JP2017199898A5 - - Google Patents
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- Publication number
- JP2017199898A5 JP2017199898A5 JP2017078797A JP2017078797A JP2017199898A5 JP 2017199898 A5 JP2017199898 A5 JP 2017199898A5 JP 2017078797 A JP2017078797 A JP 2017078797A JP 2017078797 A JP2017078797 A JP 2017078797A JP 2017199898 A5 JP2017199898 A5 JP 2017199898A5
- Authority
- JP
- Japan
- Prior art keywords
- ring
- stem
- baffle plate
- support members
- showerhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 33
- 238000003756 stirring Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- 210000000085 cashmere Anatomy 0.000 claims description 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/097,600 | 2016-04-13 | ||
| US15/097,600 US10483092B2 (en) | 2016-04-13 | 2016-04-13 | Baffle plate and showerhead assemblies and corresponding manufacturing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017199898A JP2017199898A (ja) | 2017-11-02 |
| JP2017199898A5 true JP2017199898A5 (enExample) | 2020-05-21 |
| JP6909034B2 JP6909034B2 (ja) | 2021-07-28 |
Family
ID=60039549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017078797A Active JP6909034B2 (ja) | 2016-04-13 | 2017-04-12 | バッフルプレートおよびシャワーヘッドアセンブリならびに対応する製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10483092B2 (enExample) |
| JP (1) | JP6909034B2 (enExample) |
| KR (1) | KR102055040B1 (enExample) |
| CN (2) | CN113862642B (enExample) |
| TW (1) | TWI654334B (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10741365B2 (en) * | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
| US10266947B2 (en) * | 2016-08-23 | 2019-04-23 | Lam Research Corporation | Rotary friction welded blank for PECVD heated showerhead |
| KR20200045785A (ko) * | 2018-10-23 | 2020-05-06 | 안범모 | 반도체 제조 공정용 또는 디스플레이 제조 공정용 프로세스 유체가 통과하는 접합부품 |
| GB201819455D0 (en) * | 2018-11-29 | 2019-01-16 | Johnson Matthey Plc | Apparatus and method for coating substrates with washcoats |
| GB201819454D0 (en) | 2018-11-29 | 2019-01-16 | Johnson Matthey Plc | Apparatus and method for coating substrates with washcoats |
| JP7224175B2 (ja) * | 2018-12-26 | 2023-02-17 | 東京エレクトロン株式会社 | 成膜装置及び方法 |
| TWI901065B (zh) * | 2019-03-15 | 2025-10-11 | 美商蘭姆研究公司 | 半導體製造應用中的摩擦攪拌銲接 |
| US12480210B2 (en) * | 2019-06-18 | 2025-11-25 | Lam Research Corporation | Reduced diameter carrier ring hardware for substrate processing systems |
| US12486574B2 (en) | 2019-08-23 | 2025-12-02 | Lam Research Corporation | Thermally controlled chandelier showerhead |
| WO2021042114A1 (en) | 2019-08-28 | 2021-03-04 | Lam Research Corporation | Metal deposition |
| US20220384145A1 (en) * | 2019-10-24 | 2022-12-01 | Lam Research Corporation | Semiconductor equipment module fabrication with additive manufacturing |
| US20230134061A1 (en) * | 2020-03-19 | 2023-05-04 | Lam Research Corporation | Showerhead purge collar |
| JP7767323B2 (ja) * | 2020-06-03 | 2025-11-11 | ラム リサーチ コーポレーション | 効率的な熱伝達のためのモノブロック台座 |
| KR20230028442A (ko) | 2020-06-23 | 2023-02-28 | 램 리써치 코포레이션 | 자동화된 샤워헤드 틸팅 조정 |
| US12415229B2 (en) | 2020-07-29 | 2025-09-16 | Blue Origin Manufacturing, LLC | Friction stir welding systems and methods |
| USD1066275S1 (en) * | 2022-04-04 | 2025-03-11 | Applied Materials, Inc. | Baffle for anti-rotation process kit for substrate processing chamber |
| TW202402387A (zh) * | 2022-04-06 | 2024-01-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 氣體遞送總成及包括氣體遞送總成之反應器系統 |
| USD1107669S1 (en) * | 2022-05-02 | 2025-12-30 | Lam Research Corporation | Processing chamber purge plate |
| CN115464459A (zh) * | 2022-09-22 | 2022-12-13 | 重庆镪正科技有限公司 | 一种具有粉尘收集机构的智能碳滑板毛坯加工机 |
| WO2024091408A1 (en) * | 2022-10-25 | 2024-05-02 | Lam Research Corporation | Cupped baffle plates for showerheads of substrate processing systems |
