JP2018501509A - オフセット印刷用クリシェの製造方法及びオフセット印刷用クリシェ - Google Patents
オフセット印刷用クリシェの製造方法及びオフセット印刷用クリシェ Download PDFInfo
- Publication number
- JP2018501509A JP2018501509A JP2017527770A JP2017527770A JP2018501509A JP 2018501509 A JP2018501509 A JP 2018501509A JP 2017527770 A JP2017527770 A JP 2017527770A JP 2017527770 A JP2017527770 A JP 2017527770A JP 2018501509 A JP2018501509 A JP 2018501509A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- negative photoresist
- groove
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
- B41N1/00—Printing plates or foils; Materials therefor
- B41N1/04—Printing plates or foils; Materials therefor metallic
- B41N1/06—Printing plates or foils; Materials therefor metallic for relief printing or intaglio printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
- B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
- B41C1/1008—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme by removal or destruction of lithographic material on the lithographic support, e.g. by laser or spark ablation; by the use of materials rendered soluble or insoluble by heat exposure, e.g. by heat produced from a light to heat transforming system; by on-the-press exposure or on-the-press development, e.g. by the fountain of photolithographic materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0385—Macromolecular compounds which are rendered insoluble or differentially wettable using epoxidised novolak resin
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/325—Non-aqueous compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
- H01L21/02288—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating printing, e.g. ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67225—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one lithography chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76817—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics using printing or stamping techniques
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Thermal Sciences (AREA)
- Optics & Photonics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Printing Methods (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
前記遮光マスクパターンを形成するステップは、基板上に遮光材料インクでパターニングをするステップであってもよい。
ガラス基板上にアルミニウムを120nm蒸着した後、前記アルミニウム蒸着層上にリバースオフセット印刷工程を利用して、配線部の線幅が30.2μmであり、連結部の線幅が3.7μm〜29.7μmであり、画面部の線幅が3.2μmのレジストパターンを形成した。アルミニウムエッチング液でレジストパターンが形成されていないアルミニウムを除去した後、レジスト剥離液でレジストパターンを除去して、遮光マスクパターンとしてアルミニウムパターンを図6のように形成した(この時、配線部のアルミニウムパターンの平均線幅:30μm、連結部のアルミニウムパターンの線幅:3.5〜29.5μm、連結部のアルミニウムパターンの平均線幅:16.87μm、画面部のアルミニウムパターンの平均線幅:3.0μm)。
