JP2018067634A - 半導体装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 198
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 96
- 229910052751 metal Inorganic materials 0.000 claims abstract description 91
- 239000002184 metal Substances 0.000 claims abstract description 91
- 238000002161 passivation Methods 0.000 claims abstract description 67
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 239000010703 silicon Substances 0.000 claims abstract description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000011368 organic material Substances 0.000 claims description 25
- 238000007747 plating Methods 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 238000010030 laminating Methods 0.000 abstract description 2
- 230000006835 compression Effects 0.000 abstract 2
- 238000007906 compression Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 179
- 238000000034 method Methods 0.000 description 23
- 239000012044 organic layer Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 239000007769 metal material Substances 0.000 description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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Abstract
Description
2 半導体基板
2A 表面
2B 半導体層
3 半導体素子
4 金属層
11,36 パッシベーション膜
12,37 第1絶縁膜
13,38 第2絶縁膜
32 第1金属層(金属層)
33 絶縁膜層
34 有機物層
35 第2金属層(金属層)
Claims (6)
- 半導体基板と、前記半導体基板に形成された半導体素子と、前記半導体素子を保護するパッシベーション膜とを備えた半導体装置において、
前記パッシベーション膜は、圧縮応力を発生させる密度の低い第1絶縁膜と、圧縮応力を発生させる密度の高い第2絶縁膜とを交互に積み重ねて形成され、
前記半導体基板に最も近い最下層には、前記第1絶縁膜が配置されたことを特徴とする半導体装置。 - 前記第1絶縁膜と前記第2絶縁膜は、シリコン窒化膜、シリコン酸化膜、シリコン酸窒化膜のいずれかを用いて形成されてなる請求項1に記載の半導体装置。
- 前記半導体基板には、半導体層、絶縁膜層、有機物層および金属層が形成され、
前記パッシベーション膜は、これらの半導体層、絶縁膜層、有機物層および金属層を覆って前記半導体基板に形成されてなる請求項1または2に記載の半導体装置。 - 半導体基板上に、圧縮応力を発生させる密度の低い第1絶縁膜と、圧縮応力を発生させる密度の高い第2絶縁膜とを交互に積み重ねたパッシベーション膜を形成する工程を有し、
前記工程では、前記半導体基板に最も近い最下層に、前記第1絶縁膜を配置することを特徴とする半導体装置の製造方法。 - 前記半導体基板上には、前記パッシベーション膜を形成する前に、半導体層、絶縁膜層、有機物層および金属層が形成され、
前記パッシベーション膜は、これらの半導体層、絶縁膜層、有機物層および金属層を覆って前記半導体基板に形成されてなる請求項4に記載の半導体装置の製造方法。 - 前記金属層は、蒸着またはめっきによって形成されてなる請求項5に記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016205227A JP6540651B2 (ja) | 2016-10-19 | 2016-10-19 | 半導体装置およびその製造方法 |
TW106130463A TWI667747B (zh) | 2016-10-19 | 2017-09-06 | 半導體裝置及其製造方法 |
CN201710963350.1A CN107968076B (zh) | 2016-10-19 | 2017-10-16 | 半导体装置及其制造方法 |
US15/784,667 US10157812B2 (en) | 2016-10-19 | 2017-10-16 | Semiconductor device and method of manufacturing the same |
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JPS63117429A (ja) * | 1986-11-05 | 1988-05-21 | Nec Corp | 半導体装置 |
JPH01293624A (ja) * | 1988-05-23 | 1989-11-27 | Nec Corp | 集積回路の製造方法 |
JPH07130731A (ja) * | 1993-10-29 | 1995-05-19 | Nec Corp | 半導体装置ならびにその製造方法および製造装置 |
JP2003324111A (ja) * | 2002-05-02 | 2003-11-14 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
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US7585704B2 (en) * | 2005-04-01 | 2009-09-08 | International Business Machines Corporation | Method of producing highly strained PECVD silicon nitride thin films at low temperature |
JP5897486B2 (ja) * | 2013-03-14 | 2016-03-30 | 株式会社東芝 | 半導体装置 |
JP2014184513A (ja) * | 2013-03-22 | 2014-10-02 | Toshiba Corp | 電気部品およびその製造方法 |
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JPS63117429A (ja) * | 1986-11-05 | 1988-05-21 | Nec Corp | 半導体装置 |
JPH01293624A (ja) * | 1988-05-23 | 1989-11-27 | Nec Corp | 集積回路の製造方法 |
JPH07130731A (ja) * | 1993-10-29 | 1995-05-19 | Nec Corp | 半導体装置ならびにその製造方法および製造装置 |
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