JP2017163071A - 素子チップおよびその製造方法 - Google Patents
素子チップおよびその製造方法 Download PDFInfo
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- JP2017163071A JP2017163071A JP2016048004A JP2016048004A JP2017163071A JP 2017163071 A JP2017163071 A JP 2017163071A JP 2016048004 A JP2016048004 A JP 2016048004A JP 2016048004 A JP2016048004 A JP 2016048004A JP 2017163071 A JP2017163071 A JP 2017163071A
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Abstract
【解決手段】基板を準備する工程と、基板の分割領域にレーザ光を照射して第1ダメージ領域および第2ダメージ領域を形成するレーザスクライブ工程と、基板を第1プラズマに晒すことにより第1ダメージ領域を除去するとともに、第2ダメージ領域の一部を露出させる異方性エッチング工程と、素子領域と分割領域と露出した第2ダメージ領域の一部とに保護膜を堆積させる保護膜堆積工程と、基板を第2プラズマに晒すことにより、分割領域に堆積した保護膜の一部および素子領域に堆積した保護膜を除去するとともに、第2ダメージ領域の一部を覆う保護膜を残存させる、保護膜エッチング工程と、第2主面を支持部材で支持した状態で基板を第3プラズマに晒すことにより、基板を素子チップに分割するプラズマダイシング工程と、を備える素子チップの製造方法。
【選択図】図2A
Description
(1)準備工程
まず、ダイシングの対象となる基板10を準備する(図1A(a))。基板10は、第1主面10Xおよび第2主面10Yを備えており、半導体層である第1層11と、第1層11の第1主面10X側に形成された絶縁膜を含む第2層12と、を備える。また、基板10は、分割領域R1と、分割領域R1によって画定される複数の素子領域R2とに区画されている。したがって、第1層11は、分割領域R1に対応する第1分割領域111と、素子領域R2に対応する複数の第1素子領域112とを備える。第2層12は、分割領域R1に対応する第2分割領域121と、素子領域R2に対応する複数の第2素子領域122とを備える。基板10の素子領域R2(第1素子領域112および第2素子領域122)には、半導体回路、電子部品素子、MEMS等の回路層(いずれも図示せず)が形成されていてもよい。
レーザスクライブ工程では、第2分割領域121に第1主面10X側からレーザ光Lを照射して、第2分割領域121の一部を除去し、第1分割領域111が一部露出した開口10Aを形成する(図1A(b))。言い換えれば、レーザスクライブ工程では、第1分割領域111の一部を露出させて、露出部111aを形成する。レーザ光Lの中心波長は特に限定されず、例えば350〜600nmである。
レーザスクライブ工程の後、基板10を第1プラズマP1に晒し、異方性エッチングを施す(図1A(c))。これにより、開口10Aから露出する第1ダメージ領域DR1が除去される。このとき、レーザスクライブ工程で形成された第2ダメージ領域DR2の一部が、第1素子領域112の端面から露出する。
異方性エッチング工程の後、第2素子領域122と第1分割領域111と第2素子領域122および第1素子領域112の端面とに保護膜13を堆積させる(図1A(d))。保護膜13の堆積は、例えば、基板10を第4プラズマP4に晒すことにより行うことができる。この方法は、プラズマCVDといわれ、比較的低温かつ速いスピードで薄膜を形成できる点で優れている。保護膜13によって、第1素子領域112の端面から露出する第2ダメージ領域DR2も被覆される。
保護膜堆積工程の後、基板10を第2プラズマP2に晒すことにより、保護膜13を異方的にエッチングする(図1B(e))。異方性エッチングにより、第1分割領域111に堆積した保護膜13の一部および第2素子領域122の表面(第1主面10X)に堆積した保護膜13が除去される。一方、第1素子領域112の端面に形成されている第2ダメージ領域DR2および第2素子領域122の端面に形成されている第3ダメージ領域DR3は、保護膜13に被覆されたままである。
