JP2018186163A - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- JP2018186163A JP2018186163A JP2017086343A JP2017086343A JP2018186163A JP 2018186163 A JP2018186163 A JP 2018186163A JP 2017086343 A JP2017086343 A JP 2017086343A JP 2017086343 A JP2017086343 A JP 2017086343A JP 2018186163 A JP2018186163 A JP 2018186163A
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- 238000003672 processing method Methods 0.000 title claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 20
- 239000010980 sapphire Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 24
- 239000011148 porous material Substances 0.000 claims description 11
- 238000010030 laminating Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000009751 slip forming Methods 0.000 abstract description 8
- 238000003384 imaging method Methods 0.000 description 14
- 238000003825 pressing Methods 0.000 description 10
- 239000002390 adhesive tape Substances 0.000 description 7
- 238000002679 ablation Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/782—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element
- H01L21/784—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
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- Engineering & Computer Science (AREA)
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- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
【解決手段】サファイア基板に対して透過性を有するレーザー光線の集光点をウエーハ2の裏面2bから分割予定ラインに対応する領域に位置づけて照射し、シールドトンネル14を所定の間隔をもって形成する工程と、基板に対して透過性を有するレーザー光線LB2の集光点をウエーハの裏面から分割予定ラインの内部に位置づけて照射し、シールドトンネルによって形成された所定の間隔に改質層24を形成する工程と、外力を付与しウエーハを個々の光デバイスに分割する工程を備える。
【選択図】図5
Description
パルスレーザー光線の波長 :1030nm
パルス幅 :10ps
繰り返し周波数 :10kHz
集光レンズの開口数(NA) :0.25
平均出力 :0.2W
デフォーカス :−45μm
集光点の直径 :φ5μm
加工送り速度 :300mm/s
L1=V1/F1
=300mm/s÷10kHz
=30μm
となる。したがって、隣接するシールドトンネル14の間隔が充分とれるので、前に形成されたシールドトンネル14によって次のパルスレーザー光線LB1が散乱して発光層を損傷させることがない。
パルスレーザー光線の波長 :1030nm
パルス幅 :10ps
繰り返し周波数 :100kHz
集光レンズの開口数(NA) :0.8
平均出力 :0.5W
デフォーカス :−250μm
集光点の直径 :φ5μm
加工送り速度 :1000mm/s
L2=V2/F2
=1000mm/s÷100kHz
=10μm
となり、間隔L1に3個の改質層24が形成される。
2a:ウエーハの表面
2b:ウエーハの裏面
4:分割予定ライン
4a:第一の分割予定ライン
4b:第二の分割予定ライン
6:光デバイス
14:シールドトンネル
16:細孔
18:非晶質
24:改質層
Claims (1)
- サファイア基板の表面に発光層が積層され分割予定ラインによって区画されて光デバイスが形成されたウエーハを個々の光デバイスに分割するウエーハの加工方法であって、
サファイア基板に対して透過性を有する波長のレーザー光線の集光点をウエーハの裏面から分割予定ラインに対応する領域に位置づけてレーザー光線をウエーハに照射し、細孔と細孔を囲繞する非晶質とからなるシールドトンネルを所定の間隔をもって分割予定ラインに形成するシールドトンネル形成工程と、
サファイア基板に対して透過性を有する波長のレーザー光線の集光点をウエーハの裏面から分割予定ラインの内部に位置づけてレーザー光線をウエーハに照射し、シールドトンネルによって形成された所定の間隔に改質層を形成する改質層形成工程と、
ウエーハに外力を付与しウエーハを個々の光デバイスに分割する分割工程と、
から少なくとも構成されるウエーハの加工方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017086343A JP6837905B2 (ja) | 2017-04-25 | 2017-04-25 | ウエーハの加工方法 |
KR1020180039954A KR102399375B1 (ko) | 2017-04-25 | 2018-04-05 | 웨이퍼의 가공 방법 |
CN201810353472.3A CN108735593B (zh) | 2017-04-25 | 2018-04-19 | 晶片的加工方法 |
TW107113757A TWI736760B (zh) | 2017-04-25 | 2018-04-23 | 晶圓加工方法 |
DE102018206303.6A DE102018206303B4 (de) | 2017-04-25 | 2018-04-24 | Verfahren zum Bearbeiten eines Wafers |
US15/962,772 US10297710B2 (en) | 2017-04-25 | 2018-04-25 | Method of processing wafer |
Applications Claiming Priority (1)
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JP2017086343A JP6837905B2 (ja) | 2017-04-25 | 2017-04-25 | ウエーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
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JP2018186163A true JP2018186163A (ja) | 2018-11-22 |
JP6837905B2 JP6837905B2 (ja) | 2021-03-03 |
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JP2017086343A Active JP6837905B2 (ja) | 2017-04-25 | 2017-04-25 | ウエーハの加工方法 |
Country Status (6)
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US (1) | US10297710B2 (ja) |
JP (1) | JP6837905B2 (ja) |
KR (1) | KR102399375B1 (ja) |
CN (1) | CN108735593B (ja) |
