JP2018097227A5 - - Google Patents

Claims (8)

A fixed mirror, a movable mirror, and a light source that irradiates light to the fixed mirror and the movable mirror, and generates interference light by causing interference between reflected light from the fixed mirror and reflected light from the movable mirror An interferometer that allows
The fixed mirror includes a mirror that reflects light from the light source on a reflection surface, and a plurality of actuators that displace the mirror in a direction intersecting the reflection surface.
The movable mirror is movable with a displacement amount larger than a displacement amount of the mirror in the fixed mirror,
Wherein the plurality of actuators, the Rukoto displacing said mirror at different displacement amounts respectively, wherein by changing the angle of the reflecting surface, the Rukoto was pre Symbol mirror is displaced by the same displacement amount, respectively, the angle of the reflecting surface interferometer characterized that you move the reflective surface while keeping constant. The interferometer according to claim 1, wherein the plurality of actuators are arranged at equal intervals in a circumferential direction with respect to a center position of the reflecting surface. The interferometer according to claim 1, wherein the plurality of actuators are configured by piezoelectric elements. The fixed mirror further includes a flexure portion that connects the mirror and the plurality of actuators,
The flexure portion connects the fixed portion, a displacement portion that is displaced in accordance with the operation of the plurality of actuators, the fixed portion and the displacement portion, and elastically moves the displacement portion relative to the fixed portion. The interferometer according to any one of claims 1 to 3, further comprising a beam portion that is displaced mechanically. The interference according to claim 4, wherein the fixed mirror further includes an elastic hinge interposed between the flexure part and the mirror and elastically deformable in a direction intersecting the reflection surface. Total . A main body to which the fixed mirror and the movable mirror are attached;
By adjusting the angle of the fixed mirror attached to the body, according to any one of claims 1-5, characterized in that it comprises further a coarse adjustment mechanism for changing the angle of the reflecting surface Interferometer. The interferometer according to any one of claims 1 to 6 ,
A Fourier transform spectrophotometer comprising: a detector that detects reflected light or transmitted light from a sample generated by irradiating the sample with interference light from the interferometer. A fixed mirror, a movable mirror, and a light source that irradiates light to the fixed mirror and the movable mirror, and generates interference light by causing interference between reflected light from the fixed mirror and reflected light from the movable mirror An interferometer adjustment method,
The fixed mirror includes a mirror that reflects light from the light source on a reflection surface, and a plurality of actuators that displace the mirror in a direction intersecting the reflection surface.
The movable mirror is movable with a displacement amount larger than a displacement amount of the mirror in the fixed mirror,
By using the plurality of actuators, the angle of the reflecting surface is changed by displacing the mirror by different displacement amounts,
A method of adjusting an interferometer, wherein the plurality of actuators are used to move the reflecting surface while keeping the angle of the reflecting surface constant by displacing the mirror by the same displacement amount.