JP2017536248A - 3次元集積回路(3d ic)集積化のためのマイクロ電気機械システム(mems)結合剥離構造およびウェハ移載の方法 - Google Patents
3次元集積回路(3d ic)集積化のためのマイクロ電気機械システム(mems)結合剥離構造およびウェハ移載の方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 57
- 238000012546 transfer Methods 0.000 title claims description 30
- 230000010354 integration Effects 0.000 title description 6
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 310
- 239000000758 substrate Substances 0.000 claims description 68
- 229910052751 metal Inorganic materials 0.000 claims description 58
- 239000002184 metal Substances 0.000 claims description 58
- 239000004065 semiconductor Substances 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 28
- 229910052710 silicon Inorganic materials 0.000 claims description 25
- 239000010703 silicon Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 21
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 17
- 239000007943 implant Substances 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000011229 interlayer Substances 0.000 claims description 8
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000005240 physical vapour deposition Methods 0.000 claims description 6
- 238000002513 implantation Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 5
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 8
- 235000012431 wafers Nutrition 0.000 description 94
- 230000008569 process Effects 0.000 description 29
- 230000032798 delamination Effects 0.000 description 9
- 238000007789 sealing Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000007730 finishing process Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- -1 potassium nitride Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8221—Three dimensional integrated circuits stacked in different levels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68363—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
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- H—ELECTRICITY
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- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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Abstract
Description
104 マイクロ電気機械システム(MEMS)犠牲剥離層
106 酸化物層
108a MEMSポストまたはピラー
108b MEMSポストまたはピラー
108c MEMSポストまたはピラー
150a 外側MEMSポストまたはピラー
150b 外側MEMSポストまたはピラー
160 封止リング
200 移載基板
202 バルクウェハ
204 表面
206 表面
208 半導体酸化物層
210 半導体酸化物層
212 部分
220 ドープされない部分
230 上面
300 キャリア基板
400 シリコンオンインシュレータ(SOI)基板またはBOX層
500 キャリア基板
504 連続したMEMS犠牲剥離層
1202 ウェハ
1204 金属M1層
1206 金属M2層
1208 金属M3層
1210 金属M4層
1212 層間誘電体ILD−0層
1214 層間誘電体ILD−1層
1216 層間誘電体ILD−2層
1218 層間誘電体ILD−3層
1220 ビアV1
1222 ビアV2
1224 ビアV3
1230 ILD−4層
1240 ボンディングパッド
1242 ボンディングパッド
1302 金属M1層
1304 金属M2層
1306 金属M3層
1308 金属M4層
1310 ILD−0層
1312 ILD−1層
1314 ILD−2層
1316 ILD−3層
1320 ビアV1
1322 ビアV2
1324 ビアV3
1330 ILD−4層
1340 ボンディングパッド
1342 ボンディングパッド
1702 上面
1802a ビア
1802b ビア
1802c ビア
1902a 金属相互接続
1902b 金属相互接続
1902c 金属相互接続
