JP2017199898A5 - - Google Patents

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Publication number
JP2017199898A5
JP2017199898A5 JP2017078797A JP2017078797A JP2017199898A5 JP 2017199898 A5 JP2017199898 A5 JP 2017199898A5 JP 2017078797 A JP2017078797 A JP 2017078797A JP 2017078797 A JP2017078797 A JP 2017078797A JP 2017199898 A5 JP2017199898 A5 JP 2017199898A5
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JP
Japan
Prior art keywords
ring
stem
baffle plate
support members
showerhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017078797A
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English (en)
Japanese (ja)
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JP2017199898A (ja
JP6909034B2 (ja
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Publication date
Priority claimed from US15/097,600 external-priority patent/US10483092B2/en
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Publication of JP2017199898A publication Critical patent/JP2017199898A/ja
Publication of JP2017199898A5 publication Critical patent/JP2017199898A5/ja
Application granted granted Critical
Publication of JP6909034B2 publication Critical patent/JP6909034B2/ja
Active legal-status Critical Current
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JP2017078797A 2016-04-13 2017-04-12 バッフルプレートおよびシャワーヘッドアセンブリならびに対応する製造方法 Active JP6909034B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/097,600 2016-04-13
US15/097,600 US10483092B2 (en) 2016-04-13 2016-04-13 Baffle plate and showerhead assemblies and corresponding manufacturing method

Publications (3)

Publication Number Publication Date
JP2017199898A JP2017199898A (ja) 2017-11-02
JP2017199898A5 true JP2017199898A5 (enExample) 2020-05-21
JP6909034B2 JP6909034B2 (ja) 2021-07-28

Family

ID=60039549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017078797A Active JP6909034B2 (ja) 2016-04-13 2017-04-12 バッフルプレートおよびシャワーヘッドアセンブリならびに対応する製造方法

Country Status (5)

Country Link
US (1) US10483092B2 (enExample)
JP (1) JP6909034B2 (enExample)
KR (1) KR102055040B1 (enExample)
CN (2) CN107385415B (enExample)
TW (1) TWI654334B (enExample)