実施例1で製造されたアルミニウムパターンが形成されたガラス基板上にSU−8 2005ネガティブフォトレジストを用いて平均厚さが6.0μmのネガティブフォトレジスト層を形成した。
実施例1で製造されたアルミニウムパターンが形成されたガラス基板上にSU−8 2005ネガティブフォトレジストを用いて平均厚さが7.0μmのネガティブフォトレジスト層を形成した。
クロムが100nm厚さで蒸着されたガラス基板上にフォトレジスト(PR)を塗布した後、レーザ露光及びクロムエッチング工程によりクロムマスクパターンを形成した。クロムマスクパターンが備えられた全面にモリブデンを100nm厚さで蒸着した。前記積層体上にフォトレジスト(PR)を塗布した後、レーザ露光及びモリブデンエッチング工程により配線部に対応する領域のモリブデン層を選択的に除去した。フッ酸エッチング液を用いて前記積層体の露出されたガラス面(配線部に該当)を5μm深さでエッチングした。前記積層体の上面のモリブデン層をモリブデンエッチング液を活用して除去した後、フッ酸エッチング液を用いて露出されたガラス面を250nm深さでさらにエッチングした。前記積層体の上面のクロム層をクロムエッチング液で除去して二重エッチングクリシェを完成した。前記工程により製造された二重エッチングクリシェの画面部の線幅は3μm、画面部の溝部深さは250nmであり、配線部の線幅は30μm、配線部の溝部深さは5.25μmであった。
剥離液の耐久性実験
前記実施例1〜3及び比較例により製造されたクリシェをレジスト剥離液(LG化学、品名:LGS−202)に24時間浸漬した後、溝部深さの変化及びパターンの脱膜有無を観察し、その結果を下記の表1に示す。
印圧マージンに関連した実験
レジストインクが3μm厚さで塗布されたブランケットロールを前記実施例1〜3及び比較例により製造されたクリシェに回転接触した。不要なレジストパターンがブランケットロールから前記クリシェ上部に転写された後、レジストパターンが備えられているブランケットロールを被印刷基材と回転接触して被印刷基材上にレジストパターンを転写した。
2 ・・・エッチングパターン
3 ・・・レジストパターン
10 ・・・クリシェ
100 ・・・基板
200 ・・・遮光マスクパターン
300 ・・・ネガティブフォトレジスト層
310 ・・・ネガティブフォトレジストパターン層
320 ・・・硬化したネガティブフォトレジストパターン層
330 ・・・溝部パターン
340 ・・・陽刻部
400 ・・・金属酸化膜
Claims (5)
- 基板上に遮光マスクパターンを形成するステップ、
前記遮光マスクパターンが備えられた基板上にネガティブフォトレジスト層を形成するステップ、
基板側に光を照射して露光するステップ、及び
露光されたネガティブフォトレジスト層を現像して、突出された陽刻部と現像された溝部パターンを有するネガティブフォトレジストパターン層を形成するステップを含み、
前記ネガティブフォトレジスト層の平均厚さは3μm以上であり、
前記ネガティブフォトレジストパターン層は線幅が互いに異なる少なくとも2種の溝部パターンを有し、前記少なくとも2種の溝部パターン間の線幅差は10μm以上であり、
前記線幅差が10μm以上の少なくとも2種の溝部パターンは互いに連結されているオフセット印刷用クリシェの製造方法。 - 前記ネガティブフォトレジスト層を現像するステップ後に、ネガティブフォトレジストパターン層が形成された基板上に金属酸化物を蒸着するステップをさらに含む、請求項1に記載のオフセット印刷用クリシェの製造方法。
- 基板、
前記基板上に備えられ、陽刻部と溝部パターンを有するネガティブフォトレジストパターン層、及び
前記溝部パターンの底部に備えられた遮光マスクパターンを含み、
前記ネガティブフォトレジストパターン層の溝部パターンの平均深さは3μm以上であり、
前記ネガティブフォトレジストパターン層は線幅が互いに異なる少なくとも2種の溝部パターンを含み、前記ネガティブフォトレジストパターン層の溝部パターンの平均深さは同一であり、
前記少なくとも2種の溝部パターン間の線幅差は10μm以上であり、前記線幅差が10μm以上の少なくとも2種の溝部パターンは互いに連結されているオフセット印刷用クリシェ。 - 前記ネガティブフォトレジストパターン層が備えられた基板上に備えられた金属酸化膜をさらに含む、請求項3に記載のオフセット印刷用クリシェ。
- 前記金属酸化膜の平均厚さは200nm以下である、請求項4に記載のオフセット印刷用クリシェ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20150120159 | 2015-08-26 | ||
KR10-2015-0120159 | 2015-08-26 | ||
PCT/KR2016/009529 WO2017034372A1 (ko) | 2015-08-26 | 2016-08-26 | 오프셋 인쇄용 클리쉐의 제조방법 및 오프셋 인쇄용 클리쉐 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018501509A true JP2018501509A (ja) | 2018-01-18 |
JP6358488B2 JP6358488B2 (ja) | 2018-07-18 |
Family
ID=58100537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017527770A Active JP6358488B2 (ja) | 2015-08-26 | 2016-08-26 | オフセット印刷用クリシェの製造方法及びオフセット印刷用クリシェ |
Country Status (6)
