JP2018021868A - センサ装置 - Google Patents
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- JP2018021868A JP2018021868A JP2016154534A JP2016154534A JP2018021868A JP 2018021868 A JP2018021868 A JP 2018021868A JP 2016154534 A JP2016154534 A JP 2016154534A JP 2016154534 A JP2016154534 A JP 2016154534A JP 2018021868 A JP2018021868 A JP 2018021868A
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- 238000001514 detection method Methods 0.000 claims abstract description 37
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 238000004364 calculation method Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000003990 capacitor Substances 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/14—Measuring resistance by measuring current or voltage obtained from a reference source
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
図1に示すように、本実施形態のセンサ装置1において、4つの抵抗素子Rsにより抵抗ブリッジ回路を構成してなる圧力センサ2は、抵抗ブリッジの対角の一方が電源とグランドとの間に接続されている。また、抵抗ブリッジの対角の他方となる差動出力端子Vinp,Vinmは、それぞれ電圧測定部3の入力端子に接続されている。電圧測定部3は、差動出力端子Vinp,Vinmの各電圧を測定する。
以下、第1実施形態と同一部分には同一符号を付して説明を省略し、異なる部分について説明する。図7に示すように、第2実施形態のセンサ装置11は、温度検出回路12が、電源とグランドとの間に接続される抵抗素子R1〜R3の直列回路13を備えている。そして、スイッチ回路SP1及びSM1の共通接続点は、抵抗素子R1及びR2の共通接続点に接続されており、スイッチ回路SP2及びSM2の共通接続点は、抵抗素子R2及びR3の共通接続点に接続されている。抵抗素子R1〜R3は第1〜第3抵抗素子に相当し、直列回路13は分圧抵抗回路に相当する。
図8に示すように、第3実施形態のセンサ装置21を構成する温度検出回路22は、第1実施形態の温度検出回路4より抵抗素子Rdを削除し、それらに替えて第1定電流源23,第2定電流源24を備えている。第1定電流源23の一端は電源に接続されており、第2定電流源24の一端はグランドに接続されている。そして、スイッチ回路SP1及びSM1の共通接続点は第1定電流源23の他端に接続されており、スイッチ回路SP2及びSM2の共通接続点は第2定電流源24の他端に接続されている。
図9に示すように、第3実施形態では、上記の実施形態では温度情報を取得するために測定した温度P,温度Mを加算することで、圧力センサ2が検出している圧力の情報も取得する。条件(Rd=Rs/2)を設定して(温度P+温度M)を演算すると、(1)式と同様の結果が得られる。
図11に示すように、第5実施形態のセンサ装置31は、圧力センサ2及び温度検出回路4を2組備えており、これらの一方を圧力センサ2(0)及び温度検出回路4(0),他方を圧力センサ2(1)及び温度検出回路4(1)とする。電圧測定部32は、サンプル回路部33S及びホールド回路部33Hからなるサンプルホールド回路33を内蔵している。
第6実施形態では、例えば第1実施形態の構成において、圧力センサ2の差動出力端子Vinp,Vinmの一方と電圧測定部3との間における断線の発生を検出する。図14及び図15に示すように、差動出力端子Vinp側が断線した場合に、第1実施形態と同様に温度P,温度Mを測定し、それらの差分を演算すると(8)〜(10)式のようになる。
(その他の実施形態)
センサは抵抗ブリッジ回路で構成されるものであれば良く、圧力センサに限ることはない。
第5実施形態において、圧力センサ2及び温度検出回路4を3組以上備えても良い。
各実施形態を適宜組み合わせて実施しても良い。
Claims (7)
- 電源とグランドとの間に接続される抵抗ブリッジ回路で構成され、物理量を検出するセンサ(2)と、
前記抵抗ブリッジ回路の正側,負側差動出力端子の一方に電流を供給する第1経路を形成すると共に他方より電流を流出させる第2経路を形成し、且つ前記第1経路と前記第2経路とを前記2つの出力端子に対し入れ替えて形成可能である温度検出回路(4,12,22)と、
前記差動出力端子の電圧をそれぞれ測定する電圧測定部(3,32)と、
前記温度検出回路により、前記差動出力端子の一方に前記第1経路を形成すると共に他方に前記第2経路を形成した場合と、一方に前記第2経路を形成すると共に他方に前記第1経路を形成した場合とについて、前記電圧測定部に前記2つの出力端子の電圧をそれぞれ測定させるように制御する制御部(5,35)と、
前記2つの出力端子の電圧の差分を演算することで、前記センサの温度情報を取得する演算部(6)とを備えるセンサ装置。 - 前記温度検出回路(4)は、前記正側,負側差動出力端子と電源との間にそれぞれ接続される、抵抗素子(Rd)及びスイッチ回路(SP1,SM1)からなる第1,第2直列回路と、
前記正側,負側差動出力端子とグランドとの間にそれぞれ接続される、抵抗素子(Rd)及びスイッチ回路(SP2,SM2)からなる第3,第4直列回路とを備える請求項1記載のセンサ装置。 - 前記温度検出回路(12)は、電源とグランドとの間に接続される第1〜第3抵抗素子(R1〜R3)からなる分圧抵抗回路(13)を備え、
前記第1及び第2直列回路は、前記第1抵抗素子を介して電源に接続され、
前記第3及び第4直列回路は、前記第3抵抗素子を介してグランドに接続されている請求項2記載のセンサ装置。 - 前記温度検出回路を構成する抵抗素子の抵抗値を、前記抵抗ブリッジ回路構成する抵抗素子の抵抗値の1/2に設定する請求項2又は3記載のセンサ装置。
- 前記温度検出回路(22)は、一端が電源に接続される第1定電流源(23)と、
一端がグランドに接続される第2定電流源(24)と、
前記正側,負側差動出力端子と前記第1定電流源の他端との間に接続される第1,第2スイッチ回路(SP1,SM1)と、
前記正側,負側差動出力端子と前記第2定電流源の他端との間に接続される第3,第4スイッチ回路(SP2,SM2)とを備える請求項1記載のセンサ装置。 - 前記演算部は、前記差分を演算する対象の2つの電圧を加算することで、前記センサにより検出される圧力に応じた電圧データを取得する請求項1から5の何れか一項に記載のセンサ装置。
- 前記演算部は、前記2つの電圧の差分が上限値を超えると、前記差動出力端子の断線を検出する請求項1から6の何れか一項に記載のセンサ装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016154534A JP6489081B2 (ja) | 2016-08-05 | 2016-08-05 | センサ装置 |
CN201780047056.4A CN109564139B (zh) | 2016-08-05 | 2017-05-23 | 传感器装置 |
PCT/JP2017/019219 WO2018025470A1 (ja) | 2016-08-05 | 2017-05-23 | センサ装置 |
US16/231,745 US11402275B2 (en) | 2016-08-05 | 2018-12-24 | Sensor apparatus |
Applications Claiming Priority (1)
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JP2016154534A JP6489081B2 (ja) | 2016-08-05 | 2016-08-05 | センサ装置 |
