JP2018197257A5 - - Google Patents
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- JP2018197257A5 JP2018197257A5 JP2018153215A JP2018153215A JP2018197257A5 JP 2018197257 A5 JP2018197257 A5 JP 2018197257A5 JP 2018153215 A JP2018153215 A JP 2018153215A JP 2018153215 A JP2018153215 A JP 2018153215A JP 2018197257 A5 JP2018197257 A5 JP 2018197257A5
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- JP
- Japan
- Prior art keywords
- general formula
- compound represented
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- -1 silylphosphine compound Chemical class 0.000 claims 13
- 150000001875 compounds Chemical class 0.000 claims 11
- 239000003960 organic solvent Substances 0.000 claims 3
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000003118 aryl group Chemical group 0.000 claims 2
- 125000004432 carbon atom Chemical group C* 0.000 claims 2
- 238000004821 distillation Methods 0.000 claims 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 2
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 claims 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 2
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 2
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 2
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical class [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016191858 | 2016-09-29 | ||
| JP2016191858 | 2016-09-29 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018524857A Division JP6401426B2 (ja) | 2016-09-29 | 2017-09-19 | シリルホスフィン化合物の製造方法及びシリルホスフィン化合物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018197257A JP2018197257A (ja) | 2018-12-13 |
| JP2018197257A5 true JP2018197257A5 (enExample) | 2020-09-10 |
| JP7077180B2 JP7077180B2 (ja) | 2022-05-30 |
Family
ID=61759590
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018524857A Active JP6401426B2 (ja) | 2016-09-29 | 2017-09-19 | シリルホスフィン化合物の製造方法及びシリルホスフィン化合物 |
| JP2018153215A Active JP7077180B2 (ja) | 2016-09-29 | 2018-08-16 | シリルホスフィン化合物の製造方法及びシリルホスフィン化合物 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018524857A Active JP6401426B2 (ja) | 2016-09-29 | 2017-09-19 | シリルホスフィン化合物の製造方法及びシリルホスフィン化合物 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10934316B2 (enExample) |
| EP (1) | EP3521296B1 (enExample) |
| JP (2) | JP6401426B2 (enExample) |
| KR (1) | KR102569148B1 (enExample) |
| CN (2) | CN114957316B (enExample) |
| CA (1) | CA3036035A1 (enExample) |
| TW (1) | TW201827446A (enExample) |
| WO (1) | WO2018061869A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10934316B2 (en) * | 2016-09-29 | 2021-03-02 | Nippon Chemical Industrial Co., Ltd. | Process for producing silyl phosphine compound and silyl phosphine compound |
| WO2018160037A1 (ko) * | 2017-03-03 | 2018-09-07 | 에스케이케미칼주식회사 | 양자점 제조용 포스핀 전구체 및 이로 부터 제조되는 양자점 |
| KR102595255B1 (ko) | 2017-05-18 | 2023-10-27 | 에스케이케미칼 주식회사 | 양자점 제조용 포스핀 전구체 및 이로부터 제조되는 양자점 |
| JP7177142B2 (ja) * | 2018-03-27 | 2022-11-22 | 日本化学工業株式会社 | InP量子ドットの製造方法 |
| JP7508217B2 (ja) * | 2019-04-16 | 2024-07-01 | 日本化学工業株式会社 | InP量子ドット前駆体の製造方法及びInP系量子ドットの製造方法 |
| KR20210152053A (ko) * | 2019-04-16 | 2021-12-14 | 니폰 가가쿠 고교 가부시키가이샤 | InP 양자 도트 전구체의 제조 방법 및 InP계 양자 도트의 제조 방법 |
| KR102286852B1 (ko) * | 2019-04-24 | 2021-08-06 | 주식회사 제우스이엔피 | 실리콘질화막 식각액 조성물의 제조방법 |
| WO2025129020A1 (en) * | 2023-12-15 | 2025-06-19 | Asm Ip Holding B.V. | Methods and systems for forming a layer comprising silicon |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2907785A (en) * | 1957-10-07 | 1959-10-06 | Du Pont | Organic compounds of silicon and phosphorus and their preparation |
| DD274626A1 (de) | 1988-06-09 | 1989-12-27 | Univ Halle Wittenberg | Verfahren zur herstellung von organosilylphosphanen |
| KR100274626B1 (ko) | 1997-12-26 | 2000-12-15 | 윤종용 | 원고비틀림보정장치및방법 |
| JP2002313746A (ja) | 2001-04-18 | 2002-10-25 | Mitsubishi Chemicals Corp | 半導体超微粒子の製造方法 |
| FR2986527B1 (fr) * | 2012-02-02 | 2014-03-07 | Ecole Polytechnique Dgar | Procede de preparation de phosphines tertiaires et de derives de celles-ci. |
| KR102334258B1 (ko) * | 2014-11-18 | 2021-12-03 | 에스케이케미칼 주식회사 | 트리스(트리알킬실릴)포스핀의 제조방법 |
| US10934316B2 (en) * | 2016-09-29 | 2021-03-02 | Nippon Chemical Industrial Co., Ltd. | Process for producing silyl phosphine compound and silyl phosphine compound |
| US11578266B2 (en) * | 2018-03-27 | 2023-02-14 | Nippon Chemical Industrial Co., Ltd. | Silyl phosphine compound, process for producing silyl phosphine compound and process for producing InP quantum dots |
| KR20210152053A (ko) * | 2019-04-16 | 2021-12-14 | 니폰 가가쿠 고교 가부시키가이샤 | InP 양자 도트 전구체의 제조 방법 및 InP계 양자 도트의 제조 방법 |
-
2017
- 2017-09-19 US US16/332,176 patent/US10934316B2/en active Active
- 2017-09-19 CN CN202210634428.6A patent/CN114957316B/zh active Active
- 2017-09-19 WO PCT/JP2017/033724 patent/WO2018061869A1/ja not_active Ceased
- 2017-09-19 JP JP2018524857A patent/JP6401426B2/ja active Active
- 2017-09-19 CA CA3036035A patent/CA3036035A1/en active Pending
- 2017-09-19 CN CN201780056268.9A patent/CN109715643B/zh active Active
- 2017-09-19 EP EP17855824.3A patent/EP3521296B1/en active Active
- 2017-09-19 KR KR1020197006733A patent/KR102569148B1/ko active Active
- 2017-09-25 TW TW106132772A patent/TW201827446A/zh unknown
-
2018
- 2018-08-16 JP JP2018153215A patent/JP7077180B2/ja active Active
-
2021
- 2021-01-28 US US17/161,032 patent/US11512103B2/en active Active
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