JP2017201057A - 接合材およびそれを用いた接合方法 - Google Patents
接合材およびそれを用いた接合方法 Download PDFInfo
- Publication number
- JP2017201057A JP2017201057A JP2017082296A JP2017082296A JP2017201057A JP 2017201057 A JP2017201057 A JP 2017201057A JP 2017082296 A JP2017082296 A JP 2017082296A JP 2017082296 A JP2017082296 A JP 2017082296A JP 2017201057 A JP2017201057 A JP 2017201057A
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- Prior art keywords
- bonding material
- silver
- solvent
- mass
- observed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- 238000000034 method Methods 0.000 title claims abstract description 95
- 229910052709 silver Inorganic materials 0.000 claims abstract description 359
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- OEIJHBUUFURJLI-UHFFFAOYSA-N octane-1,8-diol Chemical compound OCCCCCCCCO OEIJHBUUFURJLI-UHFFFAOYSA-N 0.000 claims abstract description 89
- 239000010419 fine particle Substances 0.000 claims abstract description 63
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 claims abstract description 52
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- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
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- QFZITDCVRJQLMZ-UHFFFAOYSA-N 3-methylbutane-1,2,3-triol Chemical compound CC(C)(O)C(O)CO QFZITDCVRJQLMZ-UHFFFAOYSA-N 0.000 description 3
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- 150000003505 terpenes Chemical class 0.000 description 3
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- RWLALWYNXFYRGW-UHFFFAOYSA-N 2-Ethyl-1,3-hexanediol Chemical compound CCCC(O)C(CC)CO RWLALWYNXFYRGW-UHFFFAOYSA-N 0.000 description 2
- RXEJCNRKXVSXDJ-UHFFFAOYSA-N 3-methylbutane-1,2,4-triol Chemical compound OCC(C)C(O)CO RXEJCNRKXVSXDJ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
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- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 2
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- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 150000003378 silver Chemical class 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 102100033806 Alpha-protein kinase 3 Human genes 0.000 description 1
- 101710082399 Alpha-protein kinase 3 Proteins 0.000 description 1
- WWZKQHOCKIZLMA-UHFFFAOYSA-N Caprylic acid Natural products CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 1
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- 125000003277 amino group Chemical group 0.000 description 1
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- GONOPSZTUGRENK-UHFFFAOYSA-N benzyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CC1=CC=CC=C1 GONOPSZTUGRENK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 235000014113 dietary fatty acids Nutrition 0.000 description 1
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- FUZZWVXGSFPDMH-UHFFFAOYSA-N n-hexanoic acid Natural products CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
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Classifications
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Abstract
Description
300mLビーカーに純水180.0gを入れ、硝酸銀(東洋化学株式会社製)33.6gを添加して溶解させることにより、原料液として硝酸銀水溶液を調製した。
溶剤1としてのODO添加量を9.34g、溶剤2としてのDBDGの添加量を1.65gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ6.91gおよび1.22gとした以外は、実施例1と同様の方法により、79.5質量%の銀粒子1と15.06質量%のODOと2.66質量%のDBDGと2.77質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.5質量%であった。