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JP2018021868A true JP2018021868A (ja) | 2018-02-08 |
JP6489081B2 JP6489081B2 (ja) | 2019-03-27 |
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JP2016154534A Active JP6489081B2 (ja) | 2016-08-05 | 2016-08-05 | センサ装置 |
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US (1) | US11402275B2 (ja) |
JP (1) | JP6489081B2 (ja) |
CN (1) | CN109564139B (ja) |
WO (1) | WO2018025470A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US11747379B2 (en) * | 2021-03-10 | 2023-09-05 | Renesas Electronics America, Inc. | Active measurement correction of resistive sensors |
CN113311365A (zh) * | 2021-06-01 | 2021-08-27 | 深圳市思榕科技有限公司 | 一种压力传感器断线检测电路 |
Citations (6)
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JPH0979875A (ja) * | 1995-09-11 | 1997-03-28 | Nec San-Ei Instr Co Ltd | 物理量測定装置及びその測定方法 |
JP2002131159A (ja) * | 2000-10-27 | 2002-05-09 | Nok Corp | センサ回路 |
US20020073783A1 (en) * | 2000-10-18 | 2002-06-20 | Endevco Corporation | Pressure sensor |
US20060052967A1 (en) * | 2004-08-10 | 2006-03-09 | Ranco Incorporated Of Delaware | Pressure and temperature measurement of a piezo-resistive device using differential channel of a ratiometric analog to digital converter |
JP2008298803A (ja) * | 2008-09-18 | 2008-12-11 | Toyota Central R&D Labs Inc | 圧力センサ出力処理装置と圧力センサ装置 |
WO2015045267A1 (ja) * | 2013-09-30 | 2015-04-02 | 株式会社デンソー | センサ信号検出装置 |
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JP2898500B2 (ja) | 1993-01-29 | 1999-06-02 | 株式会社山武 | 温度特性補正付圧力センサ |
DE4417228A1 (de) * | 1994-05-17 | 1995-11-23 | Michael Dr Altwein | Dehnungsmeßstreifen-Meßanordnung, Verwendung derselben und Modulationsverstärker für derartige Meßanordnungen |
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JP3520652B2 (ja) | 1996-02-08 | 2004-04-19 | 株式会社デンソー | 半導体力センサ |
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JP2005274412A (ja) * | 2004-03-25 | 2005-10-06 | Denso Corp | 温度センサ一体型圧力センサ装置 |
WO2006020814A2 (en) * | 2004-08-10 | 2006-02-23 | Robertshaw Controls Company | Pressure and temperature measurement of a piezo-resistive device using differential channel of a ratiometric analog to digital converter |
JP2006078310A (ja) | 2004-09-09 | 2006-03-23 | Nippon Seiki Co Ltd | 半導体センサ装置 |
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-
2016
- 2016-08-05 JP JP2016154534A patent/JP6489081B2/ja active Active
-
2017
- 2017-05-23 WO PCT/JP2017/019219 patent/WO2018025470A1/ja active Application Filing
- 2017-05-23 CN CN201780047056.4A patent/CN109564139B/zh active Active
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2018
- 2018-12-24 US US16/231,745 patent/US11402275B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0979875A (ja) * | 1995-09-11 | 1997-03-28 | Nec San-Ei Instr Co Ltd | 物理量測定装置及びその測定方法 |
US20020073783A1 (en) * | 2000-10-18 | 2002-06-20 | Endevco Corporation | Pressure sensor |
JP2002131159A (ja) * | 2000-10-27 | 2002-05-09 | Nok Corp | センサ回路 |
US20060052967A1 (en) * | 2004-08-10 | 2006-03-09 | Ranco Incorporated Of Delaware | Pressure and temperature measurement of a piezo-resistive device using differential channel of a ratiometric analog to digital converter |
JP2008298803A (ja) * | 2008-09-18 | 2008-12-11 | Toyota Central R&D Labs Inc | 圧力センサ出力処理装置と圧力センサ装置 |
WO2015045267A1 (ja) * | 2013-09-30 | 2015-04-02 | 株式会社デンソー | センサ信号検出装置 |
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WO2018025470A1 (ja) | 2018-02-08 |
JP6489081B2 (ja) | 2019-03-27 |
US20190128747A1 (en) | 2019-05-02 |
CN109564139B (zh) | 2021-02-05 |
US11402275B2 (en) | 2022-08-02 |
CN109564139A (zh) | 2019-04-02 |
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