JP2018145803A - 制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ - Google Patents

制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ Download PDF

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Publication number
JP2018145803A
JP2018145803A JP2017038206A JP2017038206A JP2018145803A JP 2018145803 A JP2018145803 A JP 2018145803A JP 2017038206 A JP2017038206 A JP 2017038206A JP 2017038206 A JP2017038206 A JP 2017038206A JP 2018145803 A JP2018145803 A JP 2018145803A
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JP
Japan
Prior art keywords
control device
board
control
motor
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017038206A
Other languages
English (en)
Japanese (ja)
Inventor
深美　英夫
Hideo Fukami
英夫 深美
由雅 江澤
Yoshimasa EZAWA
由雅 江澤
佐藤　光
Hikari Sato
光 佐藤
智優 小川
Tomomasa OGAWA
智優 小川
泰 舘野
Yasushi Tateno
泰 舘野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2017038206A priority Critical patent/JP2018145803A/ja
Priority to PCT/JP2018/003629 priority patent/WO2018159213A1/fr
Priority to CN201880014023.4A priority patent/CN110300854A/zh
Publication of JP2018145803A publication Critical patent/JP2018145803A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/16—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the circuit arrangement or by the kind of wiring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Control Of Ac Motors In General (AREA)
JP2017038206A 2017-03-01 2017-03-01 制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ Pending JP2018145803A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017038206A JP2018145803A (ja) 2017-03-01 2017-03-01 制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ
PCT/JP2018/003629 WO2018159213A1 (fr) 2017-03-01 2018-02-02 Dispositif de commande, substrat installé dans ledit dispositif de commande, et pompe à vide à laquelle ledit dispositif de commande est appliqué
CN201880014023.4A CN110300854A (zh) 2017-03-01 2018-02-02 控制装置、搭载于该控制装置的基板以及应用了该控制装置的真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017038206A JP2018145803A (ja) 2017-03-01 2017-03-01 制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ

Publications (1)

Publication Number Publication Date
JP2018145803A true JP2018145803A (ja) 2018-09-20

Family

ID=63370761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017038206A Pending JP2018145803A (ja) 2017-03-01 2017-03-01 制御装置、該制御装置に搭載された基板、及び該制御装置が適用された真空ポンプ

Country Status (3)

Country Link
JP (1) JP2018145803A (fr)
CN (1) CN110300854A (fr)
WO (1) WO2018159213A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332526A (ja) * 2001-11-07 2003-11-21 Hitachi Ltd 電力変換装置
JP2010048169A (ja) * 2008-08-21 2010-03-04 Shimadzu Corp ターボ分子ポンプ
JP2012245915A (ja) * 2011-05-30 2012-12-13 Denso Corp 制御ユニット、および、これを用いた駆動装置
JP2014075866A (ja) * 2012-10-03 2014-04-24 Mitsubishi Electric Corp 電動パワーステアリング装置
JP3195919U (ja) * 2014-11-28 2015-02-12 株式会社島津製作所 真空ポンプの制御装置、および真空ポンプ
JP2015172358A (ja) * 2014-03-12 2015-10-01 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012053270A1 (fr) * 2010-10-19 2012-04-26 エドワーズ株式会社 Pompe à vide
CN103047152B (zh) * 2011-10-17 2016-06-22 株式会社岛津制作所 真空泵
JP2013103535A (ja) * 2011-11-10 2013-05-30 Honda Elesys Co Ltd 電動パワーステアリング用電子制御ユニット
CN105526180A (zh) * 2016-01-29 2016-04-27 天津飞旋科技研发有限公司 磁悬浮复合分子泵

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332526A (ja) * 2001-11-07 2003-11-21 Hitachi Ltd 電力変換装置
JP2010048169A (ja) * 2008-08-21 2010-03-04 Shimadzu Corp ターボ分子ポンプ
JP2012245915A (ja) * 2011-05-30 2012-12-13 Denso Corp 制御ユニット、および、これを用いた駆動装置
JP2014075866A (ja) * 2012-10-03 2014-04-24 Mitsubishi Electric Corp 電動パワーステアリング装置
JP2015172358A (ja) * 2014-03-12 2015-10-01 エドワーズ株式会社 真空ポンプの制御装置とこれを備えた真空ポンプ
JP3195919U (ja) * 2014-11-28 2015-02-12 株式会社島津製作所 真空ポンプの制御装置、および真空ポンプ

Also Published As

Publication number Publication date
WO2018159213A1 (fr) 2018-09-07
CN110300854A (zh) 2019-10-01

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