溶剤1としてのODOの添加量を8.79g、溶剤2としてのDBDGの添加量を2.20gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ6.88gおよび1.72gとした以外は、実施例1と同様の方法により、79.2質量%の銀粒子1と14.42質量%のODOと3.61質量%のDBDGと2.76質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.3質量%であった。
溶剤1としてのODOの添加量を8.09g、溶剤2としてのDBDGの添加量を0.90g、 添加剤としてのIPTL−Aの添加量を5.0gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ5.56gおよび0.62gとした以外は、実施例1と同様の方法により、81.0質量%の銀粒子1と12.85質量%のODOと1.43質量%のDBDGと4.71質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.8質量%であった。
溶剤1としてのODOの添加量を11.24g、溶剤2としてのDBDGの添加量を1.25g、添加剤としてのIPTL−Aの添加量を1.5gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ6.41gおよび0.71gとした以外は、実施例1と同様の方法により、80.3質量%の銀粒子1と16.46質量%のODOと1.83質量%のDBDGと1.40質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.1質量%であった。
溶剤2としてDBDGの代わりにヘキシルジグリコール(HeDG)(日本乳化剤株式会社製、沸点260℃、粘度(25℃)8.6mPa・s、表面張力(25℃)32.3±3.0dyne/cm(平均値32.3dyne/cm))1.10gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO5.93gおよびHeDG0.66gを添加した以外は、実施例1と同様の方法により、80.7質量%の銀粒子1と14.83質量%のODOと1.65質量%のHeDGと2.81質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.5質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製、沸点227.8±3.0℃、粘度(25℃)1.38mPa・s、表面張力(25℃)29.9±3.0dyne/cm(平均値29.9dyne/cm))1.10gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO5.33gおよび1−デカノール0.59gを添加した以外は、実施例1と同様の方法により、81.2質量%の銀粒子1と14.36質量%のODOと1.60質量%の1−デカノールと2.83質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は80.0質量%であった。
溶剤1としてのODOの添加量を8.79g(8.79質量%)とし、溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)2.20gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO4.84gおよび1−デカノール1.21gを添加した以外は、実施例1と同様の方法により、81.1質量%の銀粒子1と12.85質量%のODOと3.21質量%の1−デカノールと2.83質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.9質量%であった。
300mLビーカーに純水180.0gを入れ、硝酸銀(東洋化学株式会社製)33.6gを添加して溶解させることにより、原料液として硝酸銀水溶液を調製した。
焼結助剤としてオキシジ酢酸(ジグリコール酸)に代えてマロン酸0.01gを使用し、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ7.44gおよび0.83gとした以外は、実施例9と同様の方法により、58.5質量%の銀粒子1と19.5質量%の銀粒子2と17.34質量%のODOと1.93質量%のDBDGと2.72質量%のIPTL−Aと0.01質量%のマロン酸を含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.0質量%であった。
実施例9と同様の方法により(ソルビン酸で被覆された)銀微粒子の凝集体の乾燥粉末を得た後、この銀微粒子の凝集体の乾燥粉末(銀粒子2)61.5gと、ミクロンサイズの銀粒子AG2−1C(DOWAエレクトロニクス社製、平均粒径(SEM像により求められる平均一次粒子径)0.3μm)(銀粒子3)20.5gとを、実施例1の銀微粒子の凝集体の乾燥粉末(銀粒子1)に代えて使用し、溶剤1としてのODOの添加量を8.25g、溶剤2としてのDBDGの添加量を8.25g、添加剤としてのIPTL−Aの添加量を1.5gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ1.98gおよび1.98gとし、焼結助剤としてのオキシジ酢酸(ジグリコール酸)を添加しなかった以外は、実施例1と同様の方法により、59.2質量%の銀粒子2と19.7質量%の銀粒子3と9.83質量%のODOと9.83質量%のDBDGと1.44質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.2質量%であった。
溶剤1としてのODOの添加量を9.90g、溶剤2としてのDBDGの添加量を6.60gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ2.14gおよび1.43gとした以外は、実施例11と同様の方法により、59.4質量%の銀粒子2と19.8質量%の銀粒子3と11.61質量%のODOと7.74質量%のDBDGと1.45質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.5質量%であった。
溶剤1としてのODOの添加量を11.55g、溶剤2としてのDBDGの添加量を4.95gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ2.13gおよび0.91gとした以外は、実施例11と同様の方法により、59.7質量%の銀粒子2と19.9質量%の銀粒子3と13.26質量%のODOと5.68質量%のDBDGと1.46質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.9質量%であった。
溶剤1としてのODOの添加量を13.20g、溶剤2としてのDBDGの添加量を3.30gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ2.02gおよび0.50gとした以外は、実施例11と同様の方法により、60.0質量%の銀粒子2と20.0質量%の銀粒子3と14.83質量%のODOと3.71質量%のDBDGと1.46質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.3質量%であった。
