JP2018178236A - 基板処理装置、処理ガスノズル内のパーティクルコーティング方法及び基板処理方法 - Google Patents
基板処理装置、処理ガスノズル内のパーティクルコーティング方法及び基板処理方法 Download PDFInfo
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- JP2018178236A JP2018178236A JP2017084748A JP2017084748A JP2018178236A JP 2018178236 A JP2018178236 A JP 2018178236A JP 2017084748 A JP2017084748 A JP 2017084748A JP 2017084748 A JP2017084748 A JP 2017084748A JP 2018178236 A JP2018178236 A JP 2018178236A
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- 238000012545 processing Methods 0.000 title claims abstract description 221
- 238000000576 coating method Methods 0.000 title claims abstract description 97
- 239000011248 coating agent Substances 0.000 title claims abstract description 76
- 239000000758 substrate Substances 0.000 title claims abstract description 63
- 239000002245 particle Substances 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000003672 processing method Methods 0.000 title abstract description 11
- 239000007789 gas Substances 0.000 claims abstract description 345
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 60
- 239000010453 quartz Substances 0.000 claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- 239000010703 silicon Substances 0.000 claims abstract description 40
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 9
- 230000003647 oxidation Effects 0.000 claims abstract 2
- 238000007254 oxidation reaction Methods 0.000 claims abstract 2
- 230000015572 biosynthetic process Effects 0.000 claims description 37
- 230000001590 oxidative effect Effects 0.000 claims description 34
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 28
- 238000010438 heat treatment Methods 0.000 claims description 13
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 3
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 45
- 238000006243 chemical reaction Methods 0.000 description 43
- 238000004140 cleaning Methods 0.000 description 16
- 238000005108 dry cleaning Methods 0.000 description 9
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
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- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
- B05B7/0433—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid with one inner conduit of gas surrounded by an external conduit of liquid upstream the mixing chamber
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/053—Arrangements for supplying power, e.g. charging power
- B05B5/0533—Electrodes specially adapted therefor; Arrangements of electrodes
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- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/06—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane
- B05B7/062—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane with only one liquid outlet and at least one gas outlet
- B05B7/066—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane with only one liquid outlet and at least one gas outlet with an inner liquid outlet surrounded by at least one annular gas outlet
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
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- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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Abstract
【解決手段】基板を収容して処理可能な処理容器と、
該処理容器内に互いに反応して反応生成物を生成可能な複数の処理ガスを供給可能な複数の石英ガスノズルと、
前記処理容器内を排気可能な排気手段と、
前記複数の石英ガスノズルのうち1本を前記排気手段に接続可能なバイパス配管と、
前記排気手段に接続された石英ガスノズル内を前記排気手段により排気した状態で前記石英ガスノズル内にSiO2コーティング膜を成膜可能なシリコン含有ガス及び酸化ガスの少なくとも一方を前記処理容器内に供給可能なコーティング用ガスノズルと、を有する。
