JP2017152656A - イメージセンサおよびその製造方法 - Google Patents
イメージセンサおよびその製造方法 Download PDFInfo
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- JP2017152656A JP2017152656A JP2016036296A JP2016036296A JP2017152656A JP 2017152656 A JP2017152656 A JP 2017152656A JP 2016036296 A JP2016036296 A JP 2016036296A JP 2016036296 A JP2016036296 A JP 2016036296A JP 2017152656 A JP2017152656 A JP 2017152656A
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Abstract
【解決手段】酸化物半導体TFT400とa−Si PD600とを基板200上にこの順序で形成したイメージセンサにおいて、酸化物半導体TFT400とPD600との間にガスバリア膜520を配置し、酸化物半導体TFT400のドレイン端子(ドレイン金属450)と、PD600の1つの端子(下部電極610)とを、PD600の上部に設けられた保護膜710上に形成された接続配線(ブリッジ配線720)を介して接続する。
【選択図】図4
Description
以下、本発明の実施の形態について図面を参照して詳細に説明する。なお、各図面における各構成要素の大きさや縮尺は、図の視認性を確保するために適宜変更して記載している。また、各図面におけるハッチングは、各構成要素を区別するためのものであり、必ずしも切断面を意味するものではない。
図9は、実施形態2に係わるイメージセンサ100の構成を示した回路図である。実施形態1と異なるのは、スイッチング素子であるTFT400として、半導体層430の上下に、絶縁膜を介して2つのゲート電極が配置されるデュアルゲート構造TFTを用いることである。TFTには、第1のゲートと、第2のゲートが存在する。第1のゲートはゲート線(G1〜G5)に接続される。第2のゲートはTGB配線(TGB)に接続される。TGB配線は、イメージセンサ100の全ての画素で共通である。TGB配線は、端子900を介して外部回路に接続される。
実施形態1に係わるイメージセンサ100の製造方法の1実施例について説明する。図14から図19は、実施例1に係わるイメージセンサ100の製造過程を示す断面図である。図20及び図21は、実施例1に係わるイメージセンサ100の構造を示した断面図である。図14は、実施例1に係わるイメージセンサ100の製造プロセスで、ガスバリア膜520まで成膜した段階の断面図を示している。イメージセンサ100は、基板200としてガラス基板を用いることができる。ただし、ガラス基板に限定されるわけでは無い。基板200として、耐熱性を有した樹脂基板、表面をSiOxやSiNx(窒化シリコン)でコーティングした金属基板なども用いることができる。そのガラス基板200上に、TFT400のゲート及びゲート配線410となる金属としてAlを成膜、パターニングする。Al以外にも、Cr、ITO、Wおよびそれらの合金等を用いることができる。その上にゲート絶縁膜420としてSiOxを積層する。ゲート絶縁膜420には、SiOxの他にSiNxおよびSiOxとSiNxの積層膜を用いることができる。次に、半導体層430として、In、Ga、Znを含有した酸化物半導体層を積層、パターニングする。その後、ソース/ドレイン金属440、450としてAlを積層、パターニングする。ソース/ドレイン金属440、450には、Al以外にもCrおよびそれらの合金を用いることができる。また図示していないが、ソース/ドレイン金属440、450を積層する前に、酸化物半導体層でTFT400のチャネルとなる部分にSiOx等の絶縁膜を成膜パターニングしてもよい。このTFT400のチャネル部に絶縁膜パターンを配置する構造のことをチャネル保護型TFTと呼び、図14で示したように、絶縁膜パターンを配置しない構造のことをチャネルエッチ型TFTと呼ぶことがある。実施例1に係わるイメージセンサ100では、何れの構造も用いることができる。次に、ソース/ドレイン金属440、450の上に第1層間膜510としてSiOxを積層する。第1層間膜510には、SiOx、SiNx、SiOxとSiNxの積層膜を用いることもできる。そして第1層間膜510の上にガスバリア膜520としてp−キシレンポリマーを積層する。ガスバリア膜520には、m−キシレンポリマー等のキシレンポリマーおよびその誘導体、アクリル樹脂、エポキシ樹脂などを用いることもできる。ガスバリア膜520には、前記有機絶縁膜以外に無機絶縁膜も用いることができる。無機絶縁膜は、例えばSiNxや、Al2O3(酸化アルミニウム)により形成された膜である。この場合も膜厚は1μm以上が望ましい。ただし、SiNxを積層する際には、原料ガスに含まれる水素を減らす必要がある。例えばSiF4、N2ガスを用いたプラズマCVD(Chemical Vapor Deposition)で成膜可能である。発明者らの実験結果に因れば、無機絶縁膜であるSiOxは水素ガスの拡散を抑制する効果は殆ど得られず、ガスバリア膜としては適していない。