次に、基板10を第3プラズマP3に晒す(図1B(f))。第3プラズマP3は、第1分割領域111が異方的にエッチングされる条件で発生させる。例えば、六フッ化硫黄(SF6)等のフッ素を含むプロセスガスを用いるとともに、高周波電極部220に高周波電力を印加して、バイアス電圧をかける。これにより、基材10の厚みに平行な方向に、異方的にエッチングが行われる。上記エッチング条件は、第1層11の材質に応じて適宜選択することができる。第1層11がSiの場合、第1分割領域111のエッチングには、いわゆるボッシュプロセスを用いることができる。ボッシュプロセスでは、堆積膜堆積ステップと、堆積膜エッチングステップと、Siエッチングステップとを順次繰り返すことにより、第1分割領域111を深さ方向に掘り進む。
10A:開口
10X:第1主面
10Y:第2主面
11:第1層
111:第1分割領域
111a:露出部
112:第1素子領域
112B:段差
112Ba:ステップ面
112Bb:立ち上がり面
112X:積層面
112Y:積層面とは反対側の面
12:第2層
121:第2分割領域
122:第2素子領域
13:保護膜
110:素子チップ
20:搬送キャリア
21:フレーム
21a:ノッチ
21b:コーナーカット
22:支持部材
22a:粘着面
22b:非粘着面
200:プラズマ処理装置
203:真空チャンバ
203a:ガス導入口
203b:排気口
208:誘電体部材
209:アンテナ
210A:第1高周波電源
210B:第2高周波電源
211:ステージ
212:プロセスガス源
213:アッシングガス源
214:減圧機構
215:電極層
216:金属層
217:基台
218:外周部
219:ESC電極
220:高周波電極部
221:昇降ロッド
222:支持部
223A、223B:昇降機構
224:カバー
224W:窓部
225:冷媒循環装置
226:直流電源
227:冷媒流路
228:制御装置
229:外周リング
30:基板
31:第1層
32:第2層
130:素子チップ
Claims (2)
- 第1主面および第2主面を備え、半導体層である第1層と、前記第1層の前記第1主面側に形成された絶縁膜を含む第2層と、を備える基板であって、複数の素子領域と、前記素子領域を画定する分割領域を備える基板を準備する工程と、
前記分割領域に前記第1主面側からレーザ光を照射して、前記分割領域に前記第1層が露出する露出部を備える開口を形成するとともに、前記露出部に第1ダメージ領域を形成し、前記第1ダメージ領域の近傍であって、前記第1層の前記第2層に覆われる部分に第2ダメージ領域を形成するレーザスクライブ工程と、
前記レーザスクライブ工程の後、前記基板を第1プラズマに晒すことにより前記第1ダメージ領域を異方的にエッチングして、前記第1ダメージ領域を除去するとともに、前記第2ダメージ領域の一部を露出させる異方性エッチング工程と、
前記異方性エッチング工程の後、前記素子領域と前記分割領域と露出した前記第2ダメージ領域の前記一部とに保護膜を堆積させる保護膜堆積工程と、
前記保護膜堆積工程の後、前記基板を第2プラズマに晒すことにより前記保護膜を異方的にエッチングして、前記分割領域に堆積した前記保護膜の一部および前記素子領域に堆積した前記保護膜を除去するとともに、前記第2ダメージ領域の前記一部を覆う前記保護膜を残存させる、保護膜エッチング工程と、
前記保護膜エッチング工程の後、前記第2主面を支持部材で支持した状態で前記基板を第3プラズマに晒すことにより、前記分割領域を異方的にエッチングして、前記基板を、前記素子領域を備える複数の素子チップに分割するプラズマダイシング工程と、を備える、素子チップの製造方法。 - 積層面とその反対側の面とを備える半導体層である第1層と、前記積層面上に積層された絶縁膜を含む第2層と、を備える素子チップであって、
前記第1層の前記積層面側の周縁部に形成された段差と、
前記第2層の端面と前記段差のステップ面と前記ステップ面からの立ち上がり面とを覆う保護膜と、をさらに備え、
前記第1層が、前記段差の前記立ち上がり面に前記保護膜で被覆されたダメージ領域を備える、素子チップ。
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