溶剤1としてのODOの添加量を14.85g、溶剤2としてのDBDGの添加量を1.65gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ1.81gおよび0.20gとした以外は、実施例11と同様の方法により、60.3質量%の銀粒子2と20.1質量%の銀粒子3と16.32質量%のODOと1.81質量%のDBDGと1.47質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.7質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)8.25gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO2.19gおよび1−デカノール2.19gを添加した以外は、実施例11と同様の方法により、58.9質量%の銀粒子2と19.6質量%の銀粒子3と10.03質量%のODOと10.03質量%の1−デカノールと1.44質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.0質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)6.60gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO2.30gおよび1−デカノール1.54gを添加した以外は、実施例12と同様の方法により、59.2質量%の銀粒子2と19.7質量%の銀粒子3と11.79質量%のODOと7.86質量%の1−デカノールと1.45質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.4質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)4.95gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO2.32gおよび1−デカノール0.99gを添加した以外は、実施例13と同様の方法により、59.5質量%の銀粒子2と19.8質量%の銀粒子3と13.47質量%のODOと5.77質量%の1−デカノールと1.46質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.8質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)3.30gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO2.23gおよび1−デカノール0.56gを添加した以外は、実施例14と同様の方法により、59.8質量%の銀粒子2と19.9質量%の銀粒子3と15.07質量%のODOと3.77質量%の1−デカノールと1.46質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.2質量%であった。
溶剤2としてDBDGの代わりに1−デカノール(和光純薬工業株式会社製)1.65gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO2.05gおよび1−デカノール0.23gを添加した以外は、実施例15と同様の方法により、60.1質量%の銀粒子2と20.0質量%の銀粒子3と16.59質量%のODOと1.84質量%の1−デカノールと1.47質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.6質量%であった。
溶剤2としてDBDGの代わりにヘキシルジグリコール(HeDG)(日本乳化剤株式会社製)8.25gを添加し、希釈溶剤としてODOおよびDBDGの代わりにODO1.99gおよびHeDG1.99gを添加した以外は、実施例11と同様の方法により、59.1質量%の銀粒子2と19.7質量%の銀粒子3と9.88質量%のODOと9.88質量%のHeDGと1.44質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.2質量%であった。
溶剤1としてのODOの添加量を7.50g、溶剤2としてのDBDGの添加量を7.50g、添加剤としてのIPTL−Aの添加量を3.0gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ1.65gおよび1.65gとした以外は、実施例11と同様の方法により、59.5質量%の銀粒子2と19.8質量%の銀粒子3と8.90質量%のODOと8.90質量%のDBDGと2.90質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.3質量%であった。
溶剤1としてのODOの添加量を8.00g、溶剤2としてのDBDGの添加量を8.00g、添加剤としてのIPTL−Aの添加量を2.0gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ1.92gおよび1.92gとした以外は、実施例11と同様の方法により、59.2質量%の銀粒子2と19.7質量%の銀粒子3と9.59質量%のODOと9.59質量%のDBDGと1.92質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は78.0質量%であった。
実施例9と同様の方法により(ソルビン酸で被覆された)銀微粒子の凝集体の乾燥粉末を得た後、この銀微粒子の凝集体の乾燥粉末(銀粒子2)72.0gと、ミクロンサイズの銀粒子AG2−1C(DOWAエレクトロニクス社製、平均粒径0.3μm)(銀粒子3)10.0gとを、実施例1の銀微粒子の凝集体の乾燥粉末(銀粒子1)に代えて使用し、溶剤1としてのODOの添加量を8.25g、溶剤2としてのDBDGの添加量を8.25g、添加剤としてのIPTL−Aの添加量を1.5gとし、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ2.75gおよび2.75gとし、焼結助剤としてのオキシジ酢酸(ジグリコール酸)を添加しなかった以外は、実施例1と同様の方法により、68.3質量%の銀粒子2と9.5質量%の銀粒子3と10.40質量%のODOと10.40質量%のDBDGと1.40質量%のIPTL−Aを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は76.5質量%であった。
添加剤としてのIPTL−Aの代わりに2−メチル−ブタン−1,3,4−トリオール(イソプレントリオールB(IPTL−B))(沸点278〜282℃、粘度(25℃)4050mPa・s、表面張力(25℃)47.5±1.0dyne/cm(平均値47.5dyne/cm))3.00gを添加し、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ2.84gおよび0.32gとした以外は、実施例1と同様の方法により、83.4質量%の銀粒子1と12.34質量%のODOと1.37質量%のDBDGと2.92質量%のIPTL−Bと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は82.8質量%であった。
