-29 | 2018-05-31 | Lam Research Corporation | Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating |
| KR102359591B1 (ko) * | 2017-06-16 | 2022-02-08 | 주성엔지니어링(주) | 진공용 회전 전기 커넥터 |
| JP7208168B2 (ja) * | 2017-06-16 | 2023-01-18 | チュソン エンジニアリング カンパニー，リミテッド | 基板処理装置及び真空回転電気コネクタ |
| CN108538776B (zh) * | 2018-03-29 | 2021-11-16 | 北京北方华创微电子装备有限公司 | 静电卡盘及其制造方法 |
| WO2019245727A1 (en) | 2018-06-22 | 2019-12-26 | Applied Materials, Inc. | Methods of minimizing wafer backside damage in semiconductor wafer processing |
| JP7134826B2 (ja) * | 2018-10-11 | 2022-09-12 | 東京エレクトロン株式会社 | 静電チャックの生産方法 |
| CN110158029B (zh) * | 2019-07-05 | 2020-07-17 | 北京北方华创微电子装备有限公司 | 掩膜结构和fcva设备 |
| KR20240021679A (ko) * | 2021-06-14 | 2024-02-19 | 램 리써치 코포레이션 | 기판 운동 방지를 위한 전면 및 후면 압력 모니터링 |
| CN117836899A (zh) * | 2021-08-13 | 2024-04-05 | 阳光技术有限责任公司 | 用于如离子和同位素生产等高真空应用的磁旋转装置 |
| KR20240090158A (ko) | 2021-10-01 | 2024-06-21 | 샤인 테크놀로지스 엘엘씨 | 이온 수집을 위한 섬유질 격자를 갖는 이온 생성 시스템 |
| JP2023176711A (ja) * | 2022-05-31 | 2023-12-13 | 日本特殊陶業株式会社 | 基板保持部材 |
| JP2025539558A (ja) * | 2022-10-03 | 2025-12-05 | エレベイテッド マテリアルズ ジャーマニー ゲーエムベーハー | ウェブコーティング方法および一体型静電クランプを備えた換気冷却ドラム |
| US12600682B2 (en) | 2022-11-11 | 2026-04-14 | Applied Materials, Inc. | Monolithic substrate support having porous features and methods of forming the same |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5646814A (en) * | 1994-07-15 | 1997-07-08 | Applied Materials, Inc. | Multi-electrode electrostatic chuck |
| US5825607A (en) * | 1996-05-08 | 1998-10-20 | Applied Materials, Inc. | Insulated wafer spacing mask for a substrate support chuck and method of fabricating same |
| JP3805134B2 (ja) * | 1999-05-25 | 2006-08-02 | 東陶機器株式会社 | 絶縁性基板吸着用静電チャック |
| JP3859937B2 (ja) * | 2000-06-02 | 2006-12-20 | 住友大阪セメント株式会社 | 静電チャック |
| US7161121B1 (en) * | 2001-04-30 | 2007-01-09 | Lam Research Corporation | Electrostatic chuck having radial temperature control capability |
| KR100422444B1 (ko) * | 2001-05-29 | 2004-03-12 | 삼성전자주식회사 | 정전 척에 설치되는 웨이퍼 공간 지지장치 및 그 제조방법 |
| US6946403B2 (en) * | 2003-10-28 | 2005-09-20 | Axcelis Technologies, Inc. | Method of making a MEMS electrostatic chuck |
| KR100666039B1 (ko) * | 2003-12-05 | 2007-01-10 | 동경 엘렉트론 주식회사 | 정전척 |
| US7697260B2 (en) * | 2004-03-31 | 2010-04-13 | Applied Materials, Inc. | Detachable electrostatic chuck |
| JP5069452B2 (ja) * | 2006-04-27 | 2012-11-07 | アプライド マテリアルズ インコーポレイテッド | 二重温度帯を有する静電チャックをもつ基板支持体 |
| US8422193B2 (en) * | 2006-12-19 | 2013-04-16 | Axcelis Technologies, Inc. | Annulus clamping and backside gas cooled electrostatic chuck |
| US7576018B2 (en) * | 2007-03-12 | 2009-08-18 | Tokyo Electron Limited | Method for flexing a substrate during processing |
| WO2008112673A2 (en) * | 2007-03-12 | 2008-09-18 | Tokyo Electron Limited | Dynamic temperature backside gas control for improved within-substrate processing uniformity |
| US7667944B2 (en) * | 2007-06-29 | 2010-02-23 | Praxair Technology, Inc. | Polyceramic e-chuck |
| TWI475594B (zh) * | 2008-05-19 | 2015-03-01 | 恩特格林斯公司 | 靜電夾頭 |
| WO2010019430A2 (en) * | 2008-08-12 | 2010-02-18 | Applied Materials, Inc. | Electrostatic chuck assembly |
| US8861170B2 (en) * | 2009-05-15 | 2014-10-14 | Entegris, Inc. | Electrostatic chuck with photo-patternable soft protrusion contact surface |
| NL2009189A (en) * | 2011-08-17 | 2013-02-19 | Asml Netherlands Bv | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method. |
| US9349630B2 (en) * | 2013-03-15 | 2016-05-24 | Applied Materials, Inc. | Methods and apparatus for electrostatic chuck repair and refurbishment |
-
2015
- 2015-02-06 US US14/616,647 patent/US20160230269A1/en not_active Abandoned
-
2016
- 2016-01-06 WO PCT/US2016/012362 patent/WO2016126360A1/en not_active Ceased
- 2016-01-06 CN CN202210254455.0A patent/CN114686834A/zh active Pending
- 2016-01-06 JP JP2017541608A patent/JP6711838B2/ja active Active
- 2016-01-06 CN CN201680004654.9A patent/CN107208261A/zh active Pending
- 2016-01-06 EP EP16746928.7A patent/EP3254307B1/en active Active
- 2016-01-06 KR KR1020177024969A patent/KR102619126B1/ko active Active
- 2016-01-08 TW TW105100585A patent/TWI685916B/zh active
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