JP2017535821A5 - - Google Patents

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Publication number
JP2017535821A5
JP2017535821A5 JP2017528794A JP2017528794A JP2017535821A5 JP 2017535821 A5 JP2017535821 A5 JP 2017535821A5 JP 2017528794 A JP2017528794 A JP 2017528794A JP 2017528794 A JP2017528794 A JP 2017528794A JP 2017535821 A5 JP2017535821 A5 JP 2017535821A5
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JP
Japan
Prior art keywords
light
scanning
substrate wafer
light spot
write head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017528794A
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English (en)
Japanese (ja)
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JP2017535821A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/EP2015/059143 external-priority patent/WO2016082941A1/en
Publication of JP2017535821A publication Critical patent/JP2017535821A/ja
Publication of JP2017535821A5 publication Critical patent/JP2017535821A5/ja
Priority to JP2021110224A priority Critical patent/JP7235808B2/ja
Pending legal-status Critical Current

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JP2017528794A 2014-11-27 2015-04-28 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置 Pending JP2017535821A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021110224A JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014224314.9 2014-11-27
DE102014224314 2014-11-27
PCT/EP2015/059143 WO2016082941A1 (en) 2014-11-27 2015-04-28 Lithography apparatus comprising a plurality of individually controllable write heads

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021110224A Division JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Publications (2)

Publication Number Publication Date
JP2017535821A JP2017535821A (ja) 2017-11-30
JP2017535821A5 true JP2017535821A5 (https=) 2019-11-21

Family

ID=53039409

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2017528794A Pending JP2017535821A (ja) 2014-11-27 2015-04-28 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置
JP2021110224A Active JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021110224A Active JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Country Status (7)

Country Link
US (2) US20170255110A1 (https=)
EP (1) EP3224675A1 (https=)
JP (2) JP2017535821A (https=)
KR (2) KR102415072B1 (https=)
CN (1) CN107003616B (https=)
TW (2) TWI707207B (https=)
WO (1) WO2016082941A1 (https=)

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US10684555B2 (en) * 2018-03-22 2020-06-16 Applied Materials, Inc. Spatial light modulator with variable intensity diodes
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