JP2018104690A - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
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- JP2018104690A JP2018104690A JP2017244236A JP2017244236A JP2018104690A JP 2018104690 A JP2018104690 A JP 2018104690A JP 2017244236 A JP2017244236 A JP 2017244236A JP 2017244236 A JP2017244236 A JP 2017244236A JP 2018104690 A JP2018104690 A JP 2018104690A
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- polishing
- measured
- polishing composition
- relaxation time
- particles
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
T=Rav−1
Rav=PsRns+PbRnb
Ps:粒子表面に吸着している分散媒の体積分率
Rns:粒子表面に吸着している分散媒のプロトンの緩和時定数
Pb:バルク液の体積分率
Rnb:バルク液のプロトンの緩和時定数
Claims (1)
- 動的光散乱法を用いて測定される二次平均粒子径が40〜90nmである粒子を含み、
pHが9.0〜12.0であり、
パルスNMR装置を用いて、温度25℃、CPMG法によって測定される核種1Hの横緩和時間が、1300〜2000msである、研磨用組成物。
Applications Claiming Priority (2)
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JP2016251019 | 2016-12-26 | ||
JP2016251019 | 2016-12-26 |
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JP2018104690A true JP2018104690A (ja) | 2018-07-05 |
JP6960328B2 JP6960328B2 (ja) | 2021-11-05 |
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JP2017244236A Active JP6960328B2 (ja) | 2016-12-26 | 2017-12-20 | 研磨用組成物 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102107089B1 (ko) * | 2018-11-01 | 2020-05-06 | 닛산 가가쿠 가부시키가이샤 | 수친화성이 높은 연마입자를 이용한 연마용 조성물 |
WO2023119549A1 (ja) * | 2021-12-23 | 2023-06-29 | 扶桑化学工業株式会社 | コロイダルシリカ及びその製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100497412B1 (ko) * | 2002-12-12 | 2005-06-28 | 제일모직주식회사 | 실리콘 웨이퍼의 최종 연마용 슬러리 조성물 |
WO2015152151A1 (ja) * | 2014-03-31 | 2015-10-08 | ニッタ・ハース株式会社 | 研磨用組成物及び研磨方法 |
JP2016053114A (ja) * | 2014-09-03 | 2016-04-14 | 株式会社フジミインコーポレーテッド | 研磨用組成物の製造方法 |
JP2016122806A (ja) * | 2014-12-25 | 2016-07-07 | 花王株式会社 | シリコンウェーハ用研磨液組成物 |
JP2016124943A (ja) * | 2014-12-26 | 2016-07-11 | ニッタ・ハース株式会社 | 研磨用組成物 |
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2017
- 2017-12-20 JP JP2017244236A patent/JP6960328B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100497412B1 (ko) * | 2002-12-12 | 2005-06-28 | 제일모직주식회사 | 실리콘 웨이퍼의 최종 연마용 슬러리 조성물 |
WO2015152151A1 (ja) * | 2014-03-31 | 2015-10-08 | ニッタ・ハース株式会社 | 研磨用組成物及び研磨方法 |
JP2016053114A (ja) * | 2014-09-03 | 2016-04-14 | 株式会社フジミインコーポレーテッド | 研磨用組成物の製造方法 |
JP2016122806A (ja) * | 2014-12-25 | 2016-07-07 | 花王株式会社 | シリコンウェーハ用研磨液組成物 |
JP2016124943A (ja) * | 2014-12-26 | 2016-07-11 | ニッタ・ハース株式会社 | 研磨用組成物 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102107089B1 (ko) * | 2018-11-01 | 2020-05-06 | 닛산 가가쿠 가부시키가이샤 | 수친화성이 높은 연마입자를 이용한 연마용 조성물 |
WO2020091000A1 (ja) * | 2018-11-01 | 2020-05-07 | 日産化学株式会社 | 水親和性の高い研磨粒子を用いた研磨用組成物 |
JP6718157B1 (ja) * | 2018-11-01 | 2020-07-08 | 日産化学株式会社 | 水親和性の高い研磨粒子を用いた研磨用組成物 |
TWI724599B (zh) * | 2018-11-01 | 2021-04-11 | 日商日產化學股份有限公司 | 使用高水親和性的研磨粒子之研磨用組成物 |
WO2023119549A1 (ja) * | 2021-12-23 | 2023-06-29 | 扶桑化学工業株式会社 | コロイダルシリカ及びその製造方法 |
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