JP2017225994A5 - - Google Patents

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Publication number
JP2017225994A5
JP2017225994A5 JP2016123735A JP2016123735A JP2017225994A5 JP 2017225994 A5 JP2017225994 A5 JP 2017225994A5 JP 2016123735 A JP2016123735 A JP 2016123735A JP 2016123735 A JP2016123735 A JP 2016123735A JP 2017225994 A5 JP2017225994 A5 JP 2017225994A5
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JP
Japan
Prior art keywords
laser
mirror
hole
optical system
light source
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Application number
JP2016123735A
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English (en)
Japanese (ja)
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JP6804224B2 (ja
JP2017225994A (ja
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Priority to JP2016123735A priority Critical patent/JP6804224B2/ja
Priority claimed from JP2016123735A external-priority patent/JP6804224B2/ja
Priority to PCT/JP2017/022694 priority patent/WO2017221931A1/ja
Priority to US16/308,891 priority patent/US11117221B2/en
Publication of JP2017225994A publication Critical patent/JP2017225994A/ja
Publication of JP2017225994A5 publication Critical patent/JP2017225994A5/ja
Application granted granted Critical
Publication of JP6804224B2 publication Critical patent/JP6804224B2/ja
Active legal-status Critical Current
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JP2016123735A 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法 Active JP6804224B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016123735A JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法
PCT/JP2017/022694 WO2017221931A1 (ja) 2016-06-22 2017-06-20 レーザ加工装置およびレーザ加工方法
US16/308,891 US11117221B2 (en) 2016-06-22 2017-06-20 Laser machining device and laser machining method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016123735A JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法

Publications (3)

Publication Number Publication Date
JP2017225994A JP2017225994A (ja) 2017-12-28
JP2017225994A5 true JP2017225994A5 (enExample) 2019-04-11
JP6804224B2 JP6804224B2 (ja) 2020-12-23

Family

ID=60784592

Family Applications (1)

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JP2016123735A Active JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法

Country Status (3)

Country Link
US (1) US11117221B2 (enExample)
JP (1) JP6804224B2 (enExample)
WO (1) WO2017221931A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018216940A1 (de) 2018-10-02 2020-04-02 3D-Micromac Ag Laserbearbeitungssystem
JP7291510B2 (ja) 2019-03-25 2023-06-15 三菱重工業株式会社 レーザ加工方法
JP7297568B2 (ja) 2019-07-08 2023-06-26 三菱重工業株式会社 レーザ加工方法
JP7207573B2 (ja) * 2019-12-20 2023-01-18 日本電信電話株式会社 クリーニング方法および装置
CN111571037B (zh) * 2020-06-15 2025-04-01 福建源造数字科技有限公司 激光加工装置、方法及弹性网面材料激光加工方法
CN113290386B (zh) * 2021-05-10 2022-07-08 长春理工大学 稳流区激光/超声复合低损伤复杂微结构加工装置及方法
CN113798706A (zh) * 2021-09-18 2021-12-17 苏州凯尔博精密机械有限公司 一种塑料件激光切割滑台机构
CN115041816B (zh) * 2022-05-09 2025-11-14 中国科学院沈阳自动化研究所 一种基于脉冲编码控制的微结构加工装置及方法
CN117161541A (zh) * 2022-05-27 2023-12-05 中国科学院理化技术研究所 一种激光加工设备
CN116275564A (zh) * 2022-12-22 2023-06-23 立川(无锡)半导体设备有限公司 一种激光切割光学系统及其切割方法
CN116213975A (zh) * 2023-03-01 2023-06-06 苏州德龙激光股份有限公司 双工位fpc紫外激光切割设备
CN119589163B (zh) * 2025-01-20 2025-07-25 东莞市雷宇激光设备有限公司 一种双激光加工装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746203A (en) * 1980-09-05 1982-03-16 Kokusai Denshin Denwa Co Ltd <Kdd> Optical switch
GB2227965B (en) * 1988-10-12 1993-02-10 Rolls Royce Plc Apparatus for drilling a shaped hole in a workpiece
US5216808A (en) 1990-11-13 1993-06-08 General Electric Company Method for making or repairing a gas turbine engine component
JPH09164493A (ja) * 1995-12-18 1997-06-24 Mitsubishi Electric Corp レーザ加工装置
JP4209615B2 (ja) * 2001-12-28 2009-01-14 株式会社ニデック レーザ加工装置
JP2003215477A (ja) * 2002-01-24 2003-07-30 Miyachi Technos Corp 光路切り替え装置
US7411150B2 (en) * 2002-06-12 2008-08-12 Alstom Technology Ltd. Method of producing a composite component
US7057133B2 (en) * 2004-04-14 2006-06-06 Electro Scientific Industries, Inc. Methods of drilling through-holes in homogenous and non-homogenous substrates
US8237082B2 (en) * 2004-09-02 2012-08-07 Siemens Aktiengesellschaft Method for producing a hole
EP1810774A1 (de) 2006-01-24 2007-07-25 Siemens Aktiengesellschaft Verfahren zur Herstellung eines Loches
JP2008055478A (ja) * 2006-08-31 2008-03-13 Honda Motor Co Ltd 仕上げ加工方法
JP5354969B2 (ja) * 2008-06-17 2013-11-27 ミヤチテクノス株式会社 ファイバレーザ加工方法及びファイバレーザ加工装置
US9931712B2 (en) * 2012-01-11 2018-04-03 Pim Snow Leopard Inc. Laser drilling and trepanning device
JP5908009B2 (ja) * 2013-08-20 2016-04-26 三菱重工業株式会社 レーザ加工方法及びレーザ加工装置

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