2002 ILD−5層
2004 ILD−6層
2006a 金属相互接続
2006b 金属相互接続
2006c 金属相互接続
2008a ビア
2008b ビア
2008c ビア
2010a ボンディングパッド
2010b ボンディングパッド
2110a ボンディングパッド
2110b ボンディングパッド
2120 BOX層
2130a ボンディングパッド
2130b ボンディングパッド
Claims (40)
- マイクロ電気機械システム(MEMS)結合剥離構造であって、
キャリアウェハと、
前記キャリアウェハ上にあるMEMS犠牲剥離層と、
前記MEMS犠牲剥離層上にある半導体酸化物層と、
前記半導体酸化物層上にあるアクティブ半導体層とを備える、マイクロ電気機械システム(MEMS)結合剥離構造。 - 前記半導体酸化物層は、二酸化シリコン(SiO2)層を含む、請求項1に記載の構造。
- 前記アクティブ半導体層は、前記SiO2層上にあるアクティブシリコン層を含む、請求項2に記載の構造。
- 前記MEMS犠牲剥離層は、互いに離間する複数のMEMSポストを備える、請求項1に記載の構造。
- 前記MEMSポストはそれぞれ犠牲剥離材料を含む、請求項4に記載の構造。
- 前記犠牲剥離材料は、モリブデン(Mo)、ゲルマニウム(Ge)、酸化ゲルマニウム(GeOx)および酸化シリコン(SiOx)からなるグループから選択される材料を含む、請求項5に記載の構造。
- 前記MEMSポストはそれぞれ、前記犠牲剥離材料を前記半導体酸化物層と結合するために前記犠牲剥離材料上に酸化物材料をさらに備える、請求項5に記載の構造。
- 前記MEMSポストは1つまたは複数の内側MEMSポストと、前記キャリアウェハ上で前記1つまたは複数の内側MEMSポストを少なくとも部分的に包囲する1つまたは複数の外側MEMSポストとを備える、請求項4に記載の構造。
- 前記MEMS犠牲剥離層は、前記キャリアウェハ上に連続した犠牲剥離層を含む、請求項1に記載の構造。
- 前記半導体酸化物層および前記アクティブ半導体層は共に埋め込み酸化物(BOX)層を形成する、請求項1に記載の構造。
- マイクロ電気機械システム(MEMS)結合剥離構造を作製する方法であって、
キャリアウェハを設けるステップと、
前記キャリアウェハ上にMEMS犠牲剥離層を設けるステップと、
前記MEMS犠牲剥離層上に半導体酸化物層を設けるステップと、
前記半導体酸化物層上にアクティブ半導体層を設けるステップとを含む、方法。 - 前記MEMS犠牲剥離層を設ける前記ステップは、
前記キャリアウェハ上に犠牲剥離材料を堆積するステップと、
前記犠牲剥離材料上に酸化物材料を堆積するステップとを含む、請求項11に記載の方法。 - 前記犠牲剥離材料を堆積する前記ステップは、モリブデン(Mo)、ゲルマニウム(Ge)、酸化ゲルマニウム(GeOx)および酸化シリコン(SiOx)からなるグループから選択される材料を堆積するステップを含む、請求項12に記載の方法。
- 前記犠牲剥離材料を堆積する前記ステップは、化学気相成長(CVD)、プラズマ化学気相成長(PECVD)または物理気相成長(PVD)によって、前記犠牲剥離材料を堆積するステップを含む、請求項12に記載の方法。
- 前記酸化物材料を堆積する前記ステップは、化学気相成長(CVD)、プラズマ化学気相成長(PECVD)または物理気相成長(PVD)によって、前記酸化物材料を堆積するステップを含む、請求項12に記載の方法。
- バルクウェハと、前記バルクウェハの表面上にある少なくとも1つの半導体酸化物層とを含む移載基板を設けるステップと、
前記半導体酸化物層と接触している前記バルクウェハの前記表面付近にある前記バルクウェハの第1の部分にH+デルタ注入を適用するステップとをさらに含む、請求項11に記載の方法。 - 前記移載基板を、前記キャリアウェハ、前記MEMS犠牲剥離層、前記半導体酸化物層および前記アクティブ半導体層を備えるキャリア基板に結合するステップをさらに含む、請求項16に記載の方法。
- 前記移載基板を前記キャリア基板に結合する前記ステップは、前記移載基板の前記半導体酸化物層を前記MEMS犠牲剥離層に結合するステップを含む、請求項17に記載の方法。
- 前記移載基板の前記バルクウェハの第2の部分を前記キャリア基板から分離するステップと、
H+デルタ注入を伴う前記バルクウェハの第1の部分を、前記半導体酸化物層と接触させておくステップとをさらに含む、請求項18に記載の方法。 - 前記移載基板の前記半導体酸化物層は二酸化シリコン(SiO2)を含み、前記移載基板の前記バルクウェハはシリコン(Si)を含む、請求項19に記載の方法。
- 3次元集積回路デバイスであって、
基板と、
1つまたは複数の金属層と、1つまたは複数の層間誘電体(ILD)層とを備える、第1の段の1つまたは複数の集積回路と、
1つまたは複数の金属層と、1つまたは複数のILD層とを備える、第2の段の1つまたは複数の集積回路と、
前記第2の段の1つまたは複数の集積回路内の前記ILD層のうちの少なくとも1つのILD層と接触している第1の埋め込み酸化物(BOX)層とを備え、前記第1のBOX層の1つまたは複数の部分と、前記第2の段の1つまたは複数の集積回路内の前記ILD層のうちの前記少なくとも1つのILD層の1つまたは複数の部分とは、前記第1のBOX層と、前記第2の段内の前記ILD層のうちの前記少なくとも1つのILD層とを貫通する1つまたは複数のビアを形成するために除去される、3次元集積回路デバイス。 - 前記1つまたは複数のビアの上方に1つまたは複数の金属相互接続をさらに備える、請求項21に記載のデバイス。
- 前記金属相互接続上に、1つまたは複数の金属層と、1つまたは複数のILD層とをさらに備える、請求項22に記載のデバイス。
- 前記1つまたは複数の金属層上に複数のボンディングパッドをさらに備える、請求項23に記載のデバイス。
- 前記第1のBOX層は、シリコン層(Si)と、二酸化シリコン(SiO2)層を含む、請求項21に記載のデバイス。
- 前記第1の段の1つまたは複数の集積回路はさらに、第1の1組の1つまたは複数のボンディングパッドを備え、前記第2の段の1つまたは複数の集積回路はさらに、第2の1組の1つまたは複数のボンディングパッドを備え、前記第1の組内の前記ボンディングパッドのうちの少なくとも1つは前記第2の組内の前記ボンディングパッドのうちの少なくとも1つに接続される、請求項21に記載のデバイス。
- 1つまたは複数の金属層と、1つまたは複数のILD層とを備える、第3の段の1つまたは複数の集積回路と、