| USD1076837S1 (en) * | 2023-01-19 | 2025-05-27 | Lam Research Corporation | Baffle |
| US12246392B2 (en) | 2023-03-30 | 2025-03-11 | Blue Origin Manufacturing, LLC | Deposition head for friction stir additive manufacturing devices and methods |
| US12140109B2 (en) | 2023-03-30 | 2024-11-12 | Blue Origin, Llc | Transpiration-cooled systems having permeable and non-permeable portions |
| US12172229B2 (en) * | 2023-03-30 | 2024-12-24 | Blue Origin, Llc | Friction stir additive manufacturing devices and methods for forming in-situ rivets |
| US12303994B2 (en) | 2023-08-03 | 2025-05-20 | Blue Origin Manufacturing, LLC | Friction stir additive manufacturing formed parts and structures with integrated passages |
| US12383975B2 (en) | 2023-08-03 | 2025-08-12 | Blue Origin Manufacturing, LLC | Friction stir additive manufacturing formed parts and structures with integrated passages |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2950063A (en) * | 1953-12-21 | 1960-08-23 | Jr Glenn Q Ripley | Aerating shower head |
| US3831860A (en) * | 1972-12-18 | 1974-08-27 | Wrightway Mfg Co | Low flow volume shower head |
| US5451435A (en) * | 1990-06-18 | 1995-09-19 | At&T Corp. | Method for forming dielectric |
| US5397060A (en) * | 1994-01-21 | 1995-03-14 | Afa Products, Inc. | Foam-spray-off trigger sprayer |
| US5549822A (en) * | 1995-01-13 | 1996-08-27 | Ferguson; George E. | Shower filter apparatus |
| SG45121A1 (en) * | 1995-10-28 | 1998-01-16 | Inst Of Microelectronics | Apparatus for dispensing fluid in an array pattern |
| JP2000077337A (ja) * | 1998-08-31 | 2000-03-14 | Toshiba Corp | ガス処理装置およびガス処理方法 |
| US6415736B1 (en) * | 1999-06-30 | 2002-07-09 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
| US6123775A (en) * | 1999-06-30 | 2000-09-26 | Lam Research Corporation | Reaction chamber component having improved temperature uniformity |
| KR100406176B1 (ko) | 2000-06-19 | 2003-11-19 | 주식회사 하이닉스반도체 | 샤워헤드 및 이를 이용한 액체 원료 공급 장치 |
| KR100400044B1 (ko) * | 2001-07-16 | 2003-09-29 | 삼성전자주식회사 | 간격 조절 장치를 가지는 웨이퍼 처리 장치의 샤워 헤드 |
| KR20060089002A (ko) * | 2005-02-03 | 2006-08-08 | 삼성전자주식회사 | 반도체 제조장치의 샤워헤드 |
| US7432513B2 (en) * | 2005-10-21 | 2008-10-07 | Asml Netherlands B.V. | Gas shower, lithographic apparatus and use of a gas shower |
| JP4522980B2 (ja) | 2005-11-15 | 2010-08-11 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
| TWI329135B (en) * | 2005-11-04 | 2010-08-21 | Applied Materials Inc | Apparatus and process for plasma-enhanced atomic layer deposition |
| US7476291B2 (en) * | 2006-09-28 | 2009-01-13 | Lam Research Corporation | High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation |
| US8673080B2 (en) * | 2007-10-16 | 2014-03-18 | Novellus Systems, Inc. | Temperature controlled showerhead |
| US9441296B2 (en) * | 2011-03-04 | 2016-09-13 | Novellus Systems, Inc. | Hybrid ceramic showerhead |
| JP5678116B2 (ja) * | 2013-03-19 | 2015-02-25 | 東京エレクトロン株式会社 | 蓋部品、処理ガス拡散供給装置、及び基板処理装置 |
| US9290843B2 (en) | 2014-02-11 | 2016-03-22 | Lam Research Corporation | Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatus |
| US10741365B2 (en) * | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
| US10378107B2 (en) * | 2015-05-22 | 2019-08-13 | Lam Research Corporation | Low volume showerhead with faceplate holes for improved flow uniformity |
-
2016
- 2016-04-13 US US15/097,600 patent/US10483092B2/en active Active
-
2017
- 2017-04-11 TW TW106111973A patent/TWI654334B/zh active
- 2017-04-12 KR KR1020170047208A patent/KR102055040B1/ko active Active
- 2017-04-12 JP JP2017078797A patent/JP6909034B2/ja active Active
- 2017-04-13 CN CN202110947160.7A patent/CN113862642B/zh active Active
- 2017-04-13 CN CN201710239093.7A patent/CN107385415B/zh active Active
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