JP2017208374A - 載置台システム、基板処理装置及び温度制御方法 - Google Patents
載置台システム、基板処理装置及び温度制御方法 Download PDFInfo
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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Abstract
Description
本発明の一実施形態の成膜装置について説明する。図1は、一実施形態に係る成膜装置を示す概略構成図である。
次に、省スペースで複数のヒータの温度制御を行うことが可能な、第1の実施形態及び第2の実施形態の載置台システムについて説明する。
第1の実施形態の載置台システムについて説明する。図4は、第1の実施形態の載置台システムの概略図である。図4においては、便宜上、載置台を回転させる駆動装置の図示を省略している。図5は、図4の載置台システムのスリップリングを説明するための図であり、回転軸を底面側から見たときの概略図である。
第2の実施形態の載置台システムについて説明する。第2の実施形態の載置台システムは、複数の回転側接点が回転軸の外周面に、回転軸の回転方向に沿って所定の間隔をおいて設けられている点で、第1の実施形態の載置台システムと異なる。
次に、本発明の一実施形態に係る温度制御方法について説明する。図8は、一実施形態に係る温度制御方法を示すフローチャートである。
40 載置台
50 回転軸
50a 底面
50b 外周面
56 ヒータ
58 スリップリング
581 回転側接点
582 固定側接点
60 交流電源
61 サイリスタ
62 温度センサ
100 制御部
102 記憶部
W ウエハ
Claims (10)
- 基板を載置し、回転可能に設けられた載置台と、
前記載置台に設けられ、前記載置台を加熱する複数の加熱部と、
前記複数の加熱部に電力を供給する1つの電源と、
前記載置台の回転角度に応じて、前記電源から電力が供給される加熱部を前記複数の加熱部のうちのいずれかに切り替える電力切替部と、
を有することを特徴とする載置台システム。 - 前記載置台は、回転可能に設けられた回転軸に支持されており、
前記電力切替部は、前記回転軸と一体的に回転可能に設けられ、前記複数の加熱部の各々と電気的に接続された複数の回転側接点と、前記回転軸が回転することにより前記複数の回転側接点のいずれかに接触可能に設けられた固定側接点とを有することを特徴とする請求項1に記載の載置台システム。 - 前記複数の回転側接点は、前記回転軸の底面に、前記回転軸の回転方向に沿って所定の間隔をおいて設けられていることを特徴とする請求項2に記載の載置台システム。
- 前記複数の回転側接点は、前記回転軸の外周面に、前記回転軸の回転方向に沿って所定の間隔をおいて設けられていることを特徴とする請求項2に記載の載置台システム。
- 前記複数の加熱部は、同心円状に設けられている、
請求項1乃至4のいずれか一項に記載の載置台システム。 - 前記複数の加熱部は、前記載置台の周方向に沿って設けられている、
請求項1乃至4のいずれか一項に記載の載置台システム。 - 請求項1乃至6のいずれか一項に記載の載置台システムと、
前記複数の加熱部の各々に供給される電力を制御する制御部と、
を備え、
前記載置台システムは、前記載置台の温度を検出する温度検出部を更に有し、
前記制御部は、前記温度検出部により検出される温度と設定温度とに基づいて、前記複数の加熱部の各々に供給される電力を制御することを特徴とする基板処理装置。 - 前記制御部は、所定の温度帯に対応して前記複数の加熱部の各々に供給する電力比を記憶する記憶部を参照して、
前記複数の加熱部のうち少なくとも1つの加熱部が配置された領域に設けられた前記温度検出部により検出された温度と、設定温度とに基づいて、前記複数の加熱部の各々に供給する電力を制御することを特徴とする請求項7に記載の基板処理装置。 - 基板を載置し、回転可能に設けられた載置台と、前記載置台に設けられ、前記基板を加熱する複数の加熱部と、前記複数の加熱部に電力を供給する1つの電源と、前記載置台の回転角度に応じて、前記電源から電力が供給される加熱部を切り替える電力切替部とを有する載置台システムを用いた温度制御方法であって、
前記電源から電力が供給される加熱部が切り替わるタイミングと同期させて前記加熱部に供給される電力を制御することを特徴とする温度制御方法。 - 基板を載置し、回転可能に設けられた載置台と、
前記載置台に設けられ、前記載置台を加熱する複数の加熱部と、
前記載置台の回転角度に応じて、電力が供給される加熱部を切り替える電力切替部と、
を有することを特徴とする載置台システム。
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US15/594,699 US10325801B2 (en) | 2016-05-16 | 2017-05-15 | Mounting table system, substrate processing apparatus, and temperature control method |
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Cited By (5)
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---|---|---|---|---|
WO2019082970A1 (ja) | 2017-10-27 | 2019-05-02 | 三菱マテリアル株式会社 | 接合体、及び、絶縁回路基板 |
JP2019133971A (ja) * | 2018-01-29 | 2019-08-08 | 東京エレクトロン株式会社 | アッシング装置、アッシング方法及びコンピュータ読み取り可能な記録媒体 |
JP2020056095A (ja) * | 2018-09-27 | 2020-04-09 | 東京エレクトロン株式会社 | 基板処理装置 |
JP2020205406A (ja) * | 2019-06-12 | 2020-12-24 | 株式会社Kokusai Electric | 加熱部、温度制御システム、処理装置および半導体装置の製造方法 |
WO2022085484A1 (ja) * | 2020-10-19 | 2022-04-28 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
Families Citing this family (4)
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CN110957243A (zh) * | 2018-09-27 | 2020-04-03 | 东京毅力科创株式会社 | 基板处理装置 |
JP6890114B2 (ja) * | 2018-12-05 | 2021-06-18 | 株式会社Kokusai Electric | 基板処理装置及び半導体装置の製造方法 |
JP2022136846A (ja) | 2021-03-08 | 2022-09-21 | 東京エレクトロン株式会社 | 基板処理装置及び異常検出方法 |
JP2022136847A (ja) | 2021-03-08 | 2022-09-21 | 東京エレクトロン株式会社 | 基板処理装置及び異常検出方法 |
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WO2019082970A1 (ja) | 2017-10-27 | 2019-05-02 | 三菱マテリアル株式会社 | 接合体、及び、絶縁回路基板 |
JP2019133971A (ja) * | 2018-01-29 | 2019-08-08 | 東京エレクトロン株式会社 | アッシング装置、アッシング方法及びコンピュータ読み取り可能な記録媒体 |
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JP7101718B2 (ja) | 2019-06-12 | 2022-07-15 | 株式会社Kokusai Electric | 加熱部、温度制御システム、処理装置および半導体装置の製造方法 |
WO2022085484A1 (ja) * | 2020-10-19 | 2022-04-28 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
KR20230085166A (ko) | 2020-10-19 | 2023-06-13 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법 및 기판 처리 장치 |
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