JP2018206928A - 半導体基板の製造方法 - Google Patents
半導体基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 52
- 239000004065 semiconductor Substances 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims abstract 2
- 238000002310 reflectometry Methods 0.000 claims description 2
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 102
- 229910002601 GaN Inorganic materials 0.000 description 61
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 61
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 24
- 229910010271 silicon carbide Inorganic materials 0.000 description 24
- 238000010586 diagram Methods 0.000 description 14
- 150000004767 nitrides Chemical class 0.000 description 12
- 239000002245 particle Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】SiC基板の上面における350nm以上かつ720nm以下の波長を有する光に対する第1の反射率を測定する工程(S10)と、前記第1の反射率を測定した後、MOCVD法を用い前記SiC基板上にAlNバッファ層の成長を開始する工程(S12)と、前記AlNバッファ層を成長する間に、前記AlNバッファ層における前記波長を有する光に対する第2の反射率を測定する工程(S14)と、前記第1の反射率に対する前記第2の反射率の比が所定範囲内か否か判定する工程(S16)と、前記比が前記所定範囲内と判定したとき、前記AlNバッファ層の成長を終了する工程(S18)と、を含む半導体基板の製造方法。
【選択図】図9
Description
最初に本願発明の実施形態の内容を列記して説明する。
(1)本願発明の一実施例は、SiC基板の上面における350nm以上かつ720nm以下の波長を有する光に対する第1の反射率を測定する工程と、前記第1の反射率を測定した後、MOCVD法を用い前記SiC基板上にAlNバッファ層の成長を開始する工程と、前記AlNバッファ層を成長する間に、前記AlNバッファ層における前記波長を有する光に対する第2の反射率を測定する工程と、前記第1の反射率に対する前記第2の反射率の比が所定範囲内か否か判定する工程と、前記比が前記所定範囲内と判定したとき、前記AlNバッファ層の成長を終了する工程と、を含む半導体基板の製造方法である。
これにより、ドリフト現象が抑制できる条件でAlNバッファ層の膜厚を設定することができる。よって、ドリフト現象等の不安定な現象を抑制できる半導体基板の製造方法を提供することができる。
(2)前記波長は390nm以上かつ420nm以下であり、前記所定範囲は、前記比が0.92以上かつ0.935以下の範囲であることが好ましい。これにより、不安定な現象をより抑制できる。
(3)前記第1の反射率は、前記SiC基板の温度を前記AlNバッファ層の成長温度とした状態で測定することが好ましい。これにより、第1反射率を精度よく測定できる。
(4)前記AlNバッファ層の成長温度は1095℃以上かつ1105℃より低いことが好ましい。これにより、不安定な現象をより抑制できる。
(5)前記AlNバッファ層は、12nmより大きくかつ14nm以下の膜厚で成長されることが好ましい。これにより、不安定な現象をより抑制できる。
本発明の実施形態にかかる半導体基板の製造方法の具体例を、以下に図面を参照しつつ説明する。なお、本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。
図1(a)は、GaN系HEMTの断面図、図1(b)は、実験に用いた素子の断面図である。図1(a)に示すように、GaN系HEMT100では、SiC基板10上に窒化物半導体層20が積層されている。窒化物半導体層20は、SiC基板10側からAlNバッファ層12、GaNチャネル層14、AlGaN電子供給層16およびGaNキャップ層18である。GaNチャネル層14のAlGaN電子供給層16との界面付近には2次元電子ガス15が形成される。窒化物半導体層20上にソース電極22、ドレイン電極24およびゲート電極26が設けられている。
α=πd/λ (式1)
ここで、dおよびλはそれぞれ粒子直径および波長である。散乱係数αが1より十分小さいとき、粒子による散乱はレイリー散乱となる。AlNバッファ層12の膜厚は10nm程度のため、粒子サイズも10nm程度と考えられる。このため、波長が404.6nmおよび951.4nmではレイリー散乱となる。
κs=(2π5/3)・n・{(m2−1)/(m2+2)}2・d6/λ4 (式2)
ここで、d、nおよびmはそれぞれ粒子直径、粒子数および反射係数である。
式2のように、レイリー散乱係数は波長λの4乗に反比例する。つまり、波長が951.4nmの光のレイリー散乱の散乱係数κsは、波長が404.6nmの光の約1/30となる。このように、AlNバッファ層12表面に島状の表面荒れが生じるとレイリー散乱が生じる。これにより、反射率が低下する。一方、波長が951.4nmの光に対してはAlNバッファ層12表面に島状の表面荒れが生じてもレイリー散乱はほとんど生じない。このため、AlNバッファ層12の表面が島状となっても反射率はほとんど変化しない。以上のように、波長が404.6nmの光の反射率はAlNバッファ層12の表面状態を表していると考えられる。
12 AlNバッファ層
14 GaNチャネル層
16 電子供給層
18 GaNキャップ層
20 窒化物半導体層
22 ソース電極
24 ドレイン電極
26 ゲート電極
50 光照射装置
52 検出器
54 照射光
56 反射光
Claims (5)
- SiC基板の上面における350nm以上かつ720nm以下の波長を有する光に対する第1の反射率を測定する工程と、
前記第1の反射率を測定した後、MOCVD法を用い前記SiC基板上にAlNバッファ層の成長を開始する工程と、
前記AlNバッファ層を成長する間に、前記AlNバッファ層における前記波長を有する光に対する第2の反射率を測定する工程と、
前記第1の反射率に対する前記第2の反射率の比が所定範囲内か否か判定する工程と、
前記比が前記所定範囲内と判定したとき、前記AlNバッファ層の成長を終了する工程と、
を含む半導体基板の製造方法。 - 前記波長は390nm以上かつ420nm以下であり、
前記所定範囲は、前記比が0.92以上かつ0.935以下の範囲である請求項1記載の半導体基板の製造方法。 - 前記第1の反射率は、前記SiC基板の温度を前記AlNバッファ層の成長温度とした状態で測定する請求項1または2記載の半導体基板の製造方法。
- 前記AlNバッファ層の成長温度は1095℃以上かつ1105℃より低い請求項1から3のいずれか一項記載の半導体基板の製造方法。
- 前記AlNバッファ層は、12nmより大きくかつ14nm以下の膜厚で成長される、請求項1から4のいずれか一項記載の半導体基板の製造方法。
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