DE (1) | DE102018206303B4 (ja) |
TW (1) | TWI736760B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019098356A (ja) * | 2017-11-30 | 2019-06-24 | 株式会社ディスコ | ウエーハの加工方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6908464B2 (ja) * | 2016-09-15 | 2021-07-28 | 株式会社荏原製作所 | 基板加工方法および基板加工装置 |
JP7184455B2 (ja) * | 2018-06-27 | 2022-12-06 | 株式会社ディスコ | ウェーハの加工方法 |
Citations (7)
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JP2011035253A (ja) * | 2009-08-04 | 2011-02-17 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2011061129A (ja) * | 2009-09-14 | 2011-03-24 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2016042516A (ja) * | 2014-08-15 | 2016-03-31 | 株式会社ディスコ | ウエーハの加工方法 |
JP2017041472A (ja) * | 2015-08-17 | 2017-02-23 | 株式会社ディスコ | 貼り合せ基板の加工方法 |
JP2017041604A (ja) * | 2015-08-21 | 2017-02-23 | 株式会社ディスコ | 光デバイスウエーハの加工方法 |
JP2017069510A (ja) * | 2015-10-02 | 2017-04-06 | 日亜化学工業株式会社 | 半導体素子の製造方法 |
JP2017076714A (ja) * | 2015-10-15 | 2017-04-20 | 株式会社ディスコ | ウエーハの加工方法 |
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JPH10305420A (ja) | 1997-03-04 | 1998-11-17 | Ngk Insulators Ltd | 酸化物単結晶からなる母材の加工方法、機能性デバイスの製造方法 |
JP3408805B2 (ja) | 2000-09-13 | 2003-05-19 | 浜松ホトニクス株式会社 | 切断起点領域形成方法及び加工対象物切断方法 |
JP4917382B2 (ja) * | 2006-08-09 | 2012-04-18 | 株式会社ディスコ | レーザー光線照射装置およびレーザー加工機 |
JP2009123835A (ja) * | 2007-11-13 | 2009-06-04 | Disco Abrasive Syst Ltd | 半導体デバイスの製造方法 |
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JP6062287B2 (ja) * | 2013-03-01 | 2017-01-18 | 株式会社ディスコ | ウエーハの加工方法 |
JP6113529B2 (ja) * | 2013-03-05 | 2017-04-12 | 株式会社ディスコ | ウエーハの加工方法 |
JP6151557B2 (ja) * | 2013-05-13 | 2017-06-21 | 株式会社ディスコ | レーザー加工方法 |
JP6262039B2 (ja) | 2014-03-17 | 2018-01-17 | 株式会社ディスコ | 板状物の加工方法 |
JP6466692B2 (ja) | 2014-11-05 | 2019-02-06 | 株式会社ディスコ | ウエーハの加工方法 |
JP2016143766A (ja) | 2015-02-02 | 2016-08-08 | 株式会社ディスコ | 単結晶部材の加工方法 |
JP2016167552A (ja) * | 2015-03-10 | 2016-09-15 | 株式会社ディスコ | 単結晶基板の加工方法 |
JP6549014B2 (ja) * | 2015-10-13 | 2019-07-24 | 株式会社ディスコ | 光デバイスウエーハの加工方法 |
-
2017
- 2017-04-25 JP JP2017086343A patent/JP6837905B2/ja active Active
-
2018
- 2018-04-05 KR KR1020180039954A patent/KR102399375B1/ko active IP Right Grant
- 2018-04-19 CN CN201810353472.3A patent/CN108735593B/zh active Active
- 2018-04-23 TW TW107113757A patent/TWI736760B/zh active
- 2018-04-24 DE DE102018206303.6A patent/DE102018206303B4/de active Active
- 2018-04-25 US US15/962,772 patent/US10297710B2/en active Active
Patent Citations (7)
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JP2011035253A (ja) * | 2009-08-04 | 2011-02-17 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2011061129A (ja) * | 2009-09-14 | 2011-03-24 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2016042516A (ja) * | 2014-08-15 | 2016-03-31 | 株式会社ディスコ | ウエーハの加工方法 |
JP2017041472A (ja) * | 2015-08-17 | 2017-02-23 | 株式会社ディスコ | 貼り合せ基板の加工方法 |
JP2017041604A (ja) * | 2015-08-21 | 2017-02-23 | 株式会社ディスコ | 光デバイスウエーハの加工方法 |
JP2017069510A (ja) * | 2015-10-02 | 2017-04-06 | 日亜化学工業株式会社 | 半導体素子の製造方法 |
JP2017076714A (ja) * | 2015-10-15 | 2017-04-20 | 株式会社ディスコ | ウエーハの加工方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019098356A (ja) * | 2017-11-30 | 2019-06-24 | 株式会社ディスコ | ウエーハの加工方法 |
Also Published As
Publication number | Publication date |
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DE102018206303A1 (de) | 2018-10-25 |
CN108735593B (zh) | 2023-07-21 |
KR20180119482A (ko) | 2018-11-02 |
DE102018206303B4 (de) | 2024-05-02 |
KR102399375B1 (ko) | 2022-05-17 |
TWI736760B (zh) | 2021-08-21 |
CN108735593A (zh) | 2018-11-02 |
JP6837905B2 (ja) | 2021-03-03 |
TW201839829A (zh) | 2018-11-01 |
US20180309018A1 (en) | 2018-10-25 |
US10297710B2 (en) | 2019-05-21 |
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