JP2017517696A5 - - Google Patents

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Publication number
JP2017517696A5
JP2017517696A5 JP2016569637A JP2016569637A JP2017517696A5 JP 2017517696 A5 JP2017517696 A5 JP 2017517696A5 JP 2016569637 A JP2016569637 A JP 2016569637A JP 2016569637 A JP2016569637 A JP 2016569637A JP 2017517696 A5 JP2017517696 A5 JP 2017517696A5
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JP
Japan
Prior art keywords
nut
piston
lead screw
engagement feature
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016569637A
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English (en)
Japanese (ja)
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JP6543646B2 (ja
JP2017517696A (ja
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Publication date
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Priority claimed from PCT/US2015/032816 external-priority patent/WO2015184056A1/en
Publication of JP2017517696A publication Critical patent/JP2017517696A/ja
Publication of JP2017517696A5 publication Critical patent/JP2017517696A5/ja
Application granted granted Critical
Publication of JP6543646B2 publication Critical patent/JP6543646B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016569637A 2014-05-28 2015-05-28 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム Active JP6543646B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
US62/004,117 2014-05-28
PCT/US2015/032816 WO2015184056A1 (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Publications (3)

Publication Number Publication Date
JP2017517696A JP2017517696A (ja) 2017-06-29
JP2017517696A5 true JP2017517696A5 (enExample) 2018-07-12
JP6543646B2 JP6543646B2 (ja) 2019-07-10

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016569640A Active JP6644712B2 (ja) 2014-05-28 2015-05-28 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法
JP2016569637A Active JP6543646B2 (ja) 2014-05-28 2015-05-28 高精度のシステムおよび用途におけるモーター駆動コンポーネントのためのバックラッシュ防止メカニズム

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2016569640A Active JP6644712B2 (ja) 2014-05-28 2015-05-28 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法

Country Status (8)

Country Link
US (2) US20170107982A1 (enExample)
EP (2) EP3149329B1 (enExample)
JP (2) JP6644712B2 (enExample)
KR (2) KR102141271B1 (enExample)
CN (2) CN106662083B (enExample)
SG (2) SG11201609910XA (enExample)
TW (2) TWI670417B (enExample)
WO (2) WO2015184056A1 (enExample)

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US10519942B2 (en) 2016-07-28 2019-12-31 Accriva Diagnostics, Inc. Methods of operating a pump to reduce or eliminate pump backlash errors
US10570896B1 (en) * 2017-04-28 2020-02-25 Vp Sales And Company Lp Packing nut lock
US10792697B2 (en) 2017-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Drippage prevention system and method of operating same
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JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
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US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
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KR102115101B1 (ko) * 2018-11-01 2020-05-26 강현석 Iot기반 지능형 원격관리 서비스 시스템
PL3882471T3 (pl) * 2018-11-14 2024-09-09 Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. Jednostka hydrauliczna z równoległymi pompami połączonymi z serwomotorem i jej zastosowanie
CN111219248B (zh) * 2018-11-27 2024-10-11 罗伯特·博世有限公司 检测系统中过滤器的存在的方法
JP7193376B2 (ja) * 2019-02-22 2022-12-20 Ｔｏｗａ株式会社 樹脂成型装置及び樹脂成型品の製造方法
IT201900007779A1 (it) * 2019-05-31 2020-12-01 Corob Spa Metodo di controllo della dispensazione di prodotti fluidi
US11260669B2 (en) 2019-10-01 2022-03-01 Hewlett-Packard Development Company, L.P. Gas purger anomaly condition indication
TWI768379B (zh) * 2020-06-19 2022-06-21 緯創資通股份有限公司 壓力緩衝模組及生物培養裝置
JP7585124B2 (ja) * 2021-04-08 2024-11-18 株式会社Ｓｃｒｅｅｎホールディングス 処理液流通方法、及び、処理液供給装置
JP7530861B2 (ja) 2021-04-27 2024-08-08 東京エレクトロン株式会社 処理液供給装置、液体置換方法、および記憶媒体
JP2023127381A (ja) * 2022-03-01 2023-09-13 株式会社島津製作所 真空ポンプの制御装置、及び、制御方法

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