前記第3の段の1つまたは複数の集積回路内の前記ILD層のうちの少なくとも1つのILD層と接触している第2のBOX層とを備え、前記第2のBOX層の1つまたは複数の部分と、前記第3の段の1つまたは複数の集積回路内の前記ILD層のうちの前記少なくとも1つのILD層の1つまたは複数の部分とは、前記第2のBOX層と、前記第3の段内の前記ILD層のうちの前記少なくとも1つのILD層とを貫通する1つまたは複数のビアを形成するために除去される、請求項21に記載のデバイス。 - 前記第2の段の1つまたは複数の集積回路はさらに、第2の1組の1つまたは複数のボンディングパッドを備え、前記第3の段の1つまたは複数の集積回路はさらに、第3の1組の1つまたは複数のボンディングパッドを備え、前記第2の組内の前記ボンディングパッドのうちの少なくとも1つは前記第3の組内の前記ボンディングパッドのうちの少なくとも1つに接続される、請求項27に記載のデバイス。
- 前記基板はシリコンオンインシュレータ(SOI)基板を含む、請求項21に記載のデバイス。
- 前記基板はシリコン(Si)バルクハンドラを含む、請求項21に記載のデバイス。
- 3次元集積回路デバイスを作製する方法であって、
基板を設けるステップと、
1つまたは複数の金属層と、1つまたは複数の層間誘電体(ILD)層とを備える、第1の段の1つまたは複数の集積回路を形成するステップと、
1つまたは複数の金属層と、1つまたは複数のILD層とを備える、第2の段の1つまたは複数の集積回路を形成するステップと、
前記第2の段の1つまたは複数の集積回路内の前記ILD層のうちの少なくとも1つのILD層と接触している第1の埋め込み酸化物(BOX)層を形成するステップと、
前記第1のBOX層と、前記第2の段内の前記ILD層のうちの前記少なくとも1つのILD層とを貫通する1つまたは複数のビアを形成するステップとを含む、方法。 - 前記第2の段の1つまたは複数の集積回路を形成する前記ステップは、前記第2の段の1つまたは複数の集積回路内の1つまたは複数のボンディングパッドを、前記第1の段の1つまたは複数の集積回路内の1つまたは複数のボンディングパッドと位置合わせするステップを含む、請求項31に記載の方法。
- 前記第2の段の1つまたは複数の集積回路を形成する前記ステップはさらに、前記第2の段の1つまたは複数の集積回路内の前記1つまたは複数のボンディングパッドを、前記第1の段の1つまたは複数の集積回路内の前記1つまたは複数のボンディングパッドと結合するステップを含む、請求項32に記載の方法。
- 前記第2の段の1つまたは複数の集積回路を形成する前記ステップは、キャリアウェハと、前記キャリアウェハ上にあるマイクロ電気機械システム(MEMS)結合剥離層と、前記MEMS犠牲剥離層上にある前記第1のBOX層とを備えるMEMS結合剥離構造上に、前記第2の段の1つまたは複数の集積回路を形成するステップを含む、請求項31に記載の方法。
- 前記MEMS犠牲剥離層を剥離することによって、前記第2の段の1つまたは複数の集積回路から前記キャリアウェハを分離するステップをさらに含む、請求項34に記載の方法。
- 前記1つまたは複数のビアの上方に1つまたは複数の金属相互接続を形成するステップと、
前記金属相互接続上に1つまたは複数の金属層と、1つまたは複数のILD層とを形成するステップと、
前記1つまたは複数の金属層上に複数のボンディングパッドを形成するステップとをさらに含む、請求項35に記載の方法。 - 1つまたは複数の金属層と、1つまたは複数のILD層とを備える、第3の段の1つまたは複数の集積回路を形成するステップと、
前記第3の段の1つまたは複数の集積回路内の前記ILD層のうちの少なくとも1つのILD層と接触している第2のBOX層を形成するステップとをさらに含む、請求項31に記載の方法。 - 前記第2のBOX層と、前記第3の段内の前記ILD層のうちの前記少なくとも1つのILD層とを貫通する1つまたは複数のビアを形成するステップをさらに含む、請求項37に記載の方法。
- 前記第3の段の1つまたは複数の集積回路を形成する前記ステップは、キャリアウェハと、前記キャリアウェハ上にあるマイクロ電気機械システム(MEMS)結合剥離層と、前記MEMS犠牲剥離層上にある前記第2のBOX層とを備えるMEMS結合剥離構造上に、前記第3の段の1つまたは複数の集積回路を形成するステップを含む、請求項37に記載の方法。
- 前記MEMS犠牲剥離層を剥離することによって、前記第3の段の1つまたは複数の集積回路から前記キャリアウェハを分離するステップをさらに含む、請求項39に記載の方法。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019134165A (ja) * | 2018-02-02 | 2019-08-08 | インフィニオン テクノロジーズ アクチエンゲゼルシャフトInfineon Technologies AG | ウェハ合成物および半導体コンポーネントの製造方法 |
CN113912005A (zh) * | 2021-10-08 | 2022-01-11 | 天津大学 | 一种基于柔性铰链结构的xy全解耦微运动平台 |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3007224A1 (en) * | 2014-10-08 | 2016-04-13 | Nxp B.V. | Metallisation for semiconductor device |
US10049915B2 (en) * | 2015-01-09 | 2018-08-14 | Silicon Genesis Corporation | Three dimensional integrated circuit |
JP6784969B2 (ja) * | 2015-10-22 | 2020-11-18 | 天馬微電子有限公司 | 薄膜デバイスとその製造方法 |
FR3053159B1 (fr) | 2016-06-23 | 2019-05-10 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d'une structure de transistors comportant une etape de bouchage |
US10438838B2 (en) * | 2016-09-01 | 2019-10-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor structure and related method |
