JP2017525129A - 下方にクロックゲートパワーおよび信号ルーティングを備えた、両側の金属 - Google Patents
下方にクロックゲートパワーおよび信号ルーティングを備えた、両側の金属 Download PDFInfo
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- JP2017525129A JP2017525129A JP2016566678A JP2016566678A JP2017525129A JP 2017525129 A JP2017525129 A JP 2017525129A JP 2016566678 A JP2016566678 A JP 2016566678A JP 2016566678 A JP2016566678 A JP 2016566678A JP 2017525129 A JP2017525129 A JP 2017525129A
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5283—Cross-sectional geometry
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
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- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- Engineering & Computer Science (AREA)
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Abstract
Description
本願は2014年6月16日に出願された、同時係属中の米国仮特許出願第62/012,822号に係る先の出願日の利益を主張し、当該出願は参照により本明細書に組み込まれる。本願は集積回路に関し、より具体的にはモノリシック3次元集積回路に関する。
Claims (22)
- 複数の第1の相互接続および複数の第2の相互接続を、複数の回路デバイスを含む集積回路デバイスレイヤの異なる側に形成する段階と、
前記複数の第2の相互接続への複数のコンタクトポイントを形成する段階と、を備え、
前記複数の第2の相互接続は異なる寸法の複数の相互接続を含み、
前記複数のコンタクトポイントは外部電源への接続のためのものである、方法。 - 前記複数の第2の相互接続のうちの第1のものは、前記デバイスレイヤ内の複数のデバイスにアクセスするために選択される寸法を有し、前記複数の第2の相互接続のうちの第2のものは前記複数の第2の相互接続のうちの前記第1のものより大きい厚さ寸法を有し、そのような寸法はグローバルクロック分配を含むよう選択される、請求項1に記載の方法。
- 前記複数の第2の相互接続のうちの第3のものは、電力を分配するために選択される寸法を有する、請求項2に記載の方法。
- 前記複数の第2の相互接続のうちの前記第3のものは、外部にアクセス可能な複数のコンタクトポイントに連結される、請求項3に記載の方法。
- 前記複数の第2の相互接続のうちの前記第2のものは、前記複数の第2の相互接続のうちの前記第1のものと、前記複数の第2の相互接続のうちの前記第3のものとの間に配置される、請求項3に記載の方法。
- 前記複数の第2の相互接続は、前記デバイスレイヤの位置に対して、前記複数の第2の相互接続のうちの前記第1のものから、前記複数の第2の相互接続のうちの前記第3のものへと増大する寸法を有する、請求項3に記載の方法。
- 前記複数の第1の相互接続のそれぞれは、前記集積回路デバイスレイヤ内のデバイスのそれぞれに接続される、請求項1または2に記載の方法。
- 異なる寸法の前記複数の相互接続は、異なる厚さ寸法の複数の相互接続を含む、請求項1または2に記載の方法。
- 請求項1または2に記載の前記方法のうちのいずれかで形成される、集積回路。
- 複数の第1の相互接続および複数の第2の相互接続を複数の回路デバイスを含む集積回路デバイスレイヤの異なる側に形成する段階と、
前記複数の第2の相互接続への複数のコンタクトポイントを形成する段階と、を備え、
前記複数の第1の相互接続のそれぞれは前記集積回路デバイスレイヤ内のデバイスのそれぞれに接続され、前記複数の第2の相互接続は前記デバイスレイヤの位置に対して、前記複数の第2の相互接続のうちの最初のものから、前記複数の第2の相互接続のうちの最後のものへと増大する寸法を有し、
前記複数のコンタクトポイントは外部電源への接続のためのものである、方法。 - 前記複数の第2の相互接続のうちの前記最初のものは、前記デバイスレイヤ内の複数のデバイスにアクセスするために選択される寸法を有する、請求項10に記載の方法。
- 前記複数の第2の相互接続は、前記複数の第2の相互接続の前記最初のものより大きい厚さ寸法を有する前記複数の第2の相互接続のうちの第2のものを有し、そのような寸法はグローバルクロック分配を含むよう選択される、請求項11に記載の方法。
- 前記複数の第2の相互接続のうちの前記最後のものは、電力を分配するために選択される寸法を有する、請求項12に記載の方法。
- 前記複数の第2の相互接続のうちの前記最後のものは外部にアクセス可能な複数のコンタクトポイントに連結される、請求項12に記載の方法。
- 前記複数の第2の相互接続のうちの前記第2のものの前記寸法は厚さ寸法である、請求項12に記載の方法。
- 請求項10または11に記載の前記方法のうちのいずれかによって形成される、集積回路。
- 複数の回路デバイスを含む集積回路デバイスレイヤの異なる側に、複数の第1の相互接続および複数の第2の相互接続を含む基板と、
前記複数の第2の相互接続に連結される複数のコンタクトポイントと、を備え、
前記複数の第2の相互接続は異なる寸法の複数の相互接続を含み、
前記複数のコンタクトポイントは外部電源への接続のためのものである、装置。 - 前記複数の第2の相互接続は、前記デバイスレイヤの位置に対して、前記複数の第2の相互接続のうちの第1のものから、前記複数の第2の相互接続のうちの最後のものへと増大する寸法を有する、請求項17に記載の装置。
- 前記寸法は厚さ寸法である、請求項18に記載の装置。
- 前記複数の第2の相互接続のうちの第1のものは、前記デバイスレイヤ内の複数のデバイスにアクセスするために選択される寸法を有し、前記複数の第2の相互接続のうちの第2のものは前記複数の第2の相互接続のうちの前記第1のものより大きい厚さ寸法を有し、そのような寸法はグローバルクロック分配を含むよう選択される、請求項17に記載の装置。
- 前記複数の第2の相互接続のうちの第3のものは、電力を分配するために選択される寸法を有する、請求項20に記載の装置。
- 前記複数の第2の相互接続のうちの前記第2のものは、前記複数の第2の相互接続のうちの前記第1のものと、前記複数の第2の相互接続のうちの前記第3のものとの間に配置される、請求項21に記載の装置。
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US11450600B2 (en) * | 2020-05-12 | 2022-09-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor devices including decoupling capacitors |
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US11437379B2 (en) | 2020-09-18 | 2022-09-06 | Qualcomm Incorporated | Field-effect transistors (FET) circuits employing topside and backside contacts for topside and backside routing of FET power and logic signals, and related complementary metal oxide semiconductor (CMOS) circuits |
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