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US10741365B2 (en) * 2014-05-05 2020-08-11 Lam Research Corporation Low volume showerhead with porous baffle
US10266947B2 (en) * 2016-08-23 2019-04-23 Lam Research Corporation Rotary friction welded blank for PECVD heated showerhead
KR20200045785A (ko) * 2018-10-23 2020-05-06 안범모 반도체 제조 공정용 또는 디스플레이 제조 공정용 프로세스 유체가 통과하는 접합부품
GB201819455D0 (en) * 2018-11-29 2019-01-16 Johnson Matthey Plc Apparatus and method for coating substrates with washcoats
GB201819454D0 (en) 2018-11-29 2019-01-16 Johnson Matthey Plc Apparatus and method for coating substrates with washcoats
JP7224175B2 (ja) * 2018-12-26 2023-02-17 東京エレクトロン株式会社 成膜装置及び方法
TWI901065B (zh) 2019-03-15 2025-10-11 美商蘭姆研究公司 半導體製造應用中的摩擦攪拌銲接
WO2020257095A1 (en) * 2019-06-18 2020-12-24 Lam Research Corporation Reduced diameter carrier ring hardware for substrate processing systems
WO2021042116A1 (en) 2019-08-23 2021-03-04 Lam Research Corporation Thermally controlled chandelier showerhead
CN119980191A (zh) 2019-08-28 2025-05-13 朗姆研究公司 金属沉积
WO2021081123A1 (en) * 2019-10-24 2021-04-29 Lam Research Corporation Semiconductor equipment module fabrication with additive manufacturing
CN115298350A (zh) * 2020-03-19 2022-11-04 朗姆研究公司 喷头清扫环
WO2021247627A1 (en) * 2020-06-03 2021-12-09 Lam Research Corporation Monobloc pedestal for efficient heat transfer
JP7680476B2 (ja) * 2020-06-23 2025-05-20 ラム リサーチ コーポレーション 自動シャワーヘッド傾斜調整
US12415229B2 (en) 2020-07-29 2025-09-16 Blue Origin Manufacturing, LLC Friction stir welding systems and methods
JP2023544486A (ja) * 2020-10-09 2023-10-24 ラム リサーチ コーポレーション フェイスレスシャワーヘッド
USD1066275S1 (en) * 2022-04-04 2025-03-11 Applied Materials, Inc. Baffle for anti-rotation process kit for substrate processing chamber
TW202402387A (zh) * 2022-04-06 2024-01-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 氣體遞送總成及包括氣體遞送總成之反應器系統
USD1107669S1 (en) * 2022-05-02 2025-12-30 Lam Research Corporation Processing chamber purge plate
CN115464459A (zh) * 2022-09-22 2022-12-13 重庆镪正科技有限公司 一种具有粉尘收集机构的智能碳滑板毛坯加工机
KR20250093504A (ko) * 2022-10-25 2025-06-24 램 리써치 코포레이션 기판 프로세싱 시스템의 샤워헤드를 위한 컵형 배플판
USD1076837S1 (en) * 2023-01-19 2025-05-27 Lam Research Corporation Baffle
US12246392B2 (en) 2023-03-30 2025-03-11 Blue Origin Manufacturing, LLC Deposition head for friction stir additive manufacturing devices and methods
US12140109B2 (en) 2023-03-30 2024-11-12 Blue Origin, Llc Transpiration-cooled systems having permeable and non-permeable portions
US12172229B2 (en) * 2023-03-30 2024-12-24 Blue Origin, Llc Friction stir additive manufacturing devices and methods for forming in-situ rivets
US12383975B2 (en) 2023-08-03 2025-08-12 Blue Origin Manufacturing, LLC Friction stir additive manufacturing formed parts and structures with integrated passages
US12303994B2 (en) 2023-08-03 2025-05-20 Blue Origin Manufacturing, LLC Friction stir additive manufacturing formed parts and structures with integrated passages

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US2950063A (en) * 1953-12-21 1960-08-23 Jr Glenn Q Ripley Aerating shower head
US3831860A (en) * 1972-12-18 1974-08-27 Wrightway Mfg Co Low flow volume shower head
US5451435A (en) * 1990-06-18 1995-09-19 At&T Corp. Method for forming dielectric
US5397060A (en) * 1994-01-21 1995-03-14 Afa Products, Inc. Foam-spray-off trigger sprayer
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US6123775A (en) * 1999-06-30 2000-09-26 Lam Research Corporation Reaction chamber component having improved temperature uniformity
KR100406176B1 (ko) 2000-06-19 2003-11-19 주식회사 하이닉스반도체 샤워헤드 및 이를 이용한 액체 원료 공급 장치
KR100400044B1 (ko) * 2001-07-16 2003-09-29 삼성전자주식회사 간격 조절 장치를 가지는 웨이퍼 처리 장치의 샤워 헤드
KR20060089002A (ko) * 2005-02-03 2006-08-08 삼성전자주식회사 반도체 제조장치의 샤워헤드
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JP4522980B2 (ja) 2005-11-15 2010-08-11 パナソニック株式会社 プラズマ処理装置及びプラズマ処理方法
US7682946B2 (en) * 2005-11-04 2010-03-23 Applied Materials, Inc. Apparatus and process for plasma-enhanced atomic layer deposition
US7476291B2 (en) * 2006-09-28 2009-01-13 Lam Research Corporation High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation
US8673080B2 (en) * 2007-10-16 2014-03-18 Novellus Systems, Inc. Temperature controlled showerhead
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US9290843B2 (en) 2014-02-11 2016-03-22 Lam Research Corporation Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatus
US10741365B2 (en) * 2014-05-05 2020-08-11 Lam Research Corporation Low volume showerhead with porous baffle
US10378107B2 (en) * 2015-05-22 2019-08-13 Lam Research Corporation Low volume showerhead with faceplate holes for improved flow uniformity

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