WO2018182647A1 (en) * | 2017-03-30 | 2018-10-04 | Intel Corporation | Apparatus with multi- wafer based device comprising embedded active and/or passive devices and method for forming such |
US11211328B2 (en) * | 2017-10-16 | 2021-12-28 | SK Hynix Inc. | Semiconductor memory device of three-dimensional structure |
US20190371681A1 (en) * | 2018-06-01 | 2019-12-05 | Synaptics Incorporated | Stacked wafer integrated circuit |
US10504873B1 (en) | 2018-06-25 | 2019-12-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | 3DIC structure with protective structure and method of fabricating the same and package |
US10734285B2 (en) * | 2018-06-28 | 2020-08-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bonding support structure (and related process) for wafer stacking |
KR102538181B1 (ko) * | 2018-10-24 | 2023-06-01 | 삼성전자주식회사 | 반도체 패키지 |
US10796976B2 (en) * | 2018-10-31 | 2020-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of forming the same |
US10804202B2 (en) * | 2019-02-18 | 2020-10-13 | Sandisk Technologies Llc | Bonded assembly including a semiconductor-on-insulator die and methods for making the same |
US11195818B2 (en) * | 2019-09-12 | 2021-12-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Backside contact for thermal displacement in a multi-wafer stacked integrated circuit |
US11063022B2 (en) * | 2019-09-17 | 2021-07-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package and manufacturing method of reconstructed wafer |
US11158580B2 (en) | 2019-10-18 | 2021-10-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor devices with backside power distribution network and frontside through silicon via |
US10910272B1 (en) * | 2019-10-22 | 2021-02-02 | Sandisk Technologies Llc | Reusable support substrate for formation and transfer of semiconductor devices and methods of using the same |
US11088116B2 (en) * | 2019-11-25 | 2021-08-10 | Sandisk Technologies Llc | Bonded assembly containing horizontal and vertical bonding interfaces and methods of forming the same |
US11239204B2 (en) * | 2019-11-25 | 2022-02-01 | Sandisk Technologies Llc | Bonded assembly containing laterally bonded bonding pads and methods of forming the same |
US11270988B2 (en) * | 2020-01-20 | 2022-03-08 | Monolithic 3D Inc. | 3D semiconductor device(s) and structure(s) with electronic control units |
US20240096798A1 (en) * | 2020-01-20 | 2024-03-21 | Monolithic 3D Inc. | 3d semiconductor devices and structures with electronic circuit units |
US11488939B2 (en) * | 2020-01-20 | 2022-11-01 | Monolithic 3D Inc. | 3D semiconductor devices and structures with at least one vertical bus |
US11315903B2 (en) * | 2020-03-05 | 2022-04-26 | Nanya Technology Corporation | Semiconductor device with connecting structure and method for fabricating the same |
