JP2017510979A - マルチデバイスのフレキシブルエレクトロニクスシステムオンチップ(soc)のプロセス統合 - Google Patents
マルチデバイスのフレキシブルエレクトロニクスシステムオンチップ(soc)のプロセス統合 Download PDFInfo
- Publication number
- JP2017510979A JP2017510979A JP2016551244A JP2016551244A JP2017510979A JP 2017510979 A JP2017510979 A JP 2017510979A JP 2016551244 A JP2016551244 A JP 2016551244A JP 2016551244 A JP2016551244 A JP 2016551244A JP 2017510979 A JP2017510979 A JP 2017510979A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor material
- disposed
- dielectric material
- soc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 56
- 230000010354 integration Effects 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract description 78
- 238000012545 processing Methods 0.000 claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims description 78
- 239000000758 substrate Substances 0.000 claims description 39
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 26
- 239000003989 dielectric material Substances 0.000 claims description 25
- 229910002601 GaN Inorganic materials 0.000 claims description 23
- 238000000151 deposition Methods 0.000 claims description 17
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 229910052733 gallium Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- 239000011787 zinc oxide Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 239000002657 fibrous material Substances 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000001465 metallisation Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 91
- 238000004891 communication Methods 0.000 description 20
- 230000015654 memory Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000010420 art technique Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/1613—Constructional details or arrangements for portable computers
- G06F1/1633—Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
- G06F1/1637—Details related to the display arrangement, including those related to the mounting of the display in the housing
- G06F1/1652—Details related to the display arrangement, including those related to the mounting of the display in the housing the display being flexible, e.g. mimicking a sheet of paper, or rollable
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0652—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8258—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using a combination of technologies covered by H01L21/8206, H01L21/8213, H01L21/822, H01L21/8252, H01L21/8254 or H01L21/8256
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/145—Organic substrates, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/4985—Flexible insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8221—Three dimensional integrated circuits stacked in different levels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Human Computer Interaction (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (25)
- フレキシブル基板と、
前記フレキシブル基板の上に配置された第1の半導体材料を有する第1のICデバイスと、
前記第1のICデバイスの上に配置された第1の誘電材料の層と、
前記第1の誘電材料の層の上に配置された第2の半導体材料を有する第2のICデバイスと、
を備える、フレキシブル集積回路(IC)装置。 - 前記第2のICデバイスの上に配置された第2の誘電材料の層、および前記第2の誘電材料の層の上に配置された第3のICデバイスを更に備える、請求項1に記載の装置。
- 前記第3のICデバイスは高周波デバイスを含む、請求項2に記載の装置。
- 前記第1のICデバイスに関連するトランジスタに電気的に結合された第1のコンタクトと、
前記第2のICデバイスに関連するトランジスタに電気的に結合された第2のコンタクトと、を更に備え、
前記第1のコンタクトおよび前記第2のコンタクトは実質的に同じ平面に配置されている、請求項1に記載の装置。 - 前記第2のICデバイスはシリコンベースのロジックデバイスを含む、請求項1から4のいずれか一項に記載の装置。
- 前記第1のICデバイスは、ディスプレイデバイスを含む、請求項1から4のいずれか一項に記載の装置。
- 前記第1のICデバイスは、インジウムガリウム亜鉛酸化物ベースのデバイスである、請求項1から4のいずれか一項に記載の装置。
- 前記フレキシブル基板は繊維材料である、請求項1から4のいずれか一項に記載の装置。
- 前記第1のICデバイスに結合されたアモルファスシリコン層を更に備える、請求項1から4のいずれか一項に記載の装置。
- フレキシブルデバイスを製造するための方法であって、
基板上に第1の半導体材料の層を堆積させる段階と、
前記第1の半導体材料の上に第1の誘電材料の層を堆積させる段階と、