溶剤1としてのODO添加量を17.49gとし、溶剤2としてのDBDGを添加せず、希釈溶剤としてODOおよびDBDGの代わりにODO5.67gを添加した以外は、実施例1と同様の方法により、81.4質量%の銀粒子1と15.80質量%のODOと2.79質量%のIPTL−Aと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は79.9質量%であった。
添加剤としてのIPTL−Aの代わりにジオール(IPDL−EtHex)(日本テルペン化学株式会社製、沸点287.8℃、粘度(25℃)90.2mPa・s、表面張力(25℃)30.3dyne/cm)3.0gを添加し、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ8.36gおよび0.93gとした以外は、実施例1と同様の方法により、78.6質量%の銀粒子1と16.55質量%のODOと1.84質量%のDBDGと2.74質量%のIPDL−EtHexと0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は77.5質量%であった。
添加剤としてのIPTL−Aの代わりにジオール(IPDL−C8)(日本テルペン化学株式会社製、沸点308.1℃、粘度(25℃)65mPa・s、表面張力(25℃)30.86dyne/cm)3.0gを添加し、希釈溶剤としてのODOおよびDBDGの添加量をそれぞれ8.13gおよび0.90gとした以外は、実施例1と同様の方法により、78.9質量%の銀粒子1と16.28質量%のODOと1.81質量%のDBDGと2.75質量%のIPDL−C8と0.01質量%のDGAを含む接合材(銀ペースト)を得た。なお、銀ペースト中のAg濃度を熱減量法で求めたところ、Ag濃度は77.5質量%であった。
溶剤2としてDBDGの代わりにヘキサデカン(和光純薬工業株式会社、沸点286.6±3.0℃、粘度(25℃)3mPa・s、表面張力(25℃)27.3±3.0dyne/cm(平均値27.3dyne/cm)、非極性)1.10gを添加し、希釈溶剤としてODOおよびDBDGを添加しなかった以外は、実施例1と同様の方法により、接合材(銀ペースト)の作製を試みたが、希釈溶剤としてODOおよびヘキサデカンを添加する前に分離が生じたため、各成分が分散不良で銀ペーストを作製することができなかった。
Claims (17)
- 銀微粒子と溶剤と添加剤を含む銀ペーストからなる接合材において、溶剤として、ジオールからなる第1の溶剤と、この第1の溶剤より表面張力が低い極性溶媒からなる第2の溶剤とを含み、添加剤がトリオールであることを特徴とする、接合材。
- 前記第1の溶剤がオクタンジオールであることを特徴とする、請求項1に記載の接合材。
- 前記第2の溶剤が、ジアルキルグリコールエーテル、エチレングリコール系エーテルおよびモノアルコールからなる群から選ばれる1種以上であることを特徴とする、請求項1または2に記載の接合材。
- 前記第2の溶剤が、ジブチルジグリコール、ヘキシルジグリコールおよびデカノールからなる群から選ばれる1種以上であることを特徴とする、請求項1または2に記載の接合材。
- 前記銀微粒子の平均一次粒子径が1〜100nmであることを特徴とする、請求項1乃至4のいずれかに記載の接合材。
- 前記接合材中の前記銀微粒子の含有量が60〜90質量%であることを特徴とする、請求項1乃至5のいずれかに記載の接合材。
- 前記接合材が平均粒径0.2〜10μmの銀粒子を含むことを特徴とする、請求項1乃至5のいずれかに記載の接合材。
- 前記接合材中の前記平均粒径0.2〜10μmの銀粒子の含有量が30質量%以下であり且つ前記銀微粒子の含有量と前記平均粒径0.2〜10μmの銀粒子の含有量の合計が60〜90質量%であることを特徴とする、請求項7に記載の接合材。
- 前記銀微粒子が炭素数8以下の有機化合物で被覆されていることを特徴とする、請求項1乃至8のいずれかに記載の接合材。
- 前記有機化合物がソルビン酸であることを特徴とする、請求項9に記載の接合材。
- 前記接合材中の前記第1の溶剤の含有量が5〜20質量%であることを特徴とする、請求項1乃至10いずれかに記載の接合材。
- 前記接合材中の前記第2の溶剤の含有量が0.5〜15質量%であることを特徴とする、請求項1乃至11のいずれかに記載の接合材。
- 前記接合材中の前記添加剤の含有量が0.5〜10質量%であることを特徴とする、請求項1乃至12のいずれかに記載の接合材。
- 前記接合材が焼結助剤を含むことを特徴とする、請求項1乃至13のいずれかに記載の接合材。
- 前記焼結助剤がジグリコール酸またはマロン酸であることを特徴とする、請求項14に記載の接合材。
- 前記接合材中の前記焼結助剤の含有量が0.001〜0.1質量%であることを特徴とする、請求項14または15に記載の接合材。
- 請求項1乃至16のいずれかに記載の接合材を被接合物間に介在させて加熱することにより、接合材中の銀を焼結させて銀接合層を形成し、この銀接合層により被接合物同士を接合することを特徴とする、接合方法。
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WO2013108408A1 (ja) * | 2012-01-20 | 2013-07-25 | Dowaエレクトロニクス株式会社 | 接合材およびそれを用いた接合方法 |
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WO2015198832A1 (ja) * | 2014-06-25 | 2015-12-30 | Dowaエレクトロニクス株式会社 | 接合材およびそれを用いた接合方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2019092959A1 (ja) * | 2017-11-13 | 2019-05-16 | 日東電工株式会社 | 焼結接合用組成物、焼結接合用シート、および焼結接合用シート付きダイシングテープ |
JP2020164895A (ja) * | 2019-03-28 | 2020-10-08 | Dowaエレクトロニクス株式会社 | 接合材及び接合方法 |
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CN109074897A (zh) | 2018-12-21 |
CN109074897B (zh) | 2021-05-14 |
EP3441982A1 (en) | 2019-02-13 |
TWI717502B (zh) | 2021-02-01 |
MY190188A (en) | 2022-03-31 |
TW201807715A (zh) | 2018-03-01 |
KR20190002561A (ko) | 2019-01-08 |
EP3441982A4 (en) | 2019-12-25 |
KR102271752B1 (ko) | 2021-06-30 |
US20190118257A1 (en) | 2019-04-25 |
US11453053B2 (en) | 2022-09-27 |
JP6887293B2 (ja) | 2021-06-16 |
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