JP2017508291A5 - - Google Patents

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Publication number
JP2017508291A5
JP2017508291A5 JP2016553865A JP2016553865A JP2017508291A5 JP 2017508291 A5 JP2017508291 A5 JP 2017508291A5 JP 2016553865 A JP2016553865 A JP 2016553865A JP 2016553865 A JP2016553865 A JP 2016553865A JP 2017508291 A5 JP2017508291 A5 JP 2017508291A5
Authority
JP
Japan
Prior art keywords
wafer
wafer support
support ring
continuous
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016553865A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017508291A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2015/017345 external-priority patent/WO2015130690A1/en
Publication of JP2017508291A publication Critical patent/JP2017508291A/ja
Publication of JP2017508291A5 publication Critical patent/JP2017508291A5/ja
Pending legal-status Critical Current

Links

JP2016553865A 2014-02-25 2015-02-24 積層された支持リングを備えるウエハシッパー Pending JP2017508291A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201461944455P 2014-02-25 2014-02-25
US61/944,455 2014-02-25
US201462089087P 2014-12-08 2014-12-08
US201462089103P 2014-12-08 2014-12-08
US62/089,103 2014-12-08
US62/089,087 2014-12-08
PCT/US2015/017345 WO2015130690A1 (en) 2014-02-25 2015-02-24 Wafer shipper with stacked support rings

Publications (2)

Publication Number Publication Date
JP2017508291A JP2017508291A (ja) 2017-03-23
JP2017508291A5 true JP2017508291A5 (enExample) 2018-04-12

Family

ID=54009550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016553865A Pending JP2017508291A (ja) 2014-02-25 2015-02-24 積層された支持リングを備えるウエハシッパー

Country Status (8)

Country Link
US (1) US10896834B2 (enExample)
EP (1) EP3111472B1 (enExample)
JP (1) JP2017508291A (enExample)
KR (1) KR20160126020A (enExample)
CN (1) CN106463437B (enExample)
SG (1) SG11201607061WA (enExample)
TW (1) TWI733648B (enExample)
WO (1) WO2015130690A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201607061WA (en) 2014-02-25 2016-09-29 Entegris Inc Wafer shipper with stacked support rings
JP6401293B2 (ja) * 2014-11-27 2018-10-10 アキレス株式会社 リングスペーサー
USD799825S1 (en) * 2015-08-31 2017-10-17 Entegris, Inc. Container
USD801046S1 (en) * 2015-08-31 2017-10-31 Entegris, Inc. Container
US10832927B2 (en) * 2015-12-18 2020-11-10 Texas Instruments Incorporated Interlocking nest wafer protector
DE102016113924B4 (de) 2016-07-28 2024-06-13 Infineon Technologies Ag Waferbox und Verfahren zum Anordnen von Wafern in einer Waferbox
EP3520734A4 (en) 2016-09-30 2020-09-16 Noksibcho Aloe Co., Ltd. ELECTRIC TOOTHBRUSH
USD812907S1 (en) * 2017-01-16 2018-03-20 Endural, Llc Container
WO2019046477A1 (en) * 2017-08-29 2019-03-07 Daewon Semiconductor Packaging Industrial Company SEPARATORS FOR HANDLING, TRANSPORTING OR STORING SEMICONDUCTOR WAFERS
DE202019101793U1 (de) * 2018-06-27 2019-11-14 Murata Machinery, Ltd. Vorrichtungen zum mindestens einen aus Substrat-Handhabung, Substrat-Lagerung, Substrat-Behandlung und Substrat-Verarbeitung
CN112262466B (zh) 2018-08-01 2023-04-14 平田机工株式会社 搬运装置及控制方法
US10811292B2 (en) * 2018-09-12 2020-10-20 Texas Instruments Incorporated Transport packaging and method for expanded wafers
US12165905B2 (en) 2019-05-20 2024-12-10 Applied Materials, Inc. Process kit enclosure system
USD917825S1 (en) 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
JP7330081B2 (ja) * 2019-12-03 2023-08-21 三菱電機株式会社 キャリアスペーサおよび半導体装置の製造方法
US12159795B2 (en) 2021-03-08 2024-12-03 Applied Materials, Inc. Enclosure system having walls comprising sidewalls and radio-frequency identifier holder coupled to rear wall
US11664257B2 (en) * 2021-09-21 2023-05-30 Intel Corporation Contactless wafer separator
US12159799B2 (en) * 2022-03-30 2024-12-03 Achilles Corporation Container for transporting semiconductor wafer
US12614052B2 (en) 2024-05-28 2026-04-28 Globalfoundries U.S. Inc. Fixture for radio frequency identification tag