Country | Link |
---|---|
US (1) | US10696081B2 (ja) |
EP (1) | EP3343591B1 (ja) |
JP (1) | JP6358488B2 (ja) |
KR (1) | KR102113903B1 (ja) |
CN (1) | CN107107603B (ja) |
WO (1) | WO2017034372A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110032043B (zh) * | 2019-04-22 | 2022-06-21 | 业成科技(成都)有限公司 | 光致抗蚀刻剂薄膜及应用其的光蚀刻方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002076575A (ja) * | 2000-08-29 | 2002-03-15 | Toppan Printing Co Ltd | 半導体装置用基板の製造方法 |
JP2004157542A (ja) * | 2002-11-06 | 2004-06-03 | Samsung Sdi Co Ltd | プラズマディスプレイパネル用フィルタおよびその製造方法 |
US20080000374A1 (en) * | 2006-06-21 | 2008-01-03 | L.G.Philips Lcd Co., Ltd. | Printing apparatus, patterning method, and method of fabricating liquid crystal display device using the same |
JP2009078425A (ja) * | 2007-09-26 | 2009-04-16 | Toppan Printing Co Ltd | 印刷用版およびその製造方法および印刷物の製造方法 |
JP2014096593A (ja) * | 2013-12-05 | 2014-05-22 | Dainippon Printing Co Ltd | マイクロコンタクトプリンティング用スタンプ作製用マスター版の製造方法、マイクロコンタクトプリンティング用スタンプ作製用マスター版、およびマイクロコンタクトプリンティング用スタンプの製造方法。 |
EP2772836A1 (en) * | 2012-11-30 | 2014-09-03 | LG Chem, Ltd. | Touchscreen and method for manufacturing same |
JP2014529535A (ja) * | 2011-09-27 | 2014-11-13 | エルジー・ケム・リミテッド | オフセット印刷用クリシェおよびその製造方法 |
US20150132477A1 (en) * | 2012-05-31 | 2015-05-14 | Lg Chem, Ltd. | Cliché and printing apparatus comprising same |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2291216B (en) * | 1994-06-30 | 1998-01-07 | Matsushita Electric Works Ltd | Method of manufacturing a printed circuit board |
DE19845440A1 (de) * | 1998-10-02 | 2000-04-06 | Giesecke & Devrient Gmbh | Stichtiefdruckverfahren zum vollflächigen Bedrucken großer Flächen |
US6030732A (en) * | 1999-01-07 | 2000-02-29 | Taiwan Semiconductor Manufacturing Company | In-situ etch process control monitor |
US6242156B1 (en) * | 2000-06-28 | 2001-06-05 | Gary Ganghui Teng | Lithographic plate having a conformal radiation-sensitive layer on a rough substrate |
DE10044403A1 (de) * | 2000-09-08 | 2002-03-21 | Giesecke & Devrient Gmbh | Datenträger mit Stichtiefdruckbild und Verfahren zur Umsetzung von Bildmotiven in Linienstrukturen sowie in eine Stichtiefdruckplatte |
KR100825315B1 (ko) * | 2001-12-29 | 2008-04-28 | 엘지디스플레이 주식회사 | 잉크인쇄용 클리체 및 그 제조방법 |
KR100805047B1 (ko) * | 2003-09-08 | 2008-02-20 | 엘지.필립스 엘시디 주식회사 | 인쇄 장비 및 이를 이용한 패턴 형성 방법 |
US20060160016A1 (en) * | 2004-10-12 | 2006-07-20 | Presstek, Inc. | Inkjet-imageable lithographic printing members and methods of preparing and imaging them |
KR101147079B1 (ko) * | 2005-08-25 | 2012-05-17 | 엘지디스플레이 주식회사 | 인쇄판의 제조방법 |
