JP2017123356A - プラズマ処理方法 - Google Patents
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Abstract
Description
最初に図2に示すようなウエハ13を搬送装置(図示せず)によりエッチング処理室内の電極6に載置する(S1)。次にウエハ13の磁性膜15と金属酸化膜16をタンタル(Ta)膜17をマスクとして、表1のようにCl2ガスのガス流量を20ml/min、Arガスのガス流量を80ml/min、処理圧力を0.3Pa、プラズマ生成用高周波電力を1000W、電極6に供給する高周波バイアス電力を500W、ファラデーシールド10に印加する高周波電圧(以下、FSVと称する)を300Vとするプラズマエッチング条件にてプラズマエッチングを行う(S2)。
1a 第一の誘導アンテナ
1b 第二の誘導アンテナ
2 放電部
3 プラズマ処理室
4 整合器
5 ガス供給装置
6 電極
7 サセプタ
8 プラズマ
9 排気装置
10 ファラデーシールド
11 第一の高周波電源
12 第二の高周波電源
13 ウエハ
14 シリコン基板
15 磁性膜
16 金属酸化膜
17 タンタル(Ta)膜
Claims (10)
- 磁性膜と金属酸化膜を積層する積層膜にマスクのパターンを形成するプラズマ処理方法において、
前記磁性膜をプラズマエッチングし、
前記磁性膜のプラズマエッチング後、前記磁性膜がプラズマエッチングされた処理室をプラズマクリーニングし、
前記プラズマクリーニングは、塩素元素を含有するガスと三塩化ホウ素ガスの混合ガスを用いてプラズマクリーニングする第一のプラズマクリーニングと、前記第一のプラズマクリーニング後、前記処理室内に残留するホウ素を除去する第二のプラズマクリーニングと、を含むことを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記第二のプラズマクリーニングは、四フッ化炭素ガスと酸素元素を含有するガスの混合ガスを用いて行われることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記磁性膜は、鉄、コバルト、ニッケルの中のいずれか一つの元素を含有する膜であることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記プラズマクリーニングの前に前記磁性膜と前記金属酸化膜をエッチングすることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記磁性膜のプラズマエッチングは、前記金属酸化膜の上方に配置された磁性膜のプラズマエッチングであることを特徴とするプラズマ処理方法。 - 請求項2に記載のプラズマ処理方法において、
前記金属酸化膜は、酸化マグネシウム膜であり、
前記酸素を含有するガスは、酸素ガスであることを特徴とするプラズマ処理方法。 - 請求項6に記載のプラズマ処理方法において、
前記塩素元素を含有するガスは、塩素ガスであることを特徴とするプラズマ処理方法。 - 請求項7に記載のプラズマ処理方法において、
前記マスクの材料はタンタル膜であり、
前記磁性膜を塩素ガスを用いてプラズマエッチングすることを特徴とするプラズマ処理方法。 - 請求項8に記載のプラズマ処理方法において、
前記積層膜は、磁性膜と磁性膜との間に金属酸化膜が配置された構造を有するMTJ素子となる積層膜であることを特徴とするプラズマ処理方法。 - ファラデーシールドを具備する誘電結合型プラズマエッチング装置を用いて磁性膜と金属酸化膜を積層する積層膜にマスクのパターンを形成するプラズマ処理方法において、
前記磁性膜をプラズマエッチングし、
前記磁性膜のプラズマエッチング後、前記磁性膜がプラズマエッチングされた処理室をプラズマクリーニングし、
前記プラズマクリーニングは、塩素元素を含有するガスと三塩化ホウ素ガスの混合ガスを用いてプラズマクリーニングする第一のプラズマクリーニングと、前記第一のプラズマクリーニング後、前記処理室内に残留するホウ素を除去する第二のプラズマクリーニングと、を含み、
前記第二のプラズマクリーニングの前記ファラデーシールドに印加される高周波電圧を前記第一のプラズマクリーニングの前記ファラデーシールドに印加される高周波電圧より小さくすることを特徴とするプラズマ処理方法。
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JP2016000033A JP6499980B2 (ja) | 2016-01-04 | 2016-01-04 | プラズマ処理方法 |
KR1020160098396A KR101903432B1 (ko) | 2016-01-04 | 2016-08-02 | 플라스마 처리 방법 |
TW105126830A TWI642105B (zh) | 2016-01-04 | 2016-08-19 | Plasma processing method |
US15/260,351 US9972776B2 (en) | 2016-01-04 | 2016-09-09 | Plasma processing method |
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JP2021044507A (ja) * | 2019-09-13 | 2021-03-18 | 東京エレクトロン株式会社 | クリーニング方法およびクリーニングプログラムを記録する記録媒体 |
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JP6630649B2 (ja) * | 2016-09-16 | 2020-01-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
US10651372B2 (en) * | 2017-06-13 | 2020-05-12 | Tokyo Electron Limited | Process for patterning a magnetic tunnel junction |
JP6845773B2 (ja) * | 2017-09-15 | 2021-03-24 | 株式会社日立ハイテク | プラズマ処理方法 |
US10460988B2 (en) * | 2017-12-21 | 2019-10-29 | Tokyo Electron Limited | Removal method and processing method |
CN112840039A (zh) * | 2018-10-05 | 2021-05-25 | 朗姆研究公司 | 处理室表面移除金属污染物 |
WO2021260869A1 (ja) | 2020-06-25 | 2021-12-30 | 株式会社日立ハイテク | 真空処理方法 |
KR20220101830A (ko) * | 2021-01-12 | 2022-07-19 | 에스케이스페셜티 주식회사 | 금속산화물 반도체 물질의 증착 챔버의 세정 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006237432A (ja) * | 2005-02-28 | 2006-09-07 | Hitachi High-Technologies Corp | エッチング装置のクリーニング方法 |
WO2008129605A1 (ja) * | 2007-03-30 | 2008-10-30 | Canon Anelva Corporation | 磁性素子の製造法 |
JP2009016611A (ja) * | 2007-07-05 | 2009-01-22 | Hitachi High-Technologies Corp | プラズマエッチング処理方法 |
JP2013120810A (ja) * | 2011-12-07 | 2013-06-17 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2015226032A (ja) * | 2014-05-30 | 2015-12-14 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
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JP2000012515A (ja) * | 1998-06-22 | 2000-01-14 | Hitachi Ltd | マイクロ波プラズマエッチング装置のプラズマクリーニング方法 |
JP2002359234A (ja) | 2001-06-01 | 2002-12-13 | Hitachi Ltd | プラズマ処理方法 |
US7602032B2 (en) * | 2005-04-29 | 2009-10-13 | Altis Semiconductor Snc | Memory having cap structure for magnetoresistive junction and method for structuring the same |
US8802451B2 (en) * | 2008-02-29 | 2014-08-12 | Avalanche Technology Inc. | Method for manufacturing high density non-volatile magnetic memory |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006237432A (ja) * | 2005-02-28 | 2006-09-07 | Hitachi High-Technologies Corp | エッチング装置のクリーニング方法 |
WO2008129605A1 (ja) * | 2007-03-30 | 2008-10-30 | Canon Anelva Corporation | 磁性素子の製造法 |
JP2009016611A (ja) * | 2007-07-05 | 2009-01-22 | Hitachi High-Technologies Corp | プラズマエッチング処理方法 |
JP2013120810A (ja) * | 2011-12-07 | 2013-06-17 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2015226032A (ja) * | 2014-05-30 | 2015-12-14 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
Cited By (2)
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JP2021044507A (ja) * | 2019-09-13 | 2021-03-18 | 東京エレクトロン株式会社 | クリーニング方法およびクリーニングプログラムを記録する記録媒体 |
JP7300945B2 (ja) | 2019-09-13 | 2023-06-30 | 東京エレクトロン株式会社 | クリーニング方法およびクリーニングプログラムを記録する記録媒体 |
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US20170194561A1 (en) | 2017-07-06 |
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KR20170081554A (ko) | 2017-07-12 |
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