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291336A (ja) 1985-06-20 1986-12-22 Matsushita Electric Ind Co Ltd 送出装置
JP2688664B2 (ja) 1994-09-07 1997-12-10 シノン電気産業株式会社 半導体デバイス用トレー
JP2910684B2 (ja) 1996-07-31 1999-06-23 日本電気株式会社 ウエハー容器
JP3054701U (ja) * 1998-06-05 1998-12-18 株式会社倉元製作所 膜付きガラス基板のスペーサ
DE60044028D1 (de) * 1999-07-23 2010-04-29 Ray G Brooks Sicherungssystem für wafer mit integriertem schaltkreis (ic)
US6550619B2 (en) * 2000-05-09 2003-04-22 Entergris, Inc. Shock resistant variable load tolerant wafer shipper
US7040487B2 (en) 2001-07-14 2006-05-09 Entegris, Inc. Protective shipper
JP4261170B2 (ja) 2002-11-08 2009-04-30 株式会社ヴァンテック 半導体ウェハ搬送容器
US6926150B2 (en) 2003-02-05 2005-08-09 Texas Instruments Incorporated Protective interleaf for stacked wafer shipping
JP4150963B2 (ja) 2003-02-07 2008-09-17 株式会社ダイフク 被支持体積層支持装置
JP4329536B2 (ja) 2003-12-26 2009-09-09 アキレス株式会社 半導体ウェハーの収納具
US7225929B2 (en) * 2004-12-30 2007-06-05 Illinois Tool Works Inc. Adjustable height wafer box
TW200746349A (en) * 2006-02-08 2007-12-16 Entegris Inc Stacking rings for wafers
FR2901543B1 (fr) * 2006-05-23 2009-02-27 Mezrag Mohamed Seiffeddine Bou Recipient modulaire pour contenir des denrees sensibles a leur mise a l'air.
JP4716928B2 (ja) * 2006-06-07 2011-07-06 信越ポリマー株式会社 ウェーハ収納容器
JP2008044636A (ja) 2006-08-11 2008-02-28 Sanyu Kikaku:Kk 収納用トレー
JP3130509U (ja) 2007-01-16 2007-03-29 山汰科技企業有限公司 基板搬送装置
JP5043475B2 (ja) * 2007-03-05 2012-10-10 ミライアル株式会社 半導体ウエハ収納容器
JP2009076646A (ja) 2007-09-20 2009-04-09 Shin Etsu Polymer Co Ltd 基板保持具
CN101888957B (zh) 2007-10-12 2013-01-02 大元半导体包装产业有限公司 带有交错壁结构的晶圆容器
JP4825771B2 (ja) 2007-10-22 2011-11-30 信越ポリマー株式会社 ウェーハ収納容器およびウェーハのハンドリング方法
US20100224517A1 (en) 2009-03-03 2010-09-09 Haggard Clifton C Disk separator device
US9224627B2 (en) * 2011-02-16 2015-12-29 Texchem Advanced Products Incorporated Sdn Bhd Single and dual stage wafer cushion and wafer separator
JP5712058B2 (ja) 2011-06-03 2015-05-07 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US20140076774A1 (en) * 2012-09-18 2014-03-20 Kurt F. Kaashoek Automated Wafer Container with Equipment Interface
SG11201607061WA (en) 2014-02-25 2016-09-29 Entegris Inc Wafer shipper with stacked support rings
JP6427674B2 (ja) 2014-12-08 2018-11-21 インテグリス・インコーポレーテッド 基板格納用の一体型コーナースプリングを備える水平基板コンテナ

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