JP2018097227A5 - - Google Patents

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Publication number
JP2018097227A5
JP2018097227A5 JP2016242854A JP2016242854A JP2018097227A5 JP 2018097227 A5 JP2018097227 A5 JP 2018097227A5 JP 2016242854 A JP2016242854 A JP 2016242854A JP 2016242854 A JP2016242854 A JP 2016242854A JP 2018097227 A5 JP2018097227 A5 JP 2018097227A5
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JP
Japan
Prior art keywords
mirror
fixed
actuators
interferometer
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016242854A
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English (en)
Japanese (ja)
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JP2018097227A (ja
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Publication date
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Priority to JP2016242854A priority Critical patent/JP2018097227A/ja
Priority claimed from JP2016242854A external-priority patent/JP2018097227A/ja
Publication of JP2018097227A publication Critical patent/JP2018097227A/ja
Publication of JP2018097227A5 publication Critical patent/JP2018097227A5/ja
Pending legal-status Critical Current

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JP2016242854A 2016-12-15 2016-12-15 固定鏡、干渉計及びフーリエ変換分光光度計 Pending JP2018097227A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016242854A JP2018097227A (ja) 2016-12-15 2016-12-15 固定鏡、干渉計及びフーリエ変換分光光度計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016242854A JP2018097227A (ja) 2016-12-15 2016-12-15 固定鏡、干渉計及びフーリエ変換分光光度計

Publications (2)

Publication Number Publication Date
JP2018097227A JP2018097227A (ja) 2018-06-21
JP2018097227A5 true JP2018097227A5 (enExample) 2019-12-12

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ID=62632843

Family Applications (1)

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JP2016242854A Pending JP2018097227A (ja) 2016-12-15 2016-12-15 固定鏡、干渉計及びフーリエ変換分光光度計

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JP (1) JP2018097227A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102413742B1 (ko) * 2020-06-15 2022-06-28 고등기술연구원연구조합 변위증폭구조를 이용한 초소형 광학용 미러의 팁틸트 메커니즘
CN111854611B (zh) * 2020-08-10 2024-12-27 上海乾曜光学科技有限公司 柔性铰链移相器
CN115615543A (zh) * 2021-07-13 2023-01-17 台湾超微光学股份有限公司 光谱仪及其组装方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166749A (en) * 1991-05-22 1992-11-24 Bio-Rad Laboratories Step scanning technique for interferometer
JPH05346498A (ja) * 1992-06-16 1993-12-27 Nkk Corp ミラ−装置
JP3613171B2 (ja) * 2000-11-07 2005-01-26 株式会社島津製作所 干渉分光光度計

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