US11127628B1 (en) * | 2020-03-16 | 2021-09-21 | Nanya Technology Corporation | Semiconductor device with connecting structure having a step-shaped conductive feature and method for fabricating the same |
US11715755B2 (en) * | 2020-06-15 | 2023-08-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and method for forming integrated high density MIM capacitor |
KR20220017175A (ko) * | 2020-08-04 | 2022-02-11 | 에스케이하이닉스 주식회사 | 웨이퍼 대 웨이퍼 본딩 구조를 갖는 반도체 장치 및 그 제조방법 |
US11817392B2 (en) * | 2020-09-28 | 2023-11-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit |
US11552055B2 (en) * | 2020-11-20 | 2023-01-10 | Qualcomm Incorporated | Integrated circuit (IC) packages employing front side back-end-of-line (FS-BEOL) to back side back-end-of-line (BS-BEOL) stacking for three-dimensional (3D) die stacking, and related fabrication methods |
US11682652B2 (en) * | 2021-03-10 | 2023-06-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Notched wafer and bonding support structure to improve wafer stacking |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010504649A (ja) * | 2006-09-20 | 2010-02-12 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | 転写可能な半導体構造、デバイス、及びデバイスコンポーネントを作成するための剥離方法 |
JP2014504457A (ja) * | 2010-12-24 | 2014-02-20 | アイ・オゥ・セミコンダクター・インコーポレイテッド | 半導体デバイスのためのトラップリッチ層 |
US20140264770A1 (en) * | 2013-03-15 | 2014-09-18 | Sandia Corporation | Method of forming through substrate vias (tsvs) and singulating and releasing die having the tsvs from a mechanical support substrate |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6888608B2 (en) | 1995-09-06 | 2005-05-03 | Kabushiki Kaisha Toshiba | Liquid crystal display device |
US6525415B2 (en) | 1999-12-28 | 2003-02-25 | Fuji Xerox Co., Ltd. | Three-dimensional semiconductor integrated circuit apparatus and manufacturing method therefor |
US7045878B2 (en) | 2001-05-18 | 2006-05-16 | Reveo, Inc. | Selectively bonded thin film layer and substrate layer for processing of useful devices |
US7420147B2 (en) | 2001-09-12 | 2008-09-02 | Reveo, Inc. | Microchannel plate and method of manufacturing microchannel plate |
US7435651B2 (en) * | 2005-09-12 | 2008-10-14 | Texas Instruments Incorporated | Method to obtain uniform nitrogen profile in gate dielectrics |
US7785938B2 (en) | 2006-04-28 | 2010-08-31 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor integrated circuit, manufacturing method thereof, and semiconductor device using semiconductor integrated circuit |
US20080291767A1 (en) | 2007-05-21 | 2008-11-27 | International Business Machines Corporation | Multiple wafer level multiple port register file cell |
US7897428B2 (en) | 2008-06-03 | 2011-03-01 | International Business Machines Corporation | Three-dimensional integrated circuits and techniques for fabrication thereof |
US8742476B1 (en) | 2012-11-27 | 2014-06-03 | Monolithic 3D Inc. | Semiconductor device and structure |