図22は、実施例2に係わるイメージセンサ100の1画素の回路構成を示した回路図である。各画素が、スイッチング素子であるTFT400と光電変換素子であるPD600で構成されることは同じであるが、TFT400とPD600の接続方法が異なる。実施例2におけるイメージセンサでは、TFT400のドレイン端子がPD600のアノード端子と接続される。
200 基板
300 画素
400 TFT
410 ゲート、ゲート配線
420 ゲート絶縁膜
430 半導体層(酸化物半導体)
440 ソース金属
450 ドレイン金属
460 第2のゲート
510 第1層間膜
520 ガスバリア膜
530 第2層間膜
600 PD(フォトダイオード)
610 下部電極
620 n−a−Si:H
630 i−a−Si:H
640 p−a−Si:H
650 上部電極
710 保護膜
720 ブリッジ配線
730 信号線
740 BIAS配線
811、812、813、814 コンタクトホール
900 端子
Claims (13)
- 基板上に順に積層した、酸化物半導体TFTを含むスイッチング素子と、
ガスバリア膜と、
アモルファスシリコンを用いたフォトダイオードを含む光電変換素子と、
保護膜とを備え、
前記光電変換素子を覆う保護膜上に配置され、前記スイッチング素子のドレイン電極及び前記光電変換素子の一つの端子を、コンタクトホールを介して、電気的に接続する接続配線と
を備えることを特徴とするイメージセンサ。 - 前記コンタクトホールは、前記保護膜及び前記ガスバリア膜を貫通させて設けた第1のコンタクトホール、及び前記保護膜を貫通させて設けた第2のコンタクトホールを有し、
前記接続配線は、前記第1のコンタクトホールを介して、前記スイッチング素子のドレイン電極と接続し、前記第2のコンタクトホールを介して、前記光電変換素子の前記一つの端子と接続している
ことを特徴とする請求項1に記載のイメージセンサ。 - 前記保護膜の前記第1のコンタクトホールの係る貫通孔の開口面積は、前記ガスバリア膜の前記第1のコンタクトホールに係る貫通孔の開口面積以上である
ことを特徴とする請求項2に記載のイメージセンサ。 - 前記ガスバリア膜の前記第1のコンタクトホールの係る貫通孔の内面は、前記接続配線の一部と接している
ことを特徴とする請求項2又は請求項3に記載のイメージセンサ。 - 前記光電変換素子は積層方向の上部に上部電極及び下部に下部電極を有し、
前記一つの端子は、前記下部電極又は前記上部電極である
ことを特徴とする請求項1から請求項4のいずれか一項に記載のイメージセンサ。 - 前記酸化物半導体TFTは、積層方向に離れて配置された2つのゲート電極を有する
ことを特徴とする請求項1から請求項5のいずれか一項に記載のイメージセンサ。 - 前記ガスバリア膜は有機絶縁膜である
ことを特徴とする請求項1から請求項6のいずれか一項に記載のイメージセンサ。 - 前記有機絶縁膜は、キシレンポリマー若しくはその誘導体、アクリル樹脂、又はエポキシ樹脂により形成されている
ことを特徴とする請求項7に記載のイメージセンサ。 - 前記ガスバリア膜は無機絶縁膜である
ことを特徴とする請求項1から請求項6のいずれか一項に記載のイメージセンサ。 - 前記無機絶縁膜は、窒化シリコン膜又は酸化アルミニウムにより形成された膜である
ことを特徴とする請求項9に記載のイメージセンサ。 - 前記光電変換素子の前記下部電極は、前記ガスバリア膜と接するように設けられている
ことを特徴とする請求項9に記載のイメージセンサ。 - 前記ガスバリア膜の膜厚は1μm以上である
ことを特徴とする請求項1から請求項11のいずれか一項に記載のイメージセンサ。 - 基板上に酸化物半導体TFTからなるスイッチング素子と、ガスバリア膜と、アモルファスシリコンを用いたフォトダイオードを含む光電変換素子とを、この順で積層する工程と、
前記光電変換素子を覆う保護膜を形成した後に、前記保護膜と前記ガスバリア膜にコンタクトホールを形成する工程と、
前記保護膜上に接続配線を形成し、前記コンタクトホールを介して、前記スイッチング素子のドレイン電極と前記光電変換素子の一つの端子とを、電気的に接続する工程とを含む
ことを特徴とするイメージセンサの製造方法。
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