【選択図】図2
Description
該処理容器内に互いに反応して反応生成物を生成可能な複数の処理ガスを供給可能な複数の石英ガスノズルと、
前記処理容器内を排気可能な排気手段と、
前記複数の石英ガスノズルのうち1本を前記排気手段に接続可能なバイパス配管と、
前記排気手段に接続された石英ガスノズル内を前記排気手段により排気した状態で前記石英ガスノズル内にSiO2コーティング膜を成膜可能なシリコン含有ガス及び酸化ガスの少なくとも一方を前記処理容器内に供給可能なコーティング用ガスノズルと、を有する。
11 インナーチューブ
20 ヒーター
30 マニホールド
40 処理ガスノズル
41 吐出孔
50 処理ガス供給配管
60〜67 バルブ
70 処理ガス供給源
71 シリコン含有ガス供給源
72 酸化ガス供給源
80 排気管
81 分岐排気管
90 自動制御バルブ
100 真空ポンプ
160 コーティング用ガスノズル
170〜171 コーティング用ガス供給配管
180 ウエハボート
210 制御部
Claims (21)
- 基板を収容して処理可能な処理容器と、
該処理容器内に互いに反応して反応生成物を生成可能な複数の処理ガスを供給可能な複数の石英ガスノズルと、
前記処理容器内を排気可能な排気手段と、
前記複数の石英ガスノズルのうち1本を前記排気手段に接続可能なバイパス配管と、
前記排気手段に接続された石英ガスノズル内を前記排気手段により排気した状態で前記石英ガスノズル内にSiO2コーティング膜を成膜可能なシリコン含有ガス及び酸化ガスの少なくとも一方を前記処理容器内に供給可能なコーティング用ガスノズルと、を有する基板処理装置。 - 前記排気手段に接続された前記石英ガスノズルが成膜用シリコン含有ガスを前記処理ガスとして供給する場合には、前記コーティング用ガスノズルは前記シリコン含有ガスを供給する請求項1に記載の基板処理装置。
- 前記排気手段に接続された前記石英ガスノズルが成膜用酸化ガスを前記処理ガスとして供給する場合には、前記コーティング用ガスノズルは前記酸化ガスを供給する請求項1に記載の基板処理装置。
- 前記排気手段に接続された前記石英ガスノズルが成膜用シリコン含有ガス又は成膜用酸化ガス以外のガスを前記処理ガスとして供給する場合には、前記コーティング用ガスノズルは前記シリコン含有ガス及び前記酸化ガスを供給する請求項1に記載の基板処理装置。
- 前記コーティング用ガスノズルは前記シリコン含有ガス及び前記酸化ガスを交互に供給し、ALD成膜により前記SiO2コーティング膜を成膜する請求項4に記載の基板処理装置。
- 制御手段を更に有し、
前記シリコン含有ガスと前記酸化ガスの供給切り替えは、前記制御手段により行われる請求項5に記載の基板処理装置。 - 前記コーティング用ガスノズルは、前記シリコン含有ガスを前記処理容器内に供給する第1のコーティング用ガスノズルと、前記酸化ガスを前記処理容器内に供給する第2のコーティング用ガスノズルとを含む請求項4乃至6のいずれか一項に記載の基板処理装置。
- 前記バイパス配管には、前記複数の石英ガスノズルの各々が切り替え接続可能であり、前記複数の石英ガスノズルを順次切り替えてコーティングすることが可能である請求項1乃至7のいずれか一項に記載の基板処理装置。
- 前記バイパス配管が前記複数の石英ガスノズルに対応して複数設けられ、前記複数の石英ガスノズルの同時コーティングが可能である請求項1乃至7のいずれか一項に記載の基板処理装置。
- 前記複数の石英ガスノズルの各々は、第1のバルブを有する処理ガス供給配管を介して処理ガス供給源に接続されており、
前記バイパス配管は、第2のバルブを有するとともに、前記第1のバルブよりも前記処理容器側の所定位置で前記処理ガス供給配管から分岐して前記排気手段と接続されており、
前記第1のバルブを閉とし、前記第2のバルブを開とすることにより前記排気手段に接続された前記石英ガスノズル内を前記排気手段が排気する請求項1乃至8のいずれか一項に記載の基板処理装置。 - 前記処理容器と前記排気手段とは排気管を介して接続され、
前記バイパス配管は、前記排気管に接続されている請求項1乃至10のいずれか一項に記載の基板処理装置。 - 前記排気管には第3のバルブが設けられており、
前記排気手段が前記石英ガスノズルの内部を排気するときには、前記第3のバルブを閉にする請求項11に記載の基板処理装置。 - 前記処理容器は、縦長の略円筒形の形状を有し、
前記石英ガスノズルは、前記処理容器の内周面に沿って縦に延びるように設けられ、
前記基板は、複数の基板を縦方向に間隔を有して水平な状態で積載可能な基板保持具に載置され、
前記処理容器の外部にはヒーターが更に設けられ、前記基板に熱処理を行う請求項1乃至12のいずれか一項に記載の基板処理装置。 - 処理容器内に設けられ、該処理容器内に処理ガスを供給する石英ガスノズルを、バイパス配管を介して排気手段に接続する工程と、
該排気手段により、前記バイパス配管を介して前記石英ガスノズル内を排気する工程と、
前記石英ガスノズル内の排気を継続しながら前記処理容器内にシリコン含有ガス及び酸化ガスを供給し、前記石英ガスノズルの内部に前記シリコン含有ガスと前記酸化ガスの反応生成物であるSiO2コーティング膜を成膜する工程と、を有する処理ガスノズル内のパーティクルコーティング方法。 - 前記シリコン含有ガスと前記酸化ガスは交互に供給され、ALD成膜により前記SiO2コーティング膜を成膜する請求項14に記載の処理ガスノズル内のパーティクルコーティング方法。
- 前記処理容器内には、互いに反応して反応生成物を生成可能な複数の処理ガスを供給する複数の石英ガスノズルが設けられ、
前記複数の石英ガスノズルからコーティング対象として前記石英ガスノズルを選択する工程と、
選択した前記石英ガスノズルを前記バイパス配管に接続する工程を更に有する請求項14又は15に記載の処理ガスノズル内のパーティクルコーティング方法。 - 前記複数の石英ガスノズルを選択する工程と、前記選択した前記石英ガスノズルを前記バイパス配管に接続する工程は、前記複数の石英ガスノズルの総てについて、順次行われる請求項16に記載の処理ガスノズル内のパーティクルコーティング方法。
- 前記処理容器内には、互いに反応して反応生成物を生成可能な複数の処理ガスを供給する複数の石英ガスノズルが設けられ、
前記バイパス配管は、前記複数の石英ガスノズルに対応して複数設けられ、
前記SiO2コーティング膜を成膜する工程は、前記複数の石英ガスノズルについて同時に行われる請求項14又は15に記載の処理ガスノズル内のパーティクルコーティング方法。 - 前記処理容器内にはコーティング用ガスノズルが設けられ、前記シリコン含有ガス及び前記酸化ガスの少なくとも一方は前記コーティング用ガスノズルから供給される請求項16乃至18のいずれか一項に記載の処理ガスノズル内のパーティクルコーティング方法。
- 前記シリコン含有ガスはアミノシランガスであり、前記酸化ガスはオゾンガスである請求項16乃至19のいずれか一項に記載の処理ガスノズル内のパーティクルコーティング方法。
- 請求項16乃至20のいずれか一項に記載の処理ガスノズル内のパーティクルコーティング方法により石英ガスノズル内のパーティクルをSiO2コーティング膜でコーティングする工程と、
前記排気手段の接続を前記バイパス配管から前記処理容器に切り替え、前記処理容器内を排気する工程と、
基板を前記処理容器内に搬入する工程と、
前記処理容器内に互いに反応して反応生成物を生成可能な複数の処理ガスを供給し、前記基板の表面に成膜処理を行う工程と、
成膜処理がなされた前記基板を前記処理容器から搬出する工程と、を有する成膜方法。
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