JP2017512378A5 - - Google Patents
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- Publication number
- JP2017512378A5 JP2017512378A5 JP2016550747A JP2016550747A JP2017512378A5 JP 2017512378 A5 JP2017512378 A5 JP 2017512378A5 JP 2016550747 A JP2016550747 A JP 2016550747A JP 2016550747 A JP2016550747 A JP 2016550747A JP 2017512378 A5 JP2017512378 A5 JP 2017512378A5
- Authority
- JP
- Japan
- Prior art keywords
- embedded
- workpiece
- hiv
- electrode
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 238000012544 monitoring process Methods 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461937050P | 2014-02-07 | 2014-02-07 | |
| US61/937,050 | 2014-02-07 | ||
| PCT/US2015/015078 WO2015120419A1 (en) | 2014-02-07 | 2015-02-09 | System and method for clamping a work piece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017512378A JP2017512378A (ja) | 2017-05-18 |
| JP2017512378A5 true JP2017512378A5 (enExample) | 2018-04-05 |
Family
ID=53778527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016550747A Pending JP2017512378A (ja) | 2014-02-07 | 2015-02-09 | ワークピースをクランプするためのシステムおよび方法 関連出願の相互参照 本願は、２０１４年２月７日に出願された米国仮特許出願番号第６１／９３７０５０号の優先権を主張するものである。仮特許出願の内容は、この参照によってここに援用される。 |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US11282732B2 (enExample) |
| EP (1) | EP3103127B1 (enExample) |
| JP (1) | JP2017512378A (enExample) |
| KR (1) | KR102402214B1 (enExample) |
| CN (1) | CN106165039B (enExample) |
| DE (1) | DE112015000700T5 (enExample) |
| GB (1) | GB2540883B (enExample) |
| HK (1) | HK1231629A1 (enExample) |
| MY (1) | MY174723A (enExample) |
| PH (1) | PH12016501425B1 (enExample) |
| SG (1) | SG11201605836SA (enExample) |
| WO (1) | WO2015120419A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019197128A2 (en) * | 2018-04-12 | 2019-10-17 | Asml Netherlands B.V. | Apparatus and method |
| US11073544B2 (en) | 2019-05-23 | 2021-07-27 | Advanced Energy Industries, Inc. | System and method to measure and adjust a charge of a workpiece |
| US11610800B2 (en) * | 2021-03-22 | 2023-03-21 | Applied Materials, Inc. | Capacitive method of detecting wafer chucking and de-chucking |
| US11817340B2 (en) * | 2021-04-28 | 2023-11-14 | Advanced Energy Industries, Inc. | System and method for improved electrostatic chuck clamping performance |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991004486A1 (en) | 1989-09-22 | 1991-04-04 | Blanchard Marketing Services Limited | Sensing method and device for aggregation control |
| JP2886934B2 (ja) | 1990-03-10 | 1999-04-26 | 株式会社クラレ | ジヒドロフラン系化合物の製造方法 |
| US5452177A (en) | 1990-06-08 | 1995-09-19 | Varian Associates, Inc. | Electrostatic wafer clamp |
| JPH04162443A (ja) | 1990-10-24 | 1992-06-05 | Japan Synthetic Rubber Co Ltd | 静電チャック装置 |
| JPH05299354A (ja) | 1992-04-21 | 1993-11-12 | Kokusai Electric Co Ltd | プラズマ処理装置のウェーハ保持装置 |
| US5436790A (en) | 1993-01-15 | 1995-07-25 | Eaton Corporation | Wafer sensing and clamping monitor |
| JPH0786384A (ja) | 1993-09-17 | 1995-03-31 | Sumitomo Metal Ind Ltd | 試料台、該試料台のモニタリングシステム及び半導体製造装置 |
| US5563798A (en) | 1994-04-05 | 1996-10-08 | Applied Materials, Inc. | Wafer positioning system |
| GB2293689A (en) * | 1994-09-30 | 1996-04-03 | Nec Corp | Electrostatic chuck |
| JP2976861B2 (ja) | 1994-09-30 | 1999-11-10 | 日本電気株式会社 | 静電チャック及びその製造方法 |
| JP3847363B2 (ja) | 1996-02-02 | 2006-11-22 | 富士通株式会社 | 半導体ウェハ処理装置及び半導体ウェハ処理方法 |
| US5708250A (en) * | 1996-03-29 | 1998-01-13 | Lam Resarch Corporation | Voltage controller for electrostatic chuck of vacuum plasma processors |