TWI458648B (zh) * | 2006-04-07 | 2014-11-01 | Mitsubishi Paper Mills Ltd | A method for manufacturing a photographic mask for printing a resin, and a screen printing mask for resin |
JP2008246829A (ja) | 2007-03-30 | 2008-10-16 | Nec Lcd Technologies Ltd | 凸版反転オフセット印刷用印刷版及びその製造方法、並びに表示装置及び表示装置用基板の製造方法 |
KR101069464B1 (ko) | 2007-04-06 | 2011-09-30 | 주식회사 엘지화학 | 롤 프린팅 장치 |
US8845916B2 (en) | 2007-10-01 | 2014-09-30 | Lg Chem, Ltd. | Method for manufacturing glass cliche using laser etching and apparatus for laser irradiation therefor |
US8211222B2 (en) * | 2007-12-21 | 2012-07-03 | Lg Chem, Ltd. | Ink composition roll for printing |
KR101403870B1 (ko) * | 2008-05-16 | 2014-06-09 | 엘지디스플레이 주식회사 | 클리체 형성방법 및 이를 포함하는 레지스트 패턴 인쇄장치 |
KR101113063B1 (ko) * | 2008-05-22 | 2012-02-15 | 주식회사 엘지화학 | 폴리이미드와 노볼락 수지를 포함하는 감광성 수지 조성물 |
KR101352118B1 (ko) * | 2008-08-08 | 2014-01-14 | 엘지디스플레이 주식회사 | 발광 표시장치 및 이의 제조방법 |
KR20120055754A (ko) * | 2010-11-22 | 2012-06-01 | 한국전자통신연구원 | 클리세 및 그의 제조방법 |
TWI520852B (zh) | 2011-04-01 | 2016-02-11 | Lg化學股份有限公司 | 印刷設備及印刷方法 |
KR101856938B1 (ko) * | 2011-08-04 | 2018-05-14 | 삼성디스플레이 주식회사 | 오프셋 인쇄 기판의 제조 방법 및 이를 이용한 표시 기판의 제조 방법 |
KR101226914B1 (ko) * | 2012-03-13 | 2013-01-29 | 이동열 | 미세패턴 형성방법 및 이를 이용하여 제조된 클리쉐 |
US9341946B2 (en) | 2012-05-25 | 2016-05-17 | Lg Chem, Ltd. | Photosensitive resin composition, pattern formed using same and display panel comprising same |
KR101662892B1 (ko) * | 2013-08-01 | 2016-10-05 | 주식회사 엘지화학 | 오프셋 인쇄용 블랭킷 및 이를 이용하여 형성된 미세 패턴 |
-
2016
- 2016-08-26 JP JP2017527770A patent/JP6358488B2/ja active Active
- 2016-08-26 WO PCT/KR2016/009529 patent/WO2017034372A1/ko active Application Filing
- 2016-08-26 CN CN201680004462.8A patent/CN107107603B/zh active Active
- 2016-08-26 EP EP16839660.4A patent/EP3343591B1/en active Active
- 2016-08-26 US US15/536,046 patent/US10696081B2/en active Active
- 2016-08-26 KR KR1020160109339A patent/KR102113903B1/ko active IP Right Grant
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002076575A (ja) * | 2000-08-29 | 2002-03-15 | Toppan Printing Co Ltd | 半導体装置用基板の製造方法 |
JP2004157542A (ja) * | 2002-11-06 | 2004-06-03 | Samsung Sdi Co Ltd | プラズマディスプレイパネル用フィルタおよびその製造方法 |
US20080000374A1 (en) * | 2006-06-21 | 2008-01-03 | L.G.Philips Lcd Co., Ltd. | Printing apparatus, patterning method, and method of fabricating liquid crystal display device using the same |
JP2009078425A (ja) * | 2007-09-26 | 2009-04-16 | Toppan Printing Co Ltd | 印刷用版およびその製造方法および印刷物の製造方法 |