US8330559B2 (en) | 2010-09-10 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer level packaging |
US8563396B2 (en) | 2011-01-29 | 2013-10-22 | International Business Machines Corporation | 3D integration method using SOI substrates and structures produced thereby |
US8970045B2 (en) | 2011-03-31 | 2015-03-03 | Soitec | Methods for fabrication of semiconductor structures including interposers with conductive vias, and related structures and devices |
US8368152B2 (en) | 2011-04-18 | 2013-02-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS device etch stop |
US8729673B1 (en) | 2011-09-21 | 2014-05-20 | Sandia Corporation | Structured wafer for device processing |
-
2014
- 2014-09-26 US US14/498,965 patent/US9922956B2/en not_active Expired - Fee Related
-
2015
- 2015-09-08 KR KR1020177007903A patent/KR20170066354A/ko unknown
- 2015-09-08 JP JP2017514278A patent/JP2017536248A/ja active Pending
- 2015-09-08 WO PCT/US2015/048930 patent/WO2016048649A1/en active Application Filing
- 2015-09-08 SG SG11201700918RA patent/SG11201700918RA/en unknown
- 2015-09-08 BR BR112017006167A patent/BR112017006167A2/pt not_active Application Discontinuation
- 2015-09-08 EP EP15767645.3A patent/EP3198634A1/en not_active Withdrawn
- 2015-09-08 CN CN201580048185.6A patent/CN106688077A/zh active Pending
- 2015-09-21 TW TW104131176A patent/TWI585820B/zh not_active IP Right Cessation
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010504649A (ja) * | 2006-09-20 | 2010-02-12 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | 転写可能な半導体構造、デバイス、及びデバイスコンポーネントを作成するための剥離方法 |
JP2014504457A (ja) * | 2010-12-24 | 2014-02-20 | アイ・オゥ・セミコンダクター・インコーポレイテッド | 半導体デバイスのためのトラップリッチ層 |
US20140264770A1 (en) * | 2013-03-15 | 2014-09-18 | Sandia Corporation | Method of forming through substrate vias (tsvs) and singulating and releasing die having the tsvs from a mechanical support substrate |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019134165A (ja) * | 2018-02-02 | 2019-08-08 | インフィニオン テクノロジーズ アクチエンゲゼルシャフトInfineon Technologies AG | ウェハ合成物および半導体コンポーネントの製造方法 |
JP7438664B2 (ja) | 2018-02-02 | 2024-02-27 | インフィニオン テクノロジーズ アクチエンゲゼルシャフト | ウェハ合成物および半導体コンポーネントの製造方法 |
CN113912005A (zh) * | 2021-10-08 | 2022-01-11 | 天津大学 | 一种基于柔性铰链结构的xy全解耦微运动平台 |
CN113912005B (zh) * | 2021-10-08 | 2023-02-03 | 天津大学 | 一种基于柔性铰链结构的xy全解耦微运动平台 |
Also Published As
Publication number | Publication date |
---|---|
BR112017006167A2 (pt) | 2018-04-10 |
SG11201700918RA (en) | 2017-04-27 |
HK1232339A1 (zh) | 2018-01-05 |
US20160093591A1 (en) | 2016-03-31 |
EP3198634A1 (en) | 2017-08-02 |
KR20170066354A (ko) | 2017-06-14 |
CN106688077A (zh) | 2017-05-17 |
WO2016048649A1 (en) | 2016-03-31 |
TW201633366A (zh) | 2016-09-16 |
US9922956B2 (en) | 2018-03-20 |
TWI585820B (zh) | 2017-06-01 |
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