前記第1の誘電材料の層の上に第2の半導体材料の層を堆積させる段階と、
第1の集積回路(IC)デバイスを形成するべく、前記第2の半導体材料を加工する段階と、
第2のICデバイスを形成するべく前記第1の半導体材料を加工する段階と、を備え、
前記第1の半導体材料および前記第2の半導体材料は、異なる化学成分を有する、
方法。 - 前記第2の半導体材料の上に第2の誘電材料の層を堆積させる段階と、
前記第2の誘電材料の層の上に第3の半導体材料の層を堆積させる段階と、
第3のICデバイスを形成するべく前記第3の半導体材料を加工する段階と、
を更に備える、請求項10に記載の方法。 - 前記第3のICデバイスは、前記第1のICデバイスの前に形成される、請求項11に記載の方法。
- 前記第3のICデバイスを形成する段階に関連する最大処理温度は、前記第1のICデバイスを形成する段階に関連する最大処理温度より高い、請求項12に記載の方法。
- 前記第3の半導体材料は、前記第1の半導体材料および前記第2の半導体材料とは異なる化学成分を有する、請求項11に記載の方法。
- 前記第1のICデバイスは、前記第2のICデバイスの前に形成される、請求項10から14のいずれか一項に記載の方法。
- 前記第1のICデバイスを形成する段階に関連する最大処理温度は、前記第2のICデバイスを形成する段階に関連する最大処理温度より高い、請求項15に記載の方法。
- 前記第1のICデバイスおよび前記第2のICデバイスに関連する複数のコンタクトが、実質的に同じ平面に配置されるように、前記第1のICデバイスおよび前記第2のICデバイスに関連する複数のトランジスタへの複数の電気的接続を形成する段階を更に備える、請求項10から14のいずれか一項に記載の方法。
- 前記複数の層をフレキシブル基板に移動させる段階を更に備える、請求項10から14のいずれか一項に記載の方法。
- 前記第1の半導体材料および前記第2の半導体材料は両方とも、シリコン(Si)、インジウムガリウム亜鉛酸化物(IGZO)、および窒化ガリウム(GaN)を含むリストから選択される、請求項10に記載の方法。
- 前記第2のICデバイスを形成するべく前記第1の半導体材料を加工する段階は、前記第1のICデバイスを、マスク処理を用いてパターニングする段階を含む、請求項10から14のいずれか一項に記載の方法。
- フレキシブル基板と、
前記フレキシブル基板の上に配置された第1のICデバイスと、
前記第1のICデバイスの上に配置された第1の誘電材料の層と、
前記第1の誘電材料の層の上に配置された第2のICデバイスと、
前記第1のICデバイスおよび前記第2のICデバイスに結合された電源と、を備える、
フレキシブルコンピューティングデバイス。 - 前記フレキシブル基板は、前記デバイスの第1面を画定し、前記デバイスは、前記第1面と対向して配置された前記デバイスの第2面の上に配置された複数のコンタクトを更に含む、請求項21に記載のコンピューティングデバイス。
- 前記コンピューティングデバイスは、衣服に組み込まれる、請求項21に記載のコンピューティングデバイス。
- 前記第1のICデバイスは、ディスプレイを含み、前記第2のICデバイスは、シリコンベースロジックまたは窒化ガリウムベース無線デバイスのうち1つを含む、請求項21に記載のコンピューティングデバイス。
- 前記コンピューティングデバイスは、前記基板に結合されたアンテナ、ディスプレイ、タッチスクリーンディスプレイ、タッチスクリーンコントローラ、バッテリ、オーディオコーデック、ビデオコーデック、電力増幅器、全地球測位システム(GPS)デバイス、コンパス、ガイガーカウンタ、加速度計、ジャイロスコープ、スピーカ、またはカメラのうち1または複数を含むモバイルコンピューティングデバイスである、請求項21から24のいずれか一項に記載のコンピューティングデバイス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2014/032037 WO2015147835A1 (en) | 2014-03-27 | 2014-03-27 | Multi-device flexible electronics system on a chip (soc) process integration |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017510979A true JP2017510979A (ja) | 2017-04-13 |
JP6381004B2 JP6381004B2 (ja) | 2018-08-29 |
Family
ID=54196152
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016551244A Expired - Fee Related JP6381004B2 (ja) | 2014-03-27 | 2014-03-27 | マルチデバイスのフレキシブルエレクトロニクスシステムオンチップ(soc)のプロセス統合 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10050015B2 (ja) |
EP (1) | EP3123507A4 (ja) |
JP (1) | JP6381004B2 (ja) |
KR (1) | KR102153466B1 (ja) |
CN (1) | CN106030787B (ja) |
TW (1) | TWI576998B (ja) |
WO (1) | WO2015147835A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020245695A1 (ja) | 2019-06-07 | 2020-12-10 | ||
WO2021074737A1 (ja) | 2019-10-17 | 2021-04-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009135350A (ja) * | 2007-12-03 | 2009-06-18 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP2009164160A (ja) * | 2007-12-28 | 2009-07-23 | Panasonic Corp | 半導体デバイス積層体および実装方法 |
JP2011525302A (ja) * | 2008-06-30 | 2011-09-15 | エス. オー. アイ. テック シリコン オン インシュレーター テクノロジーズ | 半導体構造の製造方法およびこの方法により得られる半導体構造 |
WO2012176422A1 (ja) * | 2011-06-24 | 2012-12-27 | シャープ株式会社 | 表示装置及びその製造方法 |
JP2014049527A (ja) * | 2012-08-30 | 2014-03-17 | Seiko Epson Corp | 光電変換素子、光電変換素子の製造方法、及び電子機器 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5901041A (en) * | 1997-12-02 | 1999-05-04 | Northern Telecom Limited | Flexible integrated circuit package |
US6455398B1 (en) * | 1999-07-16 | 2002-09-24 | Massachusetts Institute Of Technology | Silicon on III-V semiconductor bonding for monolithic optoelectronic integration |
WO2004017410A1 (ja) * | 2002-08-19 | 2004-02-26 | Seiko Epson Corporation | 強誘電体メモリおよびその製造方法 |
US7453129B2 (en) * | 2002-12-18 | 2008-11-18 | Noble Peak Vision Corp. | Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry |
US9153645B2 (en) * | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US7535089B2 (en) * | 2005-11-01 | 2009-05-19 | Massachusetts Institute Of Technology | Monolithically integrated light emitting devices |
US20090168374A1 (en) * | 2008-01-02 | 2009-07-02 | Clayton James E | Thin multi-chip flex module |
US8399889B2 (en) * | 2009-11-09 | 2013-03-19 | Solarmer Energy, Inc. | Organic light emitting diode and organic solar cell stack |
CN103518262B (zh) * | 2011-07-06 | 2016-07-06 | 松下电器产业株式会社 | 挠性器件的制造方法及挠性器件 |
SG188740A1 (en) * | 2011-09-08 | 2013-04-30 | Agency Science Tech & Res | Printed light emitting devices and method for fabrication thereof |
US9136402B2 (en) * | 2012-02-28 | 2015-09-15 | International Business Machines Corporation | High efficiency flexible solar cells for consumer electronics |
KR102481056B1 (ko) * | 2012-08-10 | 2022-12-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 전자 장치 |
-
2014
- 2014-03-27 KR KR1020167022976A patent/KR102153466B1/ko active IP Right Grant
- 2014-03-27 JP JP2016551244A patent/JP6381004B2/ja not_active Expired - Fee Related
- 2014-03-27 EP EP14887613.9A patent/EP3123507A4/en not_active Withdrawn
- 2014-03-27 US US15/121,759 patent/US10050015B2/en not_active Expired - Fee Related
- 2014-03-27 WO PCT/US2014/032037 patent/WO2015147835A1/en active Application Filing
- 2014-03-27 CN CN201480076422.5A patent/CN106030787B/zh not_active Expired - Fee Related
-
2015
- 2015-02-12 TW TW104104779A patent/TWI576998B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009135350A (ja) * | 2007-12-03 | 2009-06-18 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP2009164160A (ja) * | 2007-12-28 | 2009-07-23 | Panasonic Corp | 半導体デバイス積層体および実装方法 |
JP2011525302A (ja) * | 2008-06-30 | 2011-09-15 | エス. オー. アイ. テック シリコン オン インシュレーター テクノロジーズ | 半導体構造の製造方法およびこの方法により得られる半導体構造 |
WO2012176422A1 (ja) * | 2011-06-24 | 2012-12-27 | シャープ株式会社 | 表示装置及びその製造方法 |
JP2014049527A (ja) * | 2012-08-30 | 2014-03-17 | Seiko Epson Corp | 光電変換素子、光電変換素子の製造方法、及び電子機器 |
Also Published As
Publication number | Publication date |
---|---|
TW201545319A (zh) | 2015-12-01 |
KR20160136293A (ko) | 2016-11-29 |
CN106030787B (zh) | 2019-11-08 |
CN106030787A (zh) | 2016-10-12 |
US20170069596A1 (en) | 2017-03-09 |
EP3123507A1 (en) | 2017-02-01 |
KR102153466B1 (ko) | 2020-09-08 |
TWI576998B (zh) | 2017-04-01 |
JP6381004B2 (ja) | 2018-08-29 |
WO2015147835A1 (en) | 2015-10-01 |
EP3123507A4 (en) | 2017-12-06 |
US10050015B2 (en) | 2018-08-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10249598B2 (en) | Integrated circuit package having wirebonded multi-die stack | |
US9871026B2 (en) | Embedded memory and power management subpackage | |
JP6428788B2 (ja) | ウェハ接合のための表面封入 | |
US20230360973A1 (en) | Techniques and configurations to reduce transistor gate short defects | |
KR102367994B1 (ko) | 고체상 접착제 및 선택적 이송에 의한 초박형 기능 블록의 이종 집적 | |
JP6381004B2 (ja) | マルチデバイスのフレキシブルエレクトロニクスシステムオンチップ(soc)のプロセス統合 | |
US20190371666A1 (en) | Techniques for revealing a backside of an integrated circuit device, and associated configurations | |
TWI715665B (zh) | 積體電路的背側隔離 | |
TWI697109B (zh) | 在虛擬基板上形成絕緣體上矽(soi)裝置的技術以及關聯的結構 | |
EP3394900A1 (en) | Dielectric metal oxide cap for channel containing germanium |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170307 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20171003 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180703 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180725 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6381004 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |