JP2017151405A - 偏光光照射装置 - Google Patents

偏光光照射装置 Download PDF

Info

Publication number
JP2017151405A
JP2017151405A JP2016103628A JP2016103628A JP2017151405A JP 2017151405 A JP2017151405 A JP 2017151405A JP 2016103628 A JP2016103628 A JP 2016103628A JP 2016103628 A JP2016103628 A JP 2016103628A JP 2017151405 A JP2017151405 A JP 2017151405A
Authority
JP
Japan
Prior art keywords
light
shielding plate
stage
light source
light shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016103628A
Other languages
English (en)
Japanese (ja)
Inventor
和重 橋本
Kazushige Hashimoto
和重 橋本
敏成 新井
Toshinari Arai
敏成 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
V Technology Co Ltd
Original Assignee
V Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Priority to TW106103586A priority Critical patent/TW201734560A/zh
Priority to CN201780009669.9A priority patent/CN108604030A/zh
Priority to PCT/JP2017/006080 priority patent/WO2017145975A1/ja
Priority to KR1020187022210A priority patent/KR20180114021A/ko
Publication of JP2017151405A publication Critical patent/JP2017151405A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2016103628A 2016-02-22 2016-05-24 偏光光照射装置 Pending JP2017151405A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW106103586A TW201734560A (zh) 2016-02-22 2017-02-03 偏光光照射裝置
CN201780009669.9A CN108604030A (zh) 2016-02-22 2017-02-20 偏振光照射装置
PCT/JP2017/006080 WO2017145975A1 (ja) 2016-02-22 2017-02-20 偏光光照射装置
KR1020187022210A KR20180114021A (ko) 2016-02-22 2017-02-20 편광 광조사 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016031357 2016-02-22
JP2016031357 2016-02-22

Publications (1)

Publication Number Publication Date
JP2017151405A true JP2017151405A (ja) 2017-08-31

Family

ID=59739667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016103628A Pending JP2017151405A (ja) 2016-02-22 2016-05-24 偏光光照射装置

Country Status (4)

Country Link
JP (1) JP2017151405A (zh)
KR (1) KR20180114021A (zh)
CN (1) CN108604030A (zh)
TW (1) TW201734560A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111552124B (zh) * 2020-05-26 2022-09-23 武汉京东方光电科技有限公司 光配向设备及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006323060A (ja) * 2005-05-18 2006-11-30 Ushio Inc 偏光光照射装置
US20120064441A1 (en) * 2009-05-29 2012-03-15 Shigeki Tanaka Method for photo-alignment treatment, mask for photo-alignment treatment, and method for producing alignment film
JP5688730B2 (ja) * 2010-09-17 2015-03-25 株式会社ブイ・テクノロジー 露光装置
JP5688637B2 (ja) * 2010-11-11 2015-03-25 株式会社ブイ・テクノロジー 露光方法及び露光位置の確認方法
US9249242B2 (en) * 2011-08-29 2016-02-02 Sharp Kabushiki Kaisha Method for manufacturing liquid crystal display device
JP6004157B2 (ja) * 2012-03-02 2016-10-05 株式会社ブイ・テクノロジー ３次元液晶表示装置の製造装置及び製造方法
WO2013157114A1 (ja) * 2012-04-19 2013-10-24 信越エンジニアリング株式会社 光配向照射装置
JP5884776B2 (ja) * 2013-06-22 2016-03-15 ウシオ電機株式会社 光配向用偏光光照射装置
CN203573063U (zh) * 2013-11-01 2014-04-30 京东方科技集团股份有限公司 一种光配向设备和显示装置生产系统
JP5958491B2 (ja) * 2014-03-31 2016-08-02 ウシオ電機株式会社 偏光光照射装置
JP2017032957A (ja) * 2015-08-06 2017-02-09 ウシオ電機株式会社 光照射装置および光照射方法

Also Published As

Publication number Publication date
TW201734560A (zh) 2017-10-01
CN108604030A (zh) 2018-09-28
KR20180114021A (ko) 2018-10-17

Similar Documents

Publication Publication Date Title
JP2007114647A (ja) 光配向用偏光光照射装置
CN103119733A (zh) 制造半导体基底材料的方法、半导体设备和电子装置
JP5756813B2 (ja) 基板露光方法
TWI463270B (zh) 雷射曝光裝置
KR102272435B1 (ko) 편광광 조사장치
TW201723203A (zh) 成膜遮罩及成膜遮罩之製造方法
JP2017151405A (ja) 偏光光照射装置
JP2013228533A (ja) 偏光子ユニット
WO2013023597A1 (zh) 基板的激光修复装置以及激光修复方法
JP4589788B2 (ja) レーザ照射方法
KR100875361B1 (ko) 패턴 묘화 장치 및 패턴 묘화 방법
EP1020739A2 (en) Irradiation device for producing polarized light to optically align a liquid crystal cell element
WO2017145975A1 (ja) 偏光光照射装置
JP5495135B2 (ja) 凸状パターン形成方法、露光装置及びフォトマスク
KR20160067168A (ko) 레이저 릴리즈를 위한 레이저 스캐닝 시스템
WO2018003585A1 (ja) 偏光光照射装置
JP5501201B2 (ja) 周辺露光装置及びその方法
JP6500543B2 (ja) 偏光子、光配向装置、および光配向方法
US6652111B2 (en) Irradiation device for polarized light for optical alignment of a liquid crystal cell element
JP2021144112A (ja) 偏光光照射装置
US9316923B2 (en) Exposure apparatus and exposure method using the same
KR20200035943A (ko) 편광 광 조사 장치
WO2016133103A1 (ja) 走査露光装置
JP5709495B2 (ja) 露光装置
WO2019035321A1 (ja) 偏光光照射装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160524