JP2014529535A (ja) * | 2011-09-27 | 2014-11-13 | エルジー・ケム・リミテッド | オフセット印刷用クリシェおよびその製造方法 |
US20150132477A1 (en) * | 2012-05-31 | 2015-05-14 | Lg Chem, Ltd. | Cliché and printing apparatus comprising same |
JP2015525149A (ja) * | 2012-05-31 | 2015-09-03 | エルジー・ケム・リミテッド | クリシェおよびそれを含む印刷装置 |
EP2772836A1 (en) * | 2012-11-30 | 2014-09-03 | LG Chem, Ltd. | Touchscreen and method for manufacturing same |
JP2015532487A (ja) * | 2012-11-30 | 2015-11-09 | エルジー・ケム・リミテッド | タッチスクリーンおよびその製造方法 |
JP2014096593A (ja) * | 2013-12-05 | 2014-05-22 | Dainippon Printing Co Ltd | マイクロコンタクトプリンティング用スタンプ作製用マスター版の製造方法、マイクロコンタクトプリンティング用スタンプ作製用マスター版、およびマイクロコンタクトプリンティング用スタンプの製造方法。 |
Also Published As
Publication number | Publication date |
---|---|
US20170368862A1 (en) | 2017-12-28 |
EP3343591B1 (en) | 2020-01-29 |
CN107107603B (zh) | 2020-05-05 |
CN107107603A (zh) | 2017-08-29 |
EP3343591A1 (en) | 2018-07-04 |
KR20170026257A (ko) | 2017-03-08 |
JP6358488B2 (ja) | 2018-07-18 |
US10696081B2 (en) | 2020-06-30 |
EP3343591A4 (en) | 2019-05-01 |
WO2017034372A1 (ko) | 2017-03-02 |
KR102113903B1 (ko) | 2020-05-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9040149B2 (en) | Printing plate and method for manufacturing same | |
JP6458971B2 (ja) | フォトマスク、前記フォトマスクを含む積層体、前記フォトマスクの製造方法、前記フォトマスクを用いるパターン形成装置および前記フォトマスクを用いるパターン形成方法 | |
EP2762313B1 (en) | Cliche for offset-printing and method for manufacturing same | |
US20140373742A1 (en) | Method of manufacturing a high-resolution flexographic printing plate | |
JP6358488B2 (ja) | オフセット印刷用クリシェの製造方法及びオフセット印刷用クリシェ | |
JP4588041B2 (ja) | 樹脂モールドを利用した印刷版の製造方法 | |
KR20100072969A (ko) | 롤 프린트용 인쇄판의 제조방법 및 이를 이용한 액정표시장치의 제조방법 | |
KR102092993B1 (ko) | 포토마스크, 상기 포토마스크를 포함하는 적층체 및 상기 포토마스크의 제조방법 | |
KR102016616B1 (ko) | 오프셋 인쇄용 클리쉐의 제조방법 및 오프셋 인쇄용 클리쉐 | |
JP6458972B2 (ja) | フォトマスク、前記フォトマスクを含む積層体、前記フォトマスクの製造方法および前記フォトマスクを用いるパターン形成方法 | |
KR101581869B1 (ko) | 도금 프로세스를 이용한 그라비어 미세 선폭 가공 방법 및 이에 의해 미세 패턴이 형성된 그라비어 인쇄 제판 롤 | |
US9223201B2 (en) | Method of manufacturing a photomask with flexography | |
KR101235168B1 (ko) | 인쇄판 및 그 제조방법 | |
KR20110048605A (ko) | 액정표시장치용 클리체 및 그 제조방법 | |
KR101477299B1 (ko) | 그라비아 오프셋 인쇄장치용 요판 및 이의 제조방법 | |
JPH04267151A (ja) | 平板印刷版の製造方法 | |
KR20170001774A (ko) | 미세 패턴의 형성 방법 및 리버스 오프셋 인쇄용 클리쉐 | |
JP2015189114A (ja) | 印刷用版および印刷用版の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180426 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180522 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180606 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6358488 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |