WO2014191834A3 - Spectometer - Google Patents

Spectometer Download PDF

Info

Publication number
WO2014191834A3
WO2014191834A3 PCT/IB2014/001434 IB2014001434W WO2014191834A3 WO 2014191834 A3 WO2014191834 A3 WO 2014191834A3 IB 2014001434 W IB2014001434 W IB 2014001434W WO 2014191834 A3 WO2014191834 A3 WO 2014191834A3
Authority
WO
WIPO (PCT)
Prior art keywords
focusing lens
actuator assembly
incident beam
excitation source
movable mirror
Prior art date
Application number
PCT/IB2014/001434
Other languages
French (fr)
Other versions
WO2014191834A2 (en
Inventor
Mark Watson
Shane Buller
Keith Carron
Original Assignee
Mks Technology, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/907,812 external-priority patent/US9791313B2/en
Application filed by Mks Technology, Inc. filed Critical Mks Technology, Inc.
Priority to BR112015029663-7A priority Critical patent/BR112015029663B1/en
Priority to EP14804678.2A priority patent/EP3004819A4/en
Priority to JP2016516259A priority patent/JP6590793B2/en
Publication of WO2014191834A2 publication Critical patent/WO2014191834A2/en
Publication of WO2014191834A3 publication Critical patent/WO2014191834A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J2003/4424—Fluorescence correction for Raman spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.
PCT/IB2014/001434 2013-05-31 2014-07-31 Spectometer WO2014191834A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
BR112015029663-7A BR112015029663B1 (en) 2013-05-31 2014-07-31 spectrometer and method for moving a focused incident beam
EP14804678.2A EP3004819A4 (en) 2013-05-31 2014-07-31 Spectrometer
JP2016516259A JP6590793B2 (en) 2013-05-31 2014-07-31 Spectrometer and method for moving a focused incident beam of a spectrometer across the surface of a spectroscopic sample

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/907,812 US9791313B2 (en) 2010-12-01 2013-05-31 Spectrometer
US13/907,812 2013-05-31

Publications (2)

Publication Number Publication Date
WO2014191834A2 WO2014191834A2 (en) 2014-12-04
WO2014191834A3 true WO2014191834A3 (en) 2015-12-17

Family

ID=51989473

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2014/001434 WO2014191834A2 (en) 2013-05-31 2014-07-31 Spectometer

Country Status (4)

Country Link
EP (1) EP3004819A4 (en)
JP (1) JP6590793B2 (en)
BR (1) BR112015029663B1 (en)
WO (1) WO2014191834A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9791313B2 (en) * 2010-12-01 2017-10-17 MKS Technology Spectrometer
DE102016010236A1 (en) * 2016-08-23 2018-03-01 Blickfeld GmbH LIDAR SYSTEM WITH MOBILE FIBER
DE102016010448B4 (en) * 2016-08-30 2024-01-11 Blickfeld GmbH Fiber-based laser scanner
JP7044498B2 (en) * 2017-08-25 2022-03-30 日本信号株式会社 Actuator
EP3803293A4 (en) 2018-05-30 2022-06-15 Pendar Technologies, LLC Methods and devices for standoff differential raman spectroscopy with increased eye safety and decreased risk of explosion
JP7406510B2 (en) * 2018-05-30 2023-12-27 ペンダー・テクノロジーズ，リミテッド・ライアビリティ・カンパニー Method and apparatus for standoff difference Raman spectroscopy with improved eye safety and reduced risk of explosion
CN109490279A (en) * 2018-09-10 2019-03-19 桂林电子科技大学 The rotary SPR sensorgram chip of D-shaped microtrabeculae mirror

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265545A (en) * 1979-07-27 1981-05-05 Intec Corporation Multiple source laser scanning inspection system
US5825493A (en) * 1996-06-28 1998-10-20 Raytheon Company Compact high resolution interferometer with short stroke reactionless drive
US6501551B1 (en) * 1991-04-29 2002-12-31 Massachusetts Institute Of Technology Fiber optic imaging endoscope interferometer with at least one faraday rotator
US20060285109A1 (en) * 2005-06-20 2006-12-21 Odhner Jefferson E Compact spectrometer
US20090249521A1 (en) * 2007-05-15 2009-10-01 Dazzi A Dazzi High frequency deflection measurement of IR absorption

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03180813A (en) * 1989-12-08 1991-08-06 Matsushita Electric Ind Co Ltd Optical scanner
DE69530072T2 (en) * 1994-12-08 2004-03-04 Molecular Dynamics, Sunnyvale FLUORESCENT IMAGING SYSTEM USING A LENS WITH MACRO SCANNING
US5646411A (en) * 1996-02-01 1997-07-08 Molecular Dynamics, Inc. Fluorescence imaging system compatible with macro and micro scanning objectives
DE19707225A1 (en) * 1997-02-24 1998-08-27 Bodenseewerk Perkin Elmer Co Light scanner
CA2310672A1 (en) * 1997-11-19 1999-05-27 University Of Washington High throughput optical scanner
JP2000081587A (en) * 1998-06-24 2000-03-21 Fuji Photo Film Co Ltd Main scanner
JP2002372456A (en) * 2001-06-13 2002-12-26 Shimadzu Corp Ir spectrophotometer
DE102004006836A1 (en) * 2003-04-15 2004-11-18 E.On Ruhrgas Ag Device and method for optically scanning media, objects or surfaces
WO2012030870A1 (en) * 2010-08-30 2012-03-08 Mks Technology (D/B/A Snowy Range Instruments) Spectroscopic assays and tagging
JP2013195264A (en) * 2012-03-21 2013-09-30 Nikon Corp Spectroscope and microspectroscopic system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265545A (en) * 1979-07-27 1981-05-05 Intec Corporation Multiple source laser scanning inspection system
US6501551B1 (en) * 1991-04-29 2002-12-31 Massachusetts Institute Of Technology Fiber optic imaging endoscope interferometer with at least one faraday rotator
US5825493A (en) * 1996-06-28 1998-10-20 Raytheon Company Compact high resolution interferometer with short stroke reactionless drive
US20060285109A1 (en) * 2005-06-20 2006-12-21 Odhner Jefferson E Compact spectrometer
US20090249521A1 (en) * 2007-05-15 2009-10-01 Dazzi A Dazzi High frequency deflection measurement of IR absorption

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3004819A4 *

Also Published As

Publication number Publication date
EP3004819A4 (en) 2017-05-24
WO2014191834A2 (en) 2014-12-04
BR112015029663B1 (en) 2021-02-23
EP3004819A2 (en) 2016-04-13
JP6590793B2 (en) 2019-10-16
BR112015029663A2 (en) 2017-07-25
JP2016530486A (en) 2016-09-29

Similar Documents

Publication Publication Date Title
WO2014191834A3 (en) Spectometer
WO2014113824A3 (en) Handheld libs spectrometer
EP3542209A4 (en) An optical beam director
GB201305018D0 (en) Apparatus and methods for additive-layer manufacturing of an article
SG10201402092YA (en) Laser processing method
TR201818898T4 (en) DEVICE FOR MATERIAL PROCESSING BY LASER ILLUMINATION.
WO2012095422A3 (en) Device for converting the profile of a laser beam into a laser beam with a rotationally symmetrical intensity distribution
WO2014197553A3 (en) Optical coherence tomography imaging system and optical laser scanning system comprising beam shaping optical system with a lens triplet, where second and third lens are movable
EP3803456A4 (en) An optical beam director
WO2015132391A3 (en) Imaging device for a microscope
WO2013186179A3 (en) Device and method for the interference structuring of samples using laser beams, and samples structured in such a way
WO2011119453A3 (en) Lens system for an led luminaire
EP3900008A4 (en) Ion beam source for optical device fabrication
WO2013093459A3 (en) Chormatic confocal metrological apparatus
JP2018169379A5 (en)
WO2017062076A3 (en) Self-seeding high power laser
IL239482B (en) Generating an array of spots on inclined surfaces
EP3414612A4 (en) Microscope lens with integrated wide-field camera and beam scanning device
MX2018009833A (en) A system for performing spectroscopy.
EP3811140A4 (en) An optical beam director
EP4235255A3 (en) An optical arrangement and method for imaging a sample
EP3535087A4 (en) Beam director with improved optics
WO2013189605A3 (en) Laser scribing system
WO2015200649A3 (en) Electron energy loss spectrometer
WO2016012794A3 (en) Spectrometer

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14804678

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 2016516259

Country of ref document: JP

Kind code of ref document: A

REG Reference to national code

Ref country code: BR

Ref legal event code: B01A

Ref document number: 112015029663

Country of ref document: BR

WWE Wipo information: entry into national phase

Ref document number: 2014804678

Country of ref document: EP

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14804678

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 112015029663

Country of ref document: BR

Kind code of ref document: A2

Effective date: 20151126