| US5858099A (en) * | 1996-04-09 | 1999-01-12 | Sarnoff Corporation | Electrostatic chucks and a particle deposition apparatus therefor |
| CN1224544A (zh) | 1996-04-09 | 1999-07-28 | 德尔西斯药品公司 | 静电吸盘 |
| US5793192A (en) | 1996-06-28 | 1998-08-11 | Lam Research Corporation | Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system |
| US6075375A (en) | 1997-06-11 | 2000-06-13 | Applied Materials, Inc. | Apparatus for wafer detection |
| JPH1167885A (ja) | 1997-08-25 | 1999-03-09 | Nissin Electric Co Ltd | 基板保持装置 |
| US6198616B1 (en) | 1998-04-03 | 2001-03-06 | Applied Materials, Inc. | Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system |
| JP3058615B2 (ja) | 1998-04-10 | 2000-07-04 | 株式会社山武 | ウエハ検出装置 |
| JP3323135B2 (ja) | 1998-08-31 | 2002-09-09 | 京セラ株式会社 | 静電チャック |
| US6965506B2 (en) | 1998-09-30 | 2005-11-15 | Lam Research Corporation | System and method for dechucking a workpiece from an electrostatic chuck |
| US6267839B1 (en) | 1999-01-12 | 2001-07-31 | Applied Materials, Inc. | Electrostatic chuck with improved RF power distribution |
| US6741446B2 (en) | 2001-03-30 | 2004-05-25 | Lam Research Corporation | Vacuum plasma processor and method of operating same |
| JP2002305237A (ja) | 2001-04-05 | 2002-10-18 | Hitachi Ltd | 半導体製造方法および製造装置 |
| TW200406088A (en) | 2002-09-27 | 2004-04-16 | Tsukuba Seiko Ltd | Electrostatic holding device and electrostatic tweezers using same |
| US7072166B2 (en) | 2003-09-12 | 2006-07-04 | Axcelis Technologies, Inc. | Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage |
| KR20050056757A (ko) | 2003-12-10 | 2005-06-16 | 삼성전자주식회사 | 이온화 공정 챔버 |
| JP4641290B2 (ja) | 2006-07-31 | 2011-03-02 | 富士通テン株式会社 | 運転情報記録装置 |
| JP2008047564A (ja) | 2006-08-10 | 2008-02-28 | Tokyo Electron Ltd | 真空処理装置、静電チャックの診断方法及び記憶媒体 |
| WO2008032661A1 (en) | 2006-09-12 | 2008-03-20 | National Institute Of Advanced Industrial Science And Technology | Distribution value measuring method and measuring system using distribution value sensor therefore |
| US7813103B2 (en) * | 2007-10-11 | 2010-10-12 | Applied Materials, Inc. | Time-based wafer de-chucking from an electrostatic chuck having separate RF BIAS and DC chucking electrodes |
| KR20090068055A (ko) | 2007-12-22 | 2009-06-25 | 주식회사 동부하이텍 | 반도체 제조장비의 바이폴라형 정전척 |
| CN101872733B (zh) * | 2009-04-24 | 2012-06-27 | 中微半导体设备(上海)有限公司 | 感测和移除被加工半导体工艺件的残余电荷的系统和方法 |
| JP5399791B2 (ja) | 2009-06-30 | 2014-01-29 | コバレントマテリアル株式会社 | 静電チャック |
| US8514544B2 (en) | 2009-08-07 | 2013-08-20 | Trek, Inc. | Electrostatic clamp optimizer |
| JP5358364B2 (ja) | 2009-09-11 | 2013-12-04 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
-
2015
- 2015-02-09 WO PCT/US2015/015078 patent/WO2015120419A1/en not_active Ceased
- 2015-02-09 GB GB1613425.6A patent/GB2540883B/en active Active
- 2015-02-09 KR KR1020167024703A patent/KR102402214B1/ko active Active
- 2015-02-09 HK HK17105201.5A patent/HK1231629A1/zh unknown
- 2015-02-09 DE DE112015000700.8T patent/DE112015000700T5/de not_active Ceased
- 2015-02-09 SG SG11201605836SA patent/SG11201605836SA/en unknown
- 2015-02-09 CN CN201580007757.6A patent/CN106165039B/zh active Active
- 2015-02-09 JP JP2016550747A patent/JP2017512378A/ja active Pending
- 2015-02-09 US US15/323,920 patent/US11282732B2/en active Active
- 2015-02-09 EP EP15746323.3A patent/EP3103127B1/en active Active
- 2015-02-09 MY MYPI2016702574A patent/MY174723A/en unknown
-
2016
- 2016-07-19 PH PH12016501425A patent/PH12016501425B1/en unknown
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