JP2017207461A - 加速度センサー - Google Patents
加速度センサー Download PDFInfo
- Publication number
- JP2017207461A JP2017207461A JP2016173782A JP2016173782A JP2017207461A JP 2017207461 A JP2017207461 A JP 2017207461A JP 2016173782 A JP2016173782 A JP 2016173782A JP 2016173782 A JP2016173782 A JP 2016173782A JP 2017207461 A JP2017207461 A JP 2017207461A
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- signal
- module
- acceleration sensor
- acceleration
- temperature
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- 230000001133 acceleration Effects 0.000 title claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 3
- 230000004308 accommodation Effects 0.000 claims description 6
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0865—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using integrated signal processing circuitry
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (8)
- 収容空間が設けられたパッケージ構造、及び前記収容空間に設置された、加速度信号を検出するためのMEMSチップと複数の回路モジュールを有するASICチップを備える加速度センサーであって、前記ASICチップにおける回路モジュールは、MEMSチップに接続された信号処理モジュールを含み、前記信号処理モジュールは、前記MEMSチップが検出した加速度信号を処理すると共に、処理された加速度信号を出力し、前記ASICチップにおける回路モジュールは、温度信号を検出すると共に、当該温度信号を出力するための温度検出モジュールをさらに含むことを特徴とする加速度センサー。
- 前記温度検出モジュールは、デジタル回路モジュールであることを特徴とする請求項1に記載の加速度センサー。
- 前記ASICチップにおける回路モジュールは、前記温度検出モジュールに接続されたクロックモジュールをさらに含み、前記クロックモジュールは、前記温度検出モジュールが温度信号を出力するか否かを制御することを特徴とする請求項1又は2に記載の加速度センサー。
- 前記MEMSチップは、信号検出モジュールを含み、前記信号検出モジュールは、検出した加速度信号をASICチップにおける信号処理モジュールに伝送することを特徴とする請求項1に記載の加速度センサー。
- 前記MEMSチップの信号検出モジュールが検出した加速度信号は、差分アナログ信号であることを特徴とする請求項4に記載の加速度センサー。
- 前記信号処理モジュールは、差分アナログ信号をデジタル信号に変換するアナログデジタル変換器を含むことを特徴とする請求項5に記載の加速度センサー。
- 前記信号処理モジュールは、前記デジタル信号を増幅する増幅器をさらに含むことを特徴とする請求項6に記載の加速度センサー。
- 前記MEMSチップは、MEMS電源モジュールを含み、前記ASICチップは、MEMS電源モジュールに駆動電圧を提供する電圧モジュールを含むことを特徴とする請求項1に記載の加速度センサー。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620449656 | 2016-05-17 | ||
CN201620449656.6 | 2016-05-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017207461A true JP2017207461A (ja) | 2017-11-24 |
JP6378269B2 JP6378269B2 (ja) | 2018-08-22 |
Family
ID=60330065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016173782A Active JP6378269B2 (ja) | 2016-05-17 | 2016-09-06 | 加速度センサー |
Country Status (2)
Country | Link |
---|---|
US (1) | US20170336433A1 (ja) |
JP (1) | JP6378269B2 (ja) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08105913A (ja) * | 1994-10-06 | 1996-04-23 | Japan Aviation Electron Ind Ltd | シリコン加速度計 |
JPH08211098A (ja) * | 1994-11-29 | 1996-08-20 | Toyota Motor Corp | 歪検出式センサー |
JPH10132684A (ja) * | 1996-10-25 | 1998-05-22 | Hitachi Ltd | 半導体圧力センサ |
JP2002311045A (ja) * | 2001-04-16 | 2002-10-23 | Mitsubishi Electric Corp | 加速度センサ |
JP2005169541A (ja) * | 2003-12-10 | 2005-06-30 | Hitachi Metals Ltd | 半導体装置およびその製造方法 |
JP2009282015A (ja) * | 2008-04-24 | 2009-12-03 | Fujikura Ltd | 圧力センサモジュール及び電子部品 |
US20110132096A1 (en) * | 2009-12-09 | 2011-06-09 | Honeywell Intellectual Inc. | Pressure sensor with on-board compensation |
JP2013156165A (ja) * | 2012-01-30 | 2013-08-15 | Fujikura Ltd | 信号処理方法と圧力センサ |
JP2013186108A (ja) * | 2012-03-12 | 2013-09-19 | Seiko Epson Corp | 物理量センサーモジュール及び電子機器 |
US20130317772A1 (en) * | 2012-05-23 | 2013-11-28 | Freescale Semiconductor, Inc. | Sensor device and related operating methods |
JP2014048072A (ja) * | 2012-08-29 | 2014-03-17 | Fujikura Ltd | 圧力センサモジュール |
JP2014215097A (ja) * | 2013-04-24 | 2014-11-17 | セイコーエプソン株式会社 | 物理量検出回路、物理量検出装置、電子機器及び移動体 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6237982B2 (ja) * | 2013-04-23 | 2017-11-29 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
US9804190B2 (en) * | 2014-09-15 | 2017-10-31 | Panasonic Corporation | Apparatus and method for calibration of capacitance mismatch and temperature variations in a MEMS device |
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2016
- 2016-09-06 JP JP2016173782A patent/JP6378269B2/ja active Active
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2017
- 2017-01-26 US US15/416,700 patent/US20170336433A1/en not_active Abandoned
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08105913A (ja) * | 1994-10-06 | 1996-04-23 | Japan Aviation Electron Ind Ltd | シリコン加速度計 |
JPH08211098A (ja) * | 1994-11-29 | 1996-08-20 | Toyota Motor Corp | 歪検出式センサー |
JPH10132684A (ja) * | 1996-10-25 | 1998-05-22 | Hitachi Ltd | 半導体圧力センサ |
JP2002311045A (ja) * | 2001-04-16 | 2002-10-23 | Mitsubishi Electric Corp | 加速度センサ |
JP2005169541A (ja) * | 2003-12-10 | 2005-06-30 | Hitachi Metals Ltd | 半導体装置およびその製造方法 |
JP2009282015A (ja) * | 2008-04-24 | 2009-12-03 | Fujikura Ltd | 圧力センサモジュール及び電子部品 |
US20110132096A1 (en) * | 2009-12-09 | 2011-06-09 | Honeywell Intellectual Inc. | Pressure sensor with on-board compensation |
JP2013156165A (ja) * | 2012-01-30 | 2013-08-15 | Fujikura Ltd | 信号処理方法と圧力センサ |
JP2013186108A (ja) * | 2012-03-12 | 2013-09-19 | Seiko Epson Corp | 物理量センサーモジュール及び電子機器 |
US20130317772A1 (en) * | 2012-05-23 | 2013-11-28 | Freescale Semiconductor, Inc. | Sensor device and related operating methods |
JP2014048072A (ja) * | 2012-08-29 | 2014-03-17 | Fujikura Ltd | 圧力センサモジュール |
JP2014215097A (ja) * | 2013-04-24 | 2014-11-17 | セイコーエプソン株式会社 | 物理量検出回路、物理量検出装置、電子機器及び移動体 |
Also Published As
Publication number | Publication date |
---|---|
JP6378269B2 (ja) | 2018-08-22 |
US20170336433A1 (en